Metal-Ceramic Sealing Manual
Metal-Ceramic Sealing Manual
METAL-TO- CERAMIC
SEALINO TECHNIQUES
Prepared by
ENGINEERING DEPARTMENT
C.W. Johnson
PUBLICATIONS DEPARTMENT
E.W. Cheatham
1.
I Copy No.
IC
Sperry Pub. No. NA-27-90\ ~ ' May 196*3
.0 N
PATENT NOMICE
When Government drawings, specifications, or other data
are used for any purpose other than in connectiontwith a
definitely related Government procurement operation, the
United States Government thereby incurs no responsibility
nor any obligation whatsoever and the fact that the Gov-
ernment may have formulated, furnished, or in any way
supplied the said drawings, specifications or other data
is not to be regarded by implication or otherwise as in
any manner licensing the holder or any other personor
corporation, or conveying any rights or permission to
manufacture, use, or sell any patented invention that may
in any way be related thereto.
ASTIA NOTICE
Qualified requestors mayobtain copies of this document
from the Defense Documentation Center forScientific and
Technical Information, ArlingtonHall Station, Arlington
12, Virginia. DDCservicebfor the Department of Defense
contractors are available through the "Field of Interest
Register"ona "need-to-know" certified by the cognizant
military agency of their project or contract.
CONTENTS
I Section Page
I INTRODUCTION 1
II SELECTION OF RAW
MATERIALS 5
2-1. Ceramics 5
2-2. Metals 6
III SEAL DESIGN 9
3-1. Basic Thin-Wall
OD Compression
Seals 9
3-2. ID or Pin Seals 11
"3-3. Butt Seals 13
3-4. Nonstandard
Seals 17
IV PARTS PREPARATION
"AND METALLIZING 19
4-1. Cleaning of
Ceramics 19
4-2. Cleaning and
Plating of Metals 21
4-3. Metallizing 21
"4-4. Evaluation of
Metallizing 28
4-5. Electroplating 30
V FIXTURES AND
ASSEMBLY 33
jVI YPRAZING 37
iii
CONTENTS (Cont)
Section Page
*Appendix
A RECOMMENDED
TOLERANCES AND
METALLIZING
ALLOWANCES 43
B METALLIZING MIXTURES 45
C COMBINATIONS OF
CERAMIC BODY,
METALLIZING MIXTURE,
AND SINTERING CYCLE 47
D BRAZING MATERIALS 49
E TYPICAL PLATING
BATHS AND
PROCEDURES 51
iv
I
I ILLUSTRATIONS
Figure Page
1 Expansion Coefficients
of Typical Ceramic
I Bodies and Metals 7
2 Thin-Wall OD
I Compression Seal 10
3 Transitions to Thick-
Wall Metal Members 12
I4 Self-Jigging Seals in
Which Metal Member
I Performs Jigging 14
5 Hollow-Pin Seals
Strengthened with
Solid Pin Insert 14
6 Typical Butt-Seal
I Assemblies 15
7 Back-up of Ductile
Metal Seal with
I
Second or Blank
Ceramic 16
I 8 Thick-Wall Seal 18
9 Rectangular Seals 18
I 10 Hand-Coating Equipment 23
11 Roller-Coating Equipment 24
12 Spray-Coating Equipment 24
13 Dewpoint Cup 27
I
V
I
I
SECTION I
I NITRODUCT ION
3
phenomena. Manufacturing of metal -to -ceramic
seals currently straddles the line between
science and skilled craft; a few years ago it
was completely craft. The immediate future
should benefit as mo re scientific data are
collected, as the mechanisms are more com-
pletely understood.
4
I
I
SECTION I I
SELECTION OF RAW MATERIALS
I
2-1. CERAHICS
j The choice of the ceramic body is basic
to the process of sealing. Selection is primarily
determined by the application of the device in
which the seal is incorporated, because of the
mechanical and electrical properties of different
ceramics. Some of the properties to consider
are thermal shock resistance, r-f losses,
softening temperature, thermal expansion,
porosity or vacuum-tightness, degassing, and
physical strength.
