ZEISS O-INSPECT

Specifications
Status: November 2017
 System description
Type according to ISO 10360-1:2000 O-INSPECT 3/2/2: Column CMM, O-INSPECT 5/4/3 and 8/6/3: Fixed bridge CMM
Operating mode motorized / CNC
Sensor mounts Fixed installation
Sensors ZEISS VAST XXT (contact)/ ZEISS Discovery.V12 (optical)
Software ZEISS CALYPSO, ZEISS GEAR PRO (option)
3/2/2 5/4/3 8/6/3
Travel speed Motorized in mm/s Axes 0 to 100 0 to 100 0 to 100
CNC in mm/s X, Y, Z axes 300/300/100 300/300/100 300/150/100
in mm/s Vector 435 435 350

Acceleration in mm/s2 X, Y, Z axes 500/500/500 500/500/500 500/200/500

in mm/s2 Vector 866 866 735

Sensors and accuracy

The CMM specifications are only valid when using original accessories by ZEISS. The specified parameters are observed in the application of the internal test instructions for acceptance
testing and in the use of the released standards in accordance with the ISO 10360 series.

ZEISS VAST XXT 1)

Scanning and single-point sensor. Measuring speed up to max. 2.5 seconds per point and up to
500 points/s by scanning. Axial stylus length 30-150 mm; radial stylus length up to 65 mm (star stylus);
stylus tip diameter of 0,3 to 8 mm, maximum stylus weight = 15 g; max. stylus speed = 5 mm/s

3/2/2 5/4/3 8/6/3

Length measurement error 2)

E0 X/Y/Z (1D) in µm 18 °C - 22 °C 1.6 + L/200 1.6 + L/250 1.9 + L/150
MPE complies with ISO 10360-2:2009
E0 XY (2D) in µm 18 °C - 22 °C 1.9 + L/150 1.7 + L/250 2.0 + L/150

E0 (3D) in µm 18 °C - 22 °C 2.4 + L/150 1.9 + L/250 2.2 + L/150

TVA in µm 18 °C - 26 °C 2.7 + L/150 2.2 + L/100 2.5 + L/100

TVA in µm 18 °C - 30 °C 2.9 + L/150 2.4 + L/80 2.7 + L/80

Repeatability range R0 in µm 1.2 1.2 1.2

MPL complies with ISO 10360-2:2009

Scanning error THP in µm 18 °C - 22 °C 2.7 2.7 3.8

MPE complies with ISO 10360-4:2000

Required measuring time MPT τ in s 18 °C - 22 °C 55 55 68

Form measurement error 6) RONt (MZCI) in µm 18 °C - 22 °C 2.4 2.4 2.4
MPE for roundness complies with ISO 12181
(VDI/VDE 2617, sheet 2.2)

Single stylus form probing error PFTU in µm 18 °C - 22 °C 2.4 1.9 2.2

MPE complies with ISO 10360-5:2010

Multi-stylus form probing error PFTM 3)

in µm 18 °C - 22 °C 4.8 4.8 4.8
MPE complies with ISO 10360-5:2010

Multi-stylus dimension probing error PSTM 3)

in µm 18 °C - 22 °C 1.2 1.2 1.2
MPE complies with ISO 10360-5:2010

Multi-stylus location probing error PLTM 3)

in µm 18 °C - 22 °C 3.8 3.8 3.8
MPL complies with ISO 10360-5:2010

ZEISS Discovery.V12 4)
Optical 2D camera sensor with image processing functionality and autofocus, 12x zoom, 10 fixed zoom levels,
CMOS measuring camera chip, measuring speed up to 30 frames/s, max. probing speed 10 mm/s (Z axis), work-
ing distance 87 mm, laser pointer. Illumination: outside 8-segment ring light (blue and red), inside ring light (blue
and red), coaxial light (blue and red), transmitted light.

