TECHNICAL DATA

LEITZ PMM-C LINE

Version 2015-5

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 Technical Data

Description High and ultra high accuracy, fast universal measuring machines in “Closed Frame” design.
Optional laser sensors and roughness measurement.

Applications
Coordinate measurements Inspection of any kind of parts and geometries.
Measurements for research and development, calibration of measuring tools.
Reference measuring machines for manufacturing, quality control centers and metrology labs.

Gear inspection For gear diameters of up to 1550 mm. Capable of measuring any type of gears, gear segments, gear
racks and any type of gear cutter. No rotary table required.

Form testing Quality control of industrial form tolerances

- roundness, cylindricity, flatness, straightness, profile form and 2D/3D surfaces.
- non contact inspection of high precision surfaces: lenses, mirrors, optical flats etc.

Roughness measurement - tactile: Profiler R roughness sensor, automatic interchangeable.

- non contact: Leitz Precitec LR, automatic interchangeable

Design
Frame Unique “Closed Frame”- design with fixed portal and moving table. Unitary cast iron / granite con-
struction. No aluminium used in main structure.

Guideways Pre-loaded air bearings in all axes. Load carrying bearings with electronic gap monitoring.

Drives High performance servo motors with rotary encoders and electronic thrust force control.
Power transmission near the center of gravity by re-circulating precision ball drives.

Length measuring system High resolution steel scales (Infinity: glass ceramics) with electro-optical transducers.

Resolution Leitz Ultra, PMM-C, PMM-Xi: 0.02 µm

Leitz Infinity: 0.004 µm

Temperature compensation Automatic temperature compensation for scales and workpiece.

Number of workpiece sensors Leitz Ultra, PMM-C: 1 (optional: 4) / Leitz PMM-Xi: 1 / Leitz Infinity: 4

Damping system Leitz PMM-C, PMM-Xi: Passive elastomer damping (optional: active pneumatic damping).
Leitz Ultra, Infinity: Active pneumatic damping.
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Technical Data – Probe Heads and Roughness Measurement

Probe Heads Z ≤ 700 mm Z > 700 mm

Type Leitz LSP-S2 Scan+ Leitz LSP-S2

3D-self-centering Scanning, variable High Speed Scanning

Probing methods
Tag Scan, Scan Catch, Four Axis Scan, Optical Scan

Max. data rate 1000 points/s

Probing force 0.1 to 1.2 N

Max. stylus length 800 mm

Max. stylus weight 600 g (incl. stylus clamping) 1000 g (incl. stylus clamping)

Smallest stylus tip-ø 0.3 mm

Optical sensors (optional) Leitz Precitec LR, Hexagon HP-O

Roughness sensor (optional) Profiler R

Optical Laser Sensors Leitz Precitec LR Hexagon HP-O

Short range Mid range Long range

Measuring methods Chromatic confocal Interferometry

rough: ± 40° ± 30° ± 30° ± 10°

Measuring angle to surface
reflecting: ± 40° ± 4° ± 1° ± 0.3°

Working distance 6.5 mm 7 mm 11 mm 16 mm

Measuring range 0.1 mm 0.4 mm 2 mm 20 mm

Resolution in Z direction < 3 nm < 3 nm < 3 nm < 3 nm

Spot diameter 1.4 µm 11 µm 40 µm 220 µm

Applications Optical glasses, mirrors, all kinds of surfaces Metallic technical surfaces

Laser protection class (1) (2) 1 2 2 2

Roughness Sensors Profiler R Leitz Precitec LR

Type tactile, traditional non contact (3)

Measuring length/range 12.5 mm(15 mm)/ ± 250 µm not limited

Probe tip 2 µm/90°, exchangeable 1.4 µm (spot diameter)