The percentage of alumina in the body is
proportional to the ease of sealing. Many
ceramics from a variety of suppliers are avail-
able covering a range from 85- to 100-percent
alumina. Dense vacuum-tight aluminas are
made by mixing a small percentage of the
vitreous or glassy material referred to as a
flux with the refractory polycrystalline material,
and heating the composition beyond the melting
point of the flux. Two alumina bodies with the
same percent alumina content will not neces-
sarily have the same physical and electrical
properties, because the composition of the flux
can vary. In general, ceramics increase in
price as the purity of alumina increases. The
5
I
lowest-purity alumina which will be satisfactory
provides the greatest cost savings in raw
material and yield in processing.
2. 2. METALS
The selection of the metal member of
the seal is somewhat governed by the physical
and electrical requirements, but it is more
dependent upon the ceramic body chosen.
Characteristics such as magnetic properties,
r-f and d-c conductivity, and structural
strength determine the selection of a group of
metals. A particular metal member is then
selected on the basis of its coefficient of
expansion. Ideally, the ceramic and the metal
should be identically matched, so that they
expand and contract at the same rate throughout
the brazing and operating cycles; stresses
caused by dissimilar expansion characteristics
are thereby eliminated. It should be noted that
the stringent thermal cycling tests performed
to evaluate the reliability of finished seals are
based on the stresses developed between the
dissimilarly expanded ceramic and metal
members.
Expansion coefficients of some typical
ceramic bodies and some of the metals more
commonly employed in sealing to the ceramics
are shown in figure 1. No ideal combinations
are presently available, but the metals and
ceramics currently used allow construction of
highly reliable seals. Some of the metals
6
!
100
i I I
GLASS-SEALING ALLOY
(GRAY) KOVAR A AND FERNICO
,-. 90 - -
7"C -
70 - - N-1413.3) -- J
" 0 -
/NO.4
SYLVANIA
ALLOY T
Z
2 Cu(017.7)
c ALUMINA
50O -L -
-JJ C SAl- 00)
g ,(WESGO AL-300O
/-0 (WESGOAL-IO09)
40 - - -
CARIBON STEEL
0W (4.6)
d" No 15.3)
10 d
0
0 l00 200 300 400 500 600 700 600 900
TEMPERATURE (*C)
8
I
SECTION III
SEAL DESIGN
I 9
ROOM
TEMPERATURE
Ii II
MISMATCH
STRESS
HEATED
METAL CERAMIC
10
I
for the application of the metallizing and
plating. Basic rules for allowances are given
in Appendix A.
When sealing a ceramic assembly to a
massive metal member, a transition metal of
thinner cross section or a thinned-down metal
similar to the massive metal member can be
employed (figure 3). The transition metal is
then selected to match with the alumina body;
the massive metal member can be any material
to which the transition metal can be joined.
Thin-wall OD compression seals should
be designed to be self-jigging to facilitate
manufacturing. This is accomplished by in-
corporating a shoulder to position the ceramic
and metal with respect to each other (figure 4).
The step or shoulder should not be part of the
ceramic because of the extra expenses involved.
SCERAMIC
HEAVY METAL
C TRANSITION METAL
12
I
the diameter of the ceramic hole, following
the rule that the metal member should be as
thin as possible. When tubular pin material
is employed, plugs can be welded or brazed
at both ends of the tubing to produce a vacuum-
tight seal. For high current-carrying capa-
bilities, a center conductor with proper clear-
ance can be employed; brazing should be at
* both ends of the compliant metal tubing
(figure 5).
I
13
I
METAL CERAMIC
M-BRAZE
'WELD.m
METAL CERAMIC
14
I
Ii
] CERAMIC
= METAL
|I
115
WON,
CERAMIC
E : IMETAL
16
I
thickness of the metal should be the same order
of magnitude as with the OD compression seal.
In the special case in which two metallized
ceramics are fabricated into a vacuum-tight
joint, a spacing material of 0. 010- or 0. 020-
inch nickel is normally employed between the
ceramics to minimize stresses.
T
I 1
17
!
METAL CERAMIC
18
I
I
SECTION IV
PARTS PREPARATION AND METALLIZING
I
"4-1. CLEANING OF CERAHICS
19
I
absolutely necessary. After all water rinses,
the ceramic parts are rinsed in methanol (CP
grade) in the same Pyrex container.
After decantering the excess methanol,
the Pyrex beaker containing the ceramics is
dried in an air oven at 1200C. The parts are
then placed on a clean ceramic plate, pre-
viously air-fired, and the plate and parts are
air-fired at 1000 * 250C for 10 minutes; care
must be taken to raise and lower the tempera-
ture at a rate which will avoid thermal shock
and cracking of the ceramic pieces. After
cooling, the parts are placed in clean poly-
ethylene bags and stored until ready for met-
allizing. A maximum of 3 days can elapse
between cleaning and metallizing of the ceramics;
if this time is exceeded, air-firing is recom-
mended to remove accumulated organic con-
tamination.
