1 - Devices
1 - Devices
EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN
MOSFET invented by Atalla and Kahng Forms diamond crystal structure (repeating pattern of 18 atoms):
each silicon atom is attached with covalent bonds to four nearest
at Bell Labs in 1959 neighbors (forming a tetrahedral structure)
Si Si Si http://inventors.about.com/libr
ary/inventors/blsolar4.htm
Si Si Si
Si Si Si
EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN
functional circuits
• All modern digital integrated circuits
EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN
use CMOS technology
EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN
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CMOS Technology MOS Transistors: Types and Symbols
G
G
S
D
S
NMOS (Enhancement type) PMOS (Enhancement type)
G
G
Cross section of a CMOS integrated circuit
D
S
PMOS transistor is formed in a separate n-type region
B
called n-well
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NMOS with Bulk Contact
EEE 414/514 Introduction to CMOS VLSI Design
PMOS with Bulk Contact
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Open (off) (Gate = ‘0’) Closed (on) (Gate = ‘1’) Open (off) (Gate = ‘1’) Closed (on) (Gate = ‘0’)
Ron Ron
EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN
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MOS-Transistor Basic Properties MOSFET Critical Physical Dimension: Length
Gate
CROSS- Gate Oxide Polysilicon
Field-Oxide
SECTION Source
n+
Drain
n+ SiO2
of NMOS e-
p+ stopper
Transistor
p-substrate
Bulk (Body) Contact
Conduction at surface
There is a minimum limit: Lmin
Source and drain are physically identical L (Length): Length of the (transistor) gate
They can only be distinguished by the relative voltage potentials
The minimum gate length is the most critical physical parameter
The gate is physically isolated from the substrate that characterizes the advancement of a CMOS technology
Capacitive coupling (field-effect transistor) Smallest horizontal structure that can be defined (fabricated)
Physical mechanism for current conduction: with photolithography
Charge-carriers drift through a strongly inverted channel Example: TSMC 0.18µm CMOS technology: 0.18µm corresponds
to the minimum drawn gate length (Ldrawn_min)
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p substrate p+ stopper
Bulk (Body)
Zero VG: No Channel for Current Conduction Apply Small Positive VG: Depletion Region Formation
A small positive voltage applied to the gate: VG > 0
If VGLI = VGRI = 0, two back-to-back diodes • Similar to the plates of a capacitor
• Substrate bias = 0. VGB > 0
exist in the channel area • Oxide electric field is directed towards the substrate
• Mobile holes are repelled deeper into the bulk on the substrate side of the MOS
High resistance between the two diffusion capacitor while positive charges accumulate on the gate terminal
• Negatively charged fixed (immobile) acceptor ions are left behind
areas VG = 0V • A region depleted of mobile carriers is formed underneath the gate
(left doping
Gate - Gate
n+ area). VLI = 0V n+ n+ n+
p-substrate
(right doping p-substrate Repelled
Immobile acceptor
ions left behind
area). VRI = 0V
B B
holes
EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN
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Apply Small Positive VG: Depletion Region Formation Further Increase In VG: Surface Inversion
• Mobile holes are repelled deeper into the bulk As the gate voltage is further increased, a thin layer of n-type material emerges
• A region depleted of mobile carriers is formed underneath the gate close to the surface
2ε Si | φ | 2ε Si | φ s − φ bulk | • Within this thin layer, electron concentration is LARGER than the hole density
