MICRO FABRICATION IN MANUFACTURING SYSTEM

SEMINAR REPORT

submitted
in partial fulfillment of the requirements

for the award of the degree of

Bachelor of Technology
in
MECHANICAL ENGINEERING
of
APJ Abdul Kalam Technological University

Thiruvananthapuram-Kerala
by

ATLIN PINHEIRO
Reg. No: AIK21ME021

DEPARTMENT OF MECHANICAL ENGINEERING

Albertian Institute of Science and Technology (AISAT)

Kalamassery –Kochi 682022

2021-2025
 Vision

To be a Centre of excellence for professional education and related services

creating technically competent and ethically strong innovative minds committed
to the growth of the nation and beyond.

Mission

 We are committed to provide value based education with ample opportunities

for research and industry institution interaction.
 We take every possible step to enhance the skills and bring out quality
professionals, providing a friendly and growth oriented ambience with
appropriate resources.
 We improve ourselves through continuous evaluation and updation to meet the
challenges and requirements of the modern society.

Motto

We make Engineers, not just Engineering Graduates

 PROGRAM OUTCOMES (POs)

At the end of the program, graduate engineers will be able to:

PO1-Engineering Knowledge: Apply the knowledge of mathematics, science, engineering

fundamentals and an engineering specialization for the solution of complex engineering
problems.
PO2-Problem Analysis: Identify, review research literature, formulate and analyze complex
engineering problems, thereby arrive at substantiated conclusions using first principles of
mathematics, natural sciences and engineering.
PO3-Design/Development of Solutions: Design solutions for complex engineering problems
and design system components or processes that meet the specified needs with appropriate
consideration for public health and safety, and cultural, societal, and environment
considerations.
PO4-Conduct investigations of complex problems: Use research based knowledge and
research methods including design of experiments, analysis and interpretation of data, and
synthesis of the information to provide valid conclusions.
PO5-Modern tool usage: Create, select and apply appropriate techniques, resources, and
modern engineering and IT tools, including prediction and modeling to complex engineering
activities with an understanding of the limitations.
PO6-The Engineer and Society: Apply reasoning informed by contextual knowledge to
assess societal health, safety, legal and cultural issues and the consequent responsibilities
relevant to the professional engineering practice.
PO7-Environment and sustainability: Understand the impact of the professional engineering
solutions in societal and environmental contexts, and demonstrate the knowledge of, and need
for sustainable development.
PO8-Ethics: Apply ethical principles and commit to professional ethics and responsibilities
and norms of the engineering practice.
PO9-Individual and teamwork: function effectively as an individual, and a member in
diverse teams and in multi-disciplinary settings.
PO10-Communication: Communicate effectively on complex engineering activities with the
engineering community and with the society at large, such as, being able to comprehend and
write effective reports and design documentation, make effective presentations, and give and
receive clear instructions.
PO11-Project management and finance: Demonstrate knowledge and understanding of the
engineering and management principles and apply these to one’s own work, as a member or
leader in a team, to manage projects, and in multidisciplinary environments.
PO12-Lifelong learning: Recognize the need for, and have the preparation and ability to
engage in independent and lifelong learning in the broadest context of technological
knowledge.
 PROGRAM SPECIFIC OUTCOMES (PSOs)

Graduates of Mechanical Engineering will be able to:

PSO1: Demonstrate the knowledge of concurrent technologies to solve the practical problems
using principles of sustainable development

PSO2: Manage engineering projects as a professional team with ethical attitude by applying
principles of scientific management

PSO3: Apply principles of mathematics, science and engineering to design and analyze multi-
disciplinary systems.
 PROGRAM EDUCATIONAL OUTCOMES (PEOs)

Graduates of Mechanical Engineering shall:

PEO1: Pursue a professional career with high credentials and social commitment.

PEO2: Adapt to rapid technological changes in core domain knowledge, through life long learning.

PEO3: Convey and convince innovative ideas through good communication and execute it through
team work
 COURSE OUTCOMES (COs)

After the completion of the course the student will be able to:

CO1: Identify academic documents from the literature which are related to her/his areas of
interest.

CO2: Read and apprehend an academic document from the literature which is related to her/his
areas of interest.

CO3: Prepare a presentation about an academic document.

CO4: Give a presentation about an academic document.

CO5: Prepare a technical report.

