It Ikawa 2009
It Ikawa 2009
Yukikazu Itikawaa…
                                              Institute of Space and Astronautical Science, Sagamihara 229-8510, Japan
共Received 8 July 2008; accepted 23 October 2008; published online 12 December 2008兲
                                 Cross section data are collected and reviewed for electron collisions with oxygen
                              molecules. Included are the cross sections for total and elastic scatterings, momentum
                              transfer, excitations of rotational, vibrational, and electronic states, dissociation, ioniza-
                              tion, electron attachment, and emission of radiations. For each process, the recommended
                              values of the cross sections are presented, when possible. The literature has been sur-
                              veyed through the end of 2007. © 2009 American Institute of Physics.
                              关DOI: 10.1063/1.3025886兴
                              Key words: attachment; cross section; dissociation; elastic scattering; electron collision; emission; excitation;
                              ionization; molecular oxygen; momentum transfer; recommended data; total scattering.
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2                                                                            YUKIKAZU ITIKAWA
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                                            ELECTRON COLLISIONS WITH OXYGEN MOLECULES                                                                                                          3
                                                                                                                     12
                           1. Introduction
   The oxygen molecule 共O2兲 is one of the major components                                                           10
                                                                                                 cm )
of Earth’s atmosphere. It also plays an important role in vari-
                                                                                                2
ous processing plasmas.1,2 Oxygen discharges are of practi-
                                                                                                –16
                                                                                                 cross section (10
cal significance particularly because O2 is one of the simplest                                                       8
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4                                                                        YUKIKAZU ITIKAWA
0.1                                                           3.83                                                  10
0.12                                                          4.02
0.15                                                          4.22
0.17                                                          4.33
                                                                                                                     8
0.2                                                           4.47
                                                                                                cm )
                                                                                               2
0.25                                                          4.65
                                                                                               –16
0.3                                                           4.79
3                                                             6.84
                                                                                              FIG. 2. Elastic scattering cross section for O2. Two sets of recommended
3.5                                                           7.01
                                                                                              values 共i.e., those by Buckman et al.11 and by Kanik et al.4兲 are compared
4                                                             7.18
                                                                                              with the cross sections measured by Linert et al.15
4.5                                                           7.36
5                                                             7.55
6                                                             7.93                            portance. The recommended data of Karwasz et al., and
7                                                             8.39                            hence the present ones, simply ignore those resonant peaks.
8                                                             9.16
9                                                             9.91
10                                                           10.4                                                                    3. Elastic Scattering
12                                                           10.8
15                                                           10.7                                Normally electron beam experiments have insufficient en-
17                                                           10.7                             ergy resolution to resolve each rotational state of oxygen
20                                                           10.8                             molecules. Hence the elastic cross section experimentally
25                                                           11.0                             obtained includes the cross sections for rotational transitions
30                                                           11.0                             and is called the “vibrationally elastic” cross section. In the
35                                                           10.9
                                                                                              present section, Qelas means such a vibrationally elastic cross
40                                                           10.7
45                                                           10.5                             section.
50                                                           10.3                                In 1993, Kanik et al.4 determined their recommended
60                                                            9.87                            cross section for the electron elastic scattering from O2. They
70                                                            9.52                            reported Qelas for the energy region of 1 – 1000 eV. In 2003,
80                                                            9.23                            Buckman et al.11 reported their own recommended values of
90                                                            8.98
                                                                                              Qelas for the energy range of 1 – 100 eV. They based their
100                                                           8.68
120                                                           7.97                            recommendation on the experiments done by Trajmar et
150                                                           7.21                            al.,12 Shyn and Sharp,13 and Sullivan et al.14 Buckman et al.
170                                                           6.78                            also considered the data recommended by Kanik et al. In
200                                                           6.24                            Fig. 2, the two sets of recommended cross sections 共i.e., the
250                                                           5.51                            results of Kanik et al. and Buckman et al.兲 are compared
300                                                           4.94
                                                                                              with each other.
350                                                           4.55
400                                                           4.17                               Recently Linert et al.15 measured the differential cross sec-
450                                                           3.85                            tion 共DCS兲 for the elastic scattering in the backward direc-
500                                                           3.58                            tion 共100°–180°兲. They determined the integral elastic cross
600                                                           3.11                            section Qelas from their DCS and those measured previously
700                                                           2.76                            by Sullivan et al.14 at 15°–100°. The resulting Qelas, reported
800                                                           2.49
                                                                                              at the energies of 7 – 20 eV, is also shown in Fig. 2. The
900                                                           2.26
1000                                                          2.08                            values of Linert et al. well agree with the recommended data
                                                                                              of Buckman et al.11 The agreement is clearly better than the
                                                                                              agreement with Kanik et al.4 Here we recommend the Qelas
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                                                                 ELECTRON COLLISIONS WITH OXYGEN MOLECULES                                                                                     5
                     10                                                                                        1                                                                5.97
                                                                                                               2                                                                6.45
                                                                                                               3                                                                6.74
                      8                                                                                        4                                                                6.93
 cm )
2
                                                                                                               5                                                                7.20
                                                                                                               6                                                                7.52
–16
 cross section (10
                                                                                                               7                                                                7.86
                      6
                                                                                                               8                                                                8.21
                                                                                                               9                                                                8.49
                                                                                                               10                                                               8.80
                      4                                                                                        12                                                               9.00
                                          e + O2 elastic scattering                                            15                                                               8.89
                                                recommended                                                    20                                                               8.60
                      2                                                                                        30                                                               8.09
                                                                                                               40                                                               7.30
                                                                                                               50                                                               6.59
                      0                                                                                        60                                                               6.08
                              2       3   4 5 6 7            2   3    4 5 6 7         2   3   4 5 6 7          70                                                               5.63
                          1                         10                          100                     1000
                                                         electron energy (eV)
                                                                                                               80                                                               5.29
                                                                                                               90                                                               5.01
FIG. 3. Recommended values of the elastic scattering cross section for O2.                                     100                                                              4.78
                                                                                                               200                                                              3.15
                                                                                                               300                                                              2.40
of Buckman et al. for the energy range of 1 – 100 eV and                                                       400                                                              2.00
extend them to the higher energy 共100– 1000 eV兲 with taking                                                    500                                                              1.72
the data of Kanik et al. The recommended cross section is                                                      600                                                              1.53
shown in Fig. 3 and Table 2. Buckman et al. claimed the                                                        700                                                              1.37
uncertainty of the Qelas to be within ⫾20%.                                                                    800                                                              1.27
   As is described in Sec. 6, the elastic scattering also shows                                                900                                                              1.18
an effect of shape resonance in the region of 0.1– 1 eV. The                                                   1000                                                             1.10
resonance appears as a series of very sharp peaks in the
energy dependence of the cross section. However, no reliable
experimental data, including the resonance effect, are avail-                                                  derive the Qm, they needed to extrapolate their DCSs in the
able for the integral cross section Qelas in the energy region                                                 forward and backward directions. The cross section of Elford
below 1 eV 共see Sec. 6 for more details兲.                                                                      et al. is shown in Fig. 4.
