Semiconductors

Coating

Turbopumps Accellerators

The optimal solution for your

high vacuum application
 Turbopumps
Design and operating principle
of turbopumps
Origin
The idea of turbomolecular pumps goes back to the Pfeiffer
Vacuum engineer Dr. Willi Becker, who invented the first
turbomolecular pump in 1958. This is the ancestor of today’s
turbopumps.

Technology
Turbopumps belong to the category of kinetic vacuum pumps,
which means that gases are moved from the inlet to the
exhaust by momentum transfer. The design is that of a
turbine: a multi-stage rotor with rotating bladed disks. Stators
with similar geometries are mirrored between the spinning
rotor disks.

Rotor: Superposistion with blade velocity

Molecules that collide with the rotor blades are adsorbed

there and leave the blades again after a certain period of time.
In this process, blade speed is added to the thermal molecular
speed. The stators are needed to re-establish the direction of
movement for the next rotor blades. This results in a net
pumping effect.
 l3

Pumping speed and compression ratio

The two main characteristics that define a turbopump are its
pumping speed and compression ratio. The pumping speed
describes the ability of the pump to evacuate the volumetric
flow, whether it is just the chamber volume or a constant gas
flow. The compression ratio is the ability of the pump to work
in conjunction with the roughing pump to keep molecules out
of the vacuum chamber. Both of these characteristics depend
on the gas type.

1012
Compression ratio K0

10 11
Turbo drag pump nitrogen
1010
Classic turbopump nitrogen
10 9
10 8
10 7
Turbo drag pump hydrogen
10 6
10 5
10 4 Classic turbopump hydrogen
10 3
10 2
10 1
10 - 3 10 - 2 10 - 1 10 0 10 1 10 2 hPa
Backing pressure p

Compression ratios of pure turbopumps and turbo drag pumps

Pumping speed S

Helium

Nitrogen

Hydrogen

Inlet pressure

Pumping speed as a function of inlet pressure

 Turbopumps
Bearing technologies

Suspension
Pfeiffer Vacuum is using two most reliable design features.
The hybrid bearing suspesion consiting of a permanent
magnet bearing at the high vacuum side of the turbine and a
ceramic ballbearing at the exhaust of the pumps. The second
concept uses a 5-axis actively controlled magnetic bearing
design.

Permanent
Safety bearing
magnetic bearing

Rotor shaft

Ceramic
ball bearing

Hybrid bearing suspension

The hybrid bearing suspension was invented by Pfeiffer
Vacuum more than 40 years ago. It consists of a permanent
magnetic bearing and a ceramic ball bearing. Pfeiffer Vacuum
has produced over 1 million pumps with this design resulting
in the highest reliability. The magnetic bearing is necessary
for hydrocarbon-free radial rotor stabilization in order to
achieve extremely ultra-high vacuum (< 10-10 hPa). The
opposing single ball strongly stabilizes the rotor in both the
radial and axial direction, making it resilient to strong shocks
such as atmospheric vents and external vibrations. The
lubricant reservoir allows for constant filtration that ensures
reliability and allows the rotor to easily dissipate heat.
 l5