Parameter Ra, Rz, Rq, Rt et. al. according to ISO 4287 and 13565

(1)
Class 1 laser devices are safe under reasonably foreseeable operating conditions. In general they would not be expected to emit any radiation which is strong
enough to damage they eyes or the skin.
(2)
Under reasonably foreseeable operating conditions, Class 2 laser devices would not be expected to cause any permanent eye damage, provided that any
exposure can be terminated through the eyelid closing reflex (assumed to be 0.25 s).
(3)
Roughness results measured non-contact might not be identical compared with traditional systems due to different principles.
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Leitz LSP-S2 Scan+ Leitz LSP-S2 Scan+ Leitz LSP-S2 + Leitz LSP-S2 + HP-O Profiler R
Precitec LR

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 Specifications

Measuring Error MPE in [µm] Leitz Infinity Leitz Ultra Leitz Ultra
according to ISO 10360-2 (2010) 12.10.6 12.10.7 16.12.7 / 24.12.7

Volumetric length measuring error (1) E0 0.3 + L / 1000 0.4 + L / 850 0.7 + L / 850

Volumetric length measuring error (1) E150 0.5 + L / 1000 0.6 + L / 850 0.9 + L / 850

Repeatability range (2) R0 0.2 0.25 0.3

according to ISO 10360-4 (2000)

Single styli form error, scanning (3) THP 0.8 / 50s 0.9 / 40s 1.0 / 40s

according to ISO 10360-5 (2011)

Single styli form error (2) PFTU 0.40 0.45 0.55

Multi styli form error (4) PFTM 1.7 1.7 2.0

Multi styli size error (4) PSTM 0.4 0.5 0.6

Multi styli location error (4) PLTM 1.0 1.0 1.3

according to ISO 12181

Form measurement error (5) RONt 0.40 0.45 0.55

Permitted Environmental Conditions

Temperature limits 19° C – 21° C

Temperature gradient per hour/day/meter 0.3/0.4/0.1 K 0.3/0.5/0.2 K 0.3/0.5/0.2 K

Relative air humidity 30% - 70%, non condensing

Throughput

Max. probing frequency 20 / min

Max. positioning speed 300 mm/s

Max. acceleration 1500 mm/s2

(1)
E0, E150 and R0 are valid for a length gauge with an uncertainty of calibration of 0.02 + 0.12 x L/1000.
for a length gauge with a calibrated coefficient of expansion (CTE) between 8 x 10-6/K and 13 x 10-6/K.
for measuring lengths of more than 1000 mm the availability of adequate gauges has to be confirmed with the manufacturer.
(1) (2)
E0, R0 and PFTU are valid for Leitz Infinity styli ø 5 x 80 mm and ø 8 x 130 mm, without extension; anywhere in the measuring volume.
(3)
THP is valid for a Leitz Infinity stylus ø 5 x 80 mm.
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(4)
PFTM, PSTM, PLTM are valid for 5 Leitz styli ø 5 x 80 mm. To be tested near the reference sphere.
(5)
RONt (MZCI) is valid for a Leitz Infinity stylus ø 5 x 80 mm, filter 50 UPR, with precision calibration. Verification with QUINDOS only.
Form measurement error (roundness) at a ø 50 mm ring gauge, in scanning mode, acc. to ISO 12 181 (VDI/VDE 2617, part 2.2).

Specifications for acceptance test with ball plates on request.

Specifications are valid only with original Leitz accessories.

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Specifications

Leitz PMM-C 8.10.6 16.12.10

16.12.7
easuring Error MPE in [µm] 12.10.6 24.12.10 24.16.10
24.12.7
according to ISO 10360-2 (2010) 12.10.7 24.16.7

Volumetric length measuring error (1) E0 0.5 + L / 700 0.8 + L / 650 0.9 + L / 650 1.5 + L / 600

Volumetric length measuring error (1) E150 0.7 + L / 700 1.1 + L / 650 1.2 + L / 650 1.7 + L / 600

Repeatability range (2) R0 0.3 0.4 0.5 0.6

according to ISO 10360-4 (2000)

Single stylus form error, scanning (3) THP 0.9 / 40s 1.0 / 40s 1.0 / 40s 1.4 / 40s

according to ISO 10360-5 (2011)