                                                                                                                  As is stated in Sec. 3, Linert et al.15 recently measured
                                                                                                               qelas in the backward direction 共i.e., 100°–180°兲. Combining
                     4. Momentum-Transfer Cross Section                                                        their DCSs with those of Sullivan et al., Linert et al. deter-
                                                                                                               mined their own Qm at the energies of 7 – 20 eV. In Fig. 4,
  The 共elastic兲 momentum-transfer cross section is defined                                                     the Qm of Linert et al. are compared with those of Elford et
by                                                                                                             al.16 There is a remarkable difference between the two sets of
                                                                                                               Qm. From the definition of Qm 关see Eq. 共1兲兴, the DCS in the
                     Qm = 2      冕   共1 − cos 兲qelas共兲sin d ,                                       共1兲
                                                                                                               backward direction is very effective to Qm. Because there is
                                                                                                               no need to extrapolate in the backward direction, the data
                                                                                                               obtained by Linert et al. should be more accurate than the
where qelas共兲 is the DCS for the 共vibrationally兲 elastic scat-                                                corresponding values of Sullivan et al., on which the data of
tering. The momentum-transfer cross section gives a measure                                                    Elford et al. are based. In conclusion, we recommend the Qm
of momentum transfer during the 共elastic兲 collision.                                                           of Elford et al. but modify them with taking the values of
   Elford et al.16 presented their recommended values of Qm                                                    Linert et al. as shown in Fig. 5. The resulting values are
for O2. In the low-energy region 共⬍0.3 eV兲, their recommen-                                                    presented in Table 3. Elford et al. estimated the uncertainty
dation is based on a swarm experiment. At the higher ener-                                                     of their recommended data to be within 20%. The present
gies, they followed the result of JPCRD89.3 In the energy                                                      modification has been done in this range of allowance.
range of 2 – 20 eV, however, they modified the Qm of                                                              In the energy region below 1 eV, a shape resonance af-
JPCRD89 by using the values derived by Sullivan et al.14                                                       fects qelas, as is shown in Sec. 6. No experimental evidence,
from their beam measurement of elastic DCS. Sullivan et al.                                                    however, has been reported on the resonance effect on the
measured the DCSs at the scattering angles of 15°–100°. To                                                     momentum-transfer cross section so far.
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6                                                                                       YUKIKAZU ITIKAWA
                                                                                                             0.01                                                             0.69
                      8                                                                                      0.012                                                            0.75
                                                                                                             0.015                                                            0.86
                                                                                                             0.018                                                            0.92
                                                                                                             0.02                                                             0.96
 cm )
2
                      6                                                                                      0.025                                                            1.10
–16
                                                                                                             0.03                                                             1.23
 cross section (10
                                                                                                             0.04                                                             1.42
                                                                                                             0.05                                                             1.63
                      4                                                                                      0.06                                                             1.85
                                                                                                             0.07                                                             2.04
                                                                                                             0.08                                                             2.19
                                                                                                             0.09                                                             2.38
                                                       e + O2 momentum transfer
                      2                                                                                      0.1                                                              2.51
                                                             Elford
                                                             Linert                                          0.12                                                             2.77
                                                                                                             0.15                                                             3.10
                                                                                                             0.18                                                             3.42
                      0                                                                                      0.2                                                              3.61
                                                                                                             0.25                                                             4.02
                          0.01           0.1                 1                10                100
                                                                                                             0.3                                                              4.37
                                                   electron energy (eV)
                                                                                                             0.4                                                              4.91
FIG. 4. Momentum-transfer cross section for O2. The recommended values                                       0.5                                                              5.36
by Elford et al.16 are compared with the cross section measured by Linert et                                 0.6                                                              5.70
al.15
                                                                                                             0.7                                                              5.98
                                                                                                             0.8                                                              6.17
                                                                                                             0.9                                                              6.32
                                 5. Rotational Excitation                                                    1                                                                6.49
                                                                                                             1.2                                                              6.71
   No reliable experimental information is available for the                                                 1.5                                                              6.82
rotational excitation of O2. More specifically, no new 共either                                               1.8                                                              6.69
theoretical or experimental兲 studies of rotational transition in                                             2                                                                6.58
O2 have been reported since the publication of JPCRD89.3                                                     2.5                                                              6.32
   One of the simple methods to estimate the rotational cross                                                3                                                                6.14
                                                                                                             4                                                                6.01
section Qrot is the Born approximation with taking the elec-
                                                                                                             7                                                                6.22
                                                                                                             10                                                               6.72
                     10
                                                                                                             17.5                                                             6.80
                                                                                                             30                                                               6.00
                                                                                                             40                                                               4.37
                                                                                                             50                                                               3.66
                                                                                                             60                                                               3.05
                      8
                                                                                                             70                                                               2.58
                                                                                                             80                                                               2.22
                                                                                                             90                                                               1.91
 cm )
2
                                                                                                             100                                                              1.44
                      6
–16
 cross section (10
                      4
                                                                                                             tron interaction with the molecular quadrupole moment. Due
                                                                                                             to the presence of unpaired spins, the lowest rotational level
                                                                                                             of O2 is J = 1. Furthermore, because of molecular symmetry,
                                                                                                             rotational transitions are allowed when ⌬J = even. The lowest
                      2                                                                                      rotational transition in O2, therefore, is the process J = 1
                                                  e + O2 momentum transfer                                   → 3. The Born theory, together with the electron-quadrupole
                                                        recommended
                                                                                                             interaction, gives the cross section in the form17
                      0
FIG. 5. Recommended values of the momentum-transfer cross section for                                        Here B is the rotational constant in eV, 具M 2典 is the quadru-
O 2.                                                                                                         pole moment in a.u., and E is the electron energy in eV. For
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                                        ELECTRON COLLISIONS WITH OXYGEN MOLECULES                                                                                                                           7
                                                                                             cm /sr)
                                                                                            2
                                                                                                                              6
                                                                                            –18
              6. Vibrational Excitation
                             6.1. E > 1 eV                                                                                    0
                                               3
   At the publication of JPCRD89, no definite information                                                                         0   30         60             90           120       150            180
was available on the cross section of individual vibrational                                                                                          scattering angle (deg)
transitions,  = 0 → ⬘. Instead, only the sum ⌺⬘Qvib共0                                   FIG. 6. DCSs for the vibrational transition  = 0 → 1 at the electron energy of
→ ⬘兲 was shown in the paper. In 1993, Shyn and Sweeney19                                  10 eV. Three sets of measurements 共Linert and Zubek,22 Brunger et al.,20
reported their measurement of the individual vibrational                                   and Shyn and Sweeney19兲 are compared with each other.
