Chapter 3
THEORY OF ELECTRODEPOSITION
3.1 Introduction
The art of electroplating metals and metallic alloys has been in
practice for nearly a century and the earlier efforts are well documented.
Most of the development has been more by way of art rather than science,
which started to merge only recently. Further the viability of using the
electrodeposition technique as a tool of material technology is attracting
attention as a means of obtaining films of a wide variety of materials
including semiconductors, superconductors, polymer films, materials for
biostimulation, specific electronic device application materials and others.
Some of the key advantages of the electrodeposition technique are:
1. It is possible to grow films over large areas as well as irregularly
shaped surfaces.
2. Compositionally modulated structures or non-equilibrium alloys can
be electroplated.
3. A wide range of industrial experience can be drawn upon.
4. It is especially attracted in terms of cost, high throughput and
scalability.
Electrodeposition was originally used for the preparation of metallic
mirrors and corrosion resistant surfaces among other things. In its simplest
form electrodeposition consists of an electrolyte containing metal ions, an
electrode or substrate on which the deposition is desired, and a counter
electrode. When a current flows through the electrolyte, the cations and
anions move towards the cathode and anode, respectively, and may
deposit on the electrode after undergoing a charge transfer reaction. The
discovery of electrodeposition can be traced back to Michael Faraday and
his famous laws of electrolysis.
The first law states that the total amount of chemical change
produced by an electric current is proportional to the total charge passing
through the electrolyte. The second law states that the masses of the
different substances liberated in the electrolysis are proportional to their
chemical equivalent weights.
3.2 Electrodeposition System
A simple electrodeposition system consists of the following
components:
3.2.1 Electrolyte:
The electrolyte or bath provides the ions to be electrodeposited. It
has to be electrically conductive, it can be aqueous, non-aqueous or
molten; and it must contain suitable metal salts. Sometimes an additive is
included to improve the quality of the electrodeposits. An ideal additive
should not become incorporated in the film but should lead to improvement
of its adhesion, surface finish, uniformity etc.
3.2.2 Electrodes:
At least two electrodes (cathode and anode) are needed. An applied
electric field across these electrodes provides the main driving force for the
ions. The positive and negative ions deposit at the cathode and anode
respectively. Cathodic deposition is more popular in electroplating because
(1) most metal ions are positive ions and (2) anodic deposition has been
found to give poor stoichiometry and adhesion.
3.2.3 Power Supply:
The power supply can be (1) direct current at constant voltage, which
leads to potentiostatic deposition, (2) direct constant current which leads to
galvanostatic deposition or (3) a current or voltage waveform or pulse.
The process leading to electrodeposition can be outlined in simple
terms as below. On the application of an electric field, Mn+ would move to
the cathode, and the chemical electrodeposition process can be written as
Mn+ + n e -------> M
On the other hand, if the electrolyte contains more than one species
that can be simultaneously deposited, then the electrodeposition process,
for, say, two types of ionic species can be written as
M+ + e -------> M
N+ + e -------> N
Or
M+ + N+ + 2e ---------> MN
Accordingly a compound or alloy of a multicomponent system can be
deposited we can deposit a compound or an alloy of a multi-component
system.
As the electrodeposition proceeds, the ionic concentration in the bath
is depleted and has to be replenished by adding the salt. Another
alternative is to use one of the electrodes as a sacrificial electrode, one
that corrodes during electrodeposition to maintain the ionic concentration
constant.
The ionic discharge process can be summarized as follows:
1. Ionic species move in the electrolyte bulk toward the electrode on
which the deposition is to occur. This is regarded as the reactant
zone.
2. The moving ionic species approach the electrode (prereaction site)
at, say, the outer Helmholtz plane (OHP) without actually being
discharged. The charge transfer that ultimately leads to
electrodeposition starts at this interface. This is regarded as the
charge transfer zone.
3. The charge transfer is completed at the electrode, and the
electrdeposit is obtained.
According to the Butler-Volmer model, the discharge of the
electroplating ions is assumed to take place only when the latter have
arrived at the outer Helmholtz plane. While calculating the rate of charge
transfer reaction, it assumes that the rate at which the ions are consumed
by the discharge reaction is equal to the rate at which they arrive at the
OHP. In the charge transfer zone or pre-reaction zone the ions are
transported from the electrolyte bulk to be discharged at the electrode. The
concentration term in the Butler Volmer equation should be the ionic
concentration in the charge transfer zone at x = 0, i.e., c x = 0 and not the
bulk concentration c 0 at x = ∞ . The two will be equal only when the ionic
discharge rate is equal to the rate of ionic transport. If the charge transfer
rate is greater than the rate of ionic transport, then the interface region will
become depleted of the discharging ionic species. On the other hand, if the
ionic transport processes are much faster, this will lead to the accumulation
of ions in the interface region. This inequality between the transport flux
and the charge transfer flux gives rise to concentration polarization or
overpotential.