Single stylus form error (2) PFTU 0.45 0.6 0.7 1.0

Multi styli form error (4) PFTM 1.8 2.0 2.1 2.2

Multi styli size error (4) PSTM 0.5 0.6 0.8 1.0

Multi styli location error (4) PLTM 1.1 1.4 1.4 1.6

according to ISO 12181

Form measurement error (5) RONt 0.5 0.6 0.65 0.8

Permitted Environmental Conditions

Temperature limits 19° C - 21° C 18° C – 22° C 18° C – 22° C 18° C – 22° C

Temperature gradient per hour/day/meter 0.5/0.5/0.5 K 1/2/1 K 1/2/1 K 1/2/1 K

Relative air humidity 30 % - 70%, non condensing

Throughput PMM-C

Max. probing frequency 40 / min

Max. positioning speed 400 mm/s

Max. acceleration 2400 mm/s2

(1)
E0, E150 and R0 are valid for a length gauge (column 1) with an uncertainty of calibration of 0.02 + 0.12 x L/1000 respectively for a step gauge (columns
2-4) with an uncertainty of calibration of ≤ 0.08 + 0.3 x L/1000.
for a length gauge with a calibrated coefficient of expansion (CTE) between 8 x 10-6/K and 13 x 10-6/K.
for measuring lengths of more than 1000 mm the availability of adequate gauges has to be confirmed with the manufacturer.
(1) (2)
E0, R0 and PFTU are valid for Leitz styli from ø 3 x 35 mm up to ø 8 x 130 mm, without extension; anywhere in the measuring volume.
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(3)
THP is valid for a Leitz stylus ø 5 x 80 mm.
(4)
PFTM, PSTM, PLTM are valid for 5 Leitz styli ø 5 x 80 mm. To be tested near the reference sphere.
(5)
RONt (MZCI) is valid for a Leitz stylus ø 5 x 80 mm, filter 50 UPR, with precision calibration. Verification with QUINDOS only.
Form measurement error (roundness) at a ø 50 mm ring gauge, in scanning mode, acc. to ISO 12 181 (VDI/VDE 2617, part 2.2).

Specifications for acceptance test with ball plates on request.

Specifications are valid only with original Leitz accessories.

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 Specifications

Leitz PMM-Xi 8.10.6 16.12.10

16.12.7
Measuring Error MPE in [µm] 12.10.6 24.12.10 24.16.10
24.12.7
according to ISO 10360-2 (2010) 12.10.7 24.16.7

Volumetric length measuring error (1) E0 0.5 + L / 500 1.0 + L / 550 1.1 + L / 550 1.7 + L / 500

Volumetric length measuring error (1) E150 0.8 + L / 500 1.2 + L / 550 1.4 + L / 550 2.1 + L / 500

Repeatability range (2) R0 0.4 0.6 0.6 0.7

according to ISO 10360-4 (2000)

Single stylus form error, scanning (4) THP 0.9 / 40s 1.0 / 40s 1.1 / 40s 1.6 / 40s

according to ISO 10360-5 (2011)