CO-PO-PSO Mapping Matrix

PO/ PO PO PO PO PO PO PO PO PO PO PO PO PSO PSO PSO

CO 1 2 3 4 5 6 7 8 9 10 11 12 1 2 3
CO1 M M L L M L H H H H

CO2 H H M H M L M H

CO3 H M H L M M H

CO4 H M L H H H H H

CO5 H H H H M M M L H H

Attainment levels:
L : Slight Relevance
M: Moderate Relevance
H : Substantial Relevance
 UNDERTAKING

I declare that the work presented in this seminar titled “Micro Fabrication in Manufacturing Systems

” Submitted to the Department of Mechanical Engineering, Albertian Institute of Science and

Technology (AISAT), Kalamassery, Kochi for the award of the Bachelor of Technology degree in

Mechanical Engineering, is my original work. I have not plagiarized or submitted the same work

for the award of any other degree. In case this undertaking is found incorrect, I accept that my

degree may be unconditionally withdrawn.

Date: 07.10.2024 ATLIN PINHEIRO

Place: Kalamassery Reg. No: AIK21ME021
Certified that the work contained in the seminar titled “Micro Fabrication in Manufacturing Systems

”, by ATLIN PINHEIRO (AIK21ME021), has been carried out under my supervision and that
this work has not been submitted elsewhere for a degree.

Signature of Guide Signature of HOD

Prof. Dr. Ramadas T Prof. Dr. Ramadas T

Assoc. Professor & Seminar Guide Assoc. Professor & HOD
Dept. of Mechanical Engineering Dept. of Mechanical Engineering

Approval & Evaluation

Presented for the B.Tech Semester VII Seminar Evaluation held on 05/10/2024
 Evaluation Committee

1. Prof. Dr. Ramadas T, Associate Professor & HOD. …………………………………….

2. Prof. Jose V Mathew, Associate Professor & Director, P&T Cell…………………

.
3. Prof. Arun V, Associate Professor, Seminar Coordinator.……………

4. Prof. Nisha B Nair , Assistant Professor, Seminar Coordinator..……………….

ACKNOWLEDGEMENT
With great pleasure I take this opportunity to express my heartfelt gratitude to all people who
helped in making this seminar work a grand success. First of all, I thank God Almighty for
giving strength, courage and blessings to complete this work. I am also thankful to the
Management, Principal Prof. Dr. Veena V, Albertian Institute of Science and Technology for
giving me an opportunity for doing this seminar.

I am very much thankful to my guide, Prof. Dr. Ramadas T, HOD & Assoc. Professor,
Mechanical Engineering Department, for his valuable guidance, keen interest and
encouragement at various stages without which my seminar would not be a success.

I acknowledge with thanks the loving inspiration of the faculty members of the department
Prof. Jose V. Mathew, Prof. Arun V, Prof. Nisha B Nair and all other faculty members from
Mechanical Engineering Department for their support.

Place: Kalamassery
Date: 07.10.2024 ATLIN PINHEIRO
 ABSTRACT

Microfabrication is a pivotal technology in modern manufacturing systems, enabling the creation of

miniature structures and devices with unprecedented precision and accuracy. By leveraging techniques
such as lithography, etching, deposition, and micromachining, microfabrication facilitates the
production of complex components and systems with feature sizes measured in micrometers or smaller.
This technology has far-reaching implications across various industries, including biomedical devices,
optoelectronics, and microelectromechanical systems (MEMS). Microfabrication enhances product
performance, reduces material waste, and unlocks new design possibilities. However, it also presents
challenges like high equipment costs, intricate process control, and material limitations. As
microfabrication continues to advance, it is poised to revolutionize manufacturing by enabling the mass
production of innovative, high-performance products with unique properties. By harnessing the power
of microfabrication, industries can unlock new possibilities, drive innovation, and stay competitive in
an increasingly demanding market.

Keywords: Photolithography, Etching, Deposition, MEMS, Micro-manufacturing, Nanotechnology

 CONTENTS

Sl.No Content Page. No

1 Introduction 1

1.1 BACKGROUND

1.2 MOTIVATION

1.3 OBJECTIVES
2 Literature Survey 3
3 Fabrication of Materials 5

3.1.1 METAMATERIAL ANTENNAS

3.1.2 SUPER LENS
3.1.3 CLOAKING DEVICES
3.1.4 ABSORBER
3.1.5 SOUND FILTERING
3.1.6 INVISIBLE SUBMARINES
3.1.7 MEDICAL FIELD
3.2 FUTURE DIRECTION CHALLENGES
AND OPPORTUNITIES

4 CYBER PHYSICAL SYSTEM 14

5 Integration In Cyber Physical System With 15
Metamaterials
6 Multifunctional Metamaterials And Their 17
Integration In Cyber-Physical Systems For
Next-Generation Mechanical Engineering
Applications

7 META AIR AVIATION EYEWEAR OR 19

LASER GLARE PROTECTION
 CONTENTS

7.1 Holographic Lenses

7.2 Solutions to Global Problems

8 CONCLUSION 21
9 REFERENCES 22
 LIST OF FIGURES

Fig No. Name Page No.