3.3 Importance of Diffusion Limited Transport
Diffusion limited transport has been found to be useful in
electrodeposition work. A discussion of the important implications follows.
Diffusion limited transport enables oppositely charged ionic species
to move in the same direction. One can thus perform cathodic
electrodeposition with negatively charged ions also. Diffusion limited
transport enables one to change the equilibrium potential over a range of
values depending upon the ionic activities. According to Nernst equation, a
decrease in ionic activity of the discharging species results in a negative
shift in the deposition potential. This possibility has been used by a number
of workers to electrodeposit two or more components with different
equilibrium potentials.
The current density under the influence of diffusion is given by
αFη
j = j 1 1 − exp ………..(3.1)
RT
Suppose in a cathodic electrodeposition experiment the electrode
potential is continuously driven in the negative direction. Initially when the
electrode potential is made more negative than the equilibrium potential of
the ionic species transported by diffusion, the current will rise. The cathodic
current will continue to rise with increasingly negative electrode potential,
and the interfacial ionic activity will decrease continuously. When the rate
of diffusion becomes equal to the rate of discharge, the interfacial ionic
activity will be practically zero and the current density will attain a value j l .
The higher efficiency of the cathodic process results from the higher value
of j l . This value can be increased by (1) increasing the concentration c o ,
(2) increasing the diffusion coefficient by working at a higher temperature,
and (3) lowering the diffusion layer thickness by forced convection
(stirring).
3.4 Transfer Coefficient:
In the derivation of the Butler – Volmer equation, the movement of
ions across the interface was assumed to be the only necessary condition
for the charge transfer reaction. The role of electrons in the metal electrode
as dynamic entities capable of crossing the interfacial barrier was
completely ignored. The electron in general quantum mechanically tunnel
through the interfacial barrier to the ionic species in the electrolyte [1 - 3].
As the electron transfer process is non-radiative, the tunneling should take
place without a change in the energy of the system within the restraints of
the uncertainty principle. This requires sufficient stretching of the bonds
between the reactant and the surrounding ligand to create an acceptor
state of energy equal to the electron energy in the metal.
The transport coefficient (symmetry factor)α for quantum mechanical
tunneling has been defined as the ratio of the energy required to stretch the
ion ligand bond to the critical state and the energy gap between the
electron state in the metal and the solution side of the interface. The
energy gap should be closed to make tunneling possible. It can be seen
that α is correlated to some physically meaningful parameters such as the
ion- solvent interaction and the structure of the double layer.
The charge transfer reaction activated by a bridging ion can be
treated quantum mechanically. In bridge assisted tunneling, the
transmission probability may be large. Also if the bridging ion is of opposite
charge to reacting species, this may lead to a higher concentration of the
latter at the OHP.
3.5 Surface Coverage Factor:
The electrode surface immersed in the electrolyte is generally with
contact adsorbed ions, solute molecules etc., is broadly of two categories:
non blocking and blocking. The effect of blocking species can be
incorporated into the Butler-Volmer equation by considering only the
fraction θ of the electrode surface that is not available for charge transfer
reaction when a current j is flowing. θ is called the surface coverage factor
for all adsorbed species. Frumkin [4] gave a detailed account of the role of
contact adsorption in the electrode process.
The binding energy of the contact adsorbed species is of practical
interest in electrodeposition. For example, during aqueous
electrodeposition, the discharging hydrogen is often strongly bound to the
cathode surface with energy on the order of 50 kcal/ mol. On the other
hand the water molecules are only weakly adsorbed. Interfacial tension has
also been used as a parameter to express the interaction of the solvent-
electrode system.
Many non aqueous solvents interact fairly strong with the electrode
surface and θ become a dominant factor. Apart from solvent adsorption, the
role played by the contact- adsorbed additives is also significant in
controlling θ (and hence the electro-deposition).
Multi step reaction:
For a single step reaction,
r + 2e ----------> p
The above reaction may comprise two steps
r + e ---------> I,
I + e ---------> p
where I refer to an intermediate species formed during the reaction.
Generally the step with the lowest exchange current density qualifies
as the rate determining step (RDS). Suppose j is the current density
corresponding to the RDS for an s – step reaction. The total current density
would be sj. The electrode potential will have only one value, but the
overpotentials corresponding to the s different steps may be different. The
over potential is the difference between the electrode potential and the
reverse potential. The different values for overpotential can be attained at
different steps simply because of the differences in the reversible potentials
of each step, which are governed by the respective concentration ratios of
the intermediates.
