Doc. No.

XG*-OMW0069-A
ID: NN268489001

PRODUCT NAME

Parallel Seal Type Slit Valve

MODEL / Series / Product Number

XGTP31＊-50336-＊＊＊
Contents

Safety Instructions P2～3

1. Specifications P4
2. How to Order P5
3. Construction/Operation P6～8
4. Precautions P8～9
5. Spare Parts List P10
6. Maintenance P10
7. Troubleshooting P11
Attachment: Maintenance Procedure P12～16

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 Slit Valve
Safety Instructions
These safety instructions are intended to prevent hazardous situations and/or equipment damage. These
instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are
all important notes for safety and must be followed in addition to International Standards (ISO/IEC)*1), and other
safety regulations.
1) ISO 4414: Pneumatic fluid power - General rules and safety requirements for systems and their components
ISO 4413: Hydraulic fluid power - General rules and safety requirements for systems and their components
IEC 60204-1: Safety of machinery - Electrical equipment of machines - Part 1: General requirements
ISO 10218-1: Robots and robotic devices - Safety requirements for industrial robots - Part 1:Robots
etc.

Danger indicates a hazard with a high level of risk which, if not avoided, will result
Danger in death or serious injury.

Warnin Warning indicates a hazard with a medium level of risk which, if not avoided, could
result in death or serious injury.
g
Caution indicates a hazard with a low level of risk which, if not avoided, could result
Caution in minor or moderate injury.

Warning
1. The compatibility of the product is the responsibility of the person who designs the
equipment or decides its specifications.
Since the product specified here is used under various operating conditions, its compatibility with specific
equipment must be decided by the person who designs the equipment or decides its specifications based on
necessary analysis and test results. The expected performance and safety assurance of the equipment will
be the responsibility of the person who has determined its compatibility with the product. This person should
also continuously review all specifications of the product referring to its latest catalog information, with a view
to giving due consideration to any possibility of equipment failure when configuring the equipment.
2. Only personnel with appropriate training should operate machinery and equipment.
The product specified here may become unsafe if handled incorrectly. The assembly, operation and
maintenance of machines or equipment including our products must be performed by an operator who is
appropriately trained and experienced.
3. Do not service or attempt to remove product and machinery/equipment until safety is
confirmed.
1. The inspection and maintenance of machinery/equipment should only be performed after measures to
prevent falling or runaway of the driven objects have been confirmed.
2. When the product is to be removed, confirm that the safety measures as mentioned above are
implemented and the power from any appropriate source is cut, and read and understand the specific
product precautions of all relevant products carefully.
3. Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction.
4. Our products cannot be used beyond their specifications. Our products are not developed,
designed, and manufactured to be used under the following conditions or environments.
Use under such conditions or environments is not covered.
1. Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to
direct sunlight.
2. Use for nuclear power, railways, aviation, space equipment, ships, vehicles, military application, equipment
affecting human life, body, and property, fuel equipment, entertainment equipment, emergency shut-off
circuits, press clutches, brake circuits, safety equipment, etc., and use for applications that do not conform
to standard specifications such as catalogs and operation manuals.
3. Use for interlock circuits, except for use with double interlock such as installing a mechanical protection
function in case of failure. Please periodically inspect the product to confirm that the product is operating
properly.

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 Slit Valve
Safety Instructions

Caution
We develop, design, and manufacture our products to be used for automatic control equipment, and
provide them for peaceful use in manufacturing industries.
Use in non-manufacturing industries is not covered.
Products we manufacture and sell cannot be used for the purpose of transactions or certification specified in the
Measurement Act.
The new Measurement Act prohibits use of any unit other than SI units in Japan.

Limited warranty and Disclaimer/Compliance Requirements

The product used is subject to the following “Limited warranty and Disclaimer” and “Compliance
Requirements”.
Read and accept them before using the product.