3/2/2 5/4/3 8/6/3

Length measurement error 2) EU X/Y (1D) 5)

in µm 18 °C - 22 °C 1.6 + L/200 1.6 + L/250 1.9 + L/150
MPE complies with ISO 10360-7:2011
EU XY (2D) 5)
in µm 18 °C - 22 °C 1.9 + L/150 1.7 + L/250 2.0 + L/150

Repeatability range RU XY 5)
in µm 18 °C - 22 °C 1.2 1.2 1.2
(of EU - MPL complies with ISO 10360-7:2011

Repeatability range RUZ 5)

in µm 18 °C - 22 °C 1.9 1.9 1.9
(of EUZ L = 0 mm - MPL complies with ISO 10360-7:2011

Probing error PF2D 5)

in µm 18 °C - 22 °C 1.9 1.7 2.0
MPE complies with ISO 10360-7:2011

Probing error of the image processing system PFV2D 5)

in µm 18 °C - 22 °C 1.2 1.2 1.2
MPE complies with ISO 10360-7:2011

1) ZEISS VAST XXT: acceptance test with TL3 module; stylus length of 70 mm and stylus tip diameter of 8 mm.
2) Measuring length L in mm with acceptance testing plate from ZEISS.
3) Measuring location near the calibration position to document sensor properties.
4) Laser class 1: EN (IEC) 60825-1:2002
5) 6.3x magnification
6) Filter used: 50 W/U; scanning speed for roundness: 5 mm/s, value valid XY direction
 1 2 3 4 5 6 7 8

A A

108,8

104,6

50,4

14 28

B B

32 - 0,03
0
C

Optical confocal white light distance sensor 0

45 - 0,03 FC- APC Faser Connector
Mittlerer Arbeitsabstand =
61mm
C
1)
for ZEISS O-INSPECT 3/2/2, 5/4/3, 8/6/3

D
Measuring range 2 mm D
Working distance 61 mm, resolution 0.07 μm, measurable surface inclination to beaming direction 90°±15° 2), measuring spot
diameter 12.5 μm
E
Vertrauliches Dokument * Vervielfältigung nur mit schriftlicher Genehmigung der Firma Precitec
ist Wiederholteil in Technische Änderungen vorbehalten
Weitere Dokumente : .044 Fertigungsanw. .047 Oberflächenbearb. .050 Lackiervorschrift Oberflächenbehandlung: Schichtdicke:

(nur für mech.Teile) .059 Montageanw. .069 Prüfzeichnung .079 Fertigungsvorr. . .

Ausg. Durchgef.Änd. Tag Name Allgemeintol.: DIN ISO 2768 fK Werkstoff: . Oberfläche nach DIN 1302

. . . Tolerierung: DIN ISO 8015 Lieferant: . Ra .

. . .. . Passungen: DIN ISO 286 Benennung Maßstab:
. . . . Datum Name
19.03.10 MH 2mm-Messkopf 1:1
. . . . entw./gez.

. . . . gepr. . .
F
. . . . gen. . . Zeichn.-Nr. Seite:

. . . .
0281-0.5450.A09 1v.1
RB 200137
. . . . A3
1 2 3 4 . . . . Ersatz für: Entwickelt aus:

Unidirectional length measurement error E[Uni:Tr:ODS] in µm 18 °C - 22 °C 1.9 + L/250

MPE complies with ISO 10360-8:2013 Z axis

Total dimension probing error P[Size.Sph.All:Tr:ODS] in µm 18 °C - 22 °C 5

MPE complies with ISO 10360-8:2013 Z axis

1 2 3 4 5 6

FC- APC Faser Connector

A
Mittlerer Arbeitsabstand = 22,5 mm

Measuring range 3 mm A

Working distance 22.5 mm, resolution 0.1 μm, measurable surface inclination to beaming direction 90°±30°2), measuring spot
diameter 12 μm
- 0,05
49 - 0,09

24

B B

32,4

105,7

C C

Technische Änderungen vorbehalten!