Upper safety bearing

Upper radial bearing

Rotor shaft

Lower radial bearing

Lower safety bearing

Upper axial bearing
Lower axial bearing

5-axis active magnetically levitated suspension

Z
Turbopumps can also work with a 5-axis active magnetically
levitated suspension. The rotor is levitated through digital
electronic control and electromagnets. The 5-axis position of
Y1 X1 the turbo rotor is continuously monitored and readjusted in
real time. The magnetic bearing allows the rotor to spin freely
in its true axis of inertia, which can differ from the geometric
center of the rotor. This counteracts the imbalance of the
rotor and enables operation with low vibrations. The complete
absence of lubrication eliminates the risk of hydrocarbon
contamination in case of system malfunction. In the event of
Y2 X2 a power failure, the magnetic bearings are supplied with
electricity through the rotational energy of the pump until the
rotor can land on safety bearings at low speed. There is no
need for battery backup or additional safety devices since
there is no mechanical contact between the rotor and the
housing, the active magnetic suspension system is
maintenance free for the complete lifetime of the pump.
 Turbopumps
The optimal solution for your
high vacuum application
Drive electronics & controllers
Drive electronics are mainly responsible for the safe operation
of the high-speed motor drive rotation. In magnetically
levitated pumps, the electronics package must also monitor
and ensure the proper rotor position and control the active
electromagnets. There are different controllers available which
can either be mounted directly to the pump or installed as an
external rack. Some controllers have internal power supplies
so that they can be used with 90 – 240 V AC while smaller
controllers can be driven directly from 24 V DC / 48 V DC. The
standard communication is RS-485 or direct I/O (remote).
Other communication bus systems such as Devicenet,
Profibus, Profinet, EtherCat, E74 or LON are available upon
request. Pfeiffer Vacuum offers standard display interfaces for
all controllers as well as standard software options.

TC 80 – for small HiPace TC 110, 24 V DC – for small and

turbopumps mid-size HiPace turbopumps

TC 400, 48 V DC – for mid- TCP 350 – remote operation

size HiPace turbopumps for HiPace turbopumps

Magpower – remote operation for ATH turbopumps

 l7

Pfeiffer Vacuum turbopump series and specifications:

Pfeiffer Vacuum offers a comprehensive portfolio with all
types of turbopumps. Our mature product line has many
variations which enables us to provide our customers with the
optimal product solution for their vacuum application.

HiPace 10 – 800; HiPace Plus

■ Hybrid bearing turbopumps
in the pumping speed class of 10 to 800 l/s
■ Best size to performance ratio
■ High compression for light gases (especially H series)
■ Compact yet robust design
■ High reliability
■ Different product versions providing optimal solutions for
differnt process requirements (H series for high
compression, P series for processes and Plus for ultra low
vibration)

HiPace 300 M – 800 M

■ 5-axis magnetically levitated turbopumps
■ Unlimited operational life
■ Best vibration performance in the market
■ High compression for light gases
■ Completely free of hydrocarbons

HiPace 1200 – 2800

■ Hybrid bearing turbopumps in the pumping speed class of
1,000 to 2,800 l/s
■ High pumping speed for light gas applications
■ Good compression
■ Robust in harsh applications

ATH 500 M – ATH 3200 M

■ 5-axis magnetically levitated turbopumps
■ Very high gas throughput
■ Optimized for harsh chemistry manufacturing applications
as well as light duty high vacuum applications
■ Fast safety bearing recovery

Pfeiffer Vacuum turbopump range

DN 25 DN 63 DN 100 DN 160 DN 200 DN 250 DN 320

ATH-M
Compression ratio

Througput

HiPace P

HiPace
HiPace M
HiPace H

10 80 300 500 700 1200 1600 2000 3000 l/s

Single ball bearing suspension
5-axis magnetically levitated bearing suspension
 HiPace® 10 – 800
The optimal solution for your high
vacuum application in the pumping
speed class from 10 to 800 l/s
High gas throughput
and high
pumping speed

Your added value

Highest reliability
due to robust design
and proven bearing
system

HiPace turbomolecular pumps are reliable, robust and suitable

for many vacuum solutions. Their high compression ratio for
light gases is ideal for high vacuum applications. A large
selection of standard accessories and communications
completes the HiPace portfolio.

Pfeiffer Vacuum also offers application specific solutions with

pumping speeds from 10 to 800 l/s tailored to better serve
specific market requirements such as ultra-high compression,
low vibration, and radiation resistance

Benefits of the HiPace 10 – 800

■ High compression ratio for light gases
■ Best combination of size and performance
■ Robust Pfeiffer Vacuum hybrid rotor suspension
■ Radiation resistant pumps with external electronics
available
■ Standard certifications: UL, CSA, IP54

Patented Laser Balancing Technology

Thanks to the innovative laser balancing technology patented
by Pfeiffer Vacuum, the HiPace 80 Neo and HiPace 350/450
have the lowest vibration level on the market as well as
minimal noise emission. As a result, they offer the highest
precision and are excellently suited for vibration-sensitive
applications.
 l9

Maximum availability SEMI S2 and

due to on-site bearing UL certification
change

Maximum precision Minimum space requirement Flexible use due to arbitrary

thanks to patented due to compact design mounting orientation1)
Laser Balancing
technology 1)
HiPace Plus: 0°

Specific product versions for different applications:

HiPace
The standard HiPace turbopump has a compound rotor
containing both turbine blades and a holweck drag stage.
It provides a good combination of gas throughput and
compression ratio. It is ideal for the most common vacuum
applications.

