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Asyst SmartCourse ™ Manual

DISCLAIMER

This manual may not be reproduced, either wholly or in part, for any reason whatsoever, without prior written
permission from Asyst Technologies, Inc. Material contained within this manual is provided for informational
purposes only, and is subject to change without prior notice. Asyst Technologies, Inc. assumes no
responsibility for any errors that may appear in this manual, or for any damages resulting from such errors.

Any change, alteration, or modification to the equipment described herein, as well as application in a manner
inconsistent with its design and intent, without prior written permission from Asyst Robotics Engineering Staff
will void the system warranty and may render the equipment unsafe for use or unfit for its intended purposes.

This manual supersedes and obsoletes all prior Asyst Technologies material relating to operation of the
product(s) described herein.

It is the responsibility of the Customer to comply with all local, state, and federal ordinances, regulations, and
laws applicable to the operation of this equipment.

Asyst Technologies, Inc. assumes no liability, whatsoever, for any personal injuries or damages resulting
from the operation or service of this equipment in any manner inconsistent or contrary to the methods
supplied in Asyst Technologies, Inc. literature including, but not limited to, manuals, instructions, bulletins,
communications, and recommendations.

TRADEMARKS

SmartCourse, HineSlght xxx, HineAlign, Hine Arm xxx, 38A Elevator, 48V Elevator, 36TA Elevator,
FPO VCI Elevator, 48RA Elevator, and Model 21 are all trademarks of Asyst Technologies, Inc.

Asyst Technologies, Inc.

(Corporate Office)
48761 Kato Road
Fremont, California 94538
Telephone: (510) 661-5000
FAX: (510) 661-5166
¢ www.asyst.com ¢:i

Asyst Technologies, Inc.

241 Java Drive
Sunnyvale, California 94089
Telephone: (408) 743-5800
FAX: (408) 743-5801

Technology described In this manual may be covered under one or more of the following Asyst Technologies
(Hine Design) U.S. patents: 4,749,330; 4,892,455; 5,102,291; 5,265,170; 5,386,481; 5,803,979; 5,831,738.

Copyright ©Asyst Technologies, Inc., June 1999. All Rights Reserved Worldwide.

SmartCourse ™ Manual for Atmospheric Robot

Part Number 11558-002 Revision B
Printed: June 2000.
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 Asyst SmartCourse™ Manual

TABLE OF CONTFNTS
Paragraph Page

Chapter 1 - PATH PLANNING OVERVIEW (Pages 1-1 thru 1-20)

1. Manual Description .......................................................................................................... 1-1

1.1 Path Planning .................................................................................................................. 1-1
1.2 Components of a Path ......................... :........................................................................... 1-1
1.2.1 Center of Wafer Position ................................................................................................. 1-2
1.2.2 Straight Segment Path ..................................................................................................... 1-2
1.2.3 Circular Path Segments ................................................................................................... 1-3
1.2.4 Describing a Path ............................................................................................................ 1-3
1.2.5 Path Teaching Points ......................................................... :............................................ 1-4
1.2.6 Path Numbers and Directionality ..................................................................................... 1-4
1.2.7 Internal Path Points ......................................................................................................... 1-5
1.3 Defining Paths ................................................................................................................. 1-6
1.3.1 Individual Station Paths ................................................................................................... 1-5
1.3.2 Using Individual Station Paths ......................................................................................... 1-6
1.3.3 Combining Individual Station Paths ................................................................................. 1-7
1.3.4 Continuous Individual Station Paths ................................................................................ 1-8
1.3.5 Custom Paths ................................................. :.............................................................. 1-10
1.3.6 Joint Station Paths ......................................................................................................... 1-12
1.3.7 Path Limitations ............................................................................................................. 1-14
1.3.8 Speed Profiles Along Paths ........................................................................................... 1-14
1.4 Path Planning Commands ............................................................................................. 1-16
1.4. 1 TP Built-in Command .................................................................................................... 1-16
1.4.2 PH Built-in Command .................................................................................................... 1-16
1.4.3 CP Built-in Command .................................................................................................... 1-16
1.4.4 CS Built-in Command .................................................................................................... 1-17
1.4.5 GS Built-in Command .................................................................................................... 1-17
1.4.6 PS Built-in Command .................................................................................................... 1-17
1.4.7 PRINTPATH Command ................................................................................................. 1-17
1.4.8 LISTPATHS Command ................................................................................................. 1-18
1.4.9 WIPEPATHS Command ............ :................................................................................... 1-18
1.5 Path Planning Parameters ............................................................................................. 1-18
1.5.1 Parameters for Creating a Path ..................................................................................... 1-18
1.5.2 PEEL Parameter ............................................................................................................ 1-19
1.5.3 Parameters for Path Planning Stations ......................................................................... 1-19
1.5.4 Parameter for Running a Path ....................................................................................... 1-20
1.5.5 Parameter for Defining Z-Movement Position ............................................................... 1-20

Chapter 2- CREATING PATHS (Pages 2-1 thru 2-24)

2. Chapter Description ......................................................................................................... 2-1

2.1 Trial and Error Method ..................................................................................................... 2-1
2.1.1 Pre-Calculated Path Data ................................................................................................ 2-1
2.1.2 Tuning on an Individual Path ........................................................................................... 2-1
2.1.3 Tuning Process ................................................................................................................ 2-1
2.2 Teaching a Custom Path ................................................................................................. 2-2
2.2.1 Custom Path With Three Straight Segments ................................................................... 2-2
2.3 Teaching an Individual Station Path ................................................................................ 2-3
2.3.1 Teaching a Straight Segment Station Path ..................................................................... 2-3
2.3.2 All Paths Option ............................................................................................................... 2-5
2.3.3 Teaching a Station Path With Circular Segments ........................................................... 2-6
2.4 Joint Station Paths ........................................................................................................... 2-8
2.4.1 Semicircular Joint Station Path ........................................................................................ 2-9
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Paragraph Page

2.4.2 Simple Joint Station Path ............................................................................................................ 2-10

2.4.3 Complex Joint Station Path ......................................................................................................... 2-11
2.4.4 Individual and Joint Station Path Numbers ................................................................................. 2-12
2.5 Path Planning Fine Tuning .. :....................................................................................................... 2-13
2.5.1 Changing PVEL and PACC Parameters ..................................................................................... 2-13
2.5.1.1 Common Values to Use .............................................................................................................. 2-13
2.5.1.2 Profile Limitation ......................................................................................................................... 2-13
2.5.1.3 Error Messages Meanings .......................................................................................................... 2-13
2.5.2 Teaching a Better Circular Path .................................................................................................. 2-14
2.5.2.1 Relationship Between Teaching Points and Turn Radius ........................................................... 2-14
2.5.2.2 Best Profile For Best Performance ............................................................................................. 2-16
2.5.3 Using PFVEL and PFACC .......................................................................................................... 2-16
2.6 Using GS and PS Commands to Move Wafers .......................................................................... 2-17
2.6.1 Revised GS and PS Commands ................................................................................................ 2-17
2.6.2 Using an Individual Station Path ................................................................................................. 2-17
2.6.3 Combining Straight-Segment Station Paths .............................................. .'................................ 2-18
2.6.4 Combining Circular Station Paths ............................................................................................... 2-20
2.6.5 Using Joint Station Paths ............................................................................................................ 2-21
2.6.6 Path Z-Transition Point ............................................................................................................... 2-22
2.6.7 Double-Paddle End-Effectors ..................................................................................................... 2-23
2. 7 Using Fixtures ............................................................................................................................. 2-23
2.7.1 Variations .................................................................................................................................... 2.24

Chapter 3- PATH PLANNING REFERENCE (Pages 3-1 thru 3-16)

3·. Chapter Description ...................................................................................................................... 3-1

3.1 New Built-in Commands ............................................. :................................................................. 3-1
TP ......................................................................................................................................... 3-1
PH ......................................................................................................................................... 3-2
CP ......................................................................................................................................... 3-3
3.2 Modified Built-in Commands ......................................................................................................... 3-5
TS ......................................................................................................................................... 3-5
GS ......................................................................................................................................... 3-6
PS ......................................................................................................................................... 3-7
3.3 Path Management Commands ..................................................................................................... 3-8
GETPATH ..................................................................................................................................... 3-8
INPATHSTATION ......................................................................................................................... 3-8
PATH ... ENDPATH ..................................................................................................................... 3-9
PRINTPATH ................................................................................................................................ 3-11
RETPATH ................................................................................................................................... 3-12
REVPATH ................................................................................................................................... 3-12
SETPATH ................................................................................................................................... 3-13
WIPEPATHS ............................................................................................................................... 3-13
3.4 Path Planning Parameters .......................................................................................................... 3-14
3.5 Path Planning Error Messages ................................................................................................... 3-15

Chapter 4 - EXAMPLES (Pages 4-1 thru 4-12)

4. Chapter Description ...................................................................................................................... 4-1

4.1 Example Path Management Commands ...................................................................................... 4-1
4.1.1 Example 1: Simple One-Segment Path ....................................................................................... 4-1
4.1.2 Example 2: Individual and Joint Station Paths ............................................................................. 4-2
4.2 PV Output Format ....................................................................................................................... 4-11

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Appendix A - GLOSSARY (Pages A-1, A-2)

Appendix B - PATH PLANNING LIMITS (Pages B-1, B-2)

Addendum - MAXIMIZING THE PERFORMANCE (Pages ADD-1 thru ADD-6)

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ILLUSTRATIONS

Figure Page

1-1 Center of Wafer Position ............................................................................................................... 1-2

1-2 Single-Segment Path .................................................................................................................... 1-2
1-3 Two-Straight Segment Path .......................................................................................................... 1-3
1-4 Path With Four Straight Segments ............................................................................................... 1-3
1-5 Path Teaching Points .................................................................................................................... 1-4
1-6 Path Numbers and Direction ......................................................................................................... 1-4
1-7 Internal Path Definition Points ...................................................................................................... 1-5
· 1-8 Individual Station Path Teaching Points ....................................................................................... 1-6
1-9 Using an Individual Station Path ................................................................................................... 1-6
1-10 Moving Between Individual Stations ............................................................. .' ............................... 1-7
1-11 Possible Cassette configurations .................................................................................................. 1-8
1-12 Teaching a continuous Station Path ............................................................................................. 1-9
1-13 Combining Continuous Station Paths ........................................................................................... 1-9
1-14 Circular Segment Geometry ....................................................................................................... 1-10
1-15 Large and Small Circular Segments ........................................................................................... 1-11
1-16 Straight-Segment Teaching Points ............................................................................................. 1-11
1-17 . Incorrect Path Specifications ...................................................................................................... 1-11
1-18 Three-Segment Path Specification ............................................................................................. 1-12
1-19 Semi-Circular Joint Station Path ................................................................................................. 1-12
1-20 Illegal Circular Path ..................................................................................................................... 1-13
1-21 Simple Joint Station Path ............................................................................................................ 1-13
1-22 Complex Joint Path Between Stations ........................................................................................ 1-14
1-23 Motion Profile Along a Straight Segment .................................................................................... 1-15
1-24 Motion Profile Along Path With Circle ......................................................................................... 1-15
1-25 PEEL Parameter Measurement .................................................................................................. 1-19

2-1 Example Custom Path Specification ............................................................................................. 2-2

2-2 TS Statio;1 Teaching Points .......................................................................................................... 2-3
2-3 Station Path and Retracted Position ............................................................................................. 2-5
2-4 Yes - For All Paths Option ........................................................................................................... 2-5
2-5 No - For All Paths Option ............................................................................................................. 2-6
2-6 Defining a Circular Station Path .................................................................................................... 2-7
2-7 Individual and Joint Station Paths ................................................................................................. 2-8
2-8 Semicircular Joint Station Path ..................................................................................................... 2-9
2-9 Simple Joint Station Path Definition ............................................................................................ 2-10
2-10 Complex Joint Station Path Teaching Points .............................................................................. 2-11
2-11 Final Complex Joint Station Path ................................................................................................ 2-12
2-12 Individual and Joint Station Path Numbers ................................................................................. 2-12
2-13 Turn Radius ................................................................................................................................ 2-14
2-14 Large Turn Radius ...................................................................................................................... 2-15
2-15 Illegal Teaching Point .................................................................................................................. 2-15
2-16 Velocity-Distance Profile ....................................................................................................: ........ 2-16
2-17 Profile Reformation to Minimize Overshoot ................................................................................ 2-16
2-18 Using an Individual Station Path ................................................................................................. 2-18
2-19 Combining Straight-Segment Station Paths ............................................................................... 2-19
2-20 Opposing Straight-Segment Paths ............................................................................................. 2-19
2-21 Combining Individual Station Paths ............................................................................................ 2-20
2-22 Offset Individual Station Paths .................................................................................................... 2-21
2-23 Individual and Joint Station Paths ............................................................................................... 2-21
2-24 2-Transition Points ...................................................................................................................... 2-22
2-25 Teaching Template ..................................................................................................................... 2-24

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ABOUT THIS MANUAL

This manual describes Asyst SmartCourse ™ path planning for atmospheric Robots. This manual should be
used by Service Technicians and Equipment Engineers who teach Asyst Robots.

CONVENTIONS
Certain conventions are used throughout this manual.
Keys or switches that must be pressed are printed in bold. Example: Press Enter or press F1.
Software commands are printed in italics. Example: ... after the UNLOAD command ...
Figures and tables are numbered in a manner similar to pages; sequential within individual chapters.
Each figure and table is identified by the number of the chapter in which it resides, hyphenated to
show its sequential order within that chapter. For example, the third figure in the second chapter
would be, Figure 2-3. Figure numbers are located immediately beneath, or immediately adjacent to,
the appropriate figure. Table numbers are located immediately above the appropriate table.
Warnings, cautions, and notes as used throughout this manual:

WARNING
Warnings alert personnel to potentially hazardous
conditions or actions that may result in personal injury .

. CAUTION
·Cautions alert personnel to actions that may result in
equipment damage.

NOTE
Notes emphasize, or expand upon, the presented information.

T/Plif:
Tips provide helpful hints to improve performance and/or use.

MANUAL CHANGES AND REVISIONS

Asyst Technologies periodically updates this manual to reflect changes to the equipment or to correct or
enhance previously published material. To receive manual updates it is necessary to contact Asyst
Technologies at the address on page ii.
The current revision level for this manual may be found immediately following the part number on the Title Page.
Changes, corrections, additional material, or recommendations for future editions are always welcome and
should be directed to Asyst Technical Publications. Direct a letter to TECHNICAL PUBLICATIONS at the
address for the corporate facility in the front of this manual.

RELATED DOCUMENTS
Atmospheric Robot, Series 4.3, Technical Manual, P/N 05448-003
Atmospheric Robot, Models 53 and 54, Technical Manual, P/N 13113-001
AXYS Atmospheric Robot, AXYS Model 21, Technical Manual, PIN 11854-001
Software Manual, Series 4.3 Robots, P/N 08162-0XX
Software Manual, Models 53 and 54 Robots, P/N 13789-001
Software Manual, AXYS Model 21 Robots, PIN 12432-001

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 Asyst SmartCourse™ Manual

CHAPTER 1 Path Planning_ Overview

1. MANUAL DESCRIPTION

This manual describes the concepts and features of the SmartCourse ™path planning software on Asyst
atmospheric Robots. It is intended as a supplement to the teaching instructions found in the Asyst Robot
Installation Instructions and the Robot Technical Manual., It is assumed that the user has complete
familiarity with the Atmospheric Robot and the Software Manual for the version of Asyst Robot currently being
taught Asyst SmartCourse™ path planning.
Chapter 1 provides a general overview of the concepts and features of the path planning software on the
Asyst Robots. Chapter 2 describes how to create paths using the teach pendant and the path planning
commands. Chapter 3 is a reference for the path planning built-in commands, configuration parameters and
error messages. Chapter 4 provides examples of path planning descriptions. Appendix A is a glossary of the
new terms used to describe path planning.