The clean ceramic parts must be handled
with clean rubber finger cots and/or plastic-
coated nylon gloves to prevent finger oils and
other contaminants from being transferred to
the ceramic surfaces. Organic materials,
such as finger oils, which are allowed to remain
on the ceramics during subsequent operations
are reduced to carbon, and metallic salts are
reduced to metals and metal oxides; these stain
the ceramics and cause sparking, electrical
leakage, and r-f losses in many applications.
Tweezers, spatulas, and other tools used in
handling the ceramics must be ceramic or
plastic coated.
20
I
4-2. CLEANING AND PLATING OF HETALS•
4-3.. HETALLIZING
21
1
There are several techniques of applying the
metallizing (figures 10, ll,and 12); the one
chosen depends on the specific requirements.
Metallizing thickness does not appear to have a
large significance in seal strength, but does
cause some variations. Therefore, efforts to
standardize the procedure will result in a more
controlled and reproducible process, in addition
to enabling tighter dimensional tolerances to
be maintained for easier fits during the assem-
bly stage s.
Handpainting with a sable brush is the
mo st commonly employed method for small
lots and oddly shaped pieces. Wherever
possible, the part to be coated should be
mechanically rotated so that the total seal area
can be coated uniformly before the mixture
dries. This prevents nonuniformity of thick-
ness in the seal area and guarantees freedom
from voids. Spray coating and roller coating
require masking and more fixtures; thus, they
are suitable for large production runs. The
viscosity of the mixture determines, to some
extent, the ease of application and the resultant
thickness and uniformity; it should be main-
tained at a constant value. As the mixture is
used, evaporation rei-uces the amount of solvent.
With time, the mixture becomes more viscous,
requiring periodic replacement from the stock
bottle. In no case should any unused portion of
metallizing mixture be returned to the stock
mixture, as this will cause variations in con-
tent and viscosity.
22
I
I
!
!
1
I
FIUR CAR MOTICO•
OLAGE AI
DJUSTABLE AUXILM
ROLLER IWIPER)
MAGETAIL sIZRNG
ON AIN AIROBRUS
A •uSABNET $ OLERSEE
COTO M CONPTROLPCIEN
4OOL
TUNT.
I
After the ceramics have been coated, it
is essential that the solvents be completely
evaporated before sintering; otherwise,there
will be explosive expulsion of the materials
during sintering, with subsequent damage to
the coated surface. The ceramics are then
placed in clean molybdenum boats, or for
large assemblies on corrugated molybdenum
sheets or mesh screening lining the bottom of
j the boat. (The coated ceramics can be placed
temporarily on lint-free tissue before being
placed in the boats. ) The corrugated metal
and screening reduce the thermal path between
the ceramic and the bottom of the boat resting
in the hot zone of the furnace, thereby mini-
mizing temperature shock conditions which
can damage or destroy the ceramic. The parts
are positioned to prevent the relatively soft,
unsintered metallized coating from rubbing onto
unmetallized surfaces.
The ceramics are then placed in the
furnace for sintering. The type of furnace
employed governs the particular procedure.
For periodic batch furnaces, the ceramics are
normally protected against thermal shock by
the thermal inertia of the furnace, which acts
as the limiting heat rate to which the parts are
subjected. A pusher, or horizontal, furnace
through which the boat is passed must be
handled with extreme precaution to minimize
shocking the ceramics; several progressive
steps moving the boat closer to the hot zone,
finally into the hot zone, followed by graded
movements into the cooling chamber are
25
I
required to protect the pieces. The furnace
atmosphere can be forming gas, dissociated
ammonia, or pure hydrogen; but in all cases
the dewpoint of the gas must be maintained at
a level no less than 30 0 C. As long as the
minimum dewpoint is maintained, the seal
strength is not drastically affected.
26
I
I
The temperature of sintering and the
soak time at the sintering temperature vary
for the combination of ceramic body and met-
allizing mixture. Some recommended com-
binations of ceramic body, metallizing mixture,
and sintering cycle are listed in Appendix C.