HiPace H
The HiPace 300 H and HiPace 700 H turbomolecular pumps
are the ultimate high compression vacuum solutions and ideal
for generating ultra-high vacuum. The compression ratio for
N2 is 9 ∙ 1013 and for H2 is 9 ∙107. The HiPace 300 H and
HiPace 700 H can easily attain pressures of < 10-10 hPa in
combination with a simple diaphragm pump.

HiPace P
The HiPace P series pumps are designed for process and
light, corrosive applications. The pump rotors are Kepla®
coated for corrosion resistance and optimized to operate
without a drag stage. If necessary, the pumps can be
equipped with a purge device to make sure that no corrosive
gases enter the motor section of the pump.

HiPace Plus
The HiPace Plus pumps are optimized for vibration-sensitive Please find
applications such as electron microscopy. They have further details
extremely low magnetic stray fields and vibration signatures. and technical
Advanced specialized mounting hardware is available. data here
 HiPace® 300 – 800 M
Compact turbopumps with
magnetic bearings in the pumping
speed class from 300 to 800 l/s
High gas throughput
for all process gases

Your added value

Reliable due to
excellent long-term
stability

The turbopumps of the HiPace M series are equipped with a

5-axis magnetically levitated suspension. They are designed
for general high vacuum applications and therefore contain
compound rotors. The completely oil-free magnetic
suspension virtually eliminates the need for maintenance and
any possibility for contamination. For vibration sensitive
applications, the HiPace M has an extremely low vibration and
stray magnetic field. In case of a power outage, the controller
attached to the turbopump will use the pump motor as a
generator to keep the rotor suspended .

Benefits of the HiPace 300 – 800 M

■ 5-axis magnetically levitated suspension
■ Completely hydrocarbon-free
■ Advanced electronics with power generation motor in case
of power outages
■ Safety bearing wear counter with robust re-stabilization
after impacts
■ Integrated drive electronics
■ Can operate in any orientation
■ UL, CSA, IP54 certification
 l 11

Clean vacuum Easy

due to lubricant-free installation
magnetic bearing

Low vibration Durable due to Flexible use due to arbitrary

and low magnetic automatic unbalance mounting orientation
stray field compensation

Hybrid rotor

Drive electronics TM 700

with interface panel

5 axis
magnetig bearing
Holweck stage

Integrated
water cooling

Please find
further details
and technical
data here
 HiPace® 1200 – 2800 IT
Compact turbopumps with
hybrid bearings in the pumping speed
from 1200 up to 2800 l/s High vacuum
performance for light
gases (H2, He) and
heavy gases (Ar, CF4)

Your added value

Maximum reliability
through the use of
hybrid bearings

The HiPace 1200 – 2800 turbopumps are reliable as well as

robust, and therefore suitable for many vacuum applications.
Due to the typical use of these pumps in harsh environments,
the optimal rotor solution is a pure turbo rotor. Even without a
drag stage, these pumps have a sufficient compression ratio
for most general applications. A huge complementary
portfolio of standard accessories and communication
electronics completes this pump range.

We provide application-specific, tailored solutions: e.g. Kepla®

coating for corrosion resistance, temperature management
systems for the prevention of process deposition in high
pressure regions as well as external electronics for use under
radiation. The HiPace 1200 – 2800 pumps are a high
performing package in a compact design.

