... 20 nm logic interconnect yield validation with Ru (ruthenium) direct metal etch patterned with single-exposure high-NA EUV and enabled by Lam's Aether® technology.
In the same period double-patterning techniques were used to extend 193nm lithography in anticipation of extreme ultraviolet (EUV) lithography being ready for mass production ... The EUV era ... Using EUV ...
Extreme Ultraviolet (EUV) lithography.For years, Western policymakers rested easy under the assumption that China was permanently locked out of this frontier.However, stunning developments out of ...
In a December 2024 paper, Lin and several others solid-state lasers could replace carbon dioxide lasers as the next-generation source for traditional laser-produced plasma EUV (LPP-EUV) lithography, ...
IRVINE, Calif., June 30, 2026 /PRNewswire/ -- Roland DG, the world's leading provider of digital printing solutions, today announced the launch of EUV-H (EUV-HP7), a new industrial-grade UV hard ink ...
The Trump administration has raised concerns that one of Dutch chip-equipment giant ASML's extreme ultraviolet lithography (EUV) machines may have rea... .
ASML says that none of its EUV machines are in China and it has never shipped an EUV machine to China ... Furthermore “customers cannot remove, transport and relocate EUV systems without ASML involvement due to specialised handling procedures.”.
That would be a major breach of export controls that have barred ASML from selling EUV to China since the first Trump administration ... For its part, ASML denies shipping any advanced EUV parts or complete machines to China.
Under the changes, inspection and approval procedures for EUV equipment imports are expected to shorten from 34 days to as few as nine days, reducing delays by up to 25 days for each system.
JSR's group companies include Inpria Corporation, acquired in 2021 for EUV metal oxide resists, and Yamanaka Hutech, added in August 2024 for high-purity CVD/ALD precursors.