In most cases, a L50 0 C temperature control
is adequate, provided the minimum temperature
is not exceeded. The soak time is somewhat
more sensitive for mixes containing glass and
for high-purity alumina bodies (above 99-percent
alumina), although the molybdenum-manganese
mixes are insensitive for several hours. In
general, the sensitivity to sintering conditions
increases with the purity of the alumina body,
requiring more precise controls as the alumina
content approaches 100 percent. No firm rules
have been established, because the variety of
mixes employed reacts differently under various
conditions. After cooling below 50 0 C in the
furnace cooler, the metallized ceramics are
removed from the boat, using plastic- or
ceramic-coated tools and/or finger cots or
gloves.
28
I
Poor Coating - The metallizing is too soft
(usually resulting from under-sintering
in time and/or temperature) if the razor
blade cuts into the metallizing and peels
it, exposing ceramic beneath the surface.
29
!
The thickness of the final metallized
ceramic should be between 0. 0004 and 0. 0015
inch. Thin areas, as low as 0. 0002 inch, are
acceptable, providing bond and texture are
good and the thin areas do not exceed 20 per-
cent of the length of the metallized seal (leak
path direction). Local areas as thick as 0. 002
inch are acceptable providing the aggregate
length of these spots does not exceed 20 percent
of the length of the metallized area.
4-5. ELECTROPLATING
30
I
brazing materials, such as the more commonly
employed OFHC copper, copper-gold alloys,
or copper-silver alloys. Appendix D lists the
I melting data for these brazing materials.
Typical plating procedures and the recommended
plating bath compositions are given in Appendix
E. Accurate thickness control of the plating is
essential for dimensional considerations, as
well as for maintaining a barrier against solder
I penetration.
The electroplated metallized ceramics
and the electroplated metal members are now
prepared for the assembly operation. The
parts should be stored in clean polyethylene
bags in a heated cabinet to minimize oxidation
from humidity and airborne sulphides. Con-
tamination control in the use of plastic-coated
nylon gloves and/or finger cots is essential to
prevent stains on the surfaces to which the seal
will be made. Otherwise, there will be sub-
sequent reduction of seal length and an over-all
loss of reliability in the assembly, if not initial
failure due to a vacuum leak. An oxide imprint,
resulting from the acids of finger oils, will
act as a stopoff barrier preventing the flow of
the molten solder.
3
I
!
I
31
1
I
I
SECTION V
FIXTURES AND ASSEMBLY
I
33
!
stainless steel bands in place. Alternatively,
a single-layer winding of 0. 005-inch molybdenum
wire provides a more uniform restraint and
minimizes puckering at the twist points. With
all restrained assemblies, it is desirable to
electroplate 0. 0005 inch of copper on the
brazing site (on either the ceramic or metal
member) to ensure having solder penetrate
along the seal length. Overrestraint will
prevent an adequate flow of solder into the
joint, resulting in a weak bond.
Magnesium oxide is recommended as a
stopoff when the flow of solder along the metal
member must be inhibited. It is easily applied
by spraying or brushing, and being extremely
refractory, effectively prevents wetting by the
brazing metal. The oxide is removed from the
assembly by dissolving it in a 5-percent acetic
acid solution, followed by several deionized
water rinses. Other commonly used stopoffs-
such as chrome oxide, aquadag, and alumina
dispersions-are to be avoided as they are
difficult to remove and may contaminate the
device if not completely eliminated.
The fixtures should be designed so that
the ceramic member is not exposed to the
sudden heat of the furnace. It should be pro-
tected by a cover, thus allowing uniform heating
of the whole assembly. Ceramic windows and
other structures can shatter, even though pre-
heated, when exposed to the hot zone of the
furnace because of the intense radiant heat
produced in this zone. The thermal inertia of
the fixture should be such that thermal shock is
34
I
not a problem. However, caution should be
[
I
I
[
I
I 35
I
I
I SECTION VI
I BRAZING
3
37
I
successfully employed in attempting reworks
of assemblies which leak upon first brazing.
Adding a small piece of brazing alloy to the
area where the leak is detected will enable a
seal to be made at the brazing temperature
without disturbing the surrounding brazed
areas; the solution of some of the metal mem-
ber sufficiently raises the melting point of the
first brazed joint to prevent it from reliquefying
and disturbing the alignment of the original seal.
Through careful temperature monitoring, two
successive brazes on the same assembly with
the same brazing material can be effected with
this technique. Subsequent step brazes can then
be employed with brazing materials having
prqgressively lower melting points.