cross sections for  = 0 → 1 , 2 , 3 , 4. They obtained the corre-                            Allan18 measured the DCS at 90°. He obtained a very
sponding DCS at the scattering angles of 12°–168° for the                                  detailed energy dependence of the DCS up to 16 eV. He
electron energies of 5 – 15 eV. A similar measurement was                                  showed that the corresponding DCS of Shyn and Sweeney19
done by Brunger et al.20 共The corresponding integral cross                                 is consistent with the result of his measurement. Further-
sections were given in the paper by Noble et al.21 to compare                              more, in the region of 6 – 16 eV, Allan observed excitations
with theoretical results.兲 Brunger et al. reported the vibra-                              of very high vibrational states 共up to v⬘ = 8兲. He concluded
tional cross sections for  = 0 → 1 , 2 , 3 , 4 at the energies of                         that the broad peak in the energy region is caused by the
7 – 15 eV. They obtained the DCS only in the forward direc-                                4
                                                                                             ⌺u− resonance.
tions 共10°–90°兲. The resulting DCSs are somewhat different
from those of Shyn and Sweeney 共see, e.g., Figs. 6 and 7兲.                                                                    4
   Recently Linert and Zubek22 made a rather comprehensive                                                                                                  e + O2
measurement of DCS for the vibrational excitation. With the                                                                                                 vibrational excitation v=0 → 2 at 10 eV
                                                                                                                                                                  Linert
use of a magnetic angle changer, they determined DCS for a                                                                                                        Brunger
wide range of scattering angles 共i.e., 15°–180°兲. They ob-                                                                                                        Shyn
                                                                                                                              3
tained the cross sections for  = 0 → 1 , 2 , 3 , 4 but only at the
                                                                                             cm /sr)
                                                                                            2
For the process  = 0 → 1 共see Fig. 6兲, the DCS of Shyn and
Sweeney has a similar  dependence but a somewhat small                                                                       2
absolute magnitude compared with the result of Linert and
Zubek. The discrepancy may be due to a rather ambiguous
separation of the energy loss peak of ⬘ = 1 from the elastic
peak, which is very large. For other transitions, the DCSs of                                                                 1
the two experiments 共i.e., by Shyn and Sweeney and Linert
and Zukek兲 well agree with each other 共as an example, DCS
for  = 0 → 2 being shown in Fig. 7兲. Here we adopt as the
recommended values the integral cross sections of Shyn and
Sweeney except that for ⬘ = 1 at 10 eV. For Qvib共0 → 1兲 at                                                                   0
10 eV, we prefer the value of Linert and Zubek to that of                                                                         0   30         60             90           120       150            180
Shyn and Sweeney. The present recommended values of the                                                                                               scattering angle (deg)
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8                                                                                             YUKIKAZU ITIKAWA
                                                                                                                 5                           0.095                  0.034
                                                                                                                 7                           0.305                  0.114                0.045
 cm )
2
                     0.2
                                               v=2                                                               widths of the measured cross sections do not represent the
                                                                                                                 real profiles of resonance. For this reason, Allan could not
                     0.1                                            v=3
                                                                                                                 derive any absolute magnitude of the cross section from his
                                                                                                                 measurement. Instead he derived the energy-integrated cross
                                                                                                                 section, ⌬E · Qvib, where ⌬E is the width of each peak. Table
                                                                                                                 5 shows an example of the energy-integrated cross section
                     0.0                                                                                         derived by Allan. JPCRD89 shows a similar table, but it is
                           4          6              8            10          12         14        16            based on the measurement of ⌬E · Qvib by Linder and
                                                         electron energy (eV)                                    Schmidt.23 The values of Linder and Schmidt are by about
FIG. 8. Recommended values of the vibrational cross sections for the tran-
                                                                                                                 three times smaller than the present ones. Allan stated that
sitions v = 0 → 1 , 2 , 3.                                                                                       this difference is probably caused by the inadequate way of
                                                                                                                 normalization used by Linder and Schmidt. There are several
                                                                                                                 calculations of the resonance width. The most recent one,
                                                   6.2. E < 1 eV
                                                                                                                 obtained by Higgins et al.,24 is given in Table 5. If we adopt
   It is known that the vibrational cross section of O2 has                                                      these theoretical values of the resonance width ⌬E, the ab-
very sharp resonant peaks in the energy region of                                                                solute value of the cross section Qvib can be derived from the
0.2– 1 eV.23 Those peaks are due to a temporary electron                                                         energy-integrated cross section ⌬E · Qvib measured by Allan.
capture of O2 to form a negative ion state O2− 共 2⌸g兲. Allan18                                                   The resulting Qvib are also shown in Table 5. The resonance
made a very detailed study of the resonance. He measured                                                         cross sections thus obtained for v = 0 → 1 and 2 are plotted in
the DCS for the vibrational transitions v = 0 → v⬘ with v⬘                                                       Fig. 9 with the corresponding cross sections in the higher
= 1 – 7. All the vibrational cross sections have a sharp peak at                                                 energy region 共i.e., those shown in Fig. 8兲.