1 NEGATIVE REFRACTIVE INDEX 1

2 META AIR GLASSES 19

Micro Fabrication in Manufacturing Systems

CHAPTER 1
INTRODUCTION

Micro fabrication is a technology focused on the creation of highly precise and intricate
structures at micro and nanoscale dimensions. Typically measured in micrometers (µm) or even
nanometers (nm), micro fabrication allows for the development of components with features far
smaller than what is achievable through conventional manufacturing processes. This technology is
instrumental in the production of various microelectronic, photonic, and biomedical devices, which
have become critical across numerous fields, from consumer electronics and medical diagnostics to
aerospace and energy systems.

The micro fabrication process encompasses several advanced techniques, including

photolithography, etching, deposition, and micromachining, each of which enables precise control
over material and structure dimensions at a microscopic scale. Due to this high level of precision,
micro fabrication contributes to increased functionality, reduced material usage, and enhanced
performance of devices, supporting the growing demand for miniaturized and highly efficient
systems.

In manufacturing, micro fabrication enables the integration of micro-scale components into larger
systems, enhancing the capabilities and performance of a wide range of products. This report delves
into the principles of micro fabrication, explores the key techniques involved, and examines its
application within modern manufacturing systems.

AISAT Kalamassery 1 Dept. of Mechanical Engineering

Micro Fabrication in Manufacturing Systems
.

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Micro Fabrication in Manufacturing Systems

CHAPTER 2
OVERVIEW

Microfabrication, the process of fabricating miniature structures at micro and even nano scales,
is a cornerstone of modern manufacturing systems. Leveraging cutting-edge technology, it enables the
creation of components with intricate details, meeting the growing demands for precision,
miniaturization, and efficiency across various industries. The following key aspects highlight why
microfabrication has become indispensable in manufacturing:

1. Miniaturization
As industries strive to create smaller, more portable devices, microfabrication plays a crucial
role by producing highly compact, lightweight components. This trend towards miniaturization has
been a game-changer in sectors like electronics, where smaller chips and circuits enhance device
functionality while reducing size and weight.

2. Precision
The manufacturing world relies on microfabrication to produce parts with exceptional accuracy
and minimal error margins. This precision is essential in applications like medical devices,
microelectromechanical systems (MEMS), and semiconductor production, where even the slightest
deviation can compromise product functionality or safety.

3. Material Efficiency
Microfabrication techniques, such as photolithography and etching, allow for selective use of
materials, thereby minimizing waste. Material efficiency contributes to sustainability, reducing
resource consumption, lowering costs, and aligning with eco-friendly manufacturing practices that
prioritize sustainable design and production.

4. Innovation
Microfabrication fuels continuous innovation, particularly in high-tech industries. For instance,
in electronics, it allows for the development of powerful yet compact chips; in healthcare, it enables
minimally invasive tools and drug delivery systems; in automotive and aerospace, it facilitates the
creation of lightweight, high-performance parts. Each advancement in microfabrication opens new
possibilities, propelling industries forward with smarter, more capable devices.
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Micro Fabrication in Manufacturing Systems
By fostering miniaturization, precision, material efficiency, and innovation, microfabrication has
become integral to modern manufacturing systems. It not only drives technological advancements
but also meets the evolving demands for high-quality, sustainable, and innovative products across
diverse sectors.

AISAT Kalamassery 4 Dept. of Mechanical Engineering

Micro Fabrication in Manufacturing Systems

CHAPTER 3
MATERIALS FOR MICRO FABRICATION

Microfabrication plays a crucial role in modern manufacturing systems by enabling the

production of miniature devices and components with high precision. This technology has applications
across various fields, including electronics, biotechnology, and engineering, thanks to its ability to
create micro-scale structures that are essential in today’s advanced devices. Here, we discuss the
primary materials used in microfabrication, their unique properties, and their applications.

1. Silicon

Silicon is the most widely used material in microfabrication due to its excellent mechanical
properties, versatility, and compatibility with semiconductor manufacturing processes. Silicon wafers
provide a strong and stable substrate, essential for creating micro-scale devices, especially in electronic
applications.