1.1 . PATH PLANNING

Normally, wafer transfer Robots with 2-link arms can only make accurate single movements in either a radial
or a theta direction at any given time.
Path planning capability allows the Robot to precisely coordinate radial and theta movements, enabling the
end-effector to move along user-defined paths. By using optimal paths and continuous motion, path planning
can enable faster throughput when transferring wafers between two (2) stations. It also allows the Robot to
transfer wafers to and from cassettes that do not face the center of the Robot.

1.2 COMPONENTS OF A PATH

Maximum Limits:
Number of paths: 20
Straight segments per path: 5
Internal points per path: 300

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1.2.1 Center of Wafer Position.

An important concept of path planning ls the center-of-wafer position of the Robot's end-effector. As can be
inferred, the center-of-wafer position is the exact point on the end-effector where the center of the wafer is
located. This is shown in Figure 1-1 below.

Center-of-Wafer
Position

"'Wafer

Figure 1-1. Center-of-Wafer Position

1.2.2 Straight-Segment Path.

The simplest possible path has a single straight segment as shown in Figure 1-2. In this case, the path is
defined by two (2) reference points, one at each end.

Straight
Segment~

Reference ~ 'Reference
Point~ Point

Figure 1-2. Single-Straight-Segment Path ·

When the Robot arm is moving along a straight segment, it will accelerate from a stop at the beginning of the
segment, up to a specified maxi.mum velocity, then decelerate to a stop by the end of the segment. Single-
segment paths are used primarily for defining the entry and exit paths into and out of cassettes. This will be
discussed in detail below.

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1.2.3 Circular Path Segments.

Typically, paths will contain more than one straight segment. When multiple straight segments are used,
they are always connected by circular segments. Figure 1-3 shows a path with two (2) straight segments
connected by a circular segment. The four (4) reference points are also indicated.
Straight

Reference
I ~==', I
I
I
I
I/ ' \
\
\
\.
I
Points
~'
I
)
I
I

Figure 1-3. Two-Straight-Segment Path

With circular connecting segments, the Robot does not need to stop at the reference points (though it may
slow down). Thus, movement along the path will be continuous. As will be described below, the radius of the
circular segments is set by the user when the path is defined.

1.2.4 Describing a Path.

Paths are defined by their straight segments. Thus the path in Figure 1-3 above would be described as a
two-segment path, even though it also contains a circular segment. It is always understood that a path with
N-straight segments will also have N-1 circular segments. As an example, Figure 1-4 below shows a four (4)
-segment path (with three {3) circular segments). The eight (8) path reference points are also indicated.

Figure 1-4. Path With Four Straight Segments

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1.2.5 Path Teaching Points.

A path is defined by the user with a special joystick mode teaching procedure. The user moves the end
effector to different positions, then presses the ENTER key on the teach pendant. Each time the ENTER key
is pressed, a new teaching point is recorded at the center-of-wafer position.
Figure 1-5 below shows the teaching points (indicated with X marks) and the resultant path that the software
generates from the teaching points. The number for each teaching point indicates the order in which the
point is defined by the user.

1st Teaching Point

2ndT.P.
---~nm~
I
Reference

4lt.P.
v._.........-· I
----~ I
3rdT.P. I

Figure 1-5. Path Teaching Points

Te.aching points are described in more detail in Section 1.3 below. For now, note that the first and last
teaching· points define the first and last reference points, and the teaching points in between define the
straight and circular path segments. Note also that not all reference points are defined by the teaching
points.

1.2.6 Path Numbers and Directionality.

Each path is assigned a number given by the user. Every path has both position and direction; the direction
of the path is from one end point to the other. Thus each path taught by the user must be assigned two (2)
path numbers, one for each direction. This is shown conceptually in Figure 1-6, where the path numbers
each have arrows to indicate direction. In the figure, the straight-line path is assigned the path numbers 3
and 4, and the two-segment path is assigned the numbers 6 and 8.

Figure 1-6. Path Numbers and Direction

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 Asyst SmartCourse ™ Manual

1.2.7 Internal Path Points.

As described above, the path segments are defined by reference points. However, for the purpose of
coordinating the Robot movement, the software actually calculates many additional internal path definition
points and values that are used to control Robot movement along the path. The number of internal path
points will always be much larger than the number of reference points. A simple one-segment straight path
could have several internal points; a complex path could have dozens. Figure 1-7 shows an example path,
with the hash marks indicating the internal path points.

,__ _ _ _ _ Internal ------r-

Points

j~
Figure 1-7. Internal Path Definition Points

At each internal path point, the Robot may change the arm motors' accelerations and velocities. Internal path
points are created automatically, and usually the user need not be concerned with them. The internal path
definition point values may be output by using the PRINTPATH command
(described in Section 1.4 below).

1.3 DEFINING PATHS

This section gives an overview of how different paths can be defined. Chapter 2 provides a much more
detailed description of how to use the path commands to teach the various types of paths.
There are three (3) basic types of paths:
Individual Station Paths
Custom Paths
Joint Station Paths.
Each is described in general below.

1.3.1 Individual Station Paths.

These are paths defined in conjunction with a wafer station. The path goes from a position inside the
cassette to a position 9utside the cassette. Individual station paths are defined using a variation of the
familiar TS command, described in Section 1.4 below.
The basic individual station path is defined by using three (3) teaching points to define two (2) reference
points for the station, as shown in Figure 1-8 and explained below.

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First Point Second Point Third Point

Wafer Cassette

Figure 1-8. Individual Station Path Teaching Points

1. The first teaching point is defined where the wafer is inside the cassette.
2. The second point is any point on the centerline inside the cassette.
3. The third teaching point is defined as that point where the wafer Is clear of the cassette and the wafer
can be retracted to the Robot without hitting the cassette.
The three (3) teaching points define a straight segment path between the two (2) reference points, as shown.

1.3.2 Using Individual Station Paths.

Once an individual station path has been defined, Put and Get movements can be done to or from the
station. The primary difference is that any Robot motion involving the station will use the individual station
paths. As a simple example, Figure 1-9 shows how a Put movement could be done at a station with a
defined path.

Theta Move

Starting
Position

Figure 1-9. Using an Individual Station Path

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Assume that the arm is holding a wafer and is retracted to the starting position shown in the figure. !f a PS
command is given to put the wafer in the station:
1. Arm will first rotate in theta
2. Next, extend radially to the external path reference point for the station
Then, the arm will simultaneously extend and rotate such that the center-of-wafer follows the path into the
station.

1.3.3 Combining Individual Station Paths.

If two (2) stations each have defined station paths, the above example can be extended to transferring a
wafer from one cassette to the other. Figure 1-10 shows a possible configuration. Note that the two (2)
cassettes need not be symmetrical with respect to the Robot.
Station 1
Station 2
Starting
Position

Final
Location

Figure 1-10. Moving Between Individual Stations

Assume that it is necessary to transfer a wafer from the Station 1 on the left to Station 2 on the right, as
shown in Figure 1-10. The process is as follows:
1. Do a Get from Station 1. This moves the arm along the path out of the cassette. When the arm
reaches the end of the path, It then retracts to the radial home position along a line connecting the
outer reference point and the center of the Robot.
2. Do a Put to Station 2. The arm will rotate in theta until its radial position is on a line from the center
of the Robot to the outer reference point for Station 2. It will then extend radially to the outer refer-
ence point. From this point, it will follow the station path into the cassette.
When two (2) individual station paths are combined, many possible configurations of cassettes can be
accommodated. Some possibilities are shown in Figure 1-11. The primary requirement is that an individual
station path must be defined for each station.

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Figure 1-11. Possible Cassette Configurations

When the Robot moves between stations as shown in Figure 1-10, it must momentarily stop between the
radial, theta, and path segments of the motion. Furthermore, it must make a theta motion between the
retraction and extension positions. Both of these factors increase the time of the wafer transfer. However,
there is a more efficient alternative, as described next.

1.3.4 Continuous Individual Station Paths.

A continuous individual station path uses the same three (3) teaching points shown in Figure 1-8, but adds
two (2) additional teaching points to define a two-segment path (with a circular segment), as is shown in
Figure 1-12. This type of path has two advantages: ·
1. The path has a circular segment. This allows the motion to be continuous from inside the cassette to
the retracted position.
2. The retracted position is defined by the user, and thus can have any theta orientation, within the
movement limits of the Robot. (However, the retracted position should not cause the center-of-wafer
position to move near or beyond the center of the Robot.)

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Fourth Point Fifth Point

,
...... ------ ... ...............
,
,, ''
,I '
I
I '\
\
I
I
I
I
I

"''------,·-v1.
I
I
I
I
I
~----i.
,.
I""'··
: "
i

Figure 1-12. Teaching a Continuous Station Path

An advantage of being able to define the fifth point on the path is shown in Figure 1-13. Here, two (2)
continuous station paths are defined, and the fifth point for each has been taught at the same position. This
eliminates the need for any theta movement.

Station 2
Station 1

Overlapping Points

Robot

Figure 1-13. Combining Continuous Station Paths

Thus, if a wafer is to be moved from Station 2 to Station 1, the arm will extend to Station 2, get the wafer,
then move the wafer to the retracted position in one continuous movement. From there, it will make a

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continuous movement to Station 1 to put the wafer into the cassette. This (mostly} continuous movement is
more efficient than the straight-line path shown in Figure 1-10, but the Robot arm will still stop momentarily at
the point where the two station paths meet. Typically, continuous station paths are combined with Joint-
Station Paths, described later.

1.3.5 Custom Paths.

These are arbitrary paths defined without reference to a station. Custom paths can be as simple as a single
straight segment, or more complex than the path shown in Figure 1-4. Custom paths are defined using the
TP {path} command, described in Section 1.4.
When creating a custom path, it is important to fully understand the relationship of the teaching points, the
reference points, and the circular segments. Figure 1-14 below shows a two-segment path with the teaching
points (T.P.) and the reference points (Ref. Pt.) indicated. In addition, two (2) brace_s indicate the distance
between the intersection of the straight lines and the positions of the reference points defining the circular
segment.

T.P. #1 -Ref. Pt. 1

T.P. #2

Figure 1-14. Circular Segment Geometry

Note that the two (2) distances marked by the braces (A and B) are the same length. That is, the third
reference point is created at the same distance from the line intersection as is the second teaching point.
(Put another way, the circle will be tangent to the first straight segment at T.P. #2, and also tangent to the
second straight segment, which defines the position of Ref. Pt. 3 and the radius of the circular segment.)
Thus, the relative positions of the second teaching point and the second straight segment determine the
radius of the circular segment.
Figure 1-15 illustrates how the relative placement of the teaching points changes the radius of the circular
segment. Observe that the only difference between the two (2) path definitions is the position of the third
teaching point.

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i ------
''
''\ Small Radius
Large Radius \
I
~-- ' \
I \
I
2 I
I

I
I
I
I
I
-x---
3
~'
I

I
/
4

~--
--
3 --- ------··
Figure 1-15. Large and Small Circular Segments

As a rule, it is most efficient to use as large a radius as possible within the constraints of the Robot
installation. Avoid very-small-radius turns.
Up to now, all of the drawings have shown Teaching Point 3. on the opposite side of the first line segment, as
shown in Figure 1-16a. There is no problem with defining the second straight segment using a teaching point
closer to point 4, as shown in Figure 1-16b. However, the two {2) points defining a line segment should not
be too close together.

'I
-t-3--~
2

3 4

A B

Figure 1-16. Straight-Segment Teaching Points

From the above discussion, it should be apparent how the teaching points must be defined in order to
generate correct circular segments. To further demonstrate, Figure 1-17 shows two (2) incorrect ways of
specifying a path. In Figure 1-17a, a circular segment cannot be generated from teaching point #2. In Figure
1-17b, points 3 and 4 are specified in the reverse path direction; they must be specified in the same direction
as points 1 and 2. In both examples, no path will be created, and the Robot will give an error message.

1 1

Wrong! Wrong!
3
-*·-- -·-------------x
--X·*--1-------X
2 4 4 3

A B

Figure 1-17. Incorrect Path Specifications

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At this point, you should understand the fundamentals of creating a custom path. As another example,
Figure 1-18 shows how the path in Figure 1-4 could be specified.

'
5 ::k 2
I
-··-....... 4
!I
~--.
-~-~ I
3

8 7

Figure 1-18. Three-Segment Path Specification

While custom paths can be useful by themselves, they are usually used to create joint station paths, as
described below.

1.3.6 Joint Station Paths.

When wafers are to be moved from one station to another, the most efficient throughput can usually be
obtained by combining a custom path with individual station paths to create Joint-Station Paths. Joint station
paths are created using the command of the form: TP ST {st1} {st2}. ·
For an aligned side-by-side cassette configuration, the simplest joint'station path is a single semi-circular
segment connecting the two stations, as shown in Figure 1-19.

Individual ~ ~ Individual
Station Path Station Path

. Robot

Figure 1~19. Semi-Circular Joint Station Path

The circular path can provide the best throughput. However, if the cassettes are too close to the Robot,
relative to their separation, the circular segment may pass too near {or beyond) the center of the Robot. This
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is not allowed, as the Robot cannot physically move through such a position. This situation is shown in
Figure 1-20.

This Path
.___ Not
Allowed!

Figure 1-20. Illegal Circular Path

If a circular path cannot be created, the best solution may be to define a connecting path consisting of a
single straight segment connected to two (2) circular segments, as shown in Figure 1-21.

Robot,

Figure 1-21. Simple Joint Station Path

For stations with more complex relationships to each other, or with certain installation limitations, more
elaborate custom paths will need to be created. One such example is shown in Figure 1-22.

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Figure 1-22. Complex Joint Path Between Stations

1.3.7 Path Limitations.

Despite the general flexibility of paths, they cannot exceed the movement capabilities of the Robot. Some of
these limitations have been discussed above. A more formalized list follows:
1. Paths cannot be created that pass through the center of the Robot. Also, any paths that move close
to the center of the Robot will cause the Robot arm to slow down as it approaches the Robot center.
Such paths are not very efficient.
2. Paths cannot be created that will require the arm to move outside the theta angle limitations of the
Robot. It may be necessary to rotate the Robot in its mounts to provide.an adequate range.of-motion
to follow a path.
3. When teaching a path with a circular segment, the user has to make sure that a circular path is pos.
sible given the relationship of the two straight paths. If not possible, the path will not be created.
TIP/if:
A rule-of-thumb: During training of the path, the Robot should not have to be moved to or
near a limit of its movement. If the Robot gives an error message saying that it is not able
to create a path, then:
1. Try another path,
2. Relocate one or both of the wafer stations, or
3. Re·position the Robot.

1.3.8 Speed Profiles Along Paths.

When the Robot moves along a straight path segment, it follows essentially a trapezoidal speed profile,
accelerating to a maximum speed, then decelerating to a stop at the end of the segment. This is shown
conceptually in Figure 1·23.

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Trapezoidal
Profile

• •
Speed

Constant
Acceleration Deceleration
Speed

Figure 1-23. Motion Profile Along a Straight Segment

If the path has a circular segment, the arm will not stop at the end of the segment. However, the maximum
speed along the circular segment may be less than the speed along the straight segments. The maximum
circular segment speed will be an integer fraction (1/1, 1/2, 1/3, 1/4, etc.) of the maximum straight segment
speed. This ratio is defined using the PTURN parameter, described in Section 1.5 below. Figure 1-24 shows
conceptually how the speed profile would look if the circular segment speed ratio is 1/2.

Trapezoidal
Profile

\_.._ __ _____
~

St~ht
~~--/
)~\_.._

Circular
___
St~ht
~.
------)
Distance

Segment Segment Segment

Figure 1-24. Motion Profile Along Path With Circle

If the ratio is defined as less than one-to-one1, the arm will decelerate along the straight segment so that its
speed along the circular segment will be the correct value. When the arm has moved through the circular
segment, it will again accelerate to the maximum speed allowed for the straight segment.