the same position of the electron energy, which corresponds                                                         This 2⌸g resonance has an effect also in the cross section
to the vibrational levels 共v⬙兲 of O2− 共 2⌸g兲. Allan found peaks                                                  for other processes. Allan18 measured also the DCS 共at 90°兲
at 0.214 eV 共v⬙ = 5兲 to 2.197 eV 共v⬙ = 24兲. From theoretical                                                     for elastic scattering in the energy range of 0.2– 16 eV. The
studies 共e.g., Higgins et al.24兲, the width of each peak should                                                  elastic cross section has a sharp peak at the resonance corre-
be very small. According to Allan, the width is narrower than                                                    sponding to the O2− 共2⌸g, v⬙兲 with v⬙ = 5 – 14. Those peaks
the apparatus profile of his experiment. In other words, the                                                     appear on a large background cross section. That is, for the
                                          TABLE 5. Resonance cross section for the vibrational excitation  = 0 → ⬘ of O2. The quantum number ⬙
                                          indicates the vibrational state of the resonance state and ⌬E is the width of the resonance state
                                                                                          ⌬E · Qviba                                                   Qvibc
                                                          Resonance                    共10−20 eV cm2兲                                               共10−16 cm2兲
                                                           energya                                                        ⌬Eb
                                              v⬙            共eV兲             v⬘ = 1       v⬘ = 2        v⬘ = 3         共10−3 eV兲         v⬘ = 1        v⬘ = 2        v⬘ = 3
                                               5            0.214             共3兲  d
                                                                                                                         0.896           0.3
                                               6            0.338             153                                        2.17            7.05
                                               7            0.460             327         共1.6兲d                         3.32            9.85           0.05
                                               8            0.579             334           40                           4.99            6.69           0.80
                                               9            0.696             238           88          共0.06兲d          7.02            3.39           1.3         0.001
                                              10            0.812             138           95           5.6
                                              11            0.925              67           76          16
                                          a
                                            From the measurement by Allan.18
                                          b
                                            From a theoretical calculation by Higgins et al.24
                                          c
                                            Derived from the ⌬E · Qvib of Allan and ⌬E of Higgins et al.
                                          d
                                            Values in the parentheses have a large uncertainty 共up to a factor of 2兲.
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                                                              ELECTRON COLLISIONS WITH OXYGEN MOLECULES                                                                                          9
                                                                                                              TABLE 6. Electronic states of O2 for which the cross section data are avail-
                                                                    e + O2 vibrational excitation             able 共a more detailed list of the energy levels is given in JPCRD893兲
                      10
                                                                                                              State                       T0 共eV兲a,b                    Figure           Table
                                                                                                              a 1⌬ g                      0.977                            11             7
                                                             v=0 → 1 resonance
                                                                                                              b 1⌺ g+                     1.627                            13             7
                                                                                                              c 1⌺ u−                     4.050                            14             8
                                                                               v=0 → 1                        A⬘ 共C兲 3⌬uc
 cm )
                                                                                                                                          4.262                            14             8
2
                       1
                                                                                                              A 3⌺ u+                     4.340                            14             8
–16
                                                                                                              B 3⌺ u−
 cross section (10
                                                                                                                                          6.120                            16             9
                                                    v=0 → 2 resonance                                         a
                                                                                                               Energy of the lowest vibrational state relative to the ground level X 3⌺g−
                                                                                                               共v = 0兲.
                                                                                                              b
                                                                                                                Cited from JPCRD89.
                                                                                                              c
                                                                                                               In JPCRD89, this state is designated as C.
                      0.1
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10                                                                                                            YUKIKAZU ITIKAWA
                                    2.0                                                                                                10
                                                                                                                                                                                                         1
                                                                                                                                                                                e + O2 excitation of a ∆g
                                                                                                    1                                                                           differential cross section (Allan)
                                                                           e + O2 excitation of a ∆g at 10 eV
                                                                                 Linert
                                                                                 Tashiro (theory)                                       8
                                                                                 Shyn
                                    1.5
                                                                                 Middleton
   cm /sr)
                                                                                                                                                                                           30 deg
                                                                                 Allan
 2
 –18
                                                                                                                             cm /sr)
                                                                                                                                        6
   differential cross section (10
                                                                                                                            2
                                                                                                                            –19
                                    1.0
                                                                                                                             DCS (10
                                                                                                                                        4
                                    0.5
                                                                                                                                        2                     90 deg
0.0 0
FIG. 10. DCSs for the excitation of the a 1⌬g state of O2 at the collision                                                 FIG. 12. Energy dependence of the DCSs for the excitation of the a 1⌬g state
energy of 10 eV. Four sets of measurements 共Linert and Zubek,32 Shyn and                                                   of O2 measured by Allan31 at the scattering angles of 30° and 90°.
Sweeney,30 Middleton et al.,28 and Allan31兲 and a calculation 共Tashiro et
al.34兲 are compared with each other.                                                                                       each other. Furthermore they are in overall agreement with
                                                                                                                           the result of the calculation of Tashiro et al.33 The theoretical
                                                                                                                           cross section shows a rapidly changing structure due to reso-
the cross section measured by Middleton et al.27 because                                                                   nance. The calculation was based on the fixed nuclei ap-
they may have a large uncertainty due to their extrapolation                                                               proximation. The resonance structure may depend on the in-
of DCS in a wide range of scattering angles. Those three sets                                                              ternuclear distance. Hence the structure may be smoothed
of experimental data shown in Fig. 11 are consistent with                                                                  out when the nuclear dependence is taken into account in the
                                                                                                                           calculation. Allan31 measured a detailed energy dependence
                                                                                                                           of the DCS at 30° and 90°. Each set of his DCSs shows the
                                    0.14
                                                                                                                  1
                                                                                          e + O2 excitation of a ∆g
                                                                                                                           resonance structure similar to the theoretical result. Allan
                                                                                                Linert                     shows, however, that the structure is changed with the scat-
                                    0.12                                                        Shyn                       tering angle 共see Fig. 12兲. Therefore, the integral cross sec-
                                                                                                Doering
                                                                                                recommended                tion should have a slight effect of the resonance, if any. In
                                                                                                Tashiro (theory)           conclusion, we here adopt the cross sections of Shyn and
                                    0.10
                                                                                                                           Sweeney30 as the recommended ones. They are presented in
  cm )
                                    0.08
  cross section (10
                                                                                                                                                                 7.2. b 1⌺g+
                                    0.06
                                                                                                                              The two states, a 1⌬g and b 1⌺g+, have the same configu-
                                                                                                                           ration of molecular orbitals. The corresponding excitation
                                    0.04
                                                                                                                           TABLE 7. Recommended cross sections for the excitations of the electronic
                                                                                                                           states, a 1⌬g and b 1⌺g+
                                    0.02
                                                                                                                                                                          Cross section 共10−16 cm2兲
                                                                                                                           Energy 共eV兲                                 a 1⌬ g                         b 1⌺ g+
                                    0.00
                                           0             5                  10                 15                 20       5                                           0.076                          0.020
                                                                   electron energy (eV)                                    7                                           0.104                          0.033
                                                                                                                           10                                          0.077                          0.019
FIG. 11. Cross sections for the excitation of the a 1⌬g state of O2. Three sets                                            15                                          0.042                          0.0078
of experimental data 共Linert and Zubek,32 Shyn and Sweeney,30 and                                                          20                                          0.023                          0.0055
Doering29兲 are compared with the theoretical result of Tashiro et al.33 The
present recommended values are indicated with a thick solid line.