38
I
I
I
SECTION VII
CONTROL TESTING
!
A moderately severe test of the completed
hermetic seal is thermal cycling to some tem-
perature slightly above the maximum tempera-
ture at which the device will be used. This can
be repeated several times with helium mass-
spectrometer leak checks after each cycle. The
first or second cycle will usually eliminate the
majority of substandard seals, but there is no
T clear correlation between additional cycles and
the degree of reliability of the seals in the popu-
lation being tested. All testing, if possible,
j should be performed on representative samples
of units being manufactured and should simulate
conditions similar to the end use. For parts of
electronic tubes which are to be subsequently
brazed to metal members by induction or resis-
tance heating one end of the assembly, testing
should duplicate these uneven stresses applied
to the seal. Thermal shock, below the level
which would cause the ceramic to fail, can be
employed to test small, bead coaxial antenna
seals. Pressurization of thin ceramic windows
has been used to stress the seal area.
ASTM samples are not recommended as a
precise indication of the reliability and quality
of seals belonging to a population of which the
ASTM members were a part. The present ASTM
test has been found to have a large coefficient of
I 39
!
variation due to many uncontrollable variables;
differences in seal strength which may occur
from lot to lot in the metallizing and brazing
operations tend to be masked. Coefficients of
variation from 25 to 35 percent were observed
in the study program on which this manual is
based. A modification employing a metal mem-
ber brazed to one-half of an ASTM set is more
desirable and more representative of a typical
metal-ceramic seal.
Statistically sampling quantities of
manufactured seals which are subjected to
destructive testing is also indicative of varia-
tions from batch to batch. The destructive
testing can be accomplished by tearing the
ceramic and metal member apart in a repro-
ducible fashion. For example, with coaxial
antenna assemblies, extremely sensitive moni-
toring is possible by pulling the center coaxial
lead while restraining the outer conductor until
the ceramic bead fractures. Amore sensitive
indication of seal quality is obtained by simul-
taneously monitoring the hermetic tightness of
the seal during the application of stress.
40
!
SECTION VIII1
FAILURE ANALYSIS
41
I
I APPENDIX A
RECOMMENDED TOLERANCES AND
METALLIZING ALLOWANCES
4
43
A-4. ID SEALS LESS THAN 0.150 INCH 10 TO
THIN-WALL SLEEVES
Metal Tolerance: k 0. 0005 inch
Ceramic Tolerance: + 0. 002 inch
44
I
I APPENDIX B
g METALLIZING MIXTURES
I Mixture Composition
4
I
45
!
I
I APPENDIX C
COMBINATIONS OF CERAMIC BODY,
METALLIZING MIXTURE, AND
i SINTERING CYCLE
Recommended
Sintering Cycle
I Time at
Mix (see Tempera- Heat
* Alumina Body Appendix B) ture (°C) (hours)
1I 4
I
I
I
APPENDIX D
BRAZING MATERIALS
I
I
Brazing
[Material Temperature
I before firing.
!
1 49
I
APPENDIX E
TYPICAL PLATING BATHS
AND PROCEDURES
51
!
should be made of steel. The total anode area
should be at least twice the cathode or work
area.
2. Preparation
52
!
(d) Purify the bath at low current densi-
"tiesfor 10 to 12 hours before use.
Use a large stainless-steel plate run
at 2 amperes per square foot.
3. Maintenance
c. Plating Procedure
1.
S Immerse metallized ceramic parts
in plating bath for 30 seconds with
no current flowing. Apply current
and plate at 20 amperes per square
foot for 30 seconds, or until a uni-
form copper film covers the part.
2. Cleaned metal parts are given a 2-
percent sodium cyanide dip prior to
plating at a current density of 15-40
amperes per square foot. The plating
rate at 15 amperes per square foot
is 0. 0012 inch per hour, and at 40
amperes per square foot is 0. 002 inch
per hour.
53
I
E-3. NICKEL PLATING BATH ('SULFAMATE)
a. Equ••ment
b. Plating Bath
1. Composition
pH 3.5-4.5
Density (Baume) 29-31
2. Preparation
54
I
3. Maintenance
(a) Weekly chemical analyses for the
purpose of adjusting the composi-
tion to correct concentration.
I c. Plating Procedure
Room temperature
99-percent nickel
anodes
Follow immediately with step 2
above.
1 55
p