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1.4 PATH PLANNING COMMANDS

Paths are defined using joystick mode teaching, but they are stored and displayed in a format similar to that
used for macro definitions. For defining paths, there are new built-in commands to allow teaching the path
points. Also, some existing built-in commands have been modified. For displaying path data, there are new
commands similar to the macro-management commands. Both types of commands are described in general
terms below. Chapter 2 shows some examples, and Chapter 3 gives more complete and rigorous
descriptions.

1.4.1 TP Built-in Command.

When the TP (Teach Path} command is given, the Robot goes into joystick mode to allow the user to define
the teaching points for a custom path. The Robot will prompt the user during the teaching process.
The simplest form of the TP command is:

TP# {path}
Where {path} is the number (1 to 12) of the custom path to be taught.
Another form of the TP command allows the user to define a joint path between two (2) stations. This format
of the TP command is:

TP# ST {sn1} {sn2}

Where {sn1} and {sn2} are the station numbers of two (2) stations whose individual station paths have
already been defined.

1.4.2 PH Built-in Command.

The PH .(run a path) command is used primarily for testing a path. However, it can also be used to execute a
custom GS or PS using path planning. The format of the PH command is:

PH# {path} [01112]

Where {path} is the number of the path to be tested, and the 0, 1, 2 option flags are used to indicate how the
end-effector is to move to the beginning of the path.

1.4.3 CP Built-in Command.

Normally, the internal path points are calculated at the completion of a path teaching session. However, if
path planning configuration parameters are changed after a path has been defined, the path internal points
will not be automatically updated. Thus the CP (Calculate Path) command may need to be used anytime a
path parameter is changed after a path has been defined. The path parameters are described in Section 1.5.
The basic form of the CP command is:
CP# {path}

Where {path} is the number of the path to be recalculated. Note that the only path recalculated is the {path}
specified in the CP command(s). Thus, it is possible to teach several paths, change a path parameter (such
as path acceleration), then recalculate only certain paths, leaving others unchanged.
The CP command can be used to recalculate the individual station path points by specifying the station
number, as follows:
CP# ST {sn}

Where {sn} is the station number whose paths are to be recalculated. Using this form of the command, both
station paths will be updated without having to specify the command for each of the station's path numbers.

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1.4.4 TS Built-in Command Changes.

The TS (Teach Station} command has new options when path planning is available. When the TS command
is given, the Robot will ask whether path planning is to be used. If the response is Y (yes), the user will be
prompted to specify the three (3) individual station path teaching points. Also, additional path information
may be requested in order to allow a circular station path to be defined.
For path planning, the form of the TS command is:
TS# {sn}
Where {sn} is the station number to be taught. Note that no paddle number should be specified.

1.4.5 GS Built-in Command Changes.

The GS (Get Wafer From Station} command has an optional two-argument field that allows specification of a
path, and also indicates if the arm is to stop after it picks up the wafer.
For path planning, the form of the GS command is:
GS# {sn} {sl} [{path} {stay}] [{pf}]
Where {sn} and {sl} are the station and slot numbers. {path} is used to specify the path number to be used
for the Get. If no path is to be used, the value is zero (0). {stay} is a binary flag (0 or 1) that indicates if the
arm is to stop or is to retract after picking up the wafer.
Note that the paddle number is not used and should not be specified. The optional speed profile, {pf}, can be
specified, but the value will only be used when the arm is moving to the beginning of a path.

1.4.6 PS Built-in Command Changes.

The PS (Put Wafer To Station) command also has the optional two-argument field, similar to the modified
GS command.
The path planning form of the PS command is:
PS# {sn} {sl} [{path} {stay}] [{pf}]
{sn} and {sl} are the station and slot numbers, as before. {path} is used to specify the path number to be
used for the Put. {stay} is a binary flag that indicates if the arm is to stop or retract after putting the wafer in
the station.
The speed profile value, if specified, will only be used when the arm is moving to the beginning of a path.

1.4.7 PRINTPATH Command.

Depending upon its arguments, the PRINTPATH prints out data for a single path. The output will begin with
a PATH statement (similar to the MACRO statement}, and end with an ENDPATH (similar to the ENDMAC).
For outputting the complete path data, the form of the command is:
PRINTPATH {path}
Where {path} is the number of the path to be output. The path output generated by this command will contain
one line for each of the internal path points generated by the Robot. Each line contains both coordinate,
velocity/ acceleration and time-interval data.
Another variation of the PRINTPATH command outputs path record data:
PRINTPATH {path} { XY I RT }
Where {path} again indicates the path number. When XY or RT is specified, path record data is output. Path
records indicate the coordinates and the overall velocity / acceleration values for each of the straight path
segments. The XY or RT specifies whether the coordinates are to be output in Cartesian or cylindrical
format, respectively.
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1.4.8 LISTPATHS Command.

LISTPATHS generates an output for each path number in sequence, showing the number of internal data
points stored for the path.

1.4.9 WIPEPATHS Command.

WIPEPATHS deletes all the stored path data from Working Memory. Note that the deletion does not affect
NVM.

1.5 PATH PLANNING PARAMETERS

Several new parameters have been created to characterize paths and path planning stations. These are
described below.

1.5.1 Parameters for Creating a Path.

These parameters each apply to all paths equally; any change to one of these parameters can affect all path
calculations. These parameters take only a single argument, and are of the form: -
{name} {value}
· Where {name} is the defined parameter name and {value} indicates a numerical value assigned to the
parameter (either integer or double).
PEEL - Length from the center of rotation of the wrist to the center of wafer position (in
inches). For correct path calculation, this value must be measured and specified ac-
curately. See the next section for a more detailed description of this parameter.
PVEL- Maximum velocity of the trapezoidal profile for the path (in inches per second). This
is the highest velocity that the center-of-wafer position can reach on a straight path
segment. The default value may not be satisfactory for your application and may
need to be modified.
PACC -Acceleration {and deceleration) of the center-of-wafer position on any straight path
segment. Units are inches per second per second. Like PVEL, this value may need
to be optimized for a specific application.
PINT - Time interval between the internal data points of the path. This value is calculated by
the software and generally should not be modified.
PTURN - The ratio of PVEL to the speed along the circular path segments. The value of
PTURN is an integer from 1 to 10. For example, if PTURN 2 is specified, the arm
will move along the circular segments at half the maximum speed used for the
straight segments. The default value of PTURN is 1. If any path contains a small-
radius turn, PTURN should be specified as two (2) or more.
PFDIS- Path final-movement distance (in inches). When the center-of-wafer position is
within PFDIS of the path end-point inside a cassette, the arm slows with a special
deceleration value defined by the PFACC parameter. This minimizes the chance of
hard contact between a wafer and the back of the cassette. This value is typically
set to about one (1) inch ±1/2 inch.
PFACC - Path final-acceleration value. Used as the deceleration value when the center-of-
wafer position is within PFDIS of the final position. If the wafer hits the back of the
cassette, PFACC should be reduced, or PFDIS increased.

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1.5.2 PEEL Parameter.

For any path to be correctly calculated, the software must know the exact geometry of the Robot. The arm
le'ngth is specified with the parameter ARML, but the distance from the pivot point of the wrist to the center-
of-wafer position must also be defined. This distance is shown in Figure 1-25, and is specified using the
PEEL (Path End-Effector Length) parameter.

~ PEEL-+!
I !
i
i
i

Center-of-Wafer
Position

Figure 1-25. PEEL Parameter Measurement

It is important to carefully measure the PEEL distance, and make sure that it has been defined correctly (and
written to NVM), prior to teaching any paths.

1.5.3 Parameters for Path Planning Stations.

These parameters are defined for individual path planning stations. Unlike the parameters described above,
. which apply to all paths, these parameters apply only to the specified station. Depending upon the
parameter, one of two formats will be used:
{name} {sn} {value}
or
{name} {sn} {path}
Where {name} is the defined parameter name, {sn} is the station number, {value} indicates a numerical value,
and {path} is the number of a previously-trained path. ·
RI - Radial position of the station. The radial distance (in inches) from the radial home position
to the center of the wafer when it is in position inside the cassette at the specified station.

Tl - Theta position of the station. The angle (in degrees) from the theta home position to a line
drawn between the center of the Robot and the center of the wafer when it is in position in-
side the cassette.

ALLPH - All-paths indicator. When an arm is not carrying a wafer, it may be able to move in a
straight path into or out of a cassette, improving throughput. This parameter can be used
to define whether or not this is allowable for a given station. See Chapter 2 for a more
detailed explanation of ALLPH.

PATHI - Specifies the path number to use when moving the arm into the specified station.

PATHO - Specifies the path number to use when moving the arm out of the specified station.

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1.5.4 Parameter for Running a Path.

This parameter takes a single (integer) argument, and applies to all paths.
PTOL- Position tolerance to be used for the PH (run a path) command. The value is specified in
encoder counts. If the PH command indicates that the path motion is to start from the pre-
sent position (option 0), both arm motor encoder positions must be within PTOL of the
first path point encoder positions. Otherwise, the path motion will not be executed and an
error message will be given.
See the explanation of the PH command in Chapter 3.

1.5.5 Parameter for Defining 2-Movement Position.

This parameter is defined for each path. It uses the format:
PATHZ {path} {value}
Where {path} is the path number and {value} is an internal path point number.
PATHZ - The path internal data point number defining where the Robot is allowed to move the Z-
axis. This point must be located such that the wafer will be clear of all obstacles during Z-
axis motion. This parameter is described in much more detail at the end of Chapter 2.

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CHAPTER 2 Creating Paths

2. CHAPTER DESCRIPTION

This chapter describes in detail the procedures used to create different types of paths. Several topics are
discussed, including custom paths, individual station paths, joint station paths and using the GS and PS
commands with path planning.

2.1 TRIAL AND ERROR METHOD

Due to the complexity of creating and running a path, there is no fixed set of profile parameters that can be
used in any orientation the path is going to run. Station path performance depends on how far the cassette is
away from the Robot and the direction the cassette is facing. More important is how the path is taught. The
best performing path is one that will run fast and smooth. To find this best path, the only way is to keep
teaching - teaching differently and increasing the speed until it fails by observation. This chapter explains
some facts of this tuning process.

2.1.1 Pre-Calculated Path Data.

The path profile data is pre-calculated beforehand. Running a path involves reading existing the path data
and moving. When path data is calculated, a set of profile parameters is used to define path velocity and ac-
celeration. Once path data is calculated, the path is run independently of user defined speeds (H, S, F, and
X). The only way to change the speed of the path is to re-calculate the path data. This can be done by a sin-
gle command (CP). In order to tune· a path to perform better, this step is necessary. Note that this differs
from most other moves the Robot makes, where the speed can be changed whenever it is told to move.

2.1.2 Tuning on an Individual Path.

When running a path, the two (2) motors of the robot arm, elbow and shoulder are moving non-linearly. Only
rotation and extension movements are linear to the motors. There is always one motor running faster than the
other at some part of a path. This causes a large difference in position error between motors during the tra-
jectory correction. And thus, the amount of over-shooting and vibration varies from path to path. In order to
increase the speed of a path to its limit without observable over-shooting and vibration, tuning has to be done
on each individual path.

2.1.3 Tuning Process.

Tuning involves increasing the path speed by changing values of the velocity and acceleration parameters
(for example: ST1 PVEL 20). Calculate the path data (for example: CP1 ST 5). If an error messages oc-
curs, change parameters accordingly and repeat until it succeeds. Run the path and observe the smooth-
ness. If the path does not run smoothly at the turn because the turning angle is too small, or the turn is too
big so that the path cannot run faster, it needs to be taught again. If the path runs smoothly, increase the
speed until an observable problem comes up, such as vibration and over-shooting. In following paragraphs
are described details regarding the tuning process.

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2.2 TEACHING A CUSTOM PATH

Custom paths are created using the simplest form of the TP command. The format is:
TP# {path}
Chapter 3 describes the TP command syntax in more detail.

2.2.1 Custom Path With Three Straight Segments.

For this example, assume you want to define the path shown in Figure 2-1, where:

• The Robot is unit number 1

• This going to be called path number 5.

Teaching Points Final Path

1¥ 6
\
\ ~.,,. .... ---- ...... , '
/,
\*2
\
' I \
' I
\1
I 1
I I

---~._j .,,.,/
I \
', i
,.., t---- ',
3 \ -----------~--- •••••_ lI
\ r 4 --· ·-t---
\

1
Figure 2-1. Example Custom Path Specification

The procedure is as follows:

1. Activate the teach pendant (press F4). Respond with Y to open the teach pendant port.
2. Enter TP1 5 to indicate that teach path number 5 is to be taught. This starts the teaching mode.
3. The teach pendant responds: "ARE YOU SURE?". Enter Y.
4. Teach pendant requests: "NO. OF STRAIGHT PATHS?". Enter 3 as the number of straight
segments.
5. The motor servos are turned off, allowing the arm to be manually moved (except on the Z-axis).
6. The teach pendant requests: "POSITION AT PATH START'. There are now two (2) options:
a. Manually move the arm to each of the teaching points or
b. Press F5 to turn on servos and use joystick mode to position the arm.
7. Move the center-of-wafer position to path starting point, then press ENTER key on the teach
pendant.
8. The teach pendant will then request "POSITION AT PATH END". Position the arm at the second
teaching point and press ENTER.
9. The teach pendant will again request: "POSITION AT PATH START'. Position the arm at the third
teaching point and press ENTER.
10. The teach pendant requests: "POSITION AT PATH END". Position the arm at the fourth teaching
point and press ENTER.
11. Repeat steps 9 and 10 to define the fifth and sixth teaching points.

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12. When last teaching point {number 6) is entered, the arm will automatically retract to the home
position.
13. Next, the teach pendant will display "CREATING PATH" while it is computing the internal path points.
When done, the teach pendant screen returns to the default.
If path was not defined correctly, the message "PATH NOT CONTINUOUS" will be given. In this example,
the problem is most likely the position of point 3 in relation to point 2, or point 5 in relation to point 4. Also
verify that none of the segments passes close to the center of the Robot.
If an error has occurred, it will be necessary to repeat the teaching procedure starting at step 2.

2.3 TEACHING AN INDIVIDUAL STATION PATH

Teaching an individual station path uses an extension of the TS command. The following procedures will
work only if the Robot has the path planning software installed.
The user can define two types of station paths: Paths with a single straight segment and paths with two
straight and one circular segments. Recall that all stations have two {2) paths: An incoming path (Put), and
an outgoing path (Get). Thus, two (2) path numbers will be required for each station path definition.
When teaching a station path:
• There must be a cassette in position
• At least one wafer will be needed
• Verify that the PEEL parameter has been specified correctly
• It may also be useful to mark the exact centerpoint on the wafer.

2.3.1 Teaching a Straight..segment Station Path.

The example below describes the definition of a station path with a single straight segment. For this example,
assume the following:
• The Robot is unit number 1
• The cassette station number is 15.
• Two (2) paths are going to be designated as numbers 3 and 4.
Defining this station path will require teaching three (3) points, as shown in figure 2-2.