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                                                               ELECTRON COLLISIONS WITH OXYGEN MOLECULES                                                                                            11
                             -3
                     50x10                                                                                                              0.30
                                                                                                1    +                                                                  e + O2 excitation A+A'+c
                                                                         e + O2 excitation of b Σg
                                                                                                                                        0.25                                  Shyn
                         40                                                    Shyn
                                                                               recommended                                                                                    Green
                                                                                                                                                                              Teillet-Billy
                                                                                                                                                                              Tashiro (theory)
                                                                                                                                        0.20                                  recommended
                                                                                                                    cm )
 cm )
                                                                                                                   2
2
30
                                                                                                                   –16
–16
0.15
20
0.10
                         10
                                                                                                                                        0.05
0 0.00
                                  0               5                10                15                  20                                    0      10             20               30           40
                                                          electron energy (eV)                                                                              electron energy (eV)
FIG. 13. Recommended values of the cross section for the excitation of the                                        FIG. 14. Combined cross sections for the excitations of the states A 3⌺u+,
b 1⌺g+ state of O2 based on the experimental data obtained by Shyn and                                            A⬘ 3⌬u, and c 1⌺u− of O2. Three sets of experimental data 共Shyn and
Sweeney30.                                                                                                        Sweeney,35 Green et al.,36 and Teillet-Billy et al.37兲 are compared with the
                                                                                                                  theoretical result of Tashiro et al.33 The present recommended values are
                                                                                                                  indicated with a thick solid line.
energies are not much different from each other. Thus we
expect that the excitation cross sections are not much differ-
                                                                                                                     In Fig. 14, we show the results of three measurements
ent for the two states. We have three sets of measurements of
                                                                                                                  reported after the publication of JPCRD89 共i.e., those of
the cross section for this state.27,30,31 Assuming the same situ-
                                                                                                                  Teillet-Billy et al.,37 Shyn and Sweeney,35 and Green et
ation as in the case of the a 1⌬g state, we select the data of
                                                                                                                  al.36,38兲. The values of Shyn and Sweeney are the sum of
Shyn and Sweeney30 as the recommended values for the ex-
                                                                                                                  their cross sections separately reported for the A, A⬘, and c
citation of the b 1⌺g+ state. Those data are shown in Fig. 13
                                                                                                                  states. The cross sections of Green et al.36 were derived from
and Table 7. The uncertainty of the cross section was esti-
                                                                                                                  the DCS reported by them.38 They measured the DCS only
mated by Shyn and Sweeney to be ⫾18%.
                                                                                                                  up to 90°. Because of the wide-range extrapolation, their
                                                                                                                  integral cross section may have a large uncertainty. Here we
                                                                                                                  adopt the cross section of Shyn and Sweeney as the recom-
                                        7.3. A 3⌺u+, A⬘ 3⌬u, c 1⌺u−                                               mended data. Those cross sections are tabulated in Table 8.
   The threshold energies of the excitations of these three                                                       They are in good agreement with the experimental data of
states are very close. Normally in the electron energy loss                                                       Teillet-Billy et al. In Fig. 14, we also plot the theoretical
measurement, the energy loss peaks corresponding to these                                                         cross section obtained by Tashiro et al.33 The theoretical val-
excitations are overlapped with each other. Shyn and                                                              ues have a sharp resonant peak at around 9 eV. The calcula-
Sweeney35 attempted to decompose the loss peak into indi-                                                         tion was based on the fixed nuclei approximation. The po-
vidual components. Their conclusion, however, may have a                                                          tential curves for the upper three states 共i.e., A, A⬘, and c兲
large uncertainty 共see Green et al.36兲. Tashiro et al.33,34 made                                                  have a minimum at the internuclear distance much larger
a detailed calculation of the excitation of the electronic states                                                 than the minimum position of the ground state, so that the
of O2 and obtained cross sections each for the excitation of                                                      fixed nuclei approximation might be unreliable in this sys-
the A, A⬘, and c states. The calculation shows that the exci-
tation cross section for the A⬘ state, Qexc共A⬘兲, is very large                                                    TABLE 8. Recommended cross sections for the excitations of the electronic
compared with the other two cross sections, Qexc共A兲 and                                                           states, A 3⌺u+ + A⬘ 3⌬u + c 1⌺u−
Qexc共c兲, which have almost the same magnitude. On the
                                                                                                                  Energy 共eV兲                                       Cross section 共10−16 cm2兲
other hand, Shyn and Sweeney obtained two large cross sec-
tions 关Qexc共A兲 and Qexc共A⬘兲兴 and one small one 关Qexc共c兲兴.                                                         10                                                           0.1305
Thus we have no definite information on the relative magni-                                                       15                                                           0.075
tudes of the three cross sections. In the following, only the                                                     20                                                           0.039
sum of the three cross sections 关denoted by Qexc共A + A⬘ + c兲兴                                                     30                                                           0.013
is presented.