- Properties: High mechanical strength, excellent thermal stability, and compatibility with cleanroom
processing techniques.
- Semiconductors: Silicon is the base material for integrated circuits (ICs), including transistors,
diodes, and sensors.
- Micro-electromechanical Systems (MEMS): Silicon serves as the substrate for various MEMS
devices like accelerometers, gyroscopes, and pressure sensors.
- Optical Devices: Silicon can be used for optical devices in silicon photonics due to its refractive
properties.

2. Polymers

Polymers offer unique advantages in microfabrication due to their flexibility, lightweight, and
potential for biocompatibility, making them suitable for applications in biomedical devices and other
flexible systems. Polymer-based microfabrication is also advantageous in applications where mass
production and cost-effectiveness are required.

- Properties: Lightweight, flexible, biocompatible, and moldable at low temperatures.

- Microfluidic Devices: Polymers like polydimethylsiloxane (PDMS) are widely used in lab-on-chip
systems, which are essential for handling and analyzing small fluid volumes in medical diagnostics and
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Micro Fabrication in Manufacturing Systems
chemical analysis.
- Biomedical Sensors: Flexible polymers are employed in wearable devices, including biosensors for
monitoring physiological parameters.
- Micro-Optics: Transparent polymers, like polymethyl methacrylate (PMMA), are used in micro-
optics for lenses, waveguides, and other optical components.

3. Metals

Metals are integral to microfabrication because of their high electrical and thermal conductivity,
making them essential in applications requiring conductive pathways or robust structural elements.
Metals like gold, copper, and aluminum are frequently used for various MEMS applications and other
microfabricated devices.

- Properties: Excellent electrical and thermal conductivity, high durability, and malleability for thin
film deposition.
- Electrical Contacts: Metals are used for creating interconnections in electronic circuits and MEMS
devices, ensuring reliable signal transmission.
- Conductive Layers: Metal layers in microfabricated systems enhance conductivity, essential in
devices like micro-batteries, sensors, and actuators.
- Mechanical Components: Metals are also employed for mechanical components in MEMS,
including springs, hinges, and other support structures that demand strength and conductivity.

The choice of materials in microfabrication is crucial for determining the performance and applicability
of micro-scale devices. Silicon, polymers, and metals each bring distinct advantages that allow
microfabrication to serve diverse industries, including electronics, biotechnology, and photonics. As
microfabrication techniques continue to advance, these materials will likely play increasingly pivotal
roles in developing new, innovative systems.

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Micro Fabrication in Manufacturing Systems

CHAPTER 4
MICRO-ELECTROMECHANICAL SYSTEMS (MEMS)

Micro-Electromechanical Systems (MEMS) are integrated miniaturized mechanical and

electrical devices, performing complex functions in sensing, actuation, and signal processing at a
microscale. By incorporating both micro-scale mechanical components and microelectronics, MEMS
technology allows for versatile applications across various industries. Key uses range from
smartphones to automotive safety systems, medical monitoring devices, and navigation tools, reflecting
MEMS' transformative role in modern technology.

4.1 Components of MEMS Devices

MEMS devices are generally structured around three primary components, each contributing to the
overall system’s capability to sense, process, and act upon its environment:

 Micro-Sensors: MEMS sensors detect environmental, chemical, or biological changes. Specific

sensors include:
o Accelerometers: Measure acceleration, with applications in smartphones, automotive
airbags, and wearables.
o Gyroscopes: Measure angular velocity, used in navigation systems and stability control.
o Pressure Sensors: Measure pressure in gases or fluids, essential in automotive,
industrial, and medical systems.
o Microphones: Detect and convert sound waves to electrical signals, commonly used in
audio applications.
 Micro-Actuators: Micro-actuators convert electrical signals into mechanical motion, enabling
functions like micro-valves in fluid control or micro-motors in miniaturized mechanical
systems.
 Microelectronics: Microelectronics are essential for processing signals received from sensors
and controlling the response actions of actuators. Integrated circuits in MEMS are designed to
efficiently interpret sensor data, providing precise control over actuators to perform specific
actions.

4.2 Applications of MEMS Technology

MEMS technology spans numerous applications, leveraging its small scale, efficiency, and low cost
to serve various sectors:
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Micro Fabrication in Manufacturing Systems
 Consumer Electronics: In smartphones and wearables, MEMS accelerometers, gyroscopes,
and microphones are integrated for motion sensing, gesture control, and audio recording.
 Automotive Safety: MEMS accelerometers in airbag deployment systems detect rapid
deceleration or collision, immediately triggering airbag release.
 Medical Devices: Implantable MEMS sensors monitor critical vital signs, including glucose
levels, blood pressure, and heart rate, enabling real-time patient monitoring and management.
 Aerospace Navigation and Stability: MEMS inertial sensors, such as accelerometers and
gyroscopes, support aircraft and spacecraft navigation systems, crucial for attitude control and
stability in high-dynamic environments.
 Predictive Maintenance in Industrial Equipment: MEMS sensors monitor vibrations in
machinery, allowing for early detection of anomalies and preventive maintenance before
breakdowns occur.