Limited warranty and Disclaimer

1. The warranty period of the product is 1 year in service or 1.5 years after the product is delivered, whichever is
first.∗ 2)
Also, the product may have specified durability, running distance or replacement parts. Please consult your
nearest sales branch.
2. For any failure or damage reported within the warranty period which is clearly our responsibility, a
replacement product or necessary parts will be provided.
This limited warranty applies only to our product independently, and not to any other damage incurred due to
the failure of the product.
3. Prior to using SMC products, please read and understand the warranty terms and disclaimers noted in the
specified catalog for the particular products.
*2) Vacuum pads are excluded from this 1 year warranty.
A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.
Also, even within the warranty period, the wear of a product due to the use of the vacuum pad or failure due to
the deterioration of rubber material are not covered by the limited warranty

Compliance Requirements
1. The use of SMC products with production equipment for the manufacture of weapons of mass destruction
(WMD) or any other weapon is strictly prohibited.
2. The exports of SMC products or technology from one country to another are governed by the relevant
security laws and regulations of the countries involved in the transaction. Prior to the shipment of a SMC
product to another country, assure that all local rules governing that export are known and followed.

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1. Specifications
Opening size 50mm×336mm
Operating pressure Atmospheric pressure～10-6 Pa
Pilot pressure 0.45～0.6 MPa
O-Ring Material : FKM 6.5×10-10 Pa･m3/sec
Internal leakage *1
O-Ring Material : KalrezⓇ 6.5×10-9 Pa･m3/sec
Internal leakage at Back pressure
*1 O-Ring Material : FKM 6.5×10-8 Pa･m3/sec
〈Back pressure
0.1MPa(abs) or less〉
O-Ring Material : KalrezⓇ 6.5×10-7 Pa･m3/sec
External Leakage *1
6.5×10-11 Pa･m3/sec
Gate Part：5～120℃(During bake-out：150℃)
Operating temperature
Actuator part：5～90℃（Except Auto switch）
Fluid Inert gas
Operating Time 1 sec or less *２
Auto switch D-A93 （Operating temperature：20～60℃）
Seal material FKM
Bellows ：AM350
Gate ：A6063
Main material of
Mechanical Body ：A5052
vacuum part
parts Bonnet ：A6061
Gate bolt ：SUS316
Others ：SUS304
Piping size Rc1/8
Exhaust direction Free
End-Lock ( End lock type) With lock mechanism in opened or FULL sea position
Mounting Direction Vertical
Cylinder Volume 0.2 ℓ
・Insert type：10kg
Mass ・Cassette type (Standard)：14.5kg
・Cassette type (Half MESC)：13.5kg
*1: At normal temperature. Gas permeation is not included.(SMC's inspection conditions)
*2: The period of time from gate open state to clamp after signals comes to solenoid
valve and from gate clam
＜Conditions＞
・Pressure: 0.5MPa ,
・Pipe length:1m,
・Gate Direction: Vertical Upper,
・Without Speed Controller,
・Solenoid Valve:SY5120-01 ,
・Tube:TU0604

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2. How to order

XGTP 3 1 2 - 50336 - 1 C N
End lock
Nil : OPEN/CLOSE
end lock
N : None
Auto switch and the
connector (See Table 1)

Gate seal material

1: FKM
2: KalrezⓇ4709
KalrezⓇ is a registered trademark of E.
I .du Pont de Nemours and Company or
its affiliates.
Opening window size:
50 x 336 mm
Valve type
1：Insert type (Without body)
2：Cassette type (Standard)
3：Cassette type (Half MESC)
Number of axes and seal type:
One axis bellows

Applicable water size:

For 300mm wafer

Parallel seal type slit valve

Table 1. Auto switch and the connector

Symbol Auto switch Connector
Nil - -
A Lead wire: 0.5m
Multiple connector(AMP)
C D-A93 *C016 30D006 100 12 made by AMP is
(2pcs) recommended for the connector (female type)
D-sub connector
F *CDE-9SF05 made by HIROSE ELECTRIC CO.,LTD.
is recommended for the connector (female type).

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3. Construction/Operation
Bonnet ASSY

Fig.1

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3-1 Operation
Figures 1 and 2B show the state in which Slit ① carrying the work piece is closed and Gate ③ (Sealing
material ④) is not clamped (sealed) on Seal surface ②.
In Fig. 2A shows Slit valve opens and Slit ① of the body ⑤ is released. So it is a state where the work
piece can be transported.
Figure 2C shows a state in which Gate ③ is clamped and Seal surface ② is sealed by Sealing material
④ of Gate ③.