Wafer Cassette

A B C

Figure 2-2. TS Station Teaching Points

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The procedure is as follows:

1. Place the wafer in the cassette. Make sure the wafer is the appropriate distance from the back of the
cassette.
2. Open the teach pendant port.
3. Enter: TS1 15 to start the teaching. The 15 indicates station number 15.
4. The teach pendant will ask: "PATH PLANNING?". Press the Y key.
5. The teach pendant will request: "POSITION AT FIRST POINr.
6. Move the end-effector directly under the center of the wafer in the cassette, as shown in Figure 2-2a.
In the teach pendant Jog Mode, jog the arm up until it lifts the wafer off the cassette with the desired
clearance, then press ENTER on the teach pendant. This defines the first teaching point (and the
path reference point inside the cassette).
7. The teach pendant will next ask: "TEACH DROPDOWN?". Press Y. Then, using teach pendant jog
mode, move Z down the desired drop-down distance, then press ENTER. Pressing ENTER will
cause the arm to move to the previous Z position to pick up the wafer.
(If N is entered for dropdown, do not change the Z position.)
8. The teach pendant will request: "POSITION AT SECOND POINT'. Move the wafer to any point on
the center line inside the cassette, as shown in Figure 2-2b. For best accuracy, the second point
should be defined with the wafer close to the open edge of the cassette. When the wafer is in
position, press ENTER.
The extraction / insertion direction for the cassette station has now been defined, as well as the path
endpoint within the cassette.
9. The teach pendant will request: "POSITION AT THIRD POINT'. The third point is where the wafer is
safe to be retracted directly to the Robot, without hitting the cassette, as indicated in Figure 2-2c.
Move the wafer to this point and press ENTER. The two (2) reference points for a straight path
segment into and out of the cassette have now been defined.
10. The teach pendant will now ask: "CIRCULAR PATH?". For this example press N. The arm will then
retract to the radial home position, as shown in Figure 2-3. The retracted theta position will be on a
straight line between the second reference point and the center of the Robot.
11. (Used only if circular path specified. See Section 2.3.3 below.)
12. (Used only for circular path.)
13. When the arm has retracted, the teach pendant will request: "PATH IN NO.?". This is the path
number to be assigned to the in-path. Enter 3.
14. Pendant: "PATH OUT NO.?" Enter 4 as the out-path number.
15. The teach pendant will next request: "USE ALL PATHS?". At this point, it must be decided whether
to use the all-paths option. Enter either Y or N. See the following section for a discussion of the all-
paths option.
16. Teach pendant: "PITCH?". Enter the cassette slot pitch, in inches (usually .25 for 200mm and .375 for
300mm).
17. Teach pendant: "NUMBER OF SLOTS?". Enter the number of cassette slots (usually 25)
18. Teach pendant: "INTERLOCK MASK?". Enter the interlock mask value (usually 0).
19. When the interlock mask value has been entered, the teach pendant will write "CREATING PATH"
while it is computing the internal path data.
20. After the path computation is done, the teach pendant screen returns to the default. At this point,
paths 3 and 4 for station 15 have been defined.

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if there was a problem with the path definition and the software cannot create a valid path, it will respond with
an appropriate error message.

Figure 2-3. Station Path and Retracted Position

2.3.2 All-Paths Option.

The All-Paths option indicates whether the arm is to always use the station paths, or if the path to and from a
station depends upon whether there is a wafer on the end-effector.
If Y (Yes) is specified for the alt-paths option, then all Gets and Puts to the station will always move along the
paths defined for the station, as shown in Figure 2-4. As is indicated in the figure, the All Paths option may
be necessary if a straight path into the cassette would cause the end-effector to interfere with the cassette.

Get or Put

Figure 2-4. Yes - For All Paths Option

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!f N (No) is selected for all-paths, the Robot uses a direct path to or from the cassette if there is no wafer on
the end-effector, as shown in Figure 2-5.

Get Put

Figure 2a5, No - For All Paths Option

If the end-effector has adequate clearance, then ALL PATHS should always be specified as N (No) in order
to improve the throughput. However, if the end-effector will not clear the cassette, then Y (Yes) should be
selected.
Specifying Yes for All Paths Is equivalent to setting the ALLPH parameter to 1 for that station. Specifying No
will cause ALLPH to be set to O for that station.

2.3.3 Teaching a Station Path With Circular Segments.

When a station path is a single straight segment, as described above, the arm will stop momentarily at the
outside reference point of the station path. By defining a circular segment station path, the arm can do Puts
and Gets with continuous movements. In addition, the station path will be defined all the way to the retracted
position.
The circular path is specified during the teaching procedure described in section 2.3.1 above. It requires two
(2) additional teaching points to be defined, as shown in Figure 2-6.

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. Robot

A B

Figure 2-6. Defining a Circular Station Path

To teach a point with circular paths, the same teaching sequence as used for the straight station path is used
up through step 9. The changes start at step 10 of paragraph 2.3.1, as follows:
10. The teach pendant will ask: "CIRCULAR PATH?". For a circular station path enter Y. In this case,
the arm will not retract, but remain at the last teaching point.
11. The teach pendant will request: "POSITION AT FOURTH POINT". Move the arm to a position away
from the third teaching point, as shown in Figure 2-6a. This is like creating a point for a custom path.
Press ENTER on the teach pendant to teach the fourth point.
12. The arm will automatically retract to the radial home position without changing the theta value and the
retraction will help define the fifth teaching point.
13. Teach pendant will request: "POSITION AT FIFTH POINT'. Rotate the arm in theta (and/ or move it
radially if necessary) to the final teaching point, as shown in Figure 2-6b. The point should be near
the radial home position, but not too close to the center of the Robot. The theta position must be
within the movement limits of the Robot. Press ENTER to learn the point.
As with creating a custom path, the radius of the circular segment depends upon the relative positions of the
outside path reference point and the fourth teaching point.

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2.4 jQiNT STATION PATHS

It is possible to connect two (2) individual station paths with a custom path. Before creating a joint station
path, two individual station paths must be taught using the TS command, as described above. Then, aver-
sion of the TP command is used to define a joint path between the two stations.
For joint station paths, four important concepts should be noted:
• At each station, only the single straight path segment going into the station is used for creating a joint
path. These are the segments defined by the first two reference points for each station.
• The joint station path is actually two (2) paths, one going from the first station to the second, the
other going from the second to the first.
• The two joint station paths go from the first (inside) reference point of one station to the inside refer-
ence point of the other station. That is: the two (2) newly created paths overlap the four (4) individ-
ual paths defined for the two stations. This is shown conceptually in Figure 2-7, where path 5 over-
laps paths 1 and 4, and path 6 overlaps paths 3 and 2.
• Creation of joint station paths does not delete or override the individual station paths; they can still be
used (and usually are).

Station 22 Station 11 Station 22 Station 11

It 1• a I. ..
.,I
~1
9'
_.

0
Ji ' ~1
9'
(.,)
ji
(J:)

:5
co
a.
' 1.-'
I()

:5
(II
a.
'

Figure 2-7. Individual and Joint Station Paths

There are essentially three (3) types of joint station paths that can be created:
• A semicircular path joining two (2) aligned side-by-side stations.
• A custom path, with one straight and two circular segments, joining two stations.
• A custom path joining two stations that requires more than one straight segment.
Three (3) examples below describe the procedure for defining each type of joint station path. For all of the
examples, it is assumed that the Robot unit number is 1. The station numbers and path numbers are as de-
fined in each example.

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2.4.1 Semicircular Joint Station Path.

The simplest joint station path connects two side-by-side stations wlth a single circular segment, as shown in
Figure 2-8. However, as pointed out in Chapter 1, this kind of path requires that the Robot be far enough from
the cassettes that the path does not pass near or beyond the center of the Robot.

Station 14 Station 16

i
!
Path 8 Path 7

..... ··-·············· ·-········-···············-··· .•... ···-/-···········-··

Figure 2w8: Semicircular Joint Station Path

The two (2) stations need not be located symmetrically with respect to the Robot, as long as the path does
not exceed the movement capabilities of the Robot. However, the two (2) outside reference points must be
aligned perpendicular to the individual station paths.
The procedure is as follows:
1. Open the teach pendant port.
2. Enter TP1 ST 14 16 to indicate that you are going to teach a path between stations 14 and 16.
3. The teach pendant responds: "ARE YOU SURE?". Enter Y.
4. The teach pendant will then ask: "NO. OF STRAIGHT PATHS TO ADD?". Enter 0.
This indicates that a semicircular path is to be created.
5. The teach pendant will ask: "14 TO 16 PATH NO.?". Enter 7 (the path number).
6. The teach pendant will ask: "16 TO 14 PATH NO.?". Enter 8.
7. The teach pendant will display "CREATING PATH" while it is computing the path data.
8. When the path computation is done, the teach pendant screen returns to the default. At this point,
paths 7 and 8 have been defined between stations 14 and 16.
Note that it was not necessary to teach any new points; the Robot used the station outside reference points
to create the semicircular path.

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2.4.2 Simple Joint Station Path.

A simple joint station path can be created which connects two (2} side-by-side stations with a single straight
and two (2) circular segments. Defining this path requires the teaching of two (2) points. For the discussion
below, refer to Figure 2-9.
Station 16 Station 16
Station 14 Station 14

0
0

2
·---)0 -----·· .

0
Teaching Points Joint Path

Figure 2-9. Simple Joint Station Path Definition

Note that the cassettes stations need not be symmetrical to the Robot, or even aligned with each other. Also,
the straight line segment does not need to be perpendicular to the station path segments. Of primary impor-
tance: the teaching points should be defined to allow adequate radii for the circular segments. Also, the path
segments cannot pass near or beyond the center of the Robot.
The procedure is as follows:
1. Open the teach pendant port.
2. Enter TP1 ST 14 16 to indicate a path between stations 14 and 16.
3. The teach pendant responds: "ARE YOU SURE?". Enter Y.
4. The teach pendant will then ask: "NO. OF STRAIGHT PATHS TO ADD?". Enter 1.
This indicates a simple path with one additional straight segment (and two circular segments).
5. The teach pendant will ask: "POSITION AT FIRST POINT'. Move the end-effector so that the center-
of-wafer position is at the first teaching point, as shown in the figure. Press ENTER.
6. The teach pendant will then ask: "POSITION AT LAST POINT'. Move the end-effector to the second
teaching point and press ENTER.
7. The teach pendant will ask: "14 TO 16 PATH NO.?". Enter 7.
8. The teach pendant will ask: "16 TO 14 PATH NO.?". Enter 8.
9. The teach pendant will display "CREATING PATH" while it is computing the path data, then return to
the default screen.

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2.4.3 Complex Joint Station Path.

A complex joint station path is defined as a path that requires two or more additional straight segments to be
defined. This kind of path can be useful when the stations are not side-by-side, or if the Robot arm needs to
avoid an obstacle.
The overall procedure is essentially the same as that described for the simple path above. For consistency,
the entire procedure is given, but the only differences are in steps 4 through 8. There are two (2) new
straight segments, and thus four (4) teaching points will need to be specified. Refer to Figure 2-10 as an ex-
ample of how to define the teaching points for the two (2) straight segments (and three (3) circular ones).
Figure 2-11 shows the final path.
1. Open the teach pendant port.
2. Enter TP1 ST 17 29 to indicate a path between stations 17 and 29.
3. Pendant: "ARE YOU SURE?". Enter Y.
4. Pendant: "NO. OF STRAIGHT PATHS TO ADD?". Enter 2.
This indicates a path with two (2) additional straight (and three (3) circular) segments.
5. Pendant: "POSITION AT FIRST POINT'. Move end-effector to teaching point 1. Press ENTER.
6. Pendant: "POSITION AT LAST POINT'. Move to teaching point 2 and ENTER.
7. Pendant: "POSITION AT FIRST POINT'. Move to teaching point 3 and ENTER.
Note where this point is specified in order to avoid the obstacle.
8. Pendant: "POSITION AT LAST POINT'. Move to teaching point 4 and ENTER.
9. Pendant: "17 TO 29 PATH NO.?". Enter 8.
10. Pendant: "29 TO 17 PATH NO.?". Enter 9.
1.1. Pendant: "CREATING PATH", then displays the default screen.

Station 29
-_ '', 1£ - I

Station 17

• • 4

'
Figure 2-10. Complex Joint Station Path Teaching Points

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Station 29

StaUon 17

)j(
I

Figure 2-11. Final Complex Joint Station Path

2.4.4 Individual and Joint Station Path Numbers.

An important point to understand is that when a joint station path is created between two (2) stations, the
original individual station paths can still be used.
Figure 2-12 shows both the individual and joint station paths for Stations 10 and 12. The individual station
paths are 1, 2, 3 and 4. The two (2) joint path numbers are 5 and 7. As an example, it is possible to extend
to Station 10 using path 2, get a wafer, transfer it to Station 12 using path 7, then retract the arm using path
3.
Station 12 Station 10 Station 12
Station 10
.' ' ~.' ~ . ' :::~ ' ..'.'

l1 l1 Path 5
Path 1 Path 2 Path 3 Palh 4

Robot

Figure 2-12. Individual and Joint Station Path Numbers

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2.5 PATH PLANNING FINE TUNING

2.5.1 Changing PVEL and PACC Parameters.

After a path is taught, the first path tuning step is to adjust the PVEL and PACC parameters. PVEL defines
the maximum velocity and PACC defines the acceleration of a trapezoidal profile. These parameters repre-
sent the linear speed a point at the center of the wafer moves on the x-y plane. The wafer center travels the
same speed regardless of robot arm size. However, larger arms are limited in terms of maximum speed. By
increasing these values, path speed increases.
Due to this complexity, the profile generation may fail when the two (2) parameters are up to certain values.
When the algorithm fails to generate the profile, an error message will be displayed. This section describes
how to reach the profile limit, and the meanings of each error message.

2.5.1.1 Common Values to Use.

Before changing values of PVEL and PACC, it is good to know the range of the values that can be used. By
default, PVEL is 10 inch per second and PACC is 50 inch per second per second. A path created with these
values is slow, and is good for testing when it is first taught. After trying the default values and the path is
running smooth, higher values can be used. 20-30 for PVEL and 100-200 for PACC are considered to be
medium speed. A fast path to be run in a small arm can get up to 60 for PVEL and 1000 for PACC.
Note that PVEL and PACC have different units than those used for standard axis velocity and acceleration.

2.5.1.2 Profile Limitation.

With a single straight segment path, when the acceleration is insufficient to reach the maximum velocity, a
triangle profile will be formed. With a path combining straight and circular segments, maximum velocity must
be reached in order to create the path successfully. This is because the circular segment has to run in con-
stant speed, and this speed is set by a parameter called PTURN. By default, this turning speed is set to be
the same as the maximum velocity, PVEL. Before entering the circular segment, the path speed has to get
up to the turning speed. Also, after the circular segment, the path has to be long enough to decelerate from
the turning speed to stop. Therefore, the path has to be taught so that the straight segments before and after
the circular segment are long enough to be able to reach the maximum velocity. Paragraph 2.5.2 describes
how to teach a better circular segment path.

2.5.1.3 Error Messages Meanings.

Whenever the algorithm fails to create a path, an error message returns. Without knowing what this error
message means, path performance cannot be maximized. There are four (4) error messages described be-
low:
1. Too many points
This error message occurs when the total number of path data points exceeds 210. The non-volatile
memory allocated for each of the 12 paths is fixed to store only 210 data points. The more time the
path takes, the more data points it requires. Speeding up the path or shortening the distance the path
travels can fix this problem. So either the path is too slow or the path is too long.
2. Not enough acceleration
This error message occurs when the path's straight segments before and after the circular segment
are not long enough to reach the maximum velocity or the turning velocity. Increasing the PACC
makes the velocity reach maximum earlier. Decreasing PVEL makes it easier to reach maximum
velocity. If increasing velocity still does not fix the problem, the path must be taught again with longer
straight segments before and after the circular segment.

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3. Path not continuous and Path cannot turn

These error messages come up when the path is taught incorrectly. In some cases, the circular seg-
ment of a path cannot be formed properly. The only way to fix this problem is to teach the path again.
This is explained in more detail in the next chapter.

2.5.2 Teaching a Better Circular Path.

For a path with a combination of straight and circular segments, its performance depends on the shape of the
circular segment. Its radius and, its tangents to its adjacent straight sections define each circular segment. If
the turning radius is too small, the path is going to turn very rapidly, and appear not smooth. If the turning
radius is too big, the path will not be able to run fast or the circular segment cannot even be created. This
chapter explains how to teach a path with a circular segment that performs the best.

2.5.2.1 Relationship Between Teaching Points and Turn Radius.

The first three (3) taught points define the straight segment that allows the wafer to move in and out of the
cassette. The 4 th teaching point defines how big the turn radius is. Figure 2-13 shows typically where the po-
sition of the 4th teaching point should be placed and the size oft.he turn radius is created.