4.3Advantages of MEMS in Manufacturing Systems

MEMS technology provides several distinct advantages that make it highly effective in advanced
manufacturing:

 Miniaturization: The extremely small size of MEMS devices enables them to be integrated
into compact systems and designs where space is a constraint.
 High Performance and Sensitivity: MEMS sensors and actuators offer high sensitivity and
accuracy, critical for tasks requiring precision, such as medical monitoring or aerospace
navigation.
 Low Power Consumption: MEMS devices consume minimal power, making them ideal for
battery-powered applications, such as wearable technology and implantable medical devices.
 Cost-Effective Mass Production: MEMS devices are manufactured using semiconductor
fabrication techniques similar to those used in electronics manufacturing. This enables large-
scale production, reducing unit costs and supporting affordable high-volume applications.

AISAT Kalamassery 8 Dept. of Mechanical Engineering

Micro Fabrication in Manufacturing Systems

CHAPTER 5

CHALLENGES IN MEMS FABRICATION

MEMS fabrication presents unique challenges due to the integration of complex functions, the
need for durability in varying environmental conditions, and the demand for high reliability in
performance. The primary challenges in MEMS fabrication are design complexity, packaging, and
reliability, each of which is explored in detail below.

5.1 Design Complexity

MEMS devices often integrate multiple functions, such as sensing, actuation, and signal processing,
into a single compact structure. This multifunctionality presents several challenges:

 Multidisciplinary Integration: MEMS design requires expertise in various fields, including

electrical engineering, mechanical engineering, materials science, and chemical engineering.
Bringing together these disciplines to create a single, cohesive device is a complex task.
 Microscale Constraints: The miniature size of MEMS components means that even small
design errors can result in significant performance issues. Precision is crucial, as microscale
fabrication leaves little margin for error.
 Material Selection: Different materials are often required for different functions within a
MEMS device. Selecting materials that can work synergistically in terms of electrical
conductivity, mechanical stability, and thermal properties is challenging. Furthermore, materials
need to be compatible with fabrication processes like etching, deposition, and lithography.
 Energy Consumption: MEMS devices often operate with limited power sources, particularly
in portable applications. Designing energy-efficient MEMS devices that can perform complex
tasks without consuming excessive power is a critical design challenge.
 Modeling and Simulation Limitations: Accurate modeling of MEMS devices is difficult due
to the interactions between different physical domains (electrical, thermal, mechanical).
Simulation tools have made progress, but predicting real-world behavior remains a challenge
due to complexities in modeling material behaviors at the microscale.

5.1.1 Potential Solutions for Design Complexity

To address design complexity, new approaches such as multi-physics simulation tools, machine
learning for predictive modeling, and advanced CAD software are being explored. Collaborative,

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Micro Fabrication in Manufacturing Systems
interdisciplinary teams are also essential to successfully integrate the necessary expertise from multiple
domains.

5.2 Packaging

Packaging MEMS devices is crucial to protect them from environmental factors that can degrade
their performance. However, packaging MEMS devices poses its own unique challenges:

 Fragility of MEMS Components: MEMS components are typically small and delicate,
making them susceptible to damage during handling and packaging. They are vulnerable to
shocks, vibrations, and bending forces, which necessitates careful packaging designs that
protect without compromising functionality.
 Environmental Protection: MEMS devices are often exposed to harsh environments with
moisture, dust, and temperature variations. A robust packaging solution must shield MEMS
components from these elements while allowing for signal transmission and maintaining
mechanical flexibility.
 Size Constraints: MEMS devices are typically intended for compact applications, so packaging
cannot be bulky. Developing small, lightweight, and resilient packaging solutions that do not
interfere with device performance is challenging.
 Thermal Management: Many MEMS applications generate heat, especially when integrated
with electronic components. Managing this heat is critical, as excessive temperatures can
damage MEMS structures or lead to changes in material properties, affecting device
performance.