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12                                                                                                      YUKIKAZU ITIKAWA
                                  1000
                                         7                                                                                                                                                           e + O2 excitation
                                         6
                                                                                                                                                                                                              3   –
                                         5                          e + O2 excitation of SR continuum                                                                                                     B Σu
                                         4                                                                                                            1
                                                                    Johnson     20 eV        30 eV      50 eV                                                                                             Longest band
                                         3                          Shyn     20 eV        30 eV       50 eV                                                                                               2nd band
                                         2
 cm /sr)
2
100
                                                                                                                               cm )
–18
                                                                                                                              2
                                         7
 differential cross section (10
                                                                                                                              –16
                                         5                                                                                                           0.1
                                    10
                                         7                                                                                                          0.01
                                         6
                                         5
                                         4
                                         3
1 0.001
                                             0             20                 40               60                80                                        0          20                 40              60
                                                                    scattering angle (deg)                                                                                    electron energy (eV)
FIG. 15. DCSs for the excitation of the SR continuum of O2 measured at 20,                                                   FIG. 16. Cross sections for the excitations of the SR continuum, the LB, and
30, and 50 eV by Johnson and Kanik40 and Shyn et al.39                                                                       the 2B measured by Shyn et al.39,41
tem. Allan31 measured the DCS at 90° for this process over                                                                   excitations of the longest band 共LB兲 and the second band
the collision energies of 6 – 20 eV. His experimental result                                                                 共2B兲 in the energy loss spectrum. Those cross sections are
shows no evidence of resonance. Probably the effect of reso-                                                                 also shown in Fig. 16 and Table 9. Johnson and Kanik40 also
nance, if any, is small in the case of excitations of the A, A⬘,                                                             measured the DCSs for these two bands. Their result is in
and c states.                                                                                                                quite good agreement with the corresponding ones of Shyn et
                                                                                                                             al. Shyn et al. estimated the uncertainty of their data to be
                                   7.4. B 3⌺u− „Schumann-Runge Continuum…                                                    ⫾20% for LB and ⫾23% for 2B band.
                                                and Higher States
   The electron energy loss spectrum for O2 shows a broad                                                                                            8. Dissociation for Neutral Products
peak ranging from 7 to 9.5 eV. This is called the Schumann-
Runge 共SR兲 continuum and caused by the excitation of the                                                                                   Here we are concerned with the process
B 3⌺u− state. Assuming that two other states also have con-                                                                                         e + O2 → O共 *兲 + O + e.
tributions to this broad peak, Shyn et al.39 derived cross sec-
tions for the three individual states. However, the decompo-                                                                 One or both of the product atoms can be in its excited state.
sition of the loss peak is rather arbitrary. Here the sum of the                                                             In the following, we present
three cross sections is designated as the cross section of the
                                                                                                                             共i兲                       the total dissociation cross section for neutral products
SR continuum obtained by Shyn et al.
                                                                                                                                                       and
   Johnson and Kanik40 made a measurement of DCSs for
                                                                                                                             共ii兲                      the cross section for the production of O 共 1S兲
the SR continuum. They obtained the DCSs for the scattering
angles of 0°–25° and at the electron energies of 20, 30, 50,                                                                 When the product atom emits radiation, we can measure the
and 100 eV. Figure 15 compares the DCSs obtained by Shyn
et al.39 and Johnson and Kanik at E = 20, 30, 50 eV. The two                                                                 TABLE 9. Recommended cross sections for the excitations of the electronic
sets of cross section are consistent with each other. Since                                                                  state B 3⌺u− the LB, and the 2B
Johnson and Kanik gave no integral cross section, the Qexc of
Shyn et al. are chosen as the recommended data here. The                                                                                                                         Cross section 共10−16 cm2兲
result is shown in Fig. 16 and Table 9. Shyn et al. gave no
                                                                                                                             Energy 共eV兲                               B 3⌺ u−               LB                   2B
information of the uncertainty of their summed cross section.
If considering similar experiments of their group, however,                                                                  15                                        0.687               0.0575             0.007 20
the uncertainty of the present recommended data is around                                                                    20                                        0.790               0.0669             0.009 15
⫾20%.                                                                                                                        30                                        0.598               0.0622             0.008 71
   Shyn et al.41 extended their measurement to the excitation                                                                50                                        0.2764              0.0236             0.004 72
of higher states. They obtained the cross sections for the
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                                                        ELECTRON COLLISIONS WITH OXYGEN MOLECULES                                                                                                                          13
1.0 10
                                                                e + O2
                     0.8
                                                                dissociation for neutral products
                                                                                                                                    1
                                                                                                             cm )
 cm )
                                                                                                            2
2
0.6
                                                                                                            –16
–16
e + O2 ionization
                                                                                                                                                                                  +           +
                                                                                                                                   0.1                                       O2              O
                                                                                                                                                                               ++
                                                                                                                                                                             O               total
0.4
                                                                                                                                  0.01
                     0.2
                                                                                                                                 0.001
                                                                                                                                              2      3    4   5    6 7 8 9               2           3   4   5   6 7 8 9
                           0          50              100             150               200                                              10                                100                                        1000
                                                 electron energy (eV)                                                                                             electron energy (eV)
FIG. 17. Dissociation cross section for the neutral products 共i.e., e + O2 → e                             FIG. 18. Recommended values of ionization cross section of O2. Total ion-
+ O + O兲 measured by Cosby42.                                                                              ization cross section and partial cross sections for the production of O2+, O+,
                                                                                                           and O++ are shown.
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14                                                                     YUKIKAZU ITIKAWA
                                                                                                                         2
13                  0.0117                                                  0.0117
15.5                0.0730                                                  0.0730
18                  0.164                                                   0.164                                   1
                                                                                              cm )
                                                                                             2
                                                                                                                         7
23                  0.366             0.0167                                0.383                                        6
                                                                                             –16
                                                                                                                         5
28                  0.563             0.0781                                0.641
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                                           ELECTRON COLLISIONS WITH OXYGEN MOLECULES                                                                                                                             15
TABLE 12. Cross sections for the production of O2+ in specific electronic
states at the 100 eV electron impact with O2
                                                                                                                                          20
Ionization excitationa                                    Emissionb                                                                                                                 e + O2 ionization SDCS
                                                                                                                                                                                          E0=250 eV
                     Cross section                                   Cross section
                                                                                                 cm /eV)
                                                                                                                                                                                          150 eV
State of O2+          共10−18 cm2兲              Transition             共10−18 cm2兲                                                                                                         100 eV
                                                                                               2
                                                                                                                                                                                          50 eV
                                                                                                                                          15
X 2⌸ g
                                                                                               –18
                          92.2                                                                                                                                                            25 eV
b 4⌺ g−                   22.1              b 4⌺ g− → a 4⌸ u               32.8
A 2⌸ u                    ⬍2                A 2⌸ u → X 2⌸ g                10.2
a                                                                                                                                         10
Obtained by Doering and Yang.47
b
Obtained by Terrell et al. 48
firmed that their SDCS gives the total ionization cross sec-                                                                                   12                                                 recommended
tion measured by other authors.