Figure 2-13. Turn Radius

Figure 2-14 shows the consequence of the 4th teaching point being taught too far away from the cassette. A
large turn radius is created and it causes the straight retracted segment after the circular segment too short.
In this case, the error message "Not enough acceleration" will be displayed, which means there is not enough
distance for the given acceleration to reach the maximum velocity.

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m .'

.....
.
,' ·····............
..
..
...
--..
2nd reference point
•••••••••....•••••••••••..••••• !"

.....
4th teaching point ·· ..... __

Robot

Figure 2-14. Large Turn Radius

Figure 2-15 shows an illegal 4 th teaching point. The line created by the 4'h teaching point and the center of the
robot intercepts between the first 2 reference points. The circular segment cannot be created in this situation.
Therefore, an error message "Path cannot turn" or "Path not continuous" is returned.

2nd reference point

--.

4th teaching point

...
Robot

Figure 2-15. Illegal Teaching Point

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2.5.2.2 Best Profile For Best Performance.

Figure 2-16 is a typical velocity-distance profile of a path with a circular segment._Notice that the maximum
velocity is reached before entering the circular segment. Both (a) and (c) segments have to be long enough
to accelerate to the maximum speed. If either one of the two (2) segments is too short, the maximum velocity
has to be lowered. It means that the length of the straight segments limits the speed of the path. As a result,
a high-speed path requires that the two (2) straight segments to be as long as possible.

circular
segment
straight straight
segment segment

a b C
Distance

Figure 2-16. Velocity-Distance Profile

2.5.3 Using PFVEL and PFACC.

When path speed is increased beyond a certain level, the problem of over-shooting becomes obvious. This
problem is caused by the nature of path planning in which motors are moving non-linearly. In some regular
rotation and extension movements, over-shooting only occurs in the moving direction. In path planning, over-
shooting can occur both in the direction of movement and on the side. In order to reduce this over-shooting
problem, the end motion of the path has to be controlled. Path planning has the capability to control the final
deceleration. By reforming the profile, the path can be made to decrease the speed to a certain level at a
specified distance before the end point. Figure 2-17 shows a profile after reformation.

PACC

circular I
segment
straight straight
segment : PFACC
segment
/7
a b C
:~:
Distance PFDIS

Figure 2-17. Profile Reformation to Minimize Overshoot

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Using this featurn is simple. The default value of PFD!S is O (disabled). Use ST1 PFDIS 1 to apply one (1)
inch final distance before end point of the path. The default value of PFACC is 20. Use a value that is not too
much different from the PACC, or the result of over-shooting will not reduce. Notice that the straight segment
after the circular segment is shortened because of applying the final distance move. The possible maximum
velocity will also be reduced.

2.6 USING GS AND PS COMMANDS TO MOVE WAFERS

The GS and PS commands have been augmented for use with path planning. Previously, only the station
and the slot number needed to be specified. However, with path planning, it may also necessary to specify
the path to or from the station. This section describes how the revised GS and PS commands are used.

2.6.1 Revised GS and PS Commands.

The revised GS and PS commands have the formats:
GS# {sn} {sl} [{path} {stay}] [{pd}] [{pf}]

PS# {sn} {sl} [{path} {stay}] [{pd}] ({pf}]

As before, {sn} is the station number, {sl} is the slot number, {pd} is the optional paddle number and {pf} is the
optional speed profile. However, an optional {path} number and {stay} flag combination can be specified.
{path} is the path value that will be used for the put or get. When specifying a transfer between stations using
a joint station path, the path number must correspond to the direction of the transfer. If a put or get is to an
Individual station, then {path} should not be specified (or it should be specified as zero), since by defining the
· station, the station's paths are automatically specified. These concepts will be demonstrated by some exam-
ples below ..
{stay} is a flag value that can be either O or 1. If {stay} is zero (O), the arm will automatically retract following
the Put or Get. If {stay} is one (1) , the arm will stop after picking or placing the wafer. If {stay} is to be
specified without a {path} specification, then the {path} value should be set to zero (0).
The {pd} value should not be specified. Paths can be used with 2-paddle arms, but the paddle used is de-
fined by the teaching procedure. This is described in Section 2.6.7.
The {pf} speed profile value is not used when moving along a defined path. The value will be used only when
the arm is making any transitional moves between paths.
Chapter 3 describes the revised GS and PS command syntax in more detail.

2.6.2 Using an Individual Station Path.

An individual station path can be used by Itself to, for example, move wafers into or out of a cassette. When
a GS or PS is given for an individual station path, the path numbers should not be specified. Since the sta-
tion number is given, the software will know which path to use. -
An example is shown in Figure 2-18, where Station 5 has the individual station paths 1 and 2. However, as
mentioned above, the path numbers will not be used.
The figure shows a continuous station path, but the example would also be valid for a single-straight-segment
individual station path.

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Station 5

Path2 iI 1
Path 1

Retracted
Position

0
·Robot

Figure 2-18. Using an Individual Station Path

Assume the Robot has unit number 1, with the default paddle and speed values. To transfer a wafer in Sta-
tion 5, from slot 9 to slot 10, use the following command sequence:
GS1 5 9
PS1 5 10
The GS Gets the wafer using the station path. However, if All-Paths has been set to No, the arm will proceed
straight to the wafer. When the wafer has been picked up, the arm retracts along the station path. Note
again that the GS command does not use the path number. If the {stay} option were to be used, the path
number would be zero (0).
Next, the PS command is processed. The arm will move to the station along the path. When the wafer has
been Put, the arm will retract. If All-Paths has been set to No, the arm will retract directly.
If the PS command had used a {stay} value of one, as in:
PS1 5 10 0 1
Then when the wafer had been Put in slot 10, the arm would drop down but not retract.

2.6.3 Combining Straight-Segment Station Paths.

When individual station paths have been defined, they can be used to transfer wafers between two (2) sta-
tions. Note that this is not the same as using a joint station path, which is described below.
In the simplest case, two (2) straight-segment individual station paths can be combined. This situation is
shown in Figure 2-19, where Station 6 and Station 7 each have individual station paths. The station paths
are not numbered; for this example, the path numbers are not needed.
Note that since the retracted positions from the stations do not connect, ~he Robot will automatically perform
a theta transition.

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Station 6 Station 7

Starting
Point

Figure 2-19. Combining Straight-Segment Station Paths

Assume the Robot has unit number 1, and the center-of-wafer position of the end-effector is at the starting
point shown in the figure. To transfer a wafer from Station 6, slot 18 to Station 7, slot 19, and retract the arm,
use the following command sequence: ·
GS1 6 18
PS1 7 19
The GS Gets the wafer by first extending radially to the external path reference point at Station 6, then fol-
lowing the station path into the cassette. However, if All-Paths has been set to No, the arm will proceed
along a straight path to the wafer. When the wafer has been picked up, the arm retracts to the radial-home
position.
When the PS command is processed, the arm will first rotate along theta, then move to Station 7 by extend-
ing to the external station-path point and following the path into the cassette. When the wafer has been Put,
the arm will retract. If All-Paths has been set to No, the arm will retract along a direct path.
Note that paths can be combined even If the stations are not side-by-side. Figure 2-20 shows another possi-
ble configuration. The key restriction is that the theta rotation does not exceed the Robot's limits.

Figure 2-20. Opposing Straight-Segment Paths

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2.6.4 Combining Circular Station Paths.

When the stations have each been defined with circular segments, the user defines both the radial and the
theta values of the retracted location. This allows two (2) stations to be defined with the same retracted posi-
tions, eliminating the need for the retracted theta rotation. When the first station of a pair is taught, the last
teaching point should be selected approximately halfway between the two cassettes. The XY coordinates
(displayed on the teach pendant) should be written down. When the second station path is taught, the last
teaching point can be jogged to exactly the same coordinates. Thus, the two (2) individual station paths
overlap at the endpoints, as shown in Figure 2-21.

Station 22 Station 33

Figure 2-21. Combining Individual Station Paths

Note that even though the station path numbers are shown, they will not be used when Putting to and Getting
from the stations.
To transfer a wafer from Station 22, slot 12 to Station 33, slot 14, and not retract the arm after the put, use
the following command sequence:
GS1 22 12
PS1 33 14 0 1

The GS Gets the wafer from Station 22 along the station path. However, if All-Paths had been set to No, the
arm will proceed straight to the wafer. When the wafer has been picked up, the arm retracts along the path
for Station 22.
When the PS command is processed, the arm will move to Station 33 along the station path. The {stay} pa-
rameter is set to one (1 ), so when the wafer has been Put, the arm will drop down, but not retract. Since the
arm does not retract, the All-Paths option will have no effect. Note that because {stay} was specified, a path
value of zero (0) had to be entered as a placeholder.
As before, paths can be combined even if the stations are not side-by-side. Figure 2-22 shows another valid
combination of individual station paths.

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Figure 2-22. Offset Individual Station Paths

2.6.5 Using Joint Station Paths.

When a joint station path has been defined between two (2) stations, direct transfers between the two (2) sta-
tions can be done using the two (2) joint path numbers. Remember that the individual station paths still exist
and can be used independently of the joint station paths. As an example, Figure 2-23 shows Stations 16 and
18. Station 16 has continuous station paths 1 and 2, and Station 18 has continuous paths 3 and 4. The joint
paths between the stations have been assigned the values 6 and 8. Points A and B indicate the retracted ·
positions for each individual station path.
Station 16 Station 18 Station 16 Station 18

Path 8

Robot Robot

Individual Paths Joint Paths

Figure 2-23. Individual and Joint Station Paths

As an example, assume that the Robot arm is in the retracted position {point A). and a wafer needs to get
from Station 16, slot 5 and transferred to Station 18, slot 25, then retracted to the Robot {point B).
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The following sequence wouid be used.

GS1 16 1 0 1
PS1 18 25 8 0
The GS goes to the wafer along the Station 16 path. (lf All-Paths have been set to No, the arm will proceed
on a straight path to the wafer.) Since the {stay} flag has been set to one (1 ), the arm will pick up the wafer
from slot 1 and stop.
Next, the PS command tells the arm to move to Station 18 along path 8. Since {stay} is zero (0), when the
wafer has been Put, the arm will drop down and retract back to point B.
As a somewhat more complex example, assume that the arm is still retracted at point B, and the following
needs to be accomplished:
1 ) Pick up a wafer from Station 18, slot 9
2) Put it into Station 16, slot 12
3) Get a wafer from Station 16, slot 23
4) Put it in Station 18, slot 1, then
5) Retract the arm.
This would be done with the following sequence of commands:
GS1 18 9 0 1
PS1 16 12 6 0
GS1 16 23 0 1
PS1 18 1 8 0
Note that for the above example configuration, since the individual station paths have circular segments, the
points A and B could have been defined to overlap.

2.6.6 Path Z-Transition Point.

In the above examples, the Robot moves the wafers to different slots in the different cassette stations. Obvi-
ously, in each case the Robot will have to make a Z-axis movement somewhere on the path. This position
on the path is called the path Z-Transition point.
Each station path has a Z-transition point which is automatically defined when the path is created. For the
individual station paths, the 2-transition point is defined to be at the second (outside) reference point for the
station, since at that point the wafer is clear of the cassette. Each joint station path has two (2) such refer-
ence points on the path. For joint station paths, the Z-transition point is defined as the second reference
point of the station for the path coming out of the station. This is shown conceptually in Figure 2-24.

,. II

'

I I
Path 1
Z-TransiUon
\ Path 2
z,Transition
Point Point

Figure 2-24. Z-Transitlon Points

Page 2-22 ASYST TECHNOLOGIES

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 Asyst SmartCourse™ Manual

Note that for a single segment station path, there is no transition point; the Z-transition occurs during the ex-
tension to or retraction from the station path reference point.
The Z-Transition point for each path is stored in the PATHZ parameter. The value of each PATHZ is the
number of an internal path reference point. Thus, the number can be relatively large, even for a simple path.
If for some reason, it is necessary to change a PATHZ value (to get more clearance, for example), the value
can be modified using the ST command. Like some other parameters, this value is best adjusted in a trial-
and-error fashion. After a path has been defined, use the GT command to find the PATHZ value for that
path. Adjust it as follows:
• To move the point away from the station, increase the PATHZ value.
• To move the point toward the station, decrease the PATHZ value.
The value may have to be adjusted up or down by several counts in order to make any significant difference.
Z-Transition points are defined only for paths associated with stations; the value of PATHZ for a custom path
is meaningless. See Chapter 3 for the formal description of the PATHZ parameter.

2.6.7 Double-Paddle End-Effectors.

Path planning can be used with double-paddle end-effectors. However, their use is not automatic (as it is
when using the non-path-planning GS and PS commands), and careful thought is required when defining
paths with both paddles.
Also remember that only one value of the PEEL parameter is defined. Thus, if both paddles are used, the
PEEL distance must be the same for both ends of the end-effector.
When teaching a set of paths, either paddle can be used to define the center-of-wafer position. The only re-
quirement is that all related paths (that is, station paths) be defined using the same paddle. For example,
. paths for Stations 11 and 12 can be defined for paddle 1, and Stations 31 and 32 can be defined with paddle
2. Joint station paths can be created between Stations 11 and 12, and between Stations 31 and 32.
However it is a very bad idea to teach, for example, Station 5 with paddle 1 and Station 6 with paddle 2 and
then try to define a joint station path between the two (2) stations.

2.7 USING FIXTURES

All of this information may seem confusing and complicated, but with a well-integrated system, this should be
transparent to the operator. Here is how that can be accomplished. Most Robot installations have a predict-
able layout, perhaps with one (1) or two (2) stations that require path planning. The engineering integration
team can determine good values for PACC, PVEL, PTURN, PFOIS, and PFACC using the above procedures
and understanding ahead of time. They can then provide a template for teaching path points 2, 3, and 4, that
will produce known-good curve and linear segment lengths.
Such a template might be a piece of Plexiglas or aluminum that looks something like the example in
Figure 2-25.

ASYST TECHNOLOGIES
11558-002 Revision B
Asyst Smartcourser"' Manual

0
0
4

Figure 2-25. Teaching Template

The template should slide snugly into a cassette slot.

To use the template, teach points 1 and 2 as normal. Insert the template and position the wafer pentered over
points 3, then point 4. To teach point 5 simply retract the arm straight back to R = 0.0. This will produce a
known-good path each time. Other methods can be used to make this even more accurate, by positioning
sensors at the various positions on the template rather than by using one's eyeball.

2. 7.1 Variations.
Often there will be a mirror image station on the other side of the Robot. The same ~emplate can be used,
but put another point 4 on the other side.
Stencil outlines of the tip of the puck can be drawn on the template, so the user can just lay the puck on the
template to identify the points more precisely.

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 Asyst SmartCourse™ Manual

CHAPTER 3 Path Planning Reference '\ (

3. CHAPTER DESCRIPTION
This Chapter provides reference descriptions of the path planning built-in commands,
path management commands, configuration parameters and error messages.

3.1 NEW BUilT-IN COMMANDS

Three new built-in commands are added for path planning .. The TP command is used to
teach path points. The PH command will move the robot along a path. The CP com-
mand is used to recalculate the internal points of a path.
As used in the Software Manual, the word (motion) indicates a motion command, and
the ® character indicates that the command cannot be executed while a macro is running.

TP Teach a Path (motion) ®

Description:
Used to teach the points in a path. This command is interactive and puts the ro-
bot into joystick mode. The robot will prompt for certain responses. Then the
user moves the robot arm to define the teaching points for the path.
There are two versions of the command:
1. The first version is designed to teach a custom path, without any reference to
cassette stations. In this case, a single path number is specified, and the ref- ·
erence points for the path are defined using the teach pendant.
2. The second version is for teaching paths between two stations (a joint station
path). An individual station path for each of the two stations must have been
previously taught with the TS command. Unless a semicircular joint path is
specified, the connecting path segments are defined using the teach pendant.
Note that this command cannot be executed while a macro is running.
Syntax 1:
TP# {path}
{path} A single path number from 1 to 12. This is the number that will be
assigned to the custom path to be taught.
Syntax 2:
TP# ST {snl} {sn2}
ST Keyword indicating that a joint station path is to be planned between
two previously-defined cassette stations.
{sn 1} First station number (integer) to be used in defining the path.
{sn2} Second station number (integer) to be used in defining the path.

