Galvanometer Optical Scanner

GVM-0930S GVM-0930L GVM-1445S GVM-1445L

GVM-2260 GVM-2280 GVM-2510
Galvanometer Optical Scanner & Driver
 Galvanometer Optical Scanner
Mirror

Mirror Assembly Drawing

GM2
X-Axis Y-Axis
Laser Beam
Diameter 10

14.7
Fixed by Reflective Surface 28 Reflective Surface
10.7 Fixed by
screw 3mRAD 24
screw 3mRAD

9.8

8.2
19.6

16.4
4 Depth 5. 5
4 Depth 5.5 6.5
6.5 Spot Center 1.5 Spot Center
1.5 22
15.35

GM4
X-Axis Y-Axis
Laser Beam
Diameter 15

19.1 36
15.1 Reflective Surface Reflective Surface
Fixed by 3mRAD Fixed by 32
3mRAD
screw screw
12.85

11.85
0.81
25.7

23.7
4 Depth 5. 5
4 Depth 5. 5

6.5 6.5
Spot Center Spot Center
17.54 26
2.2 2.2

GM5
X-Axis Y-Axis
Laser Beam
Diameter 20
25.5 Reflective
Surface Reflective
3mRAD 21.5 47
Surface
3mRAD 43
Fixed by Fixed by
screw screw
18.7

14.7
29.4
37.4

6 Depth 6.9
6 Depth 6.9

Spot Center

7.9 7.9 Spot Center

3 32.9
3 22.15

GM6
X-Axis Y-Axis
Laser Beam
Diameter 30 Reflective
36.5 Surface Reflective
32.5 68 Surface
3mRAD
3mRAD 64
Fixed by Fixed by
screw screw
27.7

22
55.4

44
6 Depth 6.9
6 Depth 6.9

Spot Center

7.9 7.9
43.4 Spot Center
27.65 4.5
4.5

13
 Galvanometer Optical Scanner
Terms and Definitions

Scanning Angle
Non-Linearity (Figure 1)
(Figure 1)
This is a ratio of error against ideal scanning angle.

Measured the angle between each command to find approximated

linearity. Then it is calculated by setting full-scale value of the
approximate value as the denominator and the peak value of the
dierence from the approximate value as the numerator.
Position Command

Non-Linearity

Offset drift (Figure 2)

This is the amount of change in oset due to temperature.

Fixed the scanning angle at 0°. Then it is calculated by measuring the amount of position change when the ambient
temperature is changed from 10 to 50 ° C.

Gain drift (Figure 3)

This is the amount of change in gain due to temperature.

It is calculated by measuring the amount of position change when the ambient temperature is changed from 10 to 50 ° C
at the maximum scanning angle of ± n °.

Thermal drift (Figure 4)

This is the amount of maximum position change by combining oset drift and gain drift.

Step response time (Figure 5)

This is the amount of time from the start of scanning to the mirror is settled to the final position after the position command signal is input.
*The catalog value is stated as the response time until the scanning angle becomes ± 0.1 ° and the settling width becomes ± 0.01 °.

(Figure 2) (Figure 3)
Scanning Angle

Scanning Angle

Position
Position command Command

Oset Drift Gain Drift

(Figure 4) (Figure 5)
Scanning Angle

Scanning Angle

Position Command Signal (Scanning Angle 0.1 )

Settling Width 0.01

Position
Command
Position Signal

Response time

Time
Thermal Drift (Oset Drift + Gain Drift) Step Response Time

19
Memo

21
Memo

22