Digrtod VUSt Coremt 3, EC- 60204 f
Metal oxide Semitonductey_ (mos) $ Gructarve
Be Ne (que vellege ) Soe errs i> metal gate electrode
Ti) Unsubing onvtle’ C5iQg) dower, iindd b-Kype 4udld Semmogrdactav
an (Sikegn)? enlled ees gee te we
a + Capi Librriom eaneertrotion mobile cakes in a Smrdendnctov
obeys Mass Action Laws given 4, Nps ve
(ng tre cab tore 44, which is a fmelion of temper)
= ‘ At vom tenperelewe, (T= Z00K), 1 = 45 xi0'° “ews
clot Vo Coubstrote voltse )) Typ 2 mobAe eedser done of electvo & tes Porpeckvely,
Fy: Kore feumenod, Mos stvmetere | + Assnming suudtivele 1s wr fovmbye detped wibik acc: (0-5. Bovorn) cone 9
Ny> ysrtibeinn election Grd de tre® mp tyfe Swhotrate (hulle) oe
5 16
Rye He. eyo= Na Woe Ng: 107% 10 m3 ie, Ny >
alle electron 4 pole pe oh ce gp fro ponsfece (where yudrtirete & onde Ggelomect)
ae on Ks eae oe ere Fe wala UGE chore Kon oP MOS Sytem
Eo Eo: free space Crmeuum enciyy) level . Bondgop Aet® Kan tard (bz) ttn andl
a rvolence Sed CB) top fr sikeon rs 11 eV
Ee terdaction lard eles Lotalon of egpikebtinm Feven’ level Be: depends on
Foe oe Bye ben tatimsve encigy devel Lape of dope and dobry core? i itn Sedat
e — tithe tered fms ik ty OP inp sity)
Fig: energy Lind Aiagiom off et i) /t
* tthe siKen sult vate + For a prtybe semitandluctor, Fewmi -poléntial is afpreninated
© By = Tin 5 while for an nk :
uth 0 dare cone™ Ny) Fermi pce Bian ae n~kype semieorductav Cdetpael
ces, Manes rey See tae ti apices Fn de ( chele Boltzrann’s conrtink
Reem potential ss tue Cpritiee) ne Ld — ve (negative +t et eocoaloe
« Geckim affinity of site’ ‘olambal daifperence Lt i ry od nate Pe at ax
+ Werk fomuion energy Texfuired doy am elecivm 46 move fvonr Foun {evel inte free space, ancl 15 given
wp” Abs= ah + CE_-Ee) jFer (38
| * Consvded that the three oe
Mos struckove: Ceantd.
Semiconolucker (5) | % tha tdeal Ma syatem, mre Hoght
Digital Vest Cu-venits
oxide
€ Metal cal)
‘4 | ete phyptenl amkack.
= 41SeV 1 AS Al han Guer work £? Gr ley
E, Ahan p- porwicerductor (4'9 eV), checkrons
‘fe tend 45 fon from Ryhor onenapy stiles
Beodgeh energy Ey= chev |] tn -mekah 46 ter energy stake
Tat i! > tetemiemduotav, Change os
Stored on Atte sides of Ke \nsulekov om
é | a wwtlege drop occurs aevoss tt, Metal ss
Figs Energy Bard Of syolaled comprents Hag | 0% & tie (tive) potential writ. posder.
& | Rosy os sons
mate ely | istefas, Cnrks ek. By Ale belt ve vednsed et
eas Are ae (oxiie-semi dnterfece), - electwon robe lesen oar
ont,
Pn Produk constamt. This eases ens
e Sy eee door CE, on Ee) on He Semitenclactey tle,
‘| ze BU ete in Work oe of motel £ demn’ardnrtor
cAeatey a drop oreross the Mos syalen .
Wiad Salli Tanne etal ok affected. Hoy bond, temding.