Single stylus form error (2) PFTU 0.5 0.7 0.8 1.1

Multi styli form error (5) PFTM 1.9 2.0 2.2 2.3

Multi styli size error (5) PSTM 0.6 0.7 0.9 1.1

Multi styli location error (5) PLTM 1.2 1.4 1.5 1.7

according to ISO 12181

Form measurement error (6) RONt 0.5 0.65 0.7 0.9

Permitted Environmental Conditions

Temperature limits 19° C - 21° C 18° C – 22° C 18° C – 22° C 18° C – 22° C

Temperature gradient per hour/day/meter 0.5/1.0/0.5 K 1/2/1 K 1/2/1 K 1/2/1 K

Relative air humidity 30 % – 70 %, non condensing

Throughput

Max. probing frequency 25 /min

Max. positioning speed 400 mm/s

Max. acceleration 900 mm/s2

(1)
E0, E150 and R0 are valid for a length gauge with an uncertainty of calibration of ≤ 0.08 + 0.3 x L/1000.
for a length gauge with a calibrated coefficient of expansion (CTE) between 8 x 10-6/K and 13 x 10-6/K.
for measuring lengths of more than 1000 mm the availability of adequate gauges has to be confirmed with the manufacturer .
(1) (2)
E0, R0 and PFTU are valid for all Leitz styli from ø 3 x 35 mm up to ø 8 x 130 mm, without extension; anywhere in the measuring volume.
(4)
THP is valid for a Leitz stylus ø 5 x 80 mm.
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(5)
PFTM, PSTM, PLTM are valid for 5 Leitz styli ø 5 x 80 mm. To be tested near the reference sphere.
(6)
RONt (MZCI) is valid for a Leitz stylus ø 5 x 80 mm, filter 50 UPR, with precision calibration. Verification with QUINDOS only.
Form measurement error (roundness) at a ø 50 mm ring gauge, in scanning mode, acc. to ISO 12 181 (VDI/VDE 2617, part 2.2).

Specifications for acceptance test with ball plates on request.

Specifications are valid only with original Leitz accessories.

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CMM Capability Charts and ISO 10360

CMM Capability Charts - Diameters and Distances

Tolerance Distance or diameter [mm]

[mm]
50 100 200 400 600 1000 2000

± 0.003 0.3 + L / 1000

± 0.005 0.5 + L / 900 0.4 + L / 1000 0.3 + L / 1000

± 0.007 0.7 + L / 700 0.5 + L / 500 0.5 + L / 1000 0.3 + L / 1000

± 0.010 0.9 + L / 400 0.8 + L / 500 0.6 + L / 500 0.5 + L / 800 0.4 + L / 1000

± 0.015 1.3 + L / 300 1.2 + L / 350 0.9 + L / 350 0.7 + L / 500 0.6 + L / 700 0.4 + L 900

± 0.020 1.8 + L / 250 1.6 + L / 250 1.3 + L / 300 0.9 + L / 350 0.8 + L / 500 0.6 + L / 700 0.3 + L / 1200

± 0.030 2.8 + L / 200 2.6 + L / 250 2.2 + L / 250 1.7 + L / 300 1.5 + L / 400 1.0 + L / 500 0.5 + L / 800

± 0.050 4.7 + L / 150 4.3 + L / 150 4.0 + L / 200 3.0 + L / 200 2.6 + L / 400 1.7 + L / 300 1.0 + L / 500

± 0.070 6.5 + L / 100 6.0 + L / 100 5.7 + L / 150 5.0 + L / 200 4.0 + L / 200 2.0 + L / 200 2.0 + L / 400

Example: A diameter of 400 mm has a tolerance of ± 0.010mm.

For the inspection of this feature a CMM with a length measuring error E0 = 0.5 + L / 800 [µm] is required.

CMM Capability Charts - Form Tolerances

Tolerance 0.005 mm 0.007 mm 0.010 mm 0.015 mm 0.020 mm 0.030 mm 0.050 mm

PFTU [µm] 0.5 0.7 1.0 1.5 2.0

THP [µm] 1.0 1.5 2.0 3.0 5.0

Example: For inspection of a roundness tolerance of 0.010 mm a CMM with a single stylus form error PFTU= 1.0 µm respectively with a single stylus form error,
scanning THP = 1.0 µm is required.
Note: PFTU and THP are only specified for small areas (up to 30 mm).

CMM capability charts are applicable only, if the feature can be measured with a stylus for which the accuracy of the CMM is specified.

Volumetric length measruing error Volumetric length measuring error Single stylus form error
E0 E150 PFTU

15
0

5 gauges have to be measured 3 times with one 5 length gauges have to be measured 3 times A precision sphere has to be measured with 25
probing at each end, in 7 different directions. in the YZ- or XZ plane with opposite styli, probings. PFTU is the range of all radii.
All measuring results must be within »E0«. mounted 150 mm off the Z spindle axis. PFTU = Rmax - Rmin = sphere form.