Vertrauliches Dokument * Vervielfältigung nur mit schriftlicher Genehmigung der Firma Precitec
ist Wiederholteil in Alle nicht bemaßten Fasen: 0,2x45
Weitere Dokumente : .044 Fertigungsanw. .047 Oberflächenbearb. .050 Lackiervorschrift Oberflächenbehandlung: Schichtdicke:

(nur für mech.Teile) .059 Montageanw. .069 Prüfzeichnung .079 Fertigungsvorr. . .

Ausg. Durchgef.Änd. Tag Name Allgemeintol.: DIN ISO 2768 fK Werkstoff: . Oberfläche nach DIN 1302

Unidirectional length measurement error E[Uni:Tr:ODS] in µm 18 °C - 22 °C 2.2 + L/250

Tolerierung: DIN ISO 8015
. . . . Passungen: DIN ISO 286 Lieferant: . Ra .
. . . . Masse : 501 g Benennung Maßstab:
. . . . Datum Name
D . . . . entw./gez. 09.03.06 HS
Maßzeichnung 1:1
. . . . gepr. 10.03.06 AM
3mm Messkopf
. . . . gepr. . . Zeichn.-Nr. Seite:

MPE complies with ISO 10360-8:2013 Z axis

. . . . 0281-A.2100.B09 1v.1
b Faseranschluß geä. 06.04.10 MH RB200050 A4
1 2 a Faseranschluß geä. 13.05.09 HS Ersatz für: Entwickelt aus:

Total dimension probing error P[Size.Sph.All:Tr:ODS] in µm 18 °C - 22 °C 5

3 4
MPE complies with ISO 10360-8:2013 5 6
Z axis
ctor
bstand = 70mm A

Measuring range 10 mm 70 mm working distance, 0.3 µm resolution

B
Measurable surface inclination to beaming direction 90° ±20° 2)

60,50 Measuring spot diameter 24 μm

146,7

Technische Änderungen vorbehalten!

Vertrauliches Dokument * Vervielfältigung nur mit schriftlicher Genehmigung der Firma Precitec
ist Wiederholteil in Alle nicht bemaßten Fasen: 0,2x45
Weitere Dokumente : .044 Fertigungsanw. .047 Oberflächenbearb. .050 Lackiervorschrift Oberflächenbehandlung: Schichtdicke:

(nur für mech.Teile) .059 Montageanw. .069 Prüfzeichnung .079 Fertigungsvorr. . .

Ausg.
.
Durchgef.Änd.
. .
Tag Name

.
Allgemeintol.: DIN ISO 2768 fK
Tolerierung: DIN ISO 8015
Passungen: DIN ISO 286
Unidirectional length measurement error
Werkstoff:
Lieferant:
.
.
Oberfläche nach DIN 1302
Ra . E[Uni:Tr:ODS] in µm 18 °C - 22 °C 3.9 + L/250
. . . . Masse : 724 g Benennung Maßstab:
.
.
.
.
.
.
.
.
.
.
.
.
entw./gez.

gepr.
Datum
09.03.06
10.03.06
Name
HS
AM
MPE complies
Maßzeichnung
10mm Messkopf with ISO 10360-8:2013 1:2 Z axis
d Faseranschl. geändert 06.04.10 MH gepr. . . Zeichn.-Nr. Seite:

c Baugruppe
überarbeiet 23.07.09 HS 0281-A.3050.D09 1v.1
b
Spannbereich
21.07.09 HS RB200071 A4
Total dimension probing error P[Size.Sph.All:Tr:ODS] in µm 18 °C - 22 °C 5
geändert!
a . . . Ersatz für: Entwickelt aus:

