US006531330B2
(12) United States Patent
Lay et al.
(54)
METHOD OF FABRICATING THIN FILM
TRANSISTOR FLAT PANEL DISPLAY
(10) Patent N0.:
(45) Date of Patent:
(56)
US 6,531,330 B2
Mar. 11, 2003
References Cited
U.S. PATENT DOCUMENTS
(75) Inventors: Chung-Wen Lay, Taipei (TW);
Meng-Yueh Wu, Hsinchu (TW)
(73) Assignee: AU Optronics Corp., Hsinchu (TW)
(*)
Notice:
6,372,535 B1 *
2002/0121639 A1 *
4/2002 Lyu
9/2002 S0 et al.
* cited by examiner
Subject to any disclaimer, the term of this
patent is extended or adjusted under 35
Primary ExaminerJohn F. Niebling
U.S.C. 154(b) by 0 days.
Assistant ExaminerStanetta Isaac
(74) Attorney, Agent, or FirmLadas & Parry
(21) Appl. No.: 10/200,831
Jul. 22, 2002
(22) Filed:
Prior Publication Data
(65)
(57)
A method of fabricating a thin ?lm transistor (TFT) ?at
panel display. The method merely comprises four mask steps
of: (1) using the ?rst mask process for patterning the ?rst
US 2003/0017636 A1 Jan. 23, 2003
(30)
Jul.
conductive layer/gate insulating layer/amorphous silicon
Foreign Application Priority Data
23, 2001
ABSTRACT
..................................... .. 90117932 A
(51)
(52)
Int. Cl.7 .............................................. .. H01L 21/00
(58)
Field of Search ........................ .. 438/30, 149, 151,
US. Cl. ....................... .. 438/30; 438/149; 438/151;
438/479; 438/517
438/479, 517
layer of the TFT, (2) using the second mask process for
de?ning the passivation layer and the etching stopper, (3)
using the third mask process for forming the Source/Drain,
and (4) using the fourth mask process for forming the pixel
electrode, Whereby simplifying the fabricating process of the
TFT ?at panel display.
12 Claims, 19 Drawing Sheets
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U.S. Patent
Mar. 11,2003
Sheet 1 0f 19
US 6,531,330 B2
3
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FIG. 1A ( PRIOR ART )
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FIG. 1C ( PRIOR ART )
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FIG. 1D ( PRIOR ART )
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U.S. Patent
Mar. 11,2003
Sheet 2 0f 19
US 6,531,330 B2
DLg
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FIG.2A
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FIG. 2B
U.S. Patent
Mar. 11,2003
Sheet 3 0f 19
FIG. 2D
US 6,531,330 B2
U.S. Patent
Mar. 11,2003
Sheet 4 0f 19
11
US 6,531,330 B2
fDLp
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U.S. Patent
Mar. 11,2003
Sheet 5 0f 19
II
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US 6,531,330 B2
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U.S. Patent
Mar. 11,2003
Sheet 6 0f 19
US 6,531,330 B2
FIG. 4A
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U.S. Patent
Mar. 11,2003
Sheet 7 0f 19
II
US 6,531,330 B2
0p3
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106
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104
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FIG. 4C
FIG. 4D
U.S. Patent
Mar. 11,2003
Sheet 8 0f 19
US 6,531,330 B2
Dig
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FIG.5A
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U.S. Patent
Mar. 11,2003
Sheet 9 0f 19
FIG. 5C
US 6,531,330 B2
U.S. Patent
Mar. 11,2003
Sheet 10 0f 19
US 6,531,330 B2
f-DLp
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U.S. Patent
Mar. 11,2003
Sheet 11 0f 19
11
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US 6,531,330 B2
104
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U.S. Patent
Mar. 11,2003
Sheet 12 0f 19
Dig:
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US 6,531,330 B2
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U.S. Patent
Mar. 11,2003
Sheet 14 0f 19
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US 6,531,330 B2
101
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U.S. Patent
Mar. 11,2003
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Sheet 15 0f 19
US 6,531,330 B2
1 102( 101\
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U.S. Patent
Mar. 11,2003
Sheet 16 0f 19
US 6,531,330 B2
DLg
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FIG. 9B
U.S. Patent
Mar. 11,2003
Sheet 18 0f 19
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US 6,531,330 B2
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FIG. 10A
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U.S. Patent
Mar. 11,2003
Sheet 19 0f 19
11
US 6,531,330 B2
S107(T2)
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