Fig! Energy bird dingham of Ke tombined MO Flok- band volte: consider a mos structive made of
a ee bien) ae | ie dohek si ete Sidg Layeh and. a meal (AL) gate
Egpch: diem Fermi Fol CS tabativele Abe, = ORV Colenlal® ty omcdt-tin pobertiok
GX eAISev, & werk Ph for dobed Sis QA = 4X4 E-Ep
rence peness We 2optam
ay for sition, alee afm
+ .-€, 2 hy hosrto = 42eV
Me
fs:
So, Amt in bakerTal difference, ABE RR TT Sey ual ie
ee al tan tte bin$p eo N
+ If & wage sors de Ais pdt abpled encterrally lot sales sabkente, energy bonds
flak” — Coorpemsedang amd trending. ak 4h Surface) ee ;
: ne beh loge Yves 4 bb, = OB y Lie abply mepetioe pot. off -0°8V AF molal, side
Tatro/z_|
wiv.E. p-seAecumulasken (Mego) #
Gi sotiodl one ocd “Seay
a poet
Deleteror (a>). Gro?
Digitod Vist Crrreuits
MOS System under Exterml Bios
fa Assume sudatrake villoge Vy =0
ag 4 aS welts, Sean mes wt
doroum % Sen'- oxide, Cerne, ail
ett wah coe
Atom
core mesh SMCs | EN en) elle crits seem
canes) [elon on AKG Surface
leek 4) 2 is dvected tewid gole electrode
Eo ee dewers elect witoke pe
ed He
+ inerremental chaps onee :
Thus, dep of
wnge ders?
ve elke
jaswie
Jelaige fe semmconchactong
EV Egan Mite okwe Epp (Ferm
Poisson's ea : Hh. 6, 5 abe Bx 2 he
depletion regia. a AGH tee = edo
Abe deleting vey
mE Creag) = - 9
‘elector engier tn metel
50,
opty GNq ements
Uke oxide electre field (lx) % Hinceted | tenmrsly the Subrtvnle
Tarroneed (por ira ge pean Se seclins ana
eran Be orekal Ee ges be creat poo'Gon Ej
: Y, Pago mere (Ades) He pel
ae 4a Ne re diag) , Leow
Ge eas “heal, let SE aceytr fons oth
be ty cilee | rates oy of depletion worm
4 ite (Nj? er ae
or otha 26; Be
PE Tate bt
Fermi devel formelel
badd ih, semtembeneled) Ay
deme)
m4
“ Stef AMA deeDipl Vest Crremts Ee~ 602%
Tnvewsren (Nara) (large? ¢ WiK Parthia mevenne oo posifive ie.
* an gre Ber , election os
>o( Mell pei at decy Ke
i oO 4 Spite Jac din Palen. Deven
mrp ne yy of eneigy herd Aermsde motel ws creases
Pee cenree tee | pean “Ak Ke Surfce, paitive surfece
deletion a A potential. Wher o.= —\t, tive
ie Fs We & Raa ts el, Sere
Sullbtvole inversion ocemrs ory, of webite
ages Eom Re electra teemes door uh
= ‘e Arsles (in ovvgerad cleat vate
Fig: Seer pedrore| Kes and oety shod degra Vode p Ves rceiar & Eee ote
& Mos strackwe om SubPece Vernon - 846, Harpe on snafnce poerbol > Hs
me eye cnc y Mh threshold voltage -
region i fs
Vewersron. THis comseg traotsrrmmn depts doplbnn
Lem = joerc rit [ae Je Cher es js ate posubtinte)