Single stlyus form error, scanning Multi styli error Form measurement error
THP form PFTM, size PSTM, location PLTM RONt (MZCI)
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A precision sphere has to be scanned with 4 A sphere is measured with 5 styli (fixed probe A ring gauge, ø 50 mm, is measured in scanning
defined lines. THP is the range of all radii. head) or with 1 stylus in 5 orientations mode, with high point density. The range of
THP = Rmax - Rmin = sphere form, scanning. (articulating PH) with 5 x 25 probings. Form, radial distances is then evaluated on a
size and location error over 125 points. calculated Tschebyscheff-circle.

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 Electronics / Supply Specifications / Options

Electronics and Safety

Electronics control Microprocessor controller in a service-friendly, modular design with integrated monitoring.
Worldwide remote diagnostics through Hexagon Metrology service and internet available.

Collision protections For the complete machine (probehead, styli and Z-ram), in set up mode.
Leitz PMM-Xi: for probehead and styli, in set up mode.

Safety devices Contact devices at the columns.

Leitz Infinity, Ultra and PMM-C: Additional protection system for the Z ram.

Safety standards CE-conform with machine directive (2006/42/EG),

EMI-directive (2004/108/EG).

Supply Specifications

Controller B5 - Europa B5 - USA, Japan

Protection class IP 54 IP 54

Operating voltage 230 V, ±10 %; 50 - 60 Hz; P, N, PE 115 V, ±10 %; 50 - 60 Hz; P, N, PE

Power requirement 1,4 KVA 1,4 KVA

Power consumption 0,6 KVA 0,6 KVA

Rated current 6A 12 A at 400 V

Recommended main fuse 16 A 16 A

Air Supply
Pressure ≥ 0.55 MPa (5.5 bar); (≥ 0.65 MPa (6.5 bar) if table load ≥ 1500 kg)
Consumption approx. 125 Nl/min (with pneumatic damping system: 225 Nl/min)
Quality Class 4 according to ISO 8573, part 1

Software QUINDOS 7
PC-DMIS, optional for Leitz PMM-C and Leitz PMM-Xi

Options • New: • Laser point sensor Leitz Precitec LR

• Laser point sensor Hexagon HP-O
• Roughness sensor Profiler R
• Automatic styli changer
• Extended Z measuring range 150 mm
• Automatic Workpiece Temperature Sensor
• Environment Monitoring System (Standard for Leitz Infinity and Leitz Ultra)
• Manual and automated part loading system
• Rotary table, integrated or „on top“
• Climate controlled room

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Measuring Ranges and Dimensions

Measuring Ranges (X x Y x Z)
Size 8.10.6 800 x 1000 x 575 mm Size 12.10.6 1200 x 1000 x 575 mm
Size 12.10.7 1200 x 1000 x 700 mm Size 16.12.7 1600 x 1200 x 700 mm
Size 16.12.10 1600 x 1200 x 1000 mm Size 24.12.7 2400 x 1200 x 700 mm
Size 24.12.10 2400 x 1200 x 1000 mm Size 24.16.7 2400 x 1600 x 700 mm
Size 24.16.10 2400 x 1600 x 1000 mm

Permitted Table Load

Size 8.10.6 / 12.10.6 / Leitz Infinity 750 kg Size 12.10.7 / 16.12.7 /24.12.7 1750 kg
Leitz PMM-Xi 12.10.7 / Leitz Ultra 12.10.7 1250 kg Size 16/24.12.10 / 24.16.7 / 24.16.10 2000 kg
Leitz Ultra 16/24.12.7 1500 kg

Dimensions in mm 90

Height
A

T-Height
Width Length

Model Length Width Height T-Height Clearance A Clearance B(3) Weight

[mm] [mm] [mm] [mm] [mm] [mm] [kg]
Size 8.10.6 (1) 2395 2013 3026 755 1250 2 6700

Size 12.10.6 (2)