MPE complies with ISO 10360-8:2013 Z axis

Rotary table 1)
for ZEISS O-INSPECT 5/4/3 and 8/6/3
Dimensions and weight
Masse in kg 18 °C - 22 °C approx. 6.3
Measuring system Resolution in “ 18 °C - 22 °C 0,07
Working range B12 in mm 165
With a vertical RT axis in mm

Hight h2 in mm 135
With a vertical RT axis in mm

Dynamics
Max. angular velocity in °/s 18 °C - 22 °C 50
Rotation speed in min-1 18 °C - 22 °C 8.3
Load/moment
Moment of tilt in Nm horizontal 2
in Nm vertical centric
Max. centering capacity 3)
in kg vertical 9

Tilt rigidity in Nm/“ 1

Available torque M in Nm 18 °C - 22 °C 3
Max. distance of the load to the jaw chuck in mm 18 °C - 22 °C 100 by approx. 1.5 kg
Max. workpiece diameter in mm 18 °C - 22 °C approx. 150
Accuracy
Angular position repeatability in “ 18 °C - 22 °C ±0.75

Axial runout FA in µm 18 °C - 22 °C 6
MPE complies with ISO 10360-3:2000

Radial runout FR in µm 18 °C - 22 °C 6
MPE complies with ISO 10360-3:2000

Wobble FT in µm 18 °C - 22 °C 6
MPE complies with ISO 10360-3:2000

1) Optionally available.
2) Depending on the reflection behavior of the surface.
 ZEISS O-INSPECT 3/2/2 Dimensions in mm

Measuring range Stylus data geometry Overall machine dimensions Working range
(Max. workpiece
size)

X axis Y axis Z axis ZEISS VAST XXT ZEISS Discovery.V12 White light distance Width Length Height Width
sensor

G104 G105 G106 X Y X Y X Y B6 B5 B7 B17

Basic model 300 200 200 0 0 74.0 -1.0 170.5 61.5 8651) 10002) 1405 ∞
With standard base 300 200 200 0 0 74.0 -1.0 170.5 61.5 8651) 10002) 2080 ∞
With shopfloor base 300 200 200 0 0 74.0 -1.0 170.5 61.5 approx. 1935 19602) 2115 ∞

Dimensions in mm Weight in kg

Footprint Table height Assembly clearance Max. workpiece Measuring machine

Width Length

w1 w23) l1 B23 c1

Basic model 865 765 1000 305 ≥200 20 325

with standard base 865 740 991 980 ≥200 20 440
With shopfloor base 732 - 920 1015 ≥200 20 490

G104
c1

G106
B7

G105
B7

B23
B23

min. 300

B5
optional
standard base

w2
B6/w1

G104
c1

°
60
B7

B5
B23

°
60

optional
shop floor
base

w2 l1
w1 B5 B6
B6

Note: the given dimensions and weights are approximate values. Subject to change. Actual appearance of specific sizes may vary from illustration.
Dimensioning based on DIN 4000-167:2009.

1) plus 2 x 500 mm assembly clearance.

2) plus 240 mm for control panel storage and 500 mm assembly clearance.
3) With disassembly of the cover parts during installation.
 ZEISS O-INSPECT 5/4/3 Dimensions in mm

Measuring range Stylus data geometry Overall machine dimensions Working range
(Max. workpiece size)

X axis Y axis Z axis ZEISS VAST XXT ZEISS Discovery.V12 White light distance Width Length Height Width
sensor

G104 G105 G106 X Y X Y X Y B6 B5 B7 B17

500 400 300 0 0 74.0 -1.0 170.5 61.5 1090 1)

1653 2)
2030 700

Dimensions in mm Weight in kg

Footprint Table height Assembly clearance Max. workpiece Measuring machine Base

Width Length

B6 l1 B23 c1

1090 1295 850 ≥200 25 600 150

ZEISS O-INSPECT 8/6/3 Dimensions in mm

Measuring range Stylus data geometry Overall machine dimensions Working range
(Max. workpiece size)