Benefits of the HiPace 1200 – 2800

■ High compression ratio for light gases
■ Robust Pfeiffer Vacuum hybrid rotor suspension
■ High resistance to process deposition
■ Purge gas valve included
■ Available for radiation resistant pumps with external
electronics
■ Temperature management system
■ Standard certifications: UL, CSA, IP54
 l 13

Maximum availability SEMI S2 compatible,

due to on-site UL, CSA and TÜV
bearing change certification

IP
Highest process Suitable for industrial use
capability, resistant thanks to
to particles protection class IP54

Specific product versions for different applications:

HiPace
With the proven and optimized bearing system and to the
good combination between pumping speed and compression
ratio, the standard HiPace pumps are suitable for all kind of
standard applications.

HiPace C
The HiPace C pumps are designed for corrosive applications.
Due to a Kepla® coating of the rotor, for example, they reach
an unsurpassed resistance to various process chemicals.

HiPace I
HiPace I pumps are designed especially for Implantation
processes. The sophisticated rotor design of the turbopump
results in an optimized pumping speed for light gases. This
ensures the best process adaption for ion implantation
processes, were hydrogen pumping speed is very important.
The nickel coated rotor ensures robustness against the
dopants applied in the process.

HiPace T
The temperature management system can reduce the amount
of process deposition. By increasing the temperature at the
higher pressure region, condensation is reduced. This feature Please find
can be combined with the C-version (HiPace CT) in order to further details
provide both corrosion resistance to process chemicals as and technical
well as resistance to process deposition inside the pump. data here
ATH 500 – 3200 M, ATP 2300 M
Compact turbopumps with
magnetic bearings in the pumping
speed class from 500 to 3000 l/s
Very high gas
throughput especially
for heavy process gases

Your added value

Excellent long-term stability

and reliability due to
magnetic levitated rotor
technology

ATH-M and ATP-M 5-axis magnetically levitated turbomolecular

pumps have long term reliability in semiconductor fabrication
processes and other manufacturing environments such as flat
panel display, solar cells or large area glass coating. These
applications require high tolerances of harsh chemicals along
with high gas flow capabilities. This is where the ATH-M and
ATP-M turbopumps are the perfect fit to fulfill today’s industry
demands. The high perfomance compound rotors with
molecular drag stage of the ATH-M series pumps provide
unparalleled throughput and high foreline tolerance even at
high temperatures, whereas the ATP-M pumps offering ideal
pumping performance for light gases. Both pump series are
also widely used in R&D applications due to their maintenance
free high quality vacuum generation capacities.

The ATH-M product line offers pumping speeds from the

world’s smallest 500 l/s class turbomolecular pump up to the
3000 l/s class.

Benefits of the ATH 500 – 3200 M and ATP 2300 M

■ 5-axis magnetically levitated suspension
■ Completely hydrocarbon free
■ Advanced electronics with power generation motor for
power outage conditions
■ Safety bearing wear counters with robust re-stabilization
■ Can operate in any orientation
 l 15

Longer life time High fore-vacuum

due to temperature pressure compatibility
management for optimized backing
pump installations

Low cost of ownership Very low noise Flexible use due to arbitrary
by maintenance-free and vibrations mounting orientation
magnetic bearing
technology in clean
process

Specific product versions for different applications:

ATH-M and ATP-M non-heated version
The ATH-M has a high compression drag stage that makes it
a high flow turbopump for industrial requirements. The
ATH-M non-heated versions are designed for light duty
applications such as plasma deposition in semiconductor
manufacturing processes, large area glass coating or in non-
corrosive R&D.
ATH-M and ATP-M heated version
The ATH-M heated version with a temperature management
system (TMS) is designed to tolerate harsh chemical process
gas from silicon-based manufacturing applications. Its
pumping system is equipped with specific protection
coatings. The TMS will minimize by-product depositions
within the turbopump to maximize the maintenance intervals
and allow for a minimum tool downtime.
The ATP-M version with a turbomolecular rotor blade
structure (without Holweck stage) provides high compression
ratio for light gases. It aims at processes that require an ultra-
high vacuum, ultimate pressure or high hydrogen pumping
capacity.