                                                                                                                                               10
                                                                                                cm )
                                                                                               2
                                                                                               –16
   There are two, rather old, papers reporting the cross sec-
tion for the process                                                                                                                             6
e + O2 → O + O− . 4
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16                                                                     YUKIKAZU ITIKAWA
TABLE 13. Recommended cross sections for dissociative electron attachment                   known. Emission cross sections Qemis have been measured
                                                                                            many times for electron collisions with O2. JPCRD89 sum-
        Energy 共eV兲                         Cross section 共10−16 cm2兲
                                                                                            marizes those reported before 1989. After the publication of
4.2                                                  0                                      JPCRD89, several new measurements have been made. The
4.3                                                  0.000 088                              results of those recent measurements are given below.
4.4                                                  0.000 264
4.5                                                  0.000 440
4.6                                                  0.000 704
4.7                                                  0.000 968
4.8                                                  0.001 32                                      11.1. Emission from Dissociation Fragments
4.9                                                  0.001 76                                                        „O* , O+*…
5                                                    0.002 20
5.1                                                  0.002 90                                  Using a new apparatus with a high resolution spectrom-
5.2                                                  0.003 61                               eter, Kanik et al.54 obtained absolute cross sections for the
5.3                                                  0.004 49                               emissions of 135.6, 130.4, and 115.2 nm lines from atomic
5.4                                                  0.005 37                               oxygen. The transitions for those emissions are shown in
5.5                                                  0.006 33                               Table 14. Among them, the 135.6 nm line corresponds to a
5.6                                                  0.007 48                               forbidden transition with a long lifetime 共180 s兲. Special
5.7                                                  0.008 53                               care was taken to detect all the emission from the transition.
5.8                                                  0.009 59
                                                                                            The Qemis obtained by Kanik et al. are shown in Fig. 22 and
5.9                                                  0.010 5
                                                                                            Table 15 共and also in Table 14 for comparison with other
6                                                    0.011 4
6.1                                                  0.012 3
                                                                                            lines兲. Kanik et al. estimated the overall error of their result
6.2                                                  0.013 1                                to be ⫾23%. Particularly for the 130.4 nm line, many ex-
6.3                                                  0.013 6                                perimental studies have been reported 共see JPCRD893兲.
6.5                                                  0.014 1                                Kanik et al. claimed that their new result is in good agree-
6.6                                                  0.014 0                                ment with those previous ones.
6.7                                                  0.013 7                                   Wilhelmi and Schartner55 measured emission spectra in
6.8                                                  0.013 4                                the VUV 共46– 131 nm兲 and the near UV/visible
6.9                                                  0.012 8                                共340– 665 nm兲 ranges upon electron collisions with O2.
7                                                    0.012 2
                                                                                            Their electron energy ranged from 200 to 2000 eV. From
7.1                                                  0.011 4
                                                                                            their spectra, Wilhelmi and Schartner determined absolute
7.2                                                  0.010 6
7.3                                                  0.009 85
                                                                                            emission cross sections for the lines listed in Table 14. Those
7.4                                                  0.008 97                               emission cross sections were measured previously by several
7.5                                                  0.008 18                               other experimental groups. When a comparison is made be-
7.6                                                  0.007 39                               tween the Qemis of Wilhelmi and Schartner and those of the
7.7                                                  0.006 42                               previous experiments, some disagreements exist. In Figs. 23
7.8                                                  0.005 72                               and 24, for example, the Qemis obtained by Ajello and
7.9                                                  0.005 01                               Franklin56 are plotted for the 98.9 nm line of O* and
8                                                    0.004 49                               83.3 nm line of O+*, together with the corresponding values
8.1                                                  0.003 87                               measured by Wilhelmi and Schartner. The Qemis of Ajello and
8.2                                                  0.003 34
                                                                                            Franklin are the same as those cited in JPCRD89 but renor-
8.3                                                  0.002 82
                                                                                            malized according to the recommendation of van der Burgt
8.4                                                  0.002 38
8.5                                                  0.002 02
                                                                                            et al.57 Clearly the Qemis of Wilhelmi and Schartner is larger
8.6                                                  0.001 67                               than the values of Ajello and Franklin, even if the respective
8.7                                                  0.001 41                               experimental uncertainties are considered. Wilhelmi and
8.8                                                  0.001 23                               Schartner said nothing about the reason of this discrepancy.
8.9                                                  0.001 06                               Probably this reflects the difficulty inherent in the measure-
9                                                    0.000 880                              ment of the absolute value of the emission cross section.
9.1                                                  0.000 704                                 Terrell et al.48 measured emission spectra in the region of
9.2                                                  0.000 704                              222– 660 nm upon electron collisions with O2. Besides two
9.3                                                  0.000 616                                                         +
                                                                                            emission bands from O2 * 共see Sec. 11.2兲, they observed
9.4                                                  0.000 528
                                                                                            many lines from O* and O+*. From those lines, they deter-
9.5                                                  0.000 440
                                                                                            mined the absolute emission cross sections at the electron
9.6                                                  0.000 440
9.8                                                  0.000 352
                                                                                            energy of 100 eV. All of Qemis measured have a magnitude
9.9                                                  0.000 352                              less than 10−18 cm2. According to Terrell et al., the sum of
                                                                                            the emission cross sections they obtained 共at 100 eV兲 are
                                                                                            0.46⫻ 10−18 and 1.45⫻ 10−18 cm2 for O* and O+*, respec-
                                                                                            tively.