5.2.1Potential Solutions for Packaging Challenges

Innovative packaging techniques, such as wafer-level packaging (WLP) and system-in-package

(SiP) approaches, are being used to reduce size and increase the robustness of MEMS devices.
Encapsulation methods using thin films and hermetic sealing processes are also being developed to
protect MEMS devices from environmental

5.3 Reliability

MEMS devices need to perform consistently over time, often under harsh operating conditions.
Ensuring their long-term reliability is a significant challenge:

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Micro Fabrication in Manufacturing Systems
 Environmental Factors: MEMS devices are often subjected to wide temperature ranges, high
humidity, and exposure to contaminants. These factors can lead to mechanical degradation,
material fatigue, or failure in MEMS structures.
 Mechanical Stress and Fatigue: MEMS components experience mechanical stresses due to
vibration, shock, and cyclical loading, which can lead to material fatigue over time. The
microscale nature of MEMS structures makes them especially susceptible to these forces.
 Material Degradation: MEMS materials, such as silicon, may degrade under prolonged
exposure to specific environmental conditions. The small feature sizes in MEMS devices make
them more susceptible to issues like oxidation and corrosion.
 Reliability Testing: Testing MEMS devices for reliability is challenging due to the difficulty in
simulating real-world operating conditions and the time-consuming nature of accelerated life
testing. Ensuring that testing methods can accurately predict a device’s reliability over its
expected lifetime is essential but challenging.

5.3.1Potential Solutions for Reliability Challenges

To improve MEMS reliability, researchers are investigating robust materials and protective
coatings that withstand environmental factors. Accelerated life testing and failure analysis
techniques are also being developed to better assess reliability under simulated real-world
conditions. Additionally, ongoing advancements in material sciences, such as the development of
temperature-resistant polymers, are contributing to enhanced MEMS durability.

AISAT Kalamassery 11 Dept. of Mechanical Engineering

Micro Fabrication in Manufacturing Systems

CHAPTER 6
IMPORTANCE OF QUALITY CONTROL IN MICRO
FABRICATION

Micro-fabrication is the process of designing and creating extremely small structures and
devices, often at the micro- and nanometer scales. This specialized manufacturing process plays a
critical role across various high-tech industries, including healthcare, aerospace, automotive, and
consumer electronics. The delicate nature of these devices, coupled with the need for exact dimensional
precision, makes quality control in micro-fabrication essential. Here are several key reasons why
quality control is indispensable to micro-fabrication, each highlighting the role it plays in enhancing the
efficiency, reliability, and overall performance of micro-manufactured devices.

6.1 Precision

In micro-fabrication, devices are often developed with features that are only a few micrometers
or nanometers in size. This level of precision is crucial for micro-electromechanical systems (MEMS),
micro-optics, and microfluidics, where even slight deviations can lead to malfunction or decreased
device performance. Quality control ensures that production processes remain within acceptable
tolerances, allowing micro-fabricated components to meet strict dimensional requirements. For
instance, a MEMS sensor might rely on sub-micrometer features for accurate sensing; any deviation
could distort data or compromise the device’s reliability. Thus, precision-driven quality control is vital
to ensure consistent accuracy at microscopic levels.

6.2 Yield Optimization

Yield optimization is a core objective in manufacturing, as higher yields translate into lower
costs and greater output. Quality control plays a critical role in yield optimization by ensuring that each
step in the fabrication process is stable and repeatable, minimizing the occurrence of defects and
maximizing the number of functional units produced per batch. In micro-fabrication, even minor
inconsistencies can cause significant yield loss due to the small size and complexity of the components.
For instance, in semiconductor manufacturing, a single contamination particle can destroy an entire
wafer of microchips. Quality control measures such as in-process inspections, defect monitoring, and
environmental controls help detect and correct issues before they escalate, thus reducing waste and
overall production costs.

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Micro Fabrication in Manufacturing Systems

6.3 Functionality

For micro-scale devices, achieving the intended functionality hinges on exact dimensional
accuracy and process integrity. Devices such as MEMS sensors, microfluidic chips, and micro-
electronics are often embedded in critical systems where their performance impacts the larger
application. For example, a microfluidic chip used in medical diagnostics requires precise channel
dimensions to control fluid flow accurately. Quality control measures ensure that the fabrication
process adheres to specifications, preventing variations that could impair device functionality.
Functional accuracy is particularly important in applications where micro-fabricated devices interact
with biological systems, as deviations can lead to inaccurate readings, potentially compromising patient
outcomes.