X axis Y axis Z axis ZEISS VAST XXT ZEISS Discovery.V12 White light distance Width Length Height Width
sensor

G104 G105 G106 X Y X Y X Y B6 B5 B7 B17

800 600 300 0 0 74.0 -1.0 170.5 61.5 14401) 21442) 2030 1060

Dimensions in mm Weight in kg

Footprint Table height Assembly clearance Max. workpiece Measuring machine Base

Width Length

B6 l1 B23 c1

1440 1591 850 ≥200 100 1000 200

c1

h2 B12

G106
B7

G104
G105
B23

l1

B17 B5

B6

Note: the given dimensions and weights are approximate values. Subject to change. Actual appearance of specific sizes may vary from illustration.
Dimensioning based on DIN 4000-167:2009.

1) plus 2 x 500 mm assembly clearance.

2) plus 200 mm for control panel storage and 500 mm assembly clearance.
Requirements for operational readiness
Relative humidity 40 % - 70% (without condensation)
Environmental temperature 17°C - 35°C
Electrical power rating 3/2/2 5/4/3 8/6/3

1/N/PE 100 - 240V~(+10%); 1/N/PE 100 - 240V~(+10%); 1/N/PE 100 - 240V~(+10%);

50-60 Hz max. power consumption 50-60 Hz max. power consumption 50-60 Hz max. power consumption
600 VA Typical power consumption 600 VA Typical power consumption 600 VA Typical power consumption
(thermal load): 170 W (thermal load): 170 W (thermal load): 170 W

Environmental requirements
3/2/2 5/4/3 8/6/3
Permissible humidity (without condensation) 40 % - 70 % 40 % - 70 % 40 % - 70 %
Environmental temperature 18 °C - 22 °C 18 °C - 22 °C 18 °C - 22 °C
Temperature fluctuations per day 2.0 K/d 2.0 K/d 2.0 K/d
per hour 1.0 K/h 1.0 K/h 1.0 K/h
spatial 1.0 K/m 1.0 K/m 1.0 K/m
Floor vibrations ZEISS O-INSPECT is equipped with an integrated vibration damping system and is therefore highly resistant to vibrations.

Technical features
3/2/2 5/4/3 8/6/3

Length measurement system Optical scales; reflected light Optical scales; reflected light Optical scales; reflected light
system, photoelectric, resolution system, photoelectric, resolution system, photoelectric, resolution
0.2 μm 0.2 μm 0.2 μm

Controller Type based on ZEISS C99L based on ZEISS C99L based on ZEISS C99L
Protection type IP53 IP53 IP53

Data technology Delivered with a fully equipped Delivered with a fully equipped Delivered with a fully equipped
workstation. workstation. workstation.

Accessories (optional) Star stylus kit, part clamping set, Star stylus kit, part clamping set, Star stylus kit, part clamping set,
pallet frame, optical confocal white pallet frame, rotary table, optical pallet frame, rotary table, optical
light distance sensor, workpiece confocal white light distance sen- confocal white light distance sen-
temperature sensor, measuring sor, workpiece temperature sensor, sor, workpiece temperature sensor,
lab illumination, standard base, measuring lab illumination measuring lab illumination
ShopFloor base

Approvals

Regulations ZEISS O-INSPECT complies with EC machinery directive 2006/42/EC and EMC directive 2014/30/EU.

Disposal ZEISS products and packaging returned to us are disposed of in accordance with applicable legal provisions.

Subject to changes in design and scope of delivery and due to ongoing technical development.
Certifications/accreditations
Quality management system ISO 9001:2008; VDA 6, Parts 4, 2. Issue 2005

Printed on chlorine-free bleached paper. © Carl Zeiss Industrielle Messtechnik GmbH

Environmental management system ISO 14001:2004
Occupational health & safety management systems BS OHSAS 18001:2007
Accredited ISO/IEC 17025:2005

EN_60_022_0343IX Printed in Germany.  CZ-XI/2017