3-1 Path Planning Reference

 Asyst SmartCourse"' Manual

Reply:
Interactive on the teach pendant (see examples).
Notes:
1. When a {path} value is specified, any previous data with that path number
will be overwritten. The {path} number must not be the same as a path num-
ber defined in an individual station path.
2. When the {snl} {sn2} values are specified, the robot will request the numbers
of both the path-in and the path-out. Thus, two new paths will be defined.
See Also:
TS

Example 1:
TPl 4
ARE YOU SURE? Y
NO. OF STRAIGHT PATHS? 2
POSITION AT PATH START
POSITION AT PATH END
POSITION AT PATH START
POSITION AT PATH END
CREATING PATH

· Example 2:
TPl ST 4 5
ARE YOU SURE? Y
NO. OF STRAIGHT PATHS TO ADD? 2
POSITION AT FIRST POINT
POSITION AT LAST POINT
POSITION AT FIRST POINT
POSITION AT LAST POINT
4 TO 5 PATH NO.? 7
5 TO 4 PATH NO.? 8
CREATING PATH

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 Asyst SmartCourse"" Manual

PH Run a Path (motion) ® ·+ (

Description:
Used to move the robot along a given path. The path must have been previously
defined using the TS or TP commands.
This command is typically used for testing a path, but can also be used in some
cases for executing a "custom" GS or PS command movement.
This command cannot be executed while a macro is running.
Syntax:
PH# {path} [ {code}]
{path} Path number to be run. This path must have been previously defined
using the TP command.
{code} Optional code indicating how the robot is to move to the first point
of the path, as follows:
0 Start path from the current robot position. Default value if
{code} is not specified. Assumes that the end-effector is at
exactl;l the starting point of the path. See Notes.
1 Retract arm to radial home. Theta move, then radial move to
the path starting point.
2 Simultaneous radial and theta move from the current position
to the path starting point.
Reply:
#:OK
Notes:
1. If {code} is zero, the robot end-effector center-of-wafer position must be at
the path starting point. If either the elbow motor encoder or the shoulder mo-
tor encoder is not within the tolerance defined by the PTOL parameter, the
command will not be executed and an error message will be given. .... ,.~
. (

See Also:
TP, TS, PTOL
Example:
PH2 3 1
2:0K

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 Asyst SmartCourse™ Manual

I r-z; E5-C- ·-- --!!'!! . . ! ___ _

CP Calculate Paths Data

Description: '
Used to calculate the internal points that define a path. Normally the internal
points are calculated whenever a TP command is completed. However, if a path
planning configuration parameter has been changed, it may necessary to issue the
CP command to re-calculate the internal path definition points.
There are two versions of the command:
1. The basic command re-calculates the values for a custom path. In this case,
a single path number is specified.
2. The second version is for re-calculating individual station paths. For this
format, a station number is specified. This will cause re-calculation of both
paths associated with the station. --
Note that this command cannot be executed while a macro is running.
Syntax 1:
CP# {path}
{path} The number of the path (1 to 12) whose internal path points are to be
recalculated.
Syntax 2:
CP# ST {sn}
ST Keyword indicating that both paths are to be recalculated for an in-
dividual station.
{sn} Station number (integer) whose individual station paths are to be re-
calculated.
Reply:
#:OK
Notes:
1. When a path is recalculated, any previous data calculated for that path will be
replaced.
2. Only the specified path (or station paths) will be recalculated; all other paths
will not be affected. This allows, for example, different speed values to be
used for different paths.
See Also:
TP, TS
Example 1:
CPl 2
l:OK
Example 2:
CP1 ST 3
1:0K

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 Asyst SmartCourse"' Manual

3.2 MODIFIED BUilT-IN COMMANDS

The commands described below are modifications of existing commands. The TS com-
mand syntax has not changed, but the robot response will be different if path planning is
used. The GS and TS commands have two additional (optional) arguments that allow
specifying puts and gets along joint station paths.

TS Teach Station (motion) ®

Description:
For path planning, used to teach an individual station path. When this command
is given, the robot will ask if path planning is to be used. If the user responds
"Y" (yes), then the robot will guide the user in teaching a path for the specified
station. ·
The user will be asked to teach three points which will be used to define two ref-
erence points for the station. These reference points will define a paths into and
out of the cassette. Optionally, a continuous station path (a two-straight-segment
path) can be defined between the cassette and the robot.
This command cannot be executed while a macro is running.
Syntax:
TS# {sn}
{sn} Station number (integer from 1 to 40) for which the two station paths
are to be defined.
Reply:
Interactive on the teach pendant (see example).
Notes:
1. Note that when path planning is used for the TS command, it is assumed that
only a single paddle will be used. If the robot has two paddles, the path can
be taught for either paddle.
....,__
~ (

See Also:
Tl?, Cl?
Example:
TSl 12
PATH PLANNING? Y
POSITION AT FIRST POINT
TEACH DROPDOWN? N
POSITION AT SECOND POINT
POSITION AT THIRD POINT
CIRCULAR PATH? N
PATH IN NO.? 3
PATH OUT NO.? 4
USE ALL PATHS? Y
PITCH? .375
NUMBER OF SLOTS? 25
INTERLOCK MASK? 0
3-5 Path Planning Reference
 Asyst SmartCourseTM Manual

CREATING PATH

-~

GS Get Wafer From Station (motion) ®

Description:
Gets a wafer from a station. When path planning is used, the robot end-effector
moves along a planned path when possible. The user also has the option of
specifying whether the arm will stop after it picks up the wafer, or retract back to
the robot.
Motion along the path is determined by the path speed parameters (P ACC,
PVEL, PTURN). If a transition is made to or from a path, that movement will
be done at Medium speed, unless otherwise specified in the command.
This command cannot be executed while a macro is running.
Syntax:
GS# {sn} {sl} [ {path} {stay}] [{pd}] [{pf}]
{sn} Station number (integer).
{sl} Slot number (integer).
{path} Path number to be used for the get. This number is required only for
joint station path movements.
{stay} Indicates what the arm is to do after it picks up the wafer:
0 Retract the arm (default)
1 Stop the arm
{pd} Paddle number (1 or 2). For path planning, this number has no
meaning and should not be specified.
{pf} Optional speed profile character. Affects only arm movements that
do not follow a path.
Reply:
#:OK Command accepted.

Notes:
1. If the GS is for an individual station, the {path} parameter should not be
specified, or should be specified as zero.
2. If the optional [{path} {stay}] is not specified, the robot will use the individ-
ual station paths, if specified. Also, the arm will retract after picking up the
wafer.
3. If the ALLPH parameter is set to 0, and the path number indicates a single
station path, then the arm will extend directly into the cassette, and not use the
station path.
See Also:
PS, TS, TP, ALLPH
Example:
GSl 4 1 5 0
l:OK

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 Asyst SmartCourse"' Manual

--UY!""'WWW__,_ _ _ _ _ _ _ _ _ _ _.,.~--WWW........,_,lltl...,_,..
____ •. ._,_---_,......-•. ,o=======
•_·•·"'-'·.{-"""i,li,ar"'-

PS Put Wafer In Station (motion) ®

\ (
Description:
Puts a wafer in a station. When path planning is used, the robot end-effector
moves along a planned path when possible. The user also has the option of
specifying whether the arm will stop after it places the wafer, or whether it will
retract back to the robot.
Motion along the path is detennined by the path speed parameters (PACC,
PVEL, PTURN). If a transition is made to or from a path, that movement will
be done at Medium speed, unless otherwise specified in the command.
This command cannot be executed while a macro is running.
Syntax:
PS# {sn} {sl} [ {path} {stay}] [{pd}] [{pf}]
{sn} Station number (integer).
{sl} Slot number (integer).
{path} Path-Planning path to be used for the put. This number is only re-
quired for joint station paths.
{stay} Indicates what the arm is to do after it places the wafer:
0 Drop-down and retract the arm (default)
1 Drop-down and stop the arm
{pd} Paddle number (1 or 2). For path planning, this number has no
meaning and should not be specified.
{pf} Optional speed profile character. Affects only arm movements that
do not follow a path.
Reply:
#:OK Command accepted.

Notes:
1. If the PS is for an individual station, the {path} parameter should not be speci-
fied, or should be specified as zero. ..., ,-.~ 1

2. If the optional [{path} {stay}] is not specified, the robot will use the individ-
ual station paths, if specified. Also, the arm will retract after placing the wa-
fer.
3. If the ALLPH parameter is set to 0, and the path number indicates a single
station path, then the arm will retract directly from inside the cassette, and not
use the station path.
See Also:
GS, TS, TP, ALLPH
Example:
PS1 22 1 8 1
1:0K

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 Asyst SmartCourse"' Manual

3.3 PATH MANAGEMENT COMMANDS

These commands are used to manage the path descriptions. They are similar in concept
to the macro-management commands.
Note that, like macro management commands, a unit number can be appended to the
command to specify the robot to which it will apply.

PATH ... ENDPATH Path Description Data

Description:
Define the beginning and end of a path description, similar to the MACRO and
ENDMAC keywords. Lines following the PATH statement describe the internal
data for the path. ·
Path data can be described in three forms:
1. Raw data: The software-generated internal path point data used by the pro-
gram to compute the robot arm movements. This data will contain much
more information than a simple description of the path reference points.
2. XY path record: For each straight segment in the path, the first and last path
reference point positions given as Cartesian (X-position and Y-position) val-
ues. Also, each segment's acceleration and velocity values.
3. RT path record: Data for each straight path segment, given in cylindrical
(Radial and Theta) coordinates.
Typically, the data defined in a path description is defined by teaching a path,
using the TP and TS commands, rather than by entering it manually. The Path
Description data output can be generated using the PRINTPATH command.

Syntax 1:
PATH[#] {path} ......
{psi}, {vsl}, {asl}, {pel}, {vel}, {ael}, {til} ........~-~

{ps2}, {.vs2}, {as2}, {pe2}, {ve2}, {ae2}, {ti2}

{ps3} , {vs3} , {as3} , {pe3} , {ve3} , {ae3} , {ti3}

ENDPATH
where:
{path} Path number of the path being described
{ps?} Shoulder encoder position of an internal path point.
{vs?} Shoulder velocity to the next internal point.
{as?} Shoulder acceleration to the next internal point.
{pe?} Elbow encoder position of an internal path point.
{ve?} Elbow velocity to the next internal point.
{ae?} Elbow acceleration to the next internal point.
{ti?} Time interval to the next internal point.

3-8 Path Planning Reference

 Asyst SmartCourseTN Manual

Syntax 2:
-~ i
PATH {path} XY
{xsl}, {ysl}, {xel}, {yel}, {vl}, {al} ,o
{xs2}, {ys2}, {xe2}, {ye2}, {v2}, {a2}, 0

{xsn}, {ysn}, {xen}, {yen}, {vn}, {an}, 1

ENDPATH
where:
{path} Path number of the path being described.
XY Indicates a Cartesian path record.
{xs?} X-position of the segment starting point.
{ys?} Y-position of the segment starting point.
{xe?} X-position of the ending point.
{ye?} Y-position of the ending point.
{v?} Velocity value for the segment. If zero, then PVEL is used.
{a?} Acceleration value for the segment. If zero, then PACC is used.
0,1 Flag value to indicate data termination.

Syntax 2:
PATH {path} RT
{rsl}, {tsl}, {rel}, {tel}, {vl}, {al} ,O
{rs2}, {ts2}, {re2}, {te2}, {v2}, {a2}, O

{rsn}, {tsn}, {ren}, {ten}, {vn}, {an}, 1

ENDPATH
where:
{path} Path number of the path being described.
RT Indicates cylindrical data for the path record.
{rs?} Radial position of the segment starting point.
{ts?} Theta position of the segment starting point.
{re?} Radial position of the ending point.
{te?} Theta position of the ending point.
{v?} Velocity value for the segment. If zero, then PVEL is used.
{a?} Acceleration value for the segment. If zero, then PACC is used.
0,1 Flag value to indicate data termination.

See Also:
PRINT PATH
Notes:
1. In the examples shown below, note that the simple one-segment path requires
seven internal path points. See Chapter 4 for more examples.

3-9 Path Planning Reference

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Example 1:
PATH 3.
31603,628870,11230,19197,628870,-11230,56
31872,1244549,10994,18928,1244549,-10994,SG
32672,1844948,10721,18128,1844948,-10721,56
33992,1218114,11194,16808,1218114,-11194,56
35301,604964,10949,15499,604964,-10949,56
36080,0,10803,14720,0,-10803,56
36338,0,1,14462,0,1,0
ENDPATH

Example 2:
PATH 3 XY
3.000000,3.000000,4.000000,4.000000,0,0,1
ENDPATH

Example 3:
PATH 3 RT
1.742641,45.000000,3.156854,45.000000,0,0,1
ENDPATH

PRINTPATH Display a Path

Description:
Prints out the data for a specified path. Depending upon the command argu-
ments, the path data is output as internal path points, or as XY or RT record data.
The outputs are given in the formats described for the PATH ... ENDPATH
commands.
Syntax:
PRINTPATH[#J {path} [ XY I RT]
{path} Number of valid path
XY Output path record in Cartesian coordinates
RT Output path record in cylindrical coordinates
See Also:
PATH . .. ENDPATH
Example 1:
PRINTPATH 5
PATH 5
133430,1237310,-23794,15279,1015275,19525,52
132939,2142731,-17412,15682,1693293,13039,52
131598,2834503,-13303,16756,2152260,8826,52
129624,3258067,-8146,18282,2326213,3345,52

ENDPATH

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 Asyst SmartCourse™ Manual

l:OK
Example 2:
-~ (
PRINTPATH 5 XY
PATH 5 XY
-16.470125,18.465919,-12.687688,18.068782,0,0,0
-9.393004,15.949602,-5.125383,8.703054,0,0,1
ENDPATH
1:0K
Example 3:
PRINTPATH 5 RT
PATH 5 RT
14.643791,131.730413,11.978458,125.076083,0,0,0
8.409952,120.494587,0.000134,120.494587,0,0,1
ENDPATH
1:0K

LISTPATHS List Paths

Description:
Lists all of the possible paths, even if they have not been defined. For each path,
the number of internal path points is given.
Syntax:
L:CSTPATHS[#]
Reply:
#: PATH 1 {ipp}
#: PATH 2 {ipp}

#:PATH 12 {ipp}

where:
· {ipp} Number of internal path points.

See Also:
PRINTPATH
Example:
LISTPATHS
1:PATH 1 13
l:PATH 2 17
1:PATH 3 0
1:PATH 4 0
1:PATH 5 26
1:PATH 6 21
1:PATH 7 0
l:PATH 8 0

3-11 Path Planning Reference

 Asyst SmartCourseTM Manual

1:PATH 12 0
1:0K

WIPEPATHS Erase Path Data

Description:
Erases all the path data and records in Working Memory.
Paths stored in NVM are not lost, and can be restored with the RN command
Likewise, for this change to be made permanent, the WN command must be
given.
Syntax:
WIPEPATHS[#]
See Also:
RN, WN
Example:
WIPE PATHS
1:0K

3-12 Path Planning Reference

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3.4 PATH PLANNING PARAMETERS

Path planning requires the definition of several new parameters, as described below.
Station-specific parameters are defined during the teaching of the station paths. The re-
maining parameters are set at the factory and must be changed using the ST# command.