Please find
further details
and technical
data here
 Turbopumps
Application examples

Portable
mass spectrometers
An example for a typical application is mass
spectrometry in the field of chemical
detection. The products used in these
solutions must be compact, powerful,
battery-operated and conform to
Milspec 810 for ruggedness.

Pfeiffer Vacuum products in use

HiPace 10
Turbopump HiPace 10
The HiPace 10 is the smallest commerical
turbopump on the market. It is equipped with
a dual ball bearing for robust operation on land,
sea and air.
Ultimate pressure 5 ∙ 10-5 hPa
10 l/s N2 pumping speed
■ 24 VDC (max. power consumption 29 W)
■ 1.8 kg

Diaphgram pump MVP 010 DC MVP 010 DC

Dry and oil-free diaphragm pumps with
a pumping speed of up to 0.60 m3/h.
■ Ultimate pressure < 1 hPa
■ 24 VDC
■ Direct communication with the turbo controller
■ Long service life of diaphragms and valves

Digital piezo/pirani sensor RPT 010

Small digital piezo/pirani sensor for stable gross vacuum
measurement independent of gas type.
■ Display range 10-4 hPa to 1,200 hPa
■ Interfaces can be directly connected to turbo controller
■ Compact dimensions
■ Direct installation, no additional power supply RPT 010
■ No additional gauge cable needed

PrismaPro® mass DigiLine For conditioning bakeable

spectrometer gauge analysis chamber
Heated gas
inlet chamber

Detachable
7“ colored
touch screen

Temperature-regulated gas
sampling line (capillary)

Portable
mass spectrometer MVP 010-3 HiPace® 80
OmniStar diaphragm pump turbo pump
 l 17

High performance liquid

chromatography
mass spectrometers
Pfeiffer Vacuum has the solution for high
performance vacuum instrumentation
applications. We offer standard and
customized turbopumps, including
SplitFlow turbos.

Pfeiffer Vacuum products in use SplitFlow

Turbopump SplitFlow
With the SplitFlow technology, it is possible
to combine multiple turbopumps in a single
package. This is especially useful in the
atmospheric sample systems of analytic
instrumentation such as mass spectrometry

Short time to market for customized solutions

■ Pumping speed up to 700 l/s
■ Multiple ports to match your special design requirements
■ HV solution for < 10-10 hPa
■ Unique UHV sealing solutions
■ Unique mounting technology

Gasflow in variable chambers

 Turbopumps
Application examples

Extreme ultra-high vacuum

applications
Pfeiffer Vacuum offers unique solutions
specifically designed to reach pressure
ranges of < 10-10 hPa with minimal effort.

Pfeiffer Vacuum products in use

Turbopumps HiPace 300 H and 700 H

HiPace 300 H and 700 H turbopumps
HiPace 300 H
have a high compression ratio, which is
especially important for light gases. This
allows the pump to achieve high vacuum
even with a high foreline pressure.

HiPace 700 H
685 l/s N2 pumping speed
< 10-10 hPa ultimate pressure
Compression ratio >1 ∙ 1013 N2 and 2 ∙ 107 for H2
Max. foreline pressure 22 hPa

HiPace 300 H
■ 260 l/s N2 pumping speed
HiPace 700 H
■ < 10-10 hPa ultimate pressure
■ Compression ratio >1 ∙ 1013 N2 and 1 ∙ 107 for H2
■ Max. foreline pressure 30 hPa

ModulLine hot cathode

Pfeiffer Vacuum also offers a true 10-12 hPa extractor type hot
ion gauge.
■ X-ray limit < 1 ∙ 10-12 hPa
■ Bake-out temperature 400 °C
■ Filament Y2O

Mass spectrometer PrismaPro

Quadrupole mass spectrometers with Faraday detectors are
ModulLine hot cathode
the preferred devices for qualitative analysis of the gas
composition in a high-vacuum chamber.
■ High measurement speed, stability and high resolution
■ Flexible operation thanks to interchangeable analyzers and
electronics
■ Two filaments mean maximum up-time
■ Lowest detectable partial pressure
3 ·10-15 hPa (hPa)

PrismaPro
 l 19

Radiation emitting
applications
Pfeiffer Vacuum offers unique solutions
specifically designed to resist radiation. In such
applications, the turbopump and gauges must
be free of any semiconductor electronics.

