TS-960e-5G

MMWAVE / 5G PXIE PRODUCTION TEST SYSTEM

• mmWave Device Production Test and Characterization
• DC, Parametric and RF Test Capabilities
• PXIe based, Compact, Scalable Platform
• Supports Up to 24 RF Ports
• 50 GHz Signal Delivery to the Device Under Test
• Comprehensive ICEasy Semiconductor Test Suite
• Intuitive ATEasy® - Integrated Test Executive / Development Environment

DESCRIPTION
The TS-960e-5G mmWave test system delivers proven The TS-960e-5G's device interface board (DIB) / receiver
performance up to 50 GHz. The system incorporates laboratory interface is designed to be compatible with virtually any device
grade PXIe RF instrumentation with a high performance receiver handler. the TS-960e-5G utilizes the same receiver interface as
interface for packaged or wafer test / characterization of the TS-960EX-5G, providing DIB compatibility between the two
mmWave devices. In addition, MTS offers a full suite of digital systems. The receiver interface is also compatible with the Opus
and parametric test capabilities as well as SPI/I2C interface 3 wafer prober.
support for controlling / monitoring the device under test (DUT).
FEATURES
The base system includes a PXIe chassis with 64 dynamic digital The TS-960e-5G can be configured with up to 256 dynamic
I/O channels, 64 static digital I/O channels, a user programmable digital channels. The base platform uses the GX5295 - a 3U PXI,
power supply, a system self-test and fixture. Additional PXIe 32 channel, 100 MHz digital I/O card with per channel parametric
slots are available for adding RF instrumentation, more digital measurement units (PMUs).
and analog test resources as needed.
A wide range of digital and analog instrument options can easily
System software includes DIOEasy for digital waveform editing / be incorporated into the TS-960e-5G for supporting both

MANUFACTURING
display, ICEasy for device test development, and Marvin Test functional and DC parametric test capabilities. RF
Solutions' ATEasy which provides an integrated and complete instrumentation options include the Keysight M9807 / M9808
test executive and test development environment, allowing users PXIe VNAs.
to quickly develop and easily maintain test applications.
The system is also available with digital vector conversion tools
Offering a total of 20 PXI / PXIe peripheral slots, additional digital that support ASCII, WGL, STIL, VCD, eVCD and ATP vector
and analog test resources can be added to the TS-960e-5G as formats.
test needs evolve. The TS-960e-5G is the ideal test solution for
semiconductor OEMs, fabless semiconductor vendors, incoming
inspection / counterfeit detection labs and packaging / test
vendors needing a cost-effective, configurable mmWave test
system.

For production test applications requiring integration with an

automated handler, the TS-960e-5G is available with the Reid-
Ashman OM-1069 manipulator which provides precise
positioning of the test head and the flexibility to interface to
probers and device handlers.

Toll Free: 888-TEST-BY-PXI • Phone: 949-263-2222 • Fax: 949-263-1203 • email: sales@marvintest.com • www.marvintest.com
TS-960e-5G
TS-960E-5G CORE SYSTEM
CONFIGURATION
The TS-960e-5G core system includes the following test
resources and capabilities:
• ICEasy test software development tools
• ATEasy test executive and programming environment
• GX3104 SMU with 4 channels each (expandable to 16)
• DIOEasy digital waveform editing and display tools
• Embedded i7, quad core controller with Windows®10 OS
• (64) 100 MHz digital channels with per pin PMU (expandable
to 256)
• (64) static digital channels (expandable to 128), which can be
used for fixture ID, UUT static control or DUT board relay
control
• 21-slot, high-power PXI Express chassis
• Pogo pin, blind-mate receiver interface with 24, 50 GHz RF
ports

SOFTWARE
The test system is supplied with ATEasy and all instrument
drivers, virtual instrument panels, and a system self-test as well
as ICEasy test software tools which facilitates device test
development and characterization.

ATEasy supports a wide variety of Windows based APIs

including, LabVIEW, CVI, Microsoft® and Borland® C/C++,
Microsoft Visual Basic®, and Borland Delphi.

