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SEMICONDUCTOR TECHNICAL DATA by MPX5700/D

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The MPX5700 series piezoresistive transducer is a state–of–the–art monolithic silicon
pressure sensor designed for a wide range of applications, but particularly those INTEGRATED PRESSURE
employing a microcontroller or microprocessor with A/D inputs. This patented, single SENSOR
element transducer combines advanced micromachining techniques, thin–film metalliza- 0 to 700 kPa (0 to 101.5 psi)
tion, and bipolar processing to provide an accurate, high level analog output signal that 15 to 700 kPa
is proportional to the applied pressure. (2.18 to 101.5 psi)
0.2 to 4.7 V OUTPUT
Features
• 2.5% Maximum Error over 0° to 85°C
• Ideally Suited for Microprocessor or Microcontroller–Based Systems
• Available in Absolute, Differential and Gauge Configurations
• Patented Silicon Shear Stress Strain Gauge
• Durable Epoxy Unibody Element

MPX5700D
)& CASE 867

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MPX5700DP
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CASE 867C
Figure 1. Fully Integrated Pressure Sensor Schematic

MPX5700AS
CASE 867E

PIN NUMBER
1 Vout 4 N/C
2 Gnd 5 N/C
3 VS 6 N/C

NOTE: Pins 4, 5, and 6 are internal

device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the lead.

REV 5

Motorola
 Motorola, Inc.Sensor
2001 Device Data 1
  

MAXIMUM RATINGS(1)
Parametrics Symbol Value Unit
Maximum Pressure(2) (P2
1 Atmosphere) P1max 2800 kPa
Storage Temperature Tstg –40 to +125 °C
Operating Temperature TA –40 to +125 °C
NOTES:
1. Maximum Ratings apply to Case 867 only. Extended exposure at the specified limits may cause permanent damage or degradation to the
device.
2. This sensor is designed for applications where P1 is always greater than, or equal to P2. P2 maximum is 500 kPa.

OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in Figure 4
required to meet electrical specifications.)
Characteristic Symbol Min Typ Max Unit
Pressure Range(1) Gauge, Differential: MPX5700D POP 0 — 700 kPa
Absolute: MPX5700A 15 700
Supply Voltage(2) VS 4.75 5.0 5.25 Vdc
Supply Current Io – 7.0 10 mAdc
Zero Pressure Offset(3) Gauge, Differential: (0 to 85°C) Voff 0.088 0.2 0.313 Vdc
Absolute (0 to 85°C) 0.184 0.409
Full Scale Output(4) (0 to 85°C) VFSO 4.587 4.7 4.813 Vdc
Full Scale Span(5) (0 to 85°C) VFSS — 4.5 — Vdc
Accuracy(6) (0 to 85°C) — — — ± 2.5 %VFSS
Sensitivity V/P — 6.4 — mV/kPa
Response Time(7) tR — 1.0 — ms
Output Source Current at Full Scale Output IO+ — 0.1 — mAdc
Warm–Up Time(8) — — 20 — ms
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range.
3. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure.
5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
6. Accuracy (error budget) consists of the following:
• Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
• Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
• TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
• TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative
to 25°C.
• Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C.
7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
8. Warm–up Time is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized.

MECHANICAL CHARACTERISTICS
Characteristics Typ Unit
Weight, Basic Element (Case 867) 4.0 grams

2 Motorola Sensor Device Data

   

ON–CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING

Figure 3 illustrates the Differential/Gauge basic chip car- regarding media compatibility in your application.
rier (Case 867). A fluorosilicone gel isolates the die surface Figure 2 shows the sensor output signal relative to pres-
and wire bonds from the environment, while allowing the sure input. Typical, minimum, and maximum output curves
pressure signal to be transmitted to the sensor diaphragm. are shown for operation over a temperature range of 0° to
(For use of the MPX5700D in a high pressure, cyclic ap- 85°C using the decoupling circuit shown in Figure 4. The
plication, consult the factory.) output will saturate outside of the specified pressure range.
The MPX5700 series pressure sensor operating character- Figure 4 shows the recommended decoupling circuit for
istics, and internal reliability and qualification tests are based interfacing the output of the integrated sensor to the A/D in-
on use of dry air as the pressure media. Media, other than dry put of a microprocessor or microcontroller. Proper decoup-
air, may have adverse effects on sensor performance and ling of the power supply is recommended.
long–term reliability. Contact the factory for information

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Figure 2. Output versus Pressure Differential

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Figure 3. Cross–Sectional Diagram Figure 4. Recommended power supply decoupling

(Not to Scale) and output filtering.
For additional output filtering, please refer to
Application Note AN1646.

Motorola Sensor Device Data 3

  

PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE

Motorola designates the two sides of the pressure sensor pressure sensor is designed to operate with positive differen-
as the Pressure (P1) side and the Vacuum (P2) side. The tial pressure applied, P1 > P2.
Pressure (P1) side is the side containing fluoro silicone gel The Pressure (P1) side may be identified by using the table
which protects the die from harsh media. The Motorola MPX below:

Pressure (P1)
Part Number Case Type Side Identifier
MPX5700D, MPX5700A 867C Stainless Steel Cap
MPX5700DP 867C Side with Part Marking
MPX5700GP, MPX5700AP 867B Side with Port Attached
MPX5700GS, MPX5700AS 867E Side with Port Attached

ORDERING INFORMATION
MPX Series

Device Type Options Case Type Order Number Device Marking

Basic Element Differential 867C MPX5700D MPX5700D
Absolute 867C MPX5700A MPX5700A
Ported Elements Differential Dual Ports 867C MPX5700DP MPX5700DP
Gauge 867B MPX5700GP MPX5700GP
Gauge, Axial 867E MPX5700GS MPX5700D
Absolute 867B MPX5700AP MPX5700AP
Absolute, Axial 867E MPX5700AS MPX5700A

4 Motorola Sensor Device Data

   

PACKAGE DIMENSIONS

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CASE 867–08
ISSUE N

BASIC ELEMENT

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CASE 867B–04
ISSUE F

PRESSURE SIDE PORTED (AP, GP)

Motorola Sensor Device Data 5

  

PACKAGE DIMENSIONS–CONTINUED

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ISSUE F

PRESSURE AND VACUUM SIDES PORTED (DP)

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ISSUE D

PRESSURE SIDE PORTED (AS, GS)

6 Motorola Sensor Device Data

   


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guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the
application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental
damages. “Typical” parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications
and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application
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Motorola Sensor Device Data 7

◊ MPX5700/D