3-2 Construction
In Figures 1 and 2, Piston rod ⑦ integrated with Piston ⑥ and Moving base ⑧ are connected by a
displaceable mechanism. And Roller block ⑨ is fixed to Moving base ⑧. In addition, Shaft ⑭ fixed to
Lever ⑲ is separated from each other by the force of Moving base ⑧ and Spring ⑬. On the other hand,
since Lever ⑲ is restricted by Roller block ⑨ and Roller block ⑨ that is guided by Cylinder tube ⑩ and
Cam follower ⑪⑫ attached there. So Shaft ⑭ and Roller block ⑨ are mated by reacting force of Spring
⑬ then it is possible to move up and down together. Also regarding the external seal, Shaft⑭ moving
up and down is done with Bellows ASSY ⑰ and O-ring ⑮⑯○ 30 . And Static seal part of Bonnet ASSY

and Body ⑤ is done with O-ring ⑱.

3-3 At the case Gate CLOSE (Fig2A⇒Fig2B)

By pressurizing to "CLOSE" side port (exhausting "OPEN" side), Moving base ⑧ that is connected to
Piston rods ⑦ are moving up. On the other hand, since Moving base ⑧ pushes up Shaft ⑭ integrated
with Lever ⑲ by Spring ⑬, Lever ⑲ , Shaft ⑭ and Gate ③ attached to it also go up at the same time,
then Cam follower C ○ 21 comes into contact with Stopper ○ 20 and stop the up motion and Slit ① of Body

⑤ is closed.
In FIG. 2B, the left and right positions of Roller block ⑨ and Lever ⑲ are restricted by Cam grooves ○ 24

○26 of Roller block ⑨ and Cam followers A ○ 23 and B ○ 25 . Furthermore, the position of Roller block ⑨ of

the left-right direction is fixed by Guide groove ○22 of Roller block ⑨ and Cam follower ⑪⑫ fixed to the

cylinder tube ⑩. The distance for the vertical direction between Lever ⑲ and Roller block ⑨ is constant
because Cam groove ○ 24 of Roller block ⑨ and Cam follower ○ 23 come in contact and are pressed by

Spring ⑬.Therefore, Shaft ⑭/Gate ③ fixed by Lever ⑲ move up stable when moving from Gate ③
OPEN position in Figure 2A to Gate ③ CLOSE position in Figure 2B.

3-4 At the case Gate CLAMP (Seal) (Fig.2B⇒Fig.2C)

Cam follower C ○ 21 comes into contact with Stopper ⑳ then Lever ⑲/Shaft ⑭ and ③ stop. On the other

hand, Piston rod ⑦ and Roller block ⑨ are further going up with compressing Spring ⑬, so Cam
followers A ○23 and B ○ 25 move to the left side following the cam groove ○24 ○
26 of Roller block ⑨.And

along with that, Lever ⑲/ Shaft ⑭ and Gate ③ also move to the left side, and O ring ④ of the gate ③ is
clamped (sealed) to the seal surface ②.

3-5 Unclamp(Fig.2C⇒Fig.2B)
By pressurizing to "OPEN" port side (exhausting "CLOSE" side), Moving base ⑧ and Roller block ⑨ that
is connected to Piston rods ⑦ moves down, so by following Cam groove ○ 24 ○
26 Cam follower ○ 23 and

Cam follower B ○ 25 move to the right, along with which Shaft ⑭ and Gate ③ also move to the right side

and make unclamp of Gate ③.At that time, Cam follower B ○ 25 fixed to the lever ⑲ and Cam groove ○ 24

of Roller block ⑨ come in contact with each other and are fixed vertically by the force of Spring ⑬.And
also Cam groove ○ 26 of Roller block ⑨ and Cam follower B ○25 are fixed for the left and right direction so

the left, and right directions movement are fixed.

When Roller block ⑨ moves down a slight downward force acts from Cam follower A and ○ 23 Cam

follower ○ 25 to Lever ⑲, but because pushing up force by Spring ⑬ is greater than the downward force,

Gate ③ leaves at a right angle.