6.4 Product Lifespan

The durability and longevity of micro-fabricated devices are directly influenced by quality
control measures implemented during manufacturing. In industries such as healthcare, aerospace, and
automotive, where micro-devices are often subject to extreme conditions, consistent quality can
significantly extend a product’s lifespan. For example, in aerospace, where MEMS devices are used in
navigation and monitoring systems, even a minor defect can lead to failure under high-stress
conditions. Quality control practices, such as material inspection, environmental testing, and stress
analysis, are essential to ensure that each device can withstand the conditions it will face in the field.
By catching potential defects early, quality control not only improves device lifespan but also reduces
maintenance needs and replacement costs for end users.

Microfabrication, a vital component of modern manufacturing systems, involves creating intricate,

miniature structures on a microscopic scale, which is essential in fields like semiconductor
manufacturing, micro-electromechanical systems (MEMS), and biomedical devices. However, the
unique precision required in microfabrication brings significant challenges in quality control and
metrology, where achieving accurate measurements and defect identification is particularly complex.

AISAT Kalamassery 13 Dept. of Mechanical Engineering

Micro Fabrication in Manufacturing Systems

CHAPTER 7

CHALLENGES IN QUALITY CONTROL

One of the core issues in microfabrication quality control is maintaining precision amid the tiny
and complex features of micro-scale structures. Traditional metrology tools often fail to address issues
like surface roughness, dimensional tolerances, and micro-defects effectively because these tools lack
the resolution necessary to accurately measure nanoscale features. Micro-scale parts often undergo
deformation when contacted with probes, leading to inaccurate measurements. Advanced methods like
X-ray diffraction, atomic force microscopy, and optical profilometry are now utilized to achieve high-
resolution imaging, but these come with added complexity and higher costs.

Another challenge arises from the material variety in microfabrication, such as metals, ceramics, and
polymers, which react differently to probing forces and thermal effects during measurement. Each
material's specific characteristics—such as elasticity or plasticity—can distort measurements if not
accounted for correctly. This means that even slight contact can lead to compression, requiring
sophisticated calibration to mitigate measurement error.

7.1 Metrology Complications

For non-destructive quality assessment in microfabrication, ensuring accessibility to all

component surfaces is crucial. Micro components often include intricate inner surfaces, deep
trenches, and complex geometries that are challenging to reach with standard probes. Non-contact
optical methods like confocal microscopy can offer solutions but are also prone to limitations due to
light scattering and signal loss, particularly when working with high-aspect-ratio structures.
Additionally, issues like undercuts and reflective surfaces in microfabricated parts create difficulties
for optical methods, sometimes necessitating component destruction to achieve complete
metrological analysis.

7.2 Adapting Metrology for Microfabrication

To adapt to these challenges, microfabrication metrology is evolving with techniques such as

nano-scale surface roughness profiling and hybrid approaches combining multiple measurement
methods. For example, the use of micro-Raman spectroscopy alongside optical microscopy provides
detailed structural data without the need for direct contact. Advanced statistical methods, like the
process fingerprinting technique, help manufacturers track dimensional consistency across a
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Micro Fabrication in Manufacturing Systems
production batch, thus enhancing process reliability and control. This evolution in metrology is
helping address the challenge of detecting sub-micron defects, achieving consistent dimensional
accuracy, and effectively measuring surface quality, thereby supporting the intricate demands of
microfabrication.

In summary, quality control and metrology in microfabrication are progressing to keep up with the
rigorous standards required in micro-scale manufacturing. Although advancements in high-precision
and non-contact metrology offer promising solutions, the field must continue to innovate to meet the
demands of increasingly smaller and more complex micro-manufacturing technologies.

7.3 Applications of Micro Fabrication

1. Electronics Industry
The electronics sector is one of the most significant beneficiaries of micro fabrication. It
enables the production of microelectronic components, including transistors, capacitors, and
sensors. Techniques such as photolithography and etching are commonly employed to create
integrated circuits (ICs) and microprocessors, which are fundamental to modern computing
devices. The miniaturization of these components leads to the development of smaller, more
powerful, and energy-efficient electronic devices.
2. Biomedical Devices
Micro fabrication plays a crucial role in the development of biomedical devices, such as
microfluidic systems, biosensors, and implantable devices. These devices require precise
fabrication techniques to ensure functionality and reliability. For instance, microfluidic devices,
which manipulate small volumes of fluids, are essential in diagnostics and drug delivery
systems. The ability to create micro-scale structures enables researchers to develop innovative
medical solutions, leading to improved patient outcomes.
3. Automotive Industry
The automotive industry utilizes micro fabrication for the production of components such as
MEMS (Micro-Electro-Mechanical Systems) sensors and actuators. These devices are critical
for advanced driver-assistance systems (ADAS) and vehicle automation. By integrating
microfabricated sensors into vehicles, manufacturers can enhance safety features, improve fuel
efficiency, and enable connectivity.
4. Energy Sector
In the renewable energy sector, micro fabrication contributes to the production of solar cells and
fuel cells. The development of thin-film solar cells, which require precise layering of materials
at the micro scale, has led to more efficient energy conversion. Similarly, micro fabricated fuel