W depletion = = • Additional minority carriers attracted from the bulk to the surface → SURFACE
qN A qN A INVERSION by FIELD-EFFECT VG > 0V
ON by
(mobile) electrons k: Boltzmann constant n-channel with an abundance of free
k=1.38*10-23J/K (mobile) electrons
p-substrate
field-effect Body
T: absolute temperature (300K at room
temperature)
q: charge of an electron
p-substrate
Body
EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN
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Channel Formation with VGLI = VGRI > VT NMOS Channel Formation with VGS ≥ VT
• After the surface is inverted, if the gate voltage is further increased (VGLI > VT) Physical structure of an NMOSFET is symmetrical. Source and drain terminals are
• The depletion layer width and the depletion charge density do not change distinguished by the relative voltages applied to the left and right diffusion islands
• More mobile carriers are attracted to the channel area from the source and In an NMOS transistor:
drain, thereby enhancing the conductivity of the channel •Diffusion island with a lower voltage acts as the source of (-) charge carriers
•Diffusion island with a higher voltage acts as the drain of (-) charge carriers
Maximum depletion width Gate
+ VG ≥ VT
2ε Si | −2φbulk | VGLI > VT VGRI > VT Source + Drain
VDD How to
Wdepletion = - VGS ≥ VT Gate
qN A n+ n+ -
distinguish the
QB 0 = − 2qN Aε Si | −2φbulk | Depletion Region
n+ n+ source and drain
Φ: voltage across the depletion layer
Φ = -2 Φbulk
n-channel with an abundance of free
(mobile) electrons Depletion Region terminals in a
QB0: The charge stored in the
depletion region when there is an p-substrate
Body
n-channel with an abundance of free symmetrical
inversion layer (mobile) electrons
After the formation of the channel, the transistor still cannot conduct current with NMOSFET
the voltage bias conditions that are shown in the figure p-substrate
A (nonzero) voltage differential needs to be produced between the two diffusion areas to
distinguish source and drain and to observe current flow between these two terminals Body structure?
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p+ p+
Depletion Region
n-well
VDD B
EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN
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PMOS Transistor: Reduce VG Further Decrease In VG: Surface Inversion
Gate voltage is reduced below VDD: VG< VDD As the gate voltage is further decreased, a thin layer of p-type material emerges
• Similar to the plates of a capacitor close to the surface
• Substrate (n-well) bias = VDD • Within this thin layer, hole concentration is LARGER than the electron density
• Oxide electric field is directed towards the gate (VGB < 0) • Additional minority carriers attracted from the bulk to the surface → SURFACE
• Mobile electrons are repelled deeper into the bulk on the substrate side of the INVERSION by FIELD-EFFECT
MOS capacitor while negative charges accumulate on the gate terminal VG < VDD
• Positively charged fixed (immobile) donor ions are left behind -
VDD + VT< VGRI < 0V VDD
• A region depleted of mobile carriers is formed underneath the gate VT< VGLI < 0V
VG < VDD Gate
-
VDD VGLI < 0V VGRI < 0V VDD
Gate
+
p+ p+
p+ p+ Depletion Region
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Further Decrease In VG Bilkent University VOLKAN KURSUN
Strong Surface Inversion at VGLI = VGRI = VT • When exactly is the surface strongly inverted?
• A thin channel of p-type material with abundance of holes close to the surface • What is the threshold of minority carrier concentration that needs to be induced at the
• At VGLI = VGRI = VT: hole concentration in the inverted layer at the surface surface for the surface to be called “strongly inverted”?