Fete mevenre wr fb ies reas adh Ge
aon eas vellige he = NOs ae (brih se ond
soe 4" defor ee Pine ilonphg oo Ape snesce or dain), ww AK no
Theresheld weltage 2 ftlomns Hoye Aevorhdld rolkoge ae hentifed:
Note. Vro S tevesheld wrllage rr Veg 20 (sovree ord tod sheng ot some piténtial)
> Work fee difference ‘other grle, ond sudotiole
iS gabe rabkoge eomporent # sordece peerkiel ty —Rh,
ip re ae Te epfek: ike. deflaren age ckeipe
ae offre fixed fer'bve (Nat toma) Charger om
) oe a L
gre cade ond
Joule inkefaceGe beam, Diytal MST Covent |
Threshdd velroge (contd,) Ae ene,
D work function dfpererce ee Crndieaten role pttertel differ % ytem )
Boe= Festa Comateate = %" Gu Car oot = Feng 49 ~ Chea &) Poe fpr)
Oy Bae era 8, (eshne ot Fermi petenfal of p-subotrake
Fe eg Fm: Meaty tpn HG)
aha ec eeee ace Be swifece
ji enlneely UMted pile covelige se erate, Sevens PGT) 2 oe
fpiterbiok” by hey 1s ont loft) aeletion repr
i eet ee oe 5 Oe = JRE Me G1-Ael
0 inl ie ee oe arpa tit
Nee : Vee a sale Qe = —J% Ma &, [—abe + Vs! :
° Agi [where Con= Peay
BD 50, gate wlkize obrent offpacllig dep vf em cheye Fe igg Se
. de cal phermenn: fined prrbive charge density gay ak mtarfece Aelteor gale
WD ree ee - f : Lh
gnile Bs swdrrkrabe de simpunKen ord fr Aedice \mperfethonns of mtd oo
Gee galen wrllape seprerern tities, Me oe al intayface “>
+ tonbing, fr omcbret , Ny? Pye" 4p ~ 880 — Sox
Fos, ronyete Subativale thin (Vig #0) dap bone tote te tage
Np = Ge 74, ~ 83 — box
‘fo en es a5 - gf = Mele = Matas I,
fee = _ ORG f Par on - FR ei ae
% “pt Mp 7 EPEC - agri} “9 “arnt
ye WANA Es
i Cox
Mmos/3,EL Goa Digital UST Gimmie
ft
Ve = Veo + 7 ( Ira, 1 el - are 7) Thoeakdd vllage explonin
ye ips: Be a agen ne Dx me chommek nel Meas tee However, sor
on cae wenk —polerhier nn:
pened a nee farm’ $e Ue F mnegebive om mMos Sole ed Toe sh pmar xotov
depen vepien espe dentin &
negetive 005, ie we Ome
nan owe. a Werece pn NMOS eee = ome,
der Meo: pene tn NMS, wen
vltege F heaees tpe ames Ames parittve, ae apse fe Bo MosFET, cm
Las teon mech. Mos x islav wt follow
i i, Np = 2x10 ome’ C o
KR (gate onde? , Nox © 4x10! aw (oxide -
sda; Fermi te fe pose: oh Goat) =F bnlRE) = O86 ve tol SEY foe Bis x6 ™ E/ein. *
fo, pce a Ph are a Peer (SEE) = -0-35v S
ae ae nergy btn ds ~ polypchiter net ser terol
cea eater holes He Les zt Ib FS a tp tly gale,
ininghere » Ae G3 oe
Wok pe uppers ee
ere
2 = ip ese sna cee
arn. soir te g fo - pen)
a tae Ey na tol
oe.
BxvExIT x Tae n ee BBS XI Mx 124 O78!