Table 3-1: Path Planning Parameters

Name/ Arguments Units Description

ALLPH {sn} { 0 11 } For station {sn}:
0 use a straight path when the arm
is not carrying a wafer.
1 always use the path planning path,
even if the arm is empty.
PACC {double} in ./sec/sec Acceleration of the trapezoidal mo-
tion profile for the paths.
PATHI {sn} {path} The path number to use when going
into station {sn}.
PATHO {sn} {path} The path number when coming out
of station {sn}.
PATHZ {path} {int} For the specified {path}, the internal
data point number indicating when
the arm can start to move other
axes.
PEEL {double) inches End-effector length from the wrist
pivot point to the center-of-wafer
position.
PFACC {double} in./sec/sec Acceleration of the final movement
over the distance Pf DIS.
PFDIS {double} inches Distance of final movement into the
cassette. (Point where PFACC
starts). Default= 0.0
PINT {double} seconds Time interval between internal data
points of the path.
PTOL {int} encoder Position tolerance when the arm is
counts to start a path from its current posi-
tion (using the PH command).
PTURN {int} 1 ... 10 Ratio of PVEL to the speed when
moving along a circular segment of
the path.
PVEL {double} inches/sec Maximum velocity of the trapezoidal
motion profile for the path.
RI {sn} {double} inches Radial position of station {sn}.
Distance to the center of the wafer
when it is inside the cassette.

3-13 Path Planning Reference

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Table 3-1: Path Planning Parameters

Tl {sn} {double} degrees Theta position of station {sn}.
Angle to the center of the wafer
when it is inside the cassette.

3.5 PATH PLANNING ERROR MESSAGES

Several new error messages have been added for the path planning. These are described
in the table below.

Table 3-2: Path Planning Error Messages

Code Message Notes or Actions Flag

44 "Path speed too high" Using a GS, PS or PH from PMPT
the teach pendant will cause
the robot to exceed the max
teach pendant speed.
45 "Path does not exist" A path number was specified PMPT
that refers to a non-existent
(or undefined} path.
46 "Path is running" Attempt to start movement PMPT
along a new path while the
robot is still moving along an-
other path.
47 "Too many points" The number of internal path PMPT
points exceeds the storage
limit of the software.
48 "Not enough acceleration" The acceleration value is not PMPT
sufficient for circular path
movement.
49 "Path goes through origin" The defined path goes PMPT
through (or near) the center-
point of the robot.
50 "Path not continuous" One or more of the segments PMPT
in a specified path do not
connect.
51 "Path not start at right position" The path does not start at the PMPT
correct position.
52 "Path cannot turn" A specified teaching point will PMPT
not allow a circular path seg-
ment to be created.
53 "Path exceeds range" One or more points on the PMPT
specified path will cause the
robot to exceed the maximum
theta movement.

3-14 Path Planning Reference

 Asyst SmartCourse"' Manual

CHAPTER 4 Examples

4. CHAPTER DESCRIPTION
This Chapter gives some examples of outputs generated by path management commands.
It also shows an abbreviated version of the PV output obtained for path planning.

4.1 EXAMPLE PATH MANAGEMENT COMMANDS

In the examples below, the user-specified commands are printed in boldface. The re-
sponses are in regular text.

4.1.1 Example 1: Simple One-Segment Path

This example shows the outputs for a path with one straight segment. Note that even this
simple path contains seven internal path points.

PRINTPATH 1
PATH 1
31603,628870,11230,19197,628870,-11230,56
31872,1244549,10994,18928,1244549,-10994,56
32672,1844948,10721,18128,1844948,-10721,56
33992,1218114,11194,16808,1218114,-11194,56
35301,604964,10949,15499,604964,-10949,56
36080,0,10803,14720,0,-10803,56
36338,0,1,14462,0,1,0
ENDPATH
1:0K

PRINTPATH 1 XY
PATH 1 XY
3.000000,3.000000,4.000000,4.000000,0,0,1
ENDPATH
l:OK

PRINTPATH 1 RT
PATH 1 RT
1.742641,45.000000,3.156854,45.000000,0,0,l
ENDPATH
1:0K

LISTPATHS
l:PATH 1 7
l:PATH 2 0
1:PATH 3 0
1:PATH 4 0
l:PATH 5 0
l:PATH 6 0
1:PATH 7 0
1:PATH 8 0
1:PATH 9 0
1:PATH 10 0
1 :PATH 11 0
l:PATH 12 0
l:OK

Asyst Technologies Confldentlal 4-1

 Asyst SmartCourse™ Manual

4.1.2 Example 2: Individual and Joint Station Paths

In this example, the data is shown for four individual station paths and two joint station
paths where:

• Paths 1 & 2 are assigned to station 1

• Paths 3 & 4 are assigned to station 2

• Paths 5 & 6 are joint station paths from station 1 to 2

The path parameters for this example are as follows:

PEEL 15.1000000
PVEL 20
PACC 150
PINT 50
PTURN 1
PFDIS 0.0000000
PFACC 20
PTOL 5
RI 1 14.6437905
RI 2 14.7548769
TI 1 131. 7304134
TI 2 181.2605315
R 1 0.0001339
R 2 0.0000000
T 1 120.4945866
IT' 2 194.2263780
-'-

ALLPH 1 i
ALLPH 2 1
PATHI 1 1
PATHI 2 3
PATHO '.L 2
PATHO 2 4
PATHZ 1 21
PATHZ 2 11
PATHZ 3 19
PATHZ 4 13
PATHZ 5 11 ......... - ••p

PATHZ 6 13

The outputs below show the internal complexity of this joint station path. Typically, the
full PRINTPATH command will not be used except for debugging purposes
listpaths
1: PATH 1 41
1:PATH 2 41
1: PATH 3 41
1: PATH 4 41
1: PATH 5 89
1: PATH 6 89
1 :PATH 7 0
1: PATH 8 0
1: PATH 9 0
1: PATH 10 0
l:PATH 11 0
1: PATH 12 0
1 :OK

Asyst Technologies Confidential 4-2

 Asyst SmartCourse11,1 Manual

prin tpa th 1 xy
(
PATH 1 xy -~
-5.125383,8.703054,-9.393004,15.949602,0,0,0
-12.687688,18.068782,-16.470125,18.465919,0,0,1
ENDPATH
1:0K

prin tpa th 1 rt
PATH 1 rt
0.000134,120.494587,8.409952,120.494587,0,0,0
ll.978458,125.076083,14.643791,131.730413,0,0,l
ENDPATH
1:0K

printpath 2 xy
PATH 2 xy
-16.470125,18.465919,-12.687688,18.068782,0,0,0
-9.393004,15.949602,-5.125383,8.703054,0,0,l
ENDPATH
l:OK
printpath 2 rt
PATH 2 rt
14.643791,131.730413,11.978458,125.076083,0,0,0
8.409952,120.494587,0.000134,120.494587,0,0,1
ENDPATH
l:OK

printpath 3 xy
PATH 3 xy
-9.790256,-2.482112,-17.187025,-4.357406,0,0,0
-21.321652,-3.436855,-24.848862,-0.546774,0,0,l
ENDPATH
l:OK
printpath 4 xy
PATH 4 xy
-24.848862,-0.546774,-21.321652,-3.436855,0,0,0
-17.187025,-4.357406,-9.790256,-2.482112,0,0,1
ENDPATH
1:0K
prin tpa th 5 xy
PATH 5 xy
-16.470125,18.465919,-12.687688,18.068782,0,0,0
-8.732068,ll.229618,-14.519467,-1.819358,0,0,0
-21.321652,-3.436855,-24.848862,-0.546774,0,0,1
ENDPATH
1:0K

printpath 6 xy
PATH 6 xy
-24.848862,-0.546774,-21.321652,-3.436855,0,0,0
-14.519467,-1.819358,-8.732068,ll.229618,0,0,0
-12.687688,18.068782,-16.470125,18.465919,0,0,1
ENDPATH
1:0K

Asyst Technologies Confidential 4-3

 Asyst SmartCourseTM Manual

printpath 1
PATH 1
68013,446375,9110,68012,446375,-9110,49
68180,882602,8903,67845,882602,-8903,49
68677,1309092,8704,67348,1309092,-8704,49
69496,1711594,8214,66529,1711594,-8214,49
70625,2151439,8976,65400,2151439,-8976,49
72070,2253971,2093,63956,2253971,-2093,49
73716,2214287,810,62309,2214287,-810,49
75387,2184545,607,60638,2184545,-607,49
77031,2159185,518,58994,2159185,-518,49
78655,2141867,353,57370,2141867,-353,49
80263,2128256,278,55762,2128256,-278,49
81859,2121728,133,54166,2121728,-133,49_
83448,2118610,64,52577,2118610,-64,49
85033,2122292,75,50992,2122292,-75,49
86619,2129392,145,49406,2129392,-145,49
88208,2143611,290,47817,2143611,-290,49
89806,2161561,366,46219,2161561,-366,49
91415,2187631,532,44610,2187631,-532,49
93041,2214345,545,42984,2214345,-545,49
94687,1832282,7797,41338,1832282,-7797,49
96200,1942278,2200,39826,1772295,-1200,50
97639,2030208,1759,38451,1705911,-1328,50
99155,2107348,1543,37124,1636646,-1385,50
100733,2163178,1117,35849,1561583,-1501,50
102362,2208445,905,34629,1483523,-1561,50
104030,2232357,478,33467,1398660,-1697,50
105724,2245415,261,32368,1309918,-1775,50
107432,2235889,191,31334,1211887,-1961,50
109141,2214560,427,30372,1108377,-2070,50
110839,2168098,929,29487,991765,-2332,50
112511,2772916,11631,28686,1360262,-7087,52
114471,2921673,2861,27753,1557565,-3794,52
116731,3099401,3418,26595,1777393,-4228,52
119119,3366110,5129,25272,2084552,-5907,52
121684,3647617,5414,23740,2434251,-6725,52
124467,3258067,7491,21947,2326213,-2078,52
127207,2834503,8146,20059,2152260,-3345,52
129624,2142731,13303,18282,1693293,-8826,52
131598,1237310,17412,16756,1015275,-13039,52
132939,0,23794,15682,0,-19525,52
133430,0,l,15279,0,l,O
ENDPATH
l:OK

printpath 2
PATH 2
133430,1237310,-23794,15279,1015275,19525,52
132939,2142731,-17412,15682,1693293,13039,52
131598,2834503,-13303,16756,2152260,8826,52
129624,3258067,-8146,18282,2326213,3345,52
127207,3647617,-7491,20059,2434251,2078,52
124467,3366110,-5414,21947,2084552,6725,52
121684,3099401,-5129,23740,1777393,5907,52
119119,2921673,-3418,25272,1557565,4228,52
116731,2772916,-2861,26595,1360262,3794,52
114471,2168098,-11631,27753,991765,7087,52
112511,2214560,-929,28686,1108377,2332,50
110839,2235889,-427,29487,1211887,2070,50
109141,2245415,-191,30372,1309918,1961,50
107432,2232357,-261,31334,1398660,1775,50

Asyst Technologies Confidential 4-4

 Asyst SmartCourse111 Manual

105724,2208445,-478,32368,1483523,1697,50
104030,2163178,-905,33467,1561583,1561,50
102362,2107348,-1117,34629,1636646,1501,50
100733,2030208,-1543,35849,1705911,1385,50
99155,1942278,-1759,37124,1772296,1328,50
97639,1832282,-2200,38451,1832282,1200,50
96200,2214345,-7797,39826,2214345r7797,49
94687,2187631,-545,41338,2187631,545,49
93041,2161561,-532,42984,2161561,532,49
91415,2143611,-366,44610,2143611,366,49
89806,2129392,-290,46219,2129392,290,49
88208,2122292,-145,47817,2122292,145,49
86619,2118610,-75,49406,2118610,75,49
85033,2121728,-64,50992,2121728,64,49
83448,2128256,-133,52577,2128256,133,49
81859,2141867,-278,54166,2141867,278,49
80263,2159185,-353,55762,2159185,353,49
78655,2184545,-518,57370,2184545,518,49
77031,2214287,-607,58994,2214287,607,49
75387,2253971,-810,60638,2253971,810,49
73716,2151439,-2093,62309,2151439,2093,49
72070,1711594,-8976,63956,1711594,8976,49
70625,1309092,-8214,65400,1309092,8214,49
69496,882602,-8704,66529,882602,8704,49
68677,446375,-8903,67348,446375,8903,49
68180,0,-9110,67845,0,9110,49
68013,0,l,68012,0,1,0
ENDPATH
l:OK

printpath 3
PATH 3
109630,453346,9067,109630,453346,-9067,50
109803,896028,8854,109457,896028,-8854,50
110318,1328495,8649,108942,1328495,-8649,50
111166,1735977,8150,108094,1735977,-8150,50
112335,2178711,8855~106925,2178711,-8855,50
113829,2249378,1413,105431,2249378,-1413,50
115518,2209838,791,103742,2209838,-791,50
117219,2180485,587,102041,2180485,-587,50
118894,2155622,497,100366,2155622,-497,50 ·+,..,.,.,,
120548,2139017,332,98712,2139017,-332,50
122186,2126225,256,97074,2126225,-256,50
123813,2120748,110,95447,2120748,-110,50
125433,2118806,39,93827,2118806,-39,50
127050,2123953,103,92210,2123953,-103,50
128669,2132683,175,90591,2132683,-175,50
130293,2148929,325,88967,2148929,-325,50
131926,2215781,1337,87334,2215781,-1337,50
133591,1930624,5703,85669,1930624,-5703,50
135173,1854878,1515,84087,2046375,-2315,50
136617,1773968,1618,82570,2137452,-1822,50
138001,1690838,1663,80974,2216681,-1585,50
139323,1603235,1752,79313,2272897,-1124,50
140579,1513294,1799,77601,2317896,-900,50
141768,1417851,1909,75849,2340582,-454,50
142886,1319174,1974,74072,2352104,-230,50
143931,1212541,2133,72282,2340750,-227,50
144896,1101125,2228,70492,2317614,-463,50
145779,978142,2460,68715,2269750,-957,50
146572,1258412,5720,66965,2718560,-9159,49
147408,1387645,2637,65100,2772909,-1109,49
Asyst Technologies Confidential
 Asyst SmartCoursetv Manual

148397,1553334,3381,63047,2897092,-2534,49
149497,1763325,4286,60928,3067176,-3471,49
150737,2003792,4908,58698,3268539,-4110,49
152145,2351741,7101,56329,3578980,-6336,49
153773,2711057,7333,53770,3854878,-5631,49
155666,2601540,2235,50990,3476172,-7729,49
157 652, 24504 95, 30'83, 4 8250, 3091 733, -784 6, 4 9
159541,1985522,9489,45794,2408240,-13949,49
161199,1241473,15185,43738,1450455,-19547,49
162405,0,25336,42296,0,-29601,49
162870,0,l,41754,0,1,0
ENDPATH
l:OK

printpath 4
PATH 4
162870,1241473,-25336,41754,1450455,29601,49
162405,1985522,-15185,42296,2408240,19547,49
161199,2450495,-9489,43738,3091733,13949,49
159541,2601540,-3083,45794,3476172,7846,49
157652,2711057,-2235,48250,3854878,7729,49
155666,2351741,-7333,50990,3578980,5631,49
153773,2003792,-7101,53770,3268539,6336,49
152145,1763325,-4908,56329,3067176,4110,49
150737,1553334,-4286,58698,2897092,3471,49
149497,1387645,-3381,60928,2772909,2534,49
148397,1258412,-2637,63047,2718560,1109,49
147408,978142,-5720,65100,2269750,9159,49
146572,1101125,-2460,66965,2317614,957,50
145779,1212541,-2228,68715,2340750,463,50
144896,1319174,-2133,70492,2352104,227,50
143931,1417851,-1974,72282,2340582,230,50
142886,1513294,-1909,74072,2317896,454,50
141768,1603235,-1799,75849,2272897,900,50
140579,1690838,-1752,77601,2216681,1124,50
139323,1773968,-1663,79313,2137452,1585,50
138001,1854878,-1618,80974,2046375,1822,50
136617,1930624,-1515,82570,1930624,2315,50
135173,2215781,-5703,84087,2215781,5703,50
133591,2148929,-1337,85669,2148929,1337,50
131926,2132683,-325,87334,2132683,325,50
130293,2123953,-175,88967,2123953,175,50
128669,2Ll8806,-103,90591,2118806,103,50
127050,2120748,-39,92210,2120748,39,50
125433,2126225,-110,93827,2126225,110,SO
123813,2139017,-256,95447,2139017,256,50
122186,2155622,-332,97074,2155622,332,50
120548,2180485,-497,98712,2180485,497,50
118894,2209838,-587,100366,2209838,587,50
117219,2249378,-791,102041,2249378,791,50
115518,2178711,-1413,103742,2178711,1413,50
113829,1735977,-8855,105431,1735977,8855,50
112335,1328495,-8150,106925,1328495,8150,50
111166,896028,-8649,108094,896028,8649,50
110318,453346,-8854,108942,453346,8854,50
109803,0,-9067,109457,0,9067,50
109630,0,l,109630,0,1,0
ENDPATH
1:0K