becomes equal to the electron density deeper in the body of the device → • Classical definition: The surface is strongly inverted when the density of mobile
STRONG SURFACE (CHANNEL) INVERSION holes in the channel becomes equal to the density of electrons deeper in the
V =V +V G DD T
VDD VDD bulk (for an n-type substrate/well: PMOS transistor)
PMOS +
VGLI = VT
-
VGRI = VT
Gate
Surface _ Fermi _ potential = − Bulk _ Fermi _ potential
N VDD
VG = VDD + VT
VDD
φbulk _ n = φT ln( D ) -
transistor ni +
VGLI = VT VGRI = VT
Gate
p+ p+ ( n − type bulk : PMOS )
effect
n-well
q: charge of an electron
VDD Body q=1.602*10-19C VDD Body
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PMOS Channel Formation with VGS ≤ VT Threshold Voltage for Strong Channel Inversion
Physical structure of a PMOSFET is symmetrical. Source and drain terminals are
distinguished by the relative voltages applied to the left and right diffusion islands • Has three components
In a PMOS transistor: 1. Gate voltage component to offset the fixed (immobile) parasitic
•Diffusion island with a lower voltage acts as the drain of (+) charge carriers charge in the gate-oxide and in the silicon/silicon-dioxide
•Diffusion island with a higher voltage acts as the source of (+) charge carriers interface
Source VG ≤ VDD + VT Drain • Oxide-semiconductor interface defects
VDD +
-
0V How to • Charge acquired due to radiation
VGS ≤ VT • Contamination during fabrication
Gate distinguish the • Modeled by a fixed (typically positive for both NMOS and PMOS) charge
density at the oxide-silicon interface: Qox
p+ p+ source and drain 2. Gate voltage to offset the depletion region charge (formation of a
depletion layer)
Depletion Region
terminals in a • QB0 (without body bias) or QB (with body bias)
p-channel with an abundance of free symmetrical • Additional term QI can be included to model ion implantation for VT
adjustment
(mobile) holes
PMOSFET 3. Gate voltage component to invert the surface (strong channel
inversion)
n-well
VDD
structure? • - 2φbulk + φGC
Voltage across the depletion layer
Body
EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN
VG ≥ VT
Depletion region charge Source + Drain D 0 .8 5
VGS ≥ VT Gate
to-source voltage difference -
0 .7 5
(VBS)
0 .7
V (V)
1. If VBS is nonzero: QB n+ n+ G B 0 .6 5
T
0 .6
changes Depletion Region 0 .5 5
2. If QB changes: VT
changes n-channel with an abundance of free S 0 .5
VBS < 0V → Reverse body bias
(mobile) electrons 0 .4 5
Body-effect strongly
0 .4
influences the threshold p-substrate -2 .5 -2 -1 .5
V (V )
-1 -0 .5 0
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IDS (A)
and VDS VGS= 2.0 V
γ NMOS = , γ PMOS = −
VDS = VGS - VT Relationship
with VGS
Cox Cox
2
VGS= 1.5 V
φF _ NMOS = ln i , φF _ PMOS = ln 0
0 0.5 1 1.5 2 2.5
q NA q ni S
VDS (V)
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Vgs = 0 4
Assume VDD > VTNMOS
10-4 A
VGS (> VT) 3
Cut-off
VDS 2 VDS = VGS - VT
Vgs = VDD 1
Linear - 2V
Assume Vtn1 = Vtn2 = Vtn3 = 0.5V and Vtn4 = 0.8V
VGS = -VDD - What modes are the transistors in?
Vtp1 = Vtp2 = Vtp3 = -0.6V and Vtp4 = -1V
EEE 414/514 Introduction to CMOS VLSI Design IDS EEE 414/514 Introduction to CMOS VLSI Design
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Example 1 Example 2
VGSPMOS = 0V > Vtp1 5V VGSPMOS = 0V > Vtp2
5V
PMOS CUT-OFF p2 PMOS CUT-OFF
p1 5V
0V 2.5V
5V VGSNMOS = 5V > Vtn1 VGSNMOS = 5V > Vtn2
n2
n1
VGDNMOS = 5V > Vtn1 VGDNMOS = 2.5V > Vtn2
NMOS Linear NMOS Linear
Assume Vtn1 = Vtn2 = Vtn3 = 0.5V and Vtn4 = 0.8V Assume Vtn1 = Vtn2 = Vtn3 = 0.5V and Vtn4 = 0.8V
Vtp1 = Vtp2 = Vtp3 = -0.6V and Vtp4 = -1V Vtp1 = Vtp2 = Vtp3 = -0.6V and Vtp4 = -1V
EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN EEE 414/514 Introduction to CMOS VLSI Design VOLKAN KURSUN