Pfeiffer Vacuum products in use

External drive electronics

for turbopumps TCP 350
TCP 350 and TCP 1200 external drive
electronics allow turbopumps to be void of any
semiconductor electrical components.

TCP 350
The TCP 350 drive electronics unit is employed
for driving and monitoring the HiPace 80 ­– 800.
Available standard cable lengths from 3 up to 120 m
and up to 1000 m are available upon request.

TCP 1200
The external electronic drive unit TCP 1200 serves as voltage
supply, control and monitoring of a HiPace 1200 ­– 2300 TPG 500
turbopump and connected peripherals.
ModulLine gauges heads and controllers

Controller TPG 500

The controllers TPG 500 are modular and can be configured
in various ways. Two measuring card slots for the operation
of up to 4 gauges are available. An interface slot for various
relay and interface cards is included. Fitting for pressure
range of 1 · 10-11 to 1000 hPa.
Gauge head TPR 018
Metal sealed Pirani gauge.
Gauge head IKR 060 IKR 060
Radiation resistant cold cathode gauge head, coaxial,
with metal seal.

Electronics

Sensor

Connection between Connection between Connection between

HiPace and TCP 350 HiPace and TCP 1200 TPG 500 and IKR 060 sensor
 Turbopumps
Application examples

Modular pumping stations

Pfeiffer Vacuum pumping stations can be
configured with a variety of turbopumps and
backing pumps. Optional gauges are
available to be read directly from the
turbopump readout or a fully configured
gauge controller. Backing pumps are
available as either dry or the economical
wet version.

Pfeiffer Vacuum products in use

HiCube Eco
HiCube Eco
Compact pumping stations: ideal for
pumping small volumes.
Turbopumps: HiPace 30, 80, 300 or 300 H
Backing pump: MVP 015-2, MVP 015-4,
MVP 030 (diaphragm pumps)
Pumping speed N2 = 22 – 260 l/s
Backing pump = 0.5 - 1.8 m³/h

HiCube Classic
HiCube Classic
Robust pumping stations ideal for pumping mid-size volumes
(10 – 100 liters), available with wheels.
■ Turbopumps: HiPace 80, 300, 300 H, 400, 700, 700 H
■ Available backing pumps oil sealed: Duo 3 M, Duo 6 M
(rotary vane pumps)
■ Available backing pumps dry: MVP 040, MVP 070
(diaphragm pumps)
■ Pumping speed N2 = 35 – 665 l/s
■ Backing pump = 2.3 – 6 m³/h

HiCube Pro
Mobile pumping stations ideal for pumping large-size volumes
(50 – 1,000 liters).
■ Turbopumps: HiPace 80, 300, 300 H, 400, 700, 700 H HiCube Pro
■ Available backing pumps oil sealed: Duo 11 M, Duo 20 M,
Pascal 2010, Pascal 2021(rotary vane pumps)
■ Available backing pumps dry: ACP 15, ACP 28
(dry multi-stage Roots pumps)
■ Pumping speed N2 = 35 – 665 l/s
■ Backing pump = 9 – 22 m³/h
 l 21

Semiconductor fabrication
OEM equipment upgrades as well as full fab
solutions are also part of the Pfeiffer Vacuum
portfolio. We have dedicated harsh duty and
high throughput turbopumps for the most
demanding Etch applications. We also offer
ultra-high vacuum, low vibration solutions
for our electron beam and lithography
customers.