Asyst Technologies Confidential 4-6

 Asyst Smartcourse"" Manual

printpath 5
PATH 5
133430,1270638,-24915,15279,1042588,20443,51
~ (
132936,2198674,-18197,15685,1737018,13616,51
131586,2906835,-13886,16766,2205984,9195,51
129599,3339910,-8492,18300,2382471,3461,51
127169,3700370,-7068,20086,2466124,1640,51
124429,3365611,-6564,21972,2083986,7493,51
121680,3103580,-5138,23743,1782289,5916,51
119163,2927768,-3447,25247,1565225,4256,51
116816,2840485,-1711,26550,1401091,3218,51
114571,2454910,-7560,27704,1122963,5454,51
112511,2498831,-878,28686,1242909,2399,50
110621,2516138,-346,29589,1349820,2138,50
108708,2521105,-99,30578,1451629,2036~50
106787,2502480,-373,31646,1545325,1874,50
104870,2472498,-600,32790,1635917,1812,50
102973,2419922,-1052,34003,1721479,1711,50
101106,2356022,-1278,35284,1805025,1671,50
99284,2268828,-1744,36629,1884807,1596,50
97520,2169601,-1985,38037,1962744,1559,50
95827,2045165,-2489,39504,2036224,1470,50
94219,1907522,-2753,41030,2106975,1415,50
92711,1742251,-3305,42610,2170221,1265,50
91319,1562582,-3593,44242,2228539,1166,50
90058,1353539,-4181,45920,2273395,897,50
88946,1129640,-4478,47637,2309542,723,50
87999,877174,-5049,49386,2323083,271,50
87233,611251,-5319,51153,2322584,10,50
86665,322571,-5774,52925,2287989,692,50
86309,24972,-5952,54684,2233341,1093,50
86177,282565,6151,56408,2133739,1992,50
86275,419939,2694,58074,2388721,5000,51
86548,514455,1853,59834,2286575,2003,51
86912,621147,2092,61653,2265041,422,51
87354,729923,2133,63424,2236921,551,51
87879,839443,2148,65176,2205137,623,51
88490,949657,2161,66904,2165399,779,51
89186,1059796,2160,68605,2121396,863,51
89968,1168791,2137,70273,2068496,1037,51
90835,1276701,2116,71903,2010995,1128,51
91787,1381343,2052,73491,1944277,1308,51
92821,1483802,2009,75030,1872979,1398,51 ........
~

93936,1580840,1903,76515,1792898,1570,51
95128,1674657,1840,77941,1708651,1652,51
96395,1761178,1697,79304,1616807,1801,51
97732,1843654,1617,80598,1521564,1868,51
99134,1917517,1448,81819,1420513,1981,51
100598,1986850,1360,82964,1317071,2028,51
102117,2046987,1179,84029,1209945,2101,51
103687,2102498,1089,85012,1101527,2126,51
105301,2148998,912,85911,991577,2156,51
106955,2191144,826,86726,881372,2161,51
108644,2225119,666,87455,771542,2154,51
110363,2255299,592,88098,662318,2142,51
112106,2278611,457,88656,554952,2105,51
113870,2298863,397,89129,448813,2081,51
115651,2313803,293,89520,345515,2026,51
117446,2430508,2288,89829,250003,1873,51
119292,2097955,6521,90061,131191,2330,51
121054,2190165,1844,90209,180330,-6230,50
122690,2236473,926,90190,478575,-5965,50
124378,2262431,519,89939,766208,-5753,50
Asyst Technologies Confidential 4-7
 Asyst SmartCourse"' Manual

126095,2253824,172,89464,1027803,-5232,50
127817,2230970,457,88780,1274361,-4931,50
129528,2184955,920,87901,1489293,-4299,50
131213,2129855,1102,86847,1687878,-3972,50
132859,2060210,1393,85635,1854071,-3324,50
134457,1984917,1506,84284,2004318,-3005,50
136000,1900211,1694,82812,2123610,-2386,50
137482,1811583,1773,81237,2227897,-2086,50
138898,1715532,1921,79578,2302944,-1501,50
140244,1615854,1994,77849,2363704,-1215,50
141514,1508164,2154,76069,2396045,-647,50
142706,1395984,2244,74253,2414174,-363,50
143814,1273109,2458,72418,2403218,-219,50
144832,1143945,2583,70581,2377305,-518,50
145754,999837,2882,68757,2320093,-1144,50
146572,1262511,5361,66965,2724384,-8251,49
147418,1389454,2591,65079,2774241,-1018,49
148409,1555432,3387,63024,2898725,-2541,49
149510,1765905,4295,60903,3069304,-3481,49
150752,2006995,4920,58672,3271304,-4122,49
152162,2356212,7127,56301,3583028,-6362,49
153793,2707516,7170,53739,3846987,-5387,49
155686,2595000,2296,50961,3465719,-7781,49
157669,2443365,3095,48228,3081797,-7835,49
159552,1978738,9482,45780,2399626,-13922,49
161205,1236361,15151,43731,1444449,-19493,49
162407,0,25232,42294,0,-29479,49
162870,0,l,41754,0,l,O
ENDPATH
1:0K

printpath 6
PATH 6
162870,1236361,-25232,41754,1444449,29479,49
162407,1978738,-15151,42294,2399626,19493,49
161205,2443365,-9482,43731,3081797,13922,49
159552,2595000,-3095,45780,3465719,7835,49
157669,2707516,-2296,48228,3846987,7781,49
155686,2356212,-7170,50961,3583028,5387,49
153793,2006995,-7127,53739,3271304,6362,49
152162,1765905,-4920,56301,3069304,4122,49
150752,1555432,-4295,58672,2898725,3481,49
149510,1389454,-3387,60903,2774241,2541,49
148409,1262511,-2591,63024,2724384,1018,49
147418,999837,-5361,65079,2320093,8251,49
146572,1143945,-2882,66965,2377305,1144,50
145754,1273109,-2583,68757,2403218,518,50
144832,1395984,-2458,70581,2414174,219,50
143814,1508164,-2244,72418,2396045,363,50
142706,1615854,-2154,74253,2363704,647,50
141514,1715532,-1994,76069,2302944,1215,50
140244,1811583,-1921,77849,2227897,1501,50
138898,1900211,-1773,79578,2123610,2086,50
137482,1984917,-1694,81237,2004318,2386,50
136000,2060210,-1506,82812,1854071,3005,50
134457,2129855,-1393,84284,1687878,3324,50
132859,2184955,-1102,85635,1489293,3972,50
131213,2230970,-920,86847,1274361,4299,50
129528,2253824,-457,87901,1027803,4931,50
127817,2262431,-172,88780,766208,5232,50
126095,2236473,-519,89464,478575,5753,50
124378,2190165,-926,89939,180330,5965,50
Asyst Technologies Confidential 4-8
 J

Asyst SmartCourse™ Manual

122690,2097955,-1844,90190,131191,-6230,50
121054,2430508,-6521,90209,250003,-2330,51
119292,2313803,-2288,90061,345515,-1873,51 ~(
117446,2298863,-293,89829,448813,-2026,51
115651,2278611,-397,89520,554952,-2081,51
113870,2255299,-457,89129,662318,-2105,51
112106,2225119,-592,88656,771542,-2142,51
110363,2191144,-666,88098,881372,-2154,51
108644,2148998,-826,87455,991577,-2161,51
106955,2102498,-912,86726,1101527,-2156,51
105301,2046987,-1089,85911,1209945,-2126,51
103687,1986850,-1179,85012,1317071,-2101,51
102117,1917517,-1360,84029,1420513,-2028,51
100598,1843654,-1448,82964,1521564,-1981,51
99134,1761178,-1617,81819,1616807,-1868,51
97732,1674657,-1697,80598,1708651,-1801,51
96395,1580840,-1840,79304,1792898,-1652,51
95128,1483802,-1903,77941,1872979,-1570,51
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·-&,...,~
99284,2419922,1278,36629,1721479,-1671,50
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102973,2502480,600,34003,1545325,-1812,50
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119163,3365611,5138,25247,2083986,-5916,51
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127169,2906835,8492,20086,2205984,-3461,51
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132936,0,24915,15685,0~-20443,51
133430,0,1,15279,0,1,0
ENDPATH
1:OK

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 Asyst SmartCourseTY Manual

4.2 PV OUTPUT FORMAT

The example listing below shows the PV outputs for the path planning parameters. (Also
listed at the end are two path records.) The path planning data is indicated in bold type.
For brevity, most of the other parameters in the list are not shown.
// HINE ARM REV 6.lA Default

STl SCANS "OlDXTB"

STl SCANTOT 0
STl SCANRTRY 0

STl LOGLVL 0000

STl DDDOWN 0.5000000
STl PEEL 7.5000000
STl PVEL 10
STl PACC 50
STl PINT 50
STl PTURN 1
STl PFDIS 0.0000000
STl PFACC 20
STl PTOL 5
STl FMODE S 0
STl FMODE.E 0

STl INVT 39 0
STl INVT 40 0
STl RI 1 13.3719956
STl RI 2 14.8085861
STl TI 1 32.0722441
STl TI 2 105.3239173
STl R 1 -0.0000000
STl R 2 10. 0291184

STl DOWN 39 0.0000000

STl DOWN 40 0.6000000
STl ALLPH 1 1 ·+~ .... -~
STl ALLPH 2 0
STl PATHI 1 1
STl PATHI 2 3
STl PATHO 1 2
STl PATHO 2 4
STl STAT 1 ON
STl STAT 2 ON

STl STAT 39 ON
STl STAT 40 ON
STl PATHZ 1 25
STl PATHZ 2 27
STl SSLOT 1 25
STl SSLOT 2 25

STl SSTAT 2 ON
STl SSTAT 3 ON
STl SSTAT 4 ON

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 Asyst SmartCourse™ Manual

II** DEFINE VARIABLES**

(
~
II** MACRO DEFINITIONS**

II** PATH RECORDS**

PATHl 1 XY
2.4656,0.4133,7.5901,1.2723,0,0,0
ll.0351,3.7785,13.4496,8.4278,0,0,1
ENDPATH
CPl 1
PATHl 2 XY
13.4496,8.4278,11.0351,3.7785,0,0,0
7.5901,l.2723,2.4656,0.4133,0,0,l
ENDJ?ATH
CPl 2

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 Asyst SmartCourse™ Manual

'I
I

Asyst Technologies Confidential 4-12

 Asyst SmartCourse rr.1 Manual

Appendix A Glossary

Path planning introduces several new concepts and terminology. Listed below are definitions of the terms
used throughout this manual.

All Paths option: Defines whether station-path following is to be done if there is no wafer on the end-
effector. This option is defined for each station during the TS teaching sequence. Defined also with the
ALLPH parameter.
Center-of-Wafer position: The point on the end-effector where the center of the wafer is located. The path
trajectory is defined by the coordinates of the center-of-wafer positions as the arm moves along the path.
Circular path segments: Path segments that are a circular arc. See also Straight path segments. Motion
along circular path segments is made at or below the maximum speed used on the straight path segments.
The relative speed is defined with the PTURN parameter.
Continuous station paths: Paths to and from a station that consist of two (2) straight segments connected
by a circular arc. See also Individual station paths. These are sets of two (2) paths that go from the wafer
position inside the cassette, straight out of the cassette, along a circular arc, then straight to a retracted posi-
tion defined by the user. Continuous station paths are taught using the complete version of the TS com-
mand.
Custom paths: Paths that are taught without any explicit reference to a cassette station. Custom paths are
taught using the basic TP command. A custom path has a single direction defined by the teaching sequence.
Ending point: Last point on a defined path. This is the point where movement along the path stops. See
also Star:ting point.
Individual station paths: A set of single-segment paths defined by a reference point inside and a reference
point outside a cassette station. Each path taugt)t for a station will cause two (2) paths to be created (into
station and out of station). Individual station paths are taught using the TS command. See also Continuous
station paths.
Internal path points: Points used by the Robot software used to control arm motion along a path. There are
always many more internal path points than there are path reference points. Using the PRINTPATH com-
mand with only the path number specified will generate a listing of the internal path points. The LISTPATHS
command outputs the number of internal path points for each path.
Joint station path: A path created by adding connecting path segments between two (2) individual station
paths (which have already been taught). Each joint station path goes from the endpoint of one station, to the
endpoint of the other station, and thus overlaps the individual station paths. When a joint station path is de-
fined, two (2) path numbers are assigned, one for each direction. Joint station paths are created using the
TP command with the ST keyword argument.
Path: A trajectory defined by the center-of-wafer position of the end-effector. A path has a starting point, a
direction and an ending point. A path is made of one or more segments, which are defined by reference
points. Segments can be either straight or circular. If a path has more than one straight segment, the
straight segments are always connected by a circular segment.
Path direction: All paths have a defined direction. When an individual station path is taught, two paths will
be created, with opposite directions. When a custom path is taught, it has only a single direction.
Path planning: An optional motion mode available on Asyst Robots. Path planning enables the Robot to
precisely coordinate simultaneous radial and theta movements. This allows the end-effector to move along
optimal paths, and also allows Putting and Getting wafers from cassettes that do not directly face the Robot.
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11558-002 Revision B
Asyst SmartCourse™ Manual

Path record data: Data defining the coordinates of each straight path segment, along with the basic speed
and acceleration data for the segment. The path record data can be output in either Cartesian (XY) coordi-
nates, or cylindrical (RT) coordinates, using the PRINTPATH command.
Path reference points: Points defining the beginning and end of each of the path segments, and include the
starting point and the ending point. The reference points are not necessarily the same as the path teaching
points. Also, the reference points should not be confused with the internal path points created by the soft-
ware.
Path segments: Straight-line or circular-arc parts of the path between the path reference points. A path is
described by the number of straight segments. Thus, a path with three (3) straight (and thus two (2) circular)
segments would be called a three-segment path.
Path teaching points: Points defined by the user (using the teach pendant) when running the TP or TS
commands. The teaching points are used to define the segments of the path. Note that the teaching points
do not necessarily coincide with the path reference points.
Starting point: First point on a defined path. This is the point to which the arm moves before starting along a
path. The starting point is referenced when using the PH command. See also Ending point.
Station path teaching points: Special teaching points defined when using the TS command to teach the
path into and out of a station. Three (3) teaching points are required to define the two (2) station path refer-
ence points inside and outside the station.
Straight path segments: Path segments between reference points that are straight. If a path has more
than one straight path segment, the straight segments are always connected by circular path segments.
Thus, a path with N-straight segments will have N-1 circular segments.
z.,Transition point: The position on each path that defines where it is safe to make a 2-axis movement of
the arm. The value refers to the internal point for the path. Z-Transition points are defined only for paths as-
sociated with stations. For each path, this point is stored in the PATHZ parameter.

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 .tmo·spner1c-.<onotr'am,-,annmg-manua1------.

Appendix B Path -Planning Limits

I
\
I

RELEASE 6.1

Maximum Limits:
Number of paths: 20
Straight segments per path: 5
Internal points per path: 300

Number Ranges:
Path Numbers: l to 20
Station Numbers: 1 to 40

B-1 Path Planning Limits

 Atmospheric Robot Path Planning Manual

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B-2 Path Planning Limits