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cells, used in hydrogen power applications, benefit from the precision of these manufacturing
techniques, resulting in compact and efficient energy solutions.
5. Consumer Products
Micro fabrication techniques are increasingly used in the production of consumer products,
from smartphones to wearables. The trend toward miniaturization in consumer electronics
necessitates the use of micro fabrication to achieve compact designs without compromising
functionality. Products like smartwatches and fitness trackers incorporate micro fabricated
components, enabling features such as heart rate monitoring and GPS tracking in a small form
factor.

7.4 Advantages of Micro Fabrication

1. Precision and Accuracy

One of the primary advantages of micro fabrication is the ability to create structures with high
precision and accuracy. This level of control is essential for applications requiring tight
tolerances, such as in electronics and biomedical devices. High precision minimizes defects and
enhances the performance of the final product.
2. Miniaturization
Micro fabrication enables the production of smaller components, which is increasingly
important in many industries. The trend towards miniaturization leads to lighter and more
compact products, which can improve portability and reduce material costs. Miniaturization
also allows for the integration of multiple functions into a single device, enhancing its
versatility.
3. Cost-Effectiveness
While the initial investment in micro fabrication technology can be high, the long-term benefits
often outweigh the costs. Mass production of micro fabricated components can lead to
economies of scale, significantly reducing the cost per unit. Additionally, the reduced material
waste associated with micro fabrication processes contributes to overall cost savings.
4. Innovation and New Product Development
The capabilities of micro fabrication foster innovation by enabling the design of novel products
and technologies. Industries can explore new applications and functionalities, leading to the
development of breakthrough solutions that meet evolving consumer demands. This
adaptability is crucial in fast-paced markets, where staying ahead of competitors is essential.
5. Environmental Benefits
Micro fabrication processes often use fewer resources and generate less waste compared to

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traditional manufacturing techniques. The precision of micro fabrication reduces material
consumption, and the ability to create highly efficient devices contributes to energy savings. As
industries increasingly prioritize sustainability, micro fabrication aligns with these goals.

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CHAPTER 8
CONCLUSION

Metamaterials hold out great promise. Their extraordinary properties can provide functionality
that would be impossible, or at least impractical, with natural materials. These properties
include negative index, indefinite permittivities and designer magnetic responses, with
functionalities ranging from invisibility and cloaking to subresolution imaging. Due to their
dimensions and composition from dissimilar materials, they are very difficult to fabricate,
especially on the scale required to realise practical devices. The fibre fabrication technique, as
developed for drawing microstructured fibres, has been adapted to draw metamaterials in the
form of fibres where the microstructure is comprised of metals. This well-established
fabrication technique should be applicable to economically manufacture metamaterials in
commercial quantities. To date, this adapted technique has been successfully applied to
research demonstrations of polymer/indium metamaterials with tailored electric and magnetic
properties in the THz, and Far IR, spectral regions. Furthermore, these metamaterials have been
used to make a THz hyperlens, demonstrating their practical application to deliver significant
and novel functionality of l/50 resolution in the THz. There is an exceptionally good prospect
of extending this approach to a range of combinations of glasses and metals to provide
metamaterials and devices made from these, operating in the mid- to near-IR and even the
visible. By applying knowledge from microstructured fibre fabrication, metamaterials are
poised to move from being a fascinating research topic to an applied technology solving real-
world problems. Metamaterials offer significant potentials for numerous applications due to
their unique acoustics, electromagnetic, optical, and mechanical properties. The increasing
interest in the development of metamaterials is also driven by the inability of traditional
architecture to offer novel functionalities offered by metamaterials. Recently it has been shown
that the metamaterial phenomenon can be exploited for the development of energy harvesting
devices especially in the field of energy scavenging at low intensity.

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[3]. Anthony, J., Leonhardt, R., Argyros, A., & Large, M. C. J. (2011). Terahertz properties of

a microstructured Zeonex polymer fiber. J. Opt. Soc. Amer. B, 28(5), 1013-1018.

[4]. Smith, D. R., & Kroll, N. (2010). Negative refractive index in left-handed

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[6]. Engineering photonic density of states using metamaterials. Applied Physics B, 100,

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