3-6 At the case Gate OPEN(Fig.2B⇒Fig.2A)

After unclamp (unseal), Gate ③/ Shaft ⑭/ Lever ⑲ and Roller block ⑨ moves down together, then Gate

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 ③ opens and Slit ① of Body ⑤ is released.

3-7 End lock（in case with End Lock）

When the air pressure suddenly disappears at the opening and closing position of Gate, End lock pin ○ 27
protrudes and enters the end lock groove ○ 26 ○
28 of Roller block ⑨ to regulate the operation of Roller block

⑨ and the valve is maintain the location before the air is lost. However, if the air pressure gradually
disappears, there is a possibility that End lock will not operate properly.

4．Precautions
Caution
4-1. Air piping
Hold the speed controller on the piping port (Rc1/8) lightly and connect the tube. Please
confirm not to apply excessive external force to the fitting. Use a 2 positions 5 port valve for the
product operation.
The end lock may not operate correctly without using the 2 positions 5 port valve.

4-2．Installation
Tighten the bolt for connection gradually and diagonally by constant torque to avoid application of uneven
force to the bolts. When installing the bonnet assembly and gate, refer to the maintenance procedure for
tightening of the bolts.
※Please make OPEN conditions when Bonnet ASSY is installed.
※Please don't make scratch at Body's seal surface when installed
※The compression of the O-rings on the user's application should be 0.7 to 0.9mm.
Otherwise, it may cause potential leak path.
※Please tighten the bolts with proper torque when installed. Otherwise Bolt and Body's threads might
be damaged.

4-3．Disinstallation
Please make OPEN condition when Bonnet ASSY is removed from Body at maintenance. If Bonnet
ASSY is removed at CLOSE condition then Body's threads might be damaged.

4-4．End lock release

When unlocking the slit valve with no air pressure applied, first apply pressure to air port which can
remain current open or close position, and then release end lock and switch the solenoid valve. The
gate of the slit valve is closed before shipment, so apply pressure to the closed position first.
e.g.: If the gate is opened, apply pressure to the "open" side of air piping, and switch the valve after
releasing the end lock.
When Slit valve is shipped the condition of Gate is below,
1. Insert type: Gate is OPEN so please supply the pressure to OPEN port.
2. With Body type: Gate is CLOSE so please supply the pressure to CLOSE port.

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4-5．Speed control
Be sure to control speed to open and close the gage in meter out condition.
Otherwise, the slit valve life will be adversely affected. Improper use of speed controls can damage
end-lock mechanism as well as shorten life time of valve.

4-6．Exhaust piping
Please avoid to be influenced exhaust pressure from other solenoid valves to the slit valve. Such a
pressure may cause improper operation of end lock of the gate.

4-7．Operation of valve
(1) Please confirm in regulated difference pressure as 4kPa and do the opening and shutting operation
when you open and shut the valve.
(2) Incase Body(Chamber) and Gate is heated and cooling gradually from High Temperature to Room
temperature then please make OPEN condition. If it is cooling at CLOSE condition then Gate O-ring
will be stuck and when operate to OPEN condition then gate O-ring will be removed.

Warning
(3) Please keep within operating pressure range to slit valve.
If operating pressure is over the range then cylinder will be damaged and injury by
broken pieces.
(4) Do not put your hand into the slit of the body without confirming safety.
Injury and Bodily harm will occur with the valve operated when valve is operated valve.
(5) Do not remove the Cover （Fig.1○ 29 ）on the actuating part. And if it is touched the

internal actuating parts while the slit valve is operating may result in injury.
(6) Remove the pneumatic piping for operation and make cylinder have no pressure inside for
maintenance otherwise cylinder is operating and makes dangerous. When tube is removed please shut
off the pressure and ensure that stored energy is removed. Otherwise tube is removed the tube will be
out of control and make loss of vision to employees or injury.

Caution
4-8．Replacement of O-ring
Use the parts shown on “4. Replacement parts list” when replacing bonnet assembly, Gate and O-rings
for a gate. Give sufficient cleaning to O-ring groove and mount O-ring in it so that it will not twist. Use a
plastic specific tool so as not to damage sealing faces of the O-ring groove. Refer to the maintenance
manual for details.
After replacement, please implement leak inspection.