MANUFACTURING
APPLICATIONS
• mmWave packaged and wafer device test / characterization
• Pilot production and focused production test
• Automated failure analysis and test

Copyright © Marvin Test Solutions, Inc. All rights reserved. Product and company names listes are trademarks of their respective
companies.
Revision C • Updated Jun 24, 2020
TS-960e-5G
SPECIFICATIONS External 10 An external 10 MHz clock source (TTL level) can be

MMWAVE TESTS MHz Clock provided via a rear panel BNC or via a PXI Express
Input System Timing Controller
Tx / Rx Tests S-Parameter Measurement (Insertion / Return
Loss) 10 MHz Clock 10 MHz output is available via a rear panel BNC

S12, S21, S11, S22 Output connector, TTL compatible level

TS-960E-5G PXIE CHASSIS PXIe System 1600 W

Power
Number of 1 controller, 8 PXI-1, 8 Hybrid, 4 PXIe
Slots PXIe Chassis 120 VAC, ±15%; 20 A max (PFC)
Input AC 240 VAC, ±10%; 10 A max (PFC)
System CPU Intel Core i7, 2.4 GHz, single slot controller Power 47 Hz to 440 Hz
(Embedded) 4x4 PCIe bus configuration
8 GB of RAM DYNAMIC DIGITAL I/O SUBSYSTEM
System Hard 320 GB (min) Number of 64 (base configuration)
Disk Digital I/O and
PMU
Cooling (4) 100 CFM fans for system cooling. Integrated
Channels
temperature monitoring via an on-board
microcontroller with audible and software Maximum 256 channels
notification when preset temperature limits are Channel
exceeded. Fan speed control and monitoring is Configuration
automatic and can be controlled / monitored via the Maximum 100 MHz
GxChassis software. Clock Rate
PXI Clock Integrated 10 MHz PXI clock with auto-detect
Digital Test Stimulus / response
function. Presence of an external 10 MHz PXI clock
Modes Real-time compare
will disable the internal clock. PXI clock is
distributed to all peripheral slots. Vector 64 Mb / channel
Optional external clock via slot 2 Memory

Temperature Per slot monitoring, 1 reading/sec/slot Real Time 1,024 (records data and program steps)
Monitoring 4 second moving average value Compare
User selectable alarm criteria: Record
• Maximum slot temperature Memory
• Average slot temperature
Drive Voltage -2 V to +7 V, Drive Hi & Drive Lo, maximum swing

MANUFACTURING
Accuracy: ± 2 °C
Range is 8 V
Default warning and shutdown limits: +50 °C & +70
°C Sense Voltage -2 V to +7 V, Sense Hi & Sense Lo
Warning and shutdown limits programmable via Range
software driver Programmabl ±24 mA, programmable on a per channel basis,
Status: Query via software driver and audible alarm e Pull-Up / V commutate range: -2 V to +7 V, programmable on
for a warning limit condition Pull-Down a per channel basis
Power Supply Monitored voltages: 3.3, 5, +12, -12, VIO value Current
Monitoring Accuracy: ± 2% of reading Source / Sink

PXI Triggers Slots: 2 – 21 High and Low VCLo: -2 V to +5 V

Number: 8 per segment Commutation VCHi: 0 V to +7 V
Software controlled segment mapping supports: Voltage
• Isolate a trigger line within a segment Range
• Map a trigger line left to right
Voltage ±100 mV
• Map a trigger line right to left
Clamp
PXI Clock and Integrated 10 and 100 MHz clock with an auto- Accuracy
Synch detect function. Presence of an external 10 MHz
Resources PXI clock will synchronize the 100 MHz clock to the
external 10 MHz source
100 MHz clock accuracy: ± 30 ppm
Synchronization signals: SYNC100 & SYNC_CTRL