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                                                                    ELECTRON COLLISIONS WITH OXYGEN MOLECULES                                                                                           17
                                               O*
                                                                       135.6              2p3共 4So兲3s 5So → 2p4 3P                                                   4.79
                                                                       130.4              2p3共 4So兲3s 3So → 2p4 3P                                                   2.10
                                                                       115.2              2p3共 2Do兲3s 1Do → 2p4 1D                                                   0.298
                                                                       102.7              2p3共 4So兲3d 3Do → 2p4 3P                       0.90
                                                                        99.9              2p3共 2Po兲3s 1Po → 2p4 1D                       0.49
                                                                        98.9              2p3共 2Do兲3s 3Do → 2p4 3P                       2.13
                                                                        87.9              2p3共 2Po兲3s 3Po → 2p4 3P                       0.72
                                                                        79.2              2s2p5 3Po → 2p4 3P                             0.016
                                               O +*
                                                                         83.3             2s2p4 4P → 2s22p3 4So                          3.57
                                                                         79.7             2s2p4 2D → 2s22p3 2Po                          0.071
                                                                         71.9             2s2p4 2D → 2s22p3 2Do                          0.49
                                                                         67.3             2s22p2共 3P兲3s 2P → 2s22p3 2Po                  0.14
                                                                         64.4             2s2p4 2S → 2s22p3 2Po                          0.096
                                                                         61.7             2s22p2共 3P兲3s 2P → 2s22p3 2Do                  0.61
                                                                         58.1             2s2p4 2P → 2s22p3 2Po                          0.013
                                                                         53.9             2s22p2共 3P兲3s 4P → 2s22p3 4So                  1.38
                                               a
                                               Obtained by Wilhelmi and Schartner.55
                                               b
                                               Obtained by Kanik et al.54
                                                              +
                                        11.2. Emission from O2 *
  When electrons collide with O2, the following emission
bands are observed:                                                                                               TABLE 15. Emission cross sections for the radiation from O* measured by
                     first negative band system                                                                   Kanik et al.54
b 4⌺g− → a 4⌸u of O2+ at 450 – 850 nm, Emission cross section 共10−18 cm2兲
                           4
                                                                                                                  60                             0.359                   2.89                  6.45
                           3
                                                                                                                  70                             0.398                   2.97                  6.74
                           2
                                                                                                                  80                             0.414                   2.98                  6.76
                                                                                                                  90                             0.417                   2.95                  6.65
                       1
                                         1
                                      O ( S)
                                                                                                                  100                            0.413                   2.90                  6.40
                           7
                           6                                                                                      125                            0.386                   2.69                  5.98
                           5
                           4                                                                                      150                            0.355                   2.47                  5.52
                           3
                                                                                   O* 115.2                       175                            0.324                   2.27                  5.13
                           2                                                                                      200                            0.298                   2.10                  4.79
                                                                                                                  225                            0.275                   1.95                  4.49
                     0.1                                                                                          250                            0.255                   1.83                  4.23
                               0        100             200            300         400        500        600      275                            0.238                   1.72                  4.00
                                                              electron energy (eV)                                300                            0.223                   1.63                  3.79
                                                                                                                  400                            0.179                   1.33                  3.13
FIG. 22. Cross sections for the emission of 135.6, 130.4, and 115.2 nm lines                                      500                            0.152                   1.12                  2.62
of O, measured by Kanik et al.54 upon electron collisions with O2. For                                            600                            0.133                   0.947                 2.21
comparison, cross section for the production of O 共 1S兲 from O2 obtained by
LeClair and McConkey43 is also shown.
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18                                                                                           YUKIKAZU ITIKAWA
                     3.0                                                                                                                40
                                                                                                                                                                                                     +
                                                                                                                                                                               e + O2 emission from O2 *
                                                                        e + O2 98.9 nm emission from O*                                                                              1st Negative
                                                                              Ajello                                                                                                 2nd Negative
                     2.5
                                                                              Wilhelmi
30
2.0
                                                                                                                    cm )
 cm )
                                                                                                                   2
2
                                                                                                                   –18
–18
1.5 20
1.0
10
0.5
0.0 0
FIG. 23. Emission cross section for the 98.9 nm line of O* measured upon                                          FIG. 25. Emission cross sections for the first and second negative band
electron collisions with O2. Two sets of experimental data 共those of Ajello                                                      +
                                                                                                                  systems of O2 * measured by Terrell et al.48 upon electron collisions with
and Franklin56 and of Wilhelmi and Schartner55兲 are compared with each                                            O2. Symbols indicate the original experimental data and solid lines are the
other.                                                                                                            result of analytical fitting of those data.
                     second negative band system                                                                  gion of 222– 660 nm for the electron energies from the re-
                                                                                                                  spective threshold to 400 eV. On the basis of the measured
                                   A 2⌸u → X 2⌸g of O2+               at 180 – 530 nm.                            spectra and the relevant Franck-Condon factors, Terrell et al.
                                                                                                                  made a model spectrum for the entire wavelength range of
Terrell et al.48 observed the molecular emissions in the re-                                                      each band system. That is, they theoretically extended the
                                                                                                                  spectra outside of their measurement. From this model, Ter-
                     5                                                                                            rell et al. determined the absolute value of the emission cross
                                                                                                      +
                                                                                                                  section for the whole band system. The resulting cross sec-
                                                                      e + O2 83.3 nm emission from O *
                                                                            Ajello
                                                                                                                  tion is shown in Fig. 25 and Table 16. The experimental error
                                                                            Wilhelmi                              of their values was estimated to be ⫾24%. Their measured
                     4                                                                                            data were analytically fitted within this uncertainty. The re-
                                                                                                                  sulting fitted curve is also shown in Fig. 25.
                                                                                                                     The previous paper, JPCRD89, cited the emission cross
 cm )
                     3
                                                                                                                  measured by Borst and Zipf.58 Terrell et al.48 showed that
–18
 cross section (10
                                                                                                                  their cross section for the first negative band system is twice
                                                                                                                  the value given by Borst and Zipf. However, they also
                     2                                                                                            showed that the excitation function 共i.e., the energy depen-
                                                                                                                  dence兲 of the emission cross section for the first negative
                                                                                                                  band system of the two experiments coincides with each
                                                                                                                  other.
                     1
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                                         ELECTRON COLLISIONS WITH OXYGEN MOLECULES                                                                                                                          19
                                                           +
TABLE 16. Emission cross sections for the radiation from O2 * measured by
Terrell et al.48
                                                                                                                                e + O2            v=0-1 resonance                 tot
Energy 共eV兲 First negative band system Second negative band system ion (tot)
                                                                                              cm )
                                                                                             2
20                         1.84                                 0.32
                                                                                             –16
                                                                                                                    1                      mom
22                         4.03                                 0.84
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