Warning
4-9．Return of Product
If the product being returned is contaminated or possibly contaminated with substances that are harmful
to humans then please contact SMC in the first instance and get the product decontaminated and made
safe by a specialist cleaning company. After the decontamination prescribed in the sentence before,
submit Product Return Request Sheet or Detoxification/Decontamination certificate to SMC and await
return contact from SMC before returning the item to SMC.
Please refer to International Chemical Safety Cards (ICSC) for a list of the harmful substances.
If you have any questions, please contact your SMC sales representative.

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5．Spare Parts List

For XGTP312-50336-***
Description Orderable Part No Applicable Part No Note

Body ASSY XGT300-1-1AS XGTP312-50336-※※※ －

For XGTP313-50336-***
Description Orderable Part No Applicable Part No Note

Body ASSY XGT300-1-1-3AS XGTP313-50336-※※※ －

Common Spare Parts List

Description Orderable Part No Applicable Part No Note
XGTP31※-50336-1※※
XGTP311-50336A1-1※ or -
XGTP31※-50336-2※※
Bonnet ASSY XGTP311-50336A1-1A※ XGTP31※-50336-※A※ -
XGTP311-50336A1-1C※ XGTP31※-50336-※C※ -
XGTP311-50336A1-1F※ XGTP31※-50336-※F※ -
Gate ASSY XGTP300-2-1S XGTP31※-50336-※※※ -
Bellows ASSY XGTP300-20AS ↑ -
O-ring(Body
FKM XGT300-9-10S ↑ AS568-273
opening side)
FKM XGT300-9-9S XGTP31※-50336-1※※
O-ring(Gate) AS568-271
○
R
XGT300-9-11S XGTP31※-50336-2※※
Kalrez 4079
O-ring(Bonnet
FKM XGT300-9-7S XGTP31※-50336-※※※ AS568-177
assembly)
Gate Bolt XGT300-2-5S ↑ -

How to order for Bonnet ASSY

XGTP311 - 50336A1 - 1 ※ ※
Without Gate End lock
Nil : OPEN/CLOSE end lock
N : None

Auto switch and the connector

(See Table 1)

Connected connector of Auto witch (female type)

Description Orderable Part No Applicable Part No Note
Straight plug XGT0402-9-12S For XGTP31※-50336-※C※ C016 30D006 100 12(AMP)

6. Maintenance

Warning
Please refer to the attached “Procedure for maintenance”.

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7．Troubleshooting

Status Possible cause Countermeasure

Operating pressure is too low Increase pressure to 0.45MPa or more.
Foreign materials of
Cleaning to Seal Surface
Seal surface
Scratches on the seal surface
Replace Gate
of Gate
Scratches on the seal
Replace Body
surface of Body
Gate Deterioration of O-ring by Replace with new O-ring whose material is
Internal leakage processing changed to have compatibility with processing
Twist of O-ring Re-install O-ring
Come off of O-ring Re-install O-ring
Peeling off of O-ring Replace O-ring
Concave/ Convex of end of Put the convex part into the groove to make
O-ring the O-ring height the same.
Deterioration of Bonnet
Replace Bonnet ASSY
Assembly
Damage of Bellow ASSY Replace Bellows ASSY
Deterioration of O-ring by Replace with new O-ring whose material is
External Leakage processing changed to have compatibility with processing
Scratches on the seal surface Polishing of seal surface
Wrong End lock operation Please refer 4-4
Gate is not Operating pressure is too low Increase pressure to 0.45MPa or more.
possible to CLOSE Deterioration of Bonnet
Replace Bonnet ASSY
assembly
Wrong End lock operation Please refer 4-4
Gate is not Operating pressure is too low Increase pressure to 0.45MPa or more.
possible to OPEN Deterioration of Bonnet
Replace Bonnet ASSY
assembly
Displacement of
Adjust the location to detect range
Doesn't work Auto-switch
Auto-switch Failure of Auto-switch Replace Auto-switch
Operating pressure is too low Increase pressure to 0.45MPa or more.
Air Leakage of Loosening of connection Replace Bonnet ASSY
Bonnet ASSY Wear of piston sea Replace Bonnet ASSY

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 Revision history
Edition A: 19 February 2024

Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362

URL https://www.smcworld.com

Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.
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