Copyright © Marvin Test Solutions, Inc. All rights reserved. Product and company names listes are trademarks of their respective
companies.
Revision C • Updated Jun 24, 2020
TS-960e-5G
Parametric Measurement (PMU) USER POWER
Number of 32, one per channel Source / 4-channel, 4 quadrant operation, isolated outputs,
Parametric 4, one per auxiliary channel (for timing /control & Measure Unit common ground, with remote sense
Measurement static I/O functions) (SMU)
Units
Programmabl 0 to ±20 V
Configurations Force Voltage/Measure Current (FVMI) e Voltage
Force Current/Measure Voltage (FIMV) Range
Force Voltage/Measure Voltage (FVMV)
Force Current/Measure Current (FIMI) Output ±0.05% of programmed value + 2 mV
Voltage
Force Voltage -1.5 V to +7 V
Accuracy
Range
Output Noise <20 mV p-p, 20 MHz BW, full load
Force Voltage ±20 mV
Accuracy Output ±2.5 uA to ±250 mA in decade ranges,
Current any one channel can supply up to 1A
Force Voltage 16 bits
Resolution Output ±0.05% of programmed value + 0.05% of FS
Current
Force Current ±32 mA, ±8 mA, ±2 mA, ±512 uA, ±128 uA, ±32
Accuracy
Ranges uA, ±8 uA, ±2 uA FS
Voltage ±0.03% of programmed value + 2 mV
Force Current ±120 uA, 32 mA range
Measurement
Accuracy: ±40 uA, 8 mA range
Accuracy
Compliance ±5 uA, 2 mA range
Range: ±1.2 uA, 512 uA range Current Ranges: 2.5 uA to 250 mA in decades
+1.75 V to +7 ±600 nA, 128 uA range Measurement Accuracy: ±0.05% of reading + 0.05% of FS range
V @ 32 mA ±160 nA, 32 uA range Accuracy
-1.5 V to +7 V ±80 nA, 8 uA range Measurement Programmable, 18 to 24 bits
@ no load ±20 nA, 2 uA range Resolution
Current ±120 uA, 32 mA range RF VECTOR NETWORK ANALYZER OPTIONS
Measurement ±40 uA, 8 mA range
Accuracy (60 ±5 uA, 2 mA range Keysight M9807, 2 port VNA, 40 GHz, PXIe

Measurement ±1.2 uA, 512 uA range Technologies M9808A, 2 port VNA, 53 GHz, PXIe

MANUFACTURING
s / Sec) ±600 nA, 128 uA range TS-960E-5G RECEIVER INTERFACE
Compliance ±160 nA, 32 uA range
Range: ±80 nA, 8 uA range Type Modular, pogo-pin and blind-mate RF interface

+1.75 V to +7 ±20 nA, 2 uA range Interfaces • (4) 128 pin digital blocks
V @ 32 mA • (2) power blocks (8 DPS)
-1.5 V to +7 V • 24 blind mate RF ports
@ no load (Weinschel Planar Blind-Mate, 2.92mm (SMK)

Measure -2 V to +7 V
Voltage
Range
Measure ±1 mV (measurement rate < 200 measurements /
Voltage sec)
Accuracy
STATIC DIGITAL INSTRUMENT
Number of 64, expandable to 128
Static Digital 48 Input / Output ( programmable I/O in groups of
I/O Channels eight)
16 inputs for fixture ID

Logic Levels LVTTL compatible

Source / Sink 24 mA (max)

Current

Copyright © Marvin Test Solutions, Inc. All rights reserved. Product and company names listes are trademarks of their respective
companies.
Revision C • Updated Jun 24, 2020
TS-960e-5G
ENVIRONMENTAL / PHYSICAL
Operating 0 °C to +50 °C
Temperature
Storage -20 °C to +60 °C
Temperature
Relative 90%
Humidity
(Non-
Condensing)
Altitude 30,000 ft

Weight 125 lbs, core system

Overall Size 26" D x 23.5" W x 20" H

Manipulator Reid-Ashman OM-1069

Option

Note: Specifications are subject to change without notice

ORDERING INFORMATION
TS-960e-5G mmWave / 5G PXIe Semiconductor Test System,
64 Dynamic Digital I/O Channels with per Pin PMU

OPTION
TS-900-OPT64 64 Additional Dynamic Channels for use in TS-900

MANUFACTURING

Copyright © Marvin Test Solutions, Inc. All rights reserved. Product and company names listes are trademarks of their respective
companies.
Revision C • Updated Jun 24, 2020
TS-960e-5G
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Copyright © Marvin Test Solutions, Inc. All rights reserved. Product and company names listes are trademarks of their respective
companies.
Revision C • Updated Jun 24, 2020