Pfeiffer Vacuum products in use ATH 2804 MT

Turbopump ATH 2804 MT

High tempe rature and high throughput
turbopumps
designed for harsh Etch processes.
Operation with compact pump
integrated controller
Installation in any orientation
■ Water cooled
■ CE marked and ROHS compliant
■ Heated version (MT) available for corrosive applications.
3-position pendulum valve
These valves offer the user a highly reliable, compact and 3-position pendulum valve
low-cost alternative to competitive designs. In addition, the
smooth actuation results in low particle generation and rapid
open-to-close speeds. The valve body can be heated to 150 ºC
with optional heater jackets. In-situ serviceability of the valve
is made possible through the incorporation of a removable
bonnet cover.
Multi-stage Roots pumps A4X series
Equipped with the proven and energy efficient multi-stage
Roots technology, the A4X series offers a wide range of dry
pumping solutions designed for the most corrosive appli-
cations. The pumping speed varies from 160 to 3,000 m³/h.
■ High efficiency motors and limited use of electrical heaters
A4X series
■ Corrosion resistant materials for increased lifetime
■ Wide operating temperature range protects the pump
against precursor cracking or condensable deposition
■ Extended monitoring functionalities for accurate control of
pump operating conditions and idle mode capabilities
■ Semi S2-0712 and UL 61010 compliant

Leak detector ASM 390

Optimized for fast and accurate leak testing in all
measurement ranges. The ASM 390 is the perfect
combination of high dry pumping performance, sensitivity and
mobility in the smallest footprint.
■ Dry and clean pump with high backing capacity (35 m³/h)
■ Fast time to test: unrivalled performances from small to ASM 390
large volumes
■ High maneuverability flexibility and compact design
■ Large color touch screen, fully rotatable and detachable
without any tool
■ Integrated toolbox for storage of accessories
■ Connectable DN 25 exhaust for connection to a general
Fab exhaust
 Turbopumps
Application examples

Coating applications
Pfeiffer Vacuum offers complete pumping
solutions for a wide variety of thin film vacuum
coatings, ranging from decorative to solar
panel coatings. These applications require
industrial harsh duty pumps with high
reliability.

Pfeiffer Vacuum products in use

Turbopump ATH 2303 M

ATH 2303 M
Turbomolecular pump with large world
wide installation
base in light to harsh processes for DN 200
and DN 250 flange size.
5-axis magnetically levitated turbopump
for maintenance-free operation
Water cooled controller
Operation in upside down orientation for dusty
vacuum system
■ Profibus interface (other fieldbus options available)

Pumping station CombiLine

For example, a combination of a Hepta 630 screw pump
CombiLine
and an Okta 4000 Roots pump
■ 600 m³/h dry roughing pump
■ 4,000 m³/h Roots booster pump
Also available in various combinations, including wet
and dry pumps.
 l 23

Energy storage flywheel

To ensure the efficiency of a flywheel as an
energy storage device, the constant losses
through friction have to be reduced to a
minimum. To do so, the flywheel housing is
evacuated with vacuum pumps. Typical
targeted pressures are 1 ∙ 10-1 hPa down to
1 ∙ 10-3 hPa or even less.

Pfeiffer Vacuum products in use

HiPace 300
Turbopump HiPace 300
Compact yet powerful turbopumps with
pumping speeds of up to 260 l/s for N2
Equipped with integrated power supply
24 VDC operation
Robust enough to withstand accidental
air inrushes

Rotary vane pump Duo 3 DC

Dual-stage, high-performance rotary vane pump with a
pumping speed of 2.5 m³/h
■ With 24 VDC drive
■ Integrated gas ballast and safety valve Duo 3 DC
■ Low cost of ownership due to
power consumption < 100 W
■ Low maintenance due to brushless drive and optional
magnetic coupling
■ Easy installation and small footprint

Pirani/cold cathode combination gauge MPT 200

With its rugged metallic case and digital interface, the MPT
200 is particularly suited for operation in vacuum and other
systems.
■ Display range: 5 ∙ 10-9 – 1,000 hPa
■ Insensitive to gas inrush
MPT 200
We give our best for you every day –
worldwide!

All information is subject to change without prior notice. PT 0191 PEN (January 2022/PoD)
Are you looking for your
optimized vacuum solution?
Please contact us:

Pfeiffer Vacuum GmbH

Germany
T +49 6441 802-0

www.pfeiffer-vacuum.com