2795 2460 2986 755 1250 2 7250

Size Infinity 12.10.6 2795 2013 3106 875 1250 3 7250

Size 12.10.7 (Ultra) 2795 2013 3246 (3326) 795 1250 100 7400

Size 16.12.7 (Ultra) 3595 2213 3246 (3326) 795 1450 100 10200

Size 24.12.7 (Ultra) 4395 2213 3346 (3426) 895 1450 100 13800

Size 24.16.7 4395 2613 3346 895 1850 50 14800

Size 16.12.10 3595 2213 3796 795 1450 50 10300

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Size 24.12.10 4395 2213 3896 895 1450 50 13900

Size 24.16.10 4395 2613 3896 895 1850 50 14900

Controller B5 800 400 1200 115

Height and T-height as specified are valid for standard damping system. In case of an active damping system 80 mm have to be added to the height dimension.
(1)
Dimensions with active damping system: Width: 2460 mm, Height: 2986 mm; (2) With active damping system only.
(3)
The option “Extended Z measuring range” extends the clearance by 150 mm. Not available for Infinity and Ultra.

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 Gear Inspection

Gear Measuring Capability

Cylindrical gears Spur, helical, double helical, splines (internal and external)
Clutch gears internal and external
Gear segments minimum No. of teeth: 1
Gear racks
Bevel gears Straight bevel, spiral bevel, hypoid bevel, crown gears
Couplings Curvic, Hirth
Gear cutting tool Hob cutter, broach, shaper cutter, shaving gears, form cutter
Evaluation standards DIN, ISO, AGMA, ANSI, JIS, CNOMO, CAT
Available interfaces Gleason GAGE 4/WIN, Klingelnberg KIMOS, DMG Mori, Depo

Inspection Methods
Measuring principle 3-Axes, gear fixed anywhere in the measuring volume. No rotary table required.
Profile and flank inspection with Variable High-Speed-Scanning with involute path control.
Alignment of the gear axis Vertical or horizontal
Max. no. of gears on pallet Not limited, depending on gear diameter and machine measuring range.

Available Software Modules for Gear Inspection

• Cylindrical gear • Straight bevel gear • Shaving gear • Cylindrical worm

• Unknown gear • Spiral bevel gear • Shaper cutter • Worm wheel
• Gear gauges • Hob cutter • Broach • Globoid worm
• CAT gear • Form cutter • Sprocket / chain wheel • Curvic couplings
• Hirth gearing

Gear related Specifications

Max. gear weight see permitted table load, page 9

Module range 0.5 - 100 mm
Max. gear width = Z-range of the PMM-C (vertical orientation), e. g. 1000 mm for a 24.12.10
Max. shaft length = X-range of the PMM-C (horizontal orientation), e. g. 2400 mm for a 24.12.10
Min. gear diameter not limited
Max. gear diameter 8.10.6 12.10.7 xx.12.zz xx.16.zz
Spur gear 750 mm 950 mm 1150 mm 1550 mm
Helical gear(1) 500 mm 700 mm 900 mm 1300 mm
(1)
depending on module and styli configuration

Spiral angle 0° - 90°

Machine accuracy Group 1 according to VDI/VDE 2612/2613, page 1 and 2
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25
150, depending on module

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Room Layout

500

2000

1000

soaking area soaking area

2000

Above room layout shows the minimum clearance and is for reference only.
Individual room designs may differ.

To maintain the climatic conditions for the Leitz Infinity we recommend

to place the controller outside the measuring room.

Roughness sensor Profiler R

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Leitz PMM-C with option

“Extended Z-measuring range”

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 PRECISION MEASURING LASER TRACKERS
PORTABLE MEASURING ARMS WHITE LIGHT SCANNERS
INSTRUMENTS & STATIONS

SENSORS BRIDGE CMMS MULTISENSOR & OPTICAL SYSTEMS ULTRA HIGH ACCURACY CMMS

HORIZONTAL ARM CMMS GANTRY CMMS AUTOMATED APPLICATIONS SOFTWARE SOLUTIONS

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All rights reserved. Due to continuing product development,

Hexagon Metrology reserves the right to change product
specifications without prior notice.
576647

Printed in Germany. April 2015

ISO 14001 ISO 9001 VDA 6.4