Ae -8
= tml ‘ = BAX 10
vibe inbeaface thange > Qo 2 (My = rex? fone ay 107)
Gale rene capautiarce ph weit aden > Cox = eT "3-97x8-3. pai" ¢h Coa ie Le i 3 fens
arehteg Ake fos comprents, Abrerhed Foox 10~
Vo = See - 2$p Conk) — Spe — Box a 2h tan c-035D-(- ~hp2x0. ne ele
e612
pen Fosxioe
9 FOF + 069 -0-09 = O”
Mm.; Digital VLAT Crrenis FC, 60204
Addgustinge threshold voltege ty selective depant sim timplentation
a ptiace ne, = i % eresaed (made oy addury extra
Se ee eee epi Reaber 2 oppo ot te for 4 ch
ee eee at 96 pote (yete) mot prone ppertive cheipe . Je, th a
crt tee A Lg ile af mtemnel ted oes deemed (ede ros
i , 7 te Vinnposslion (dere sons) ints’ chanel vein. rn
ff com 4e
nepebve) imploring
cn thresh wilkepe 9 * Aer cake ee
ent, ee: Ue Re dene Split phere Nr Cing/ent) . |
Assume ol inplantad tina tnbrilmle 1 46 depkehinnw ee charge. Ten, Nop Gu gee)
eel ae f tM lox. TRE niont — neplect mmmiaton of |
__swhatvrbe Fem: potertioh Oe an a demit of ertkim theplenk-
x: For & p-ehennel Mas, Vyz "IBV. Determ
an plankakion, "han ee needed te cahiees bh Shot ont z
Channel lon
oxide copontente per wit” aves 2 ae £4 od FfewS. 6
Gir Te etme Me frm a len eae ore ter gue mpeta Ta Uroppatitas
Q meee el ngitn Oa L BN get) pated.
oh
TE postiweby chaiged dewor
Soe tg Se the tei aon
‘ net ; ue
ae ne cae actne, ie tach Vor eaterbntes "K the depletion vey
fpaeh | oe
Ve Bar oy ae tye eet AVro = 4x0 8x pAt0) = Q34X 10" lors/or®
Avr = = 2 ON wo? a
%
Depletion type (noverally on) n= Channel MULT : Yo *f ws ero
7 a annel eaitz er nth OE flier, Sverel prasad ste,
des a mos dignted eirronrts. a tes rg
ts alia ara
Ep tabact wits Nin The eon z
Wee ee arent syrbl fom-etienel deflehon type masters
Thdhgkeh — hyen™ ‘gaan, | Veg20 th mat prove .
Te we Meee effet ae "ty Pratage of
Digitol Vist, Crrveuty — Fe~ 0204 1
consis *K nechansel MOsceT picem we fame seen earber, Tin veus'nn
Mos Crenmotor 2
+ WOK Nye elo 3, Cox = Fron x lo’ glk the Aeely
Suletmte Anu Veg Cv) oc ps
mos /Digitod Nusa Gives Ge- 60204
Whernel Leng Mondor (oe wos Ganadtoe)
*
“ps
| Gow vs= Vosar)_! Dp Ge) = Age wu is
Ea, a Nd cu eae
Sepmenk See theron charge)
depletion th
sa ie 7 Ly lok) = b past ss (Mes- ays
a
ea tees on WY was
= (< = Ors * ‘e)
A, Tylon s a faGt ET Cos” re 3
7 aa ~~ aasliel this Cemmn
TD 3 : Ab sham ee effect Us eee : ea .
eee ee tan emcees Npsat = NGS” To an
| ye OI | ler ee ee ee Peo
(Ee A Ca Nellge dante seve anrel Mor er yr
Aeeod sypoun een Aig cretion depletion vege AL Ike dine’ ond
tnd Ke akdsGronel hie we Nps —Ypsar AK whollemenrgy (06 decrsere ) Sp He charred
Note et Me wilt of thin deflotion vepor > ne (da, alps dent o> Pobyfe Sotele,,
wl, » ALe Sa Cth Stow ia oe (ARDY?
if Ny, Ke Nes “psar, Aen AL OC a sar au mee oe
atic ates &e even noes, enprwal vwleie- 4% 0 Vy, vt, 2b.
o- ae eS tie channel ete soda lon nih
$0 tek \~ BE 1 Ds
Abenty (Nese Lo ta = sams =0->™ e = 1460 (-M%,) + ODE Pos)
F1+2% Cheol, @ rfensin)
“ Tp (set) = 2 Ange Os: Ney (Nps) ee ee
Wos/t