The exchange current density jo and the transfer coefficients α c
and α a are two important parameters related to the kinetics of the charge
transfer reaction. For a given electrode potential, the net current density
will be higher for the process with the higher exchange current density. The
exchange current density depends on the nature of the reaction, the
electrode material, and the bath composition. The transfer coefficient
describes the effect of the electric field on the charge transfer step and the
symmetry of the cathodic and anodic processes. Its dependence on the
electrode material is usually small.
3.6 Electrodeposition of Semiconductors
In principle the theory of metallic electrodeposition can be applied to
semiconductor film deposition. However, some problems of typical
semiconductors have to be considered.
First, semiconductor films are relatively resistive (in comparison with
metals). As a consequence, the interfacial potential and charge distribution
may drastically change over the first few layers of semiconductor. For
thicker films this may even lead to morphological changes.
Second, the resistivity of a semiconductor is highly sensitive to
defects, orientation, and other factors. As the electrodeposition proceeds,
the semiconductor resistivity may continue to vary. In an extreme situation,
a non degenerate semiconductor may even become a degenerate
semiconductor.
Third, in metal electrode – electrolyte contact, the space charge layer
within the electrode plays an insignificant role, whereas for semiconductor
electrolyte contact the space charge layer is dominant.
Fourth, the presence of the space charge layer, the high density of
surface states or surface defects, and the resistivity of the semiconducting
film can also exercise controlling effects on the charge transfer reactions.
As a result the Tafel plot for semiconductors may not be the same as was
originally envisaged for metallic deposits.
The above remarks are applicable to both elemental and compound
semiconductors. Apart from a few elemental semiconductors (Si, Ge,
Se.Te) most of the semiconductors of interest are compound
semiconductors. The three problems of a typical compound semiconductor
electrodeposition are
1. Most of the compound semiconductors have at least one metallic
(Ga, Cu, In, Cd, Zn, etc.,) and one nonmetallic (S, Se, Te, P, As
etc.,) component as in GaAs, GaP, CdS and CuInSe 2 .
Unfortunately, the reduction potentials of the nonmetals are widely
different from those of the metal ions. The general condition for co-
depositing the different components of the compound requires that
the constituents have equal reduction potentials. This is difficult to
attain for compound semiconductors.
2. Most compound semiconductors have a very negative Gibbs free
energy of formation. This may shift the deposition potential of the
more noble component to more positive value, helping the co-
deposition.
3. Many compound semiconductors exhibit multiple phases. The
possibility of such multiphase formation may lead to additional
complexities in the activity term controlling the electrodeposition.
3.7 Practical Aspects of Electrodeposition
3.7.1 Choice of substrate:
Substrates in semiconductor electrodeposition are expected to play
an important role. Their characteristics are not restricted to impart certain
morphological characteristics to the growing layer. In a more subtle way
electronic or optical properties may also be affected. Therefore, in choosing
a suitable substrate, in addition to considering the need to provide
mechanical support to the electrodeposits, due consideration must be given
to the possible influence of the substrate on the properties of the deposit.
Broadly speaking the following criteria should be applied for the selection of
the substrate.
1. It should have good conductivity. One can use an insulating
substrate, provided a suitably conducting coating is first applied on
its surface. Good conductivity of the substrate is also beneficial in
improving the carrier collection efficiency.
2. The thermal expansion of the substrate should match well with that of
the electrodeposit. Usually, in semiconductor electrodeposition the
film requires annealing treatments at temperatures that may be fairly
high to improve the grain size or stoichiometry or to fabricate
junctions. A mismatch in the thermal expansion often leads to strains
that result in cracking or peeling of the film.
3. The substrate should have good mechanical strength.
4. In many applications cost is an important consideration.
5. For epitaxial films, it is necessary to match the lattice parameters
between the single crystal substrate and the growing film.
6. The semiconductor metal contacts may be ohmic or rectifying, so
care should be given to the type of interface one desires to obtain.
7. In some cases the atoms of the substrates tend to diffuse inside the
electrodeposited semiconducting film, especially during post
deposition annealing treatments. The film purity, doping
concentration, electronic properties etc., may consequently be
altered. Due care should be given to these considerations. The solid
solubility, diffusion coefficient and other properties of the substrate
atoms in the semiconductor bulk should be examined to avoid such
problems.
8. The substrate should be stable in the electrolyte bath.
9. The substrate surface should be smooth and one should avoid
surface waviness, porosity, voids, and other irregularities as these
influence the local current distribution. Also the electrodeposits tend
to reproduce the surface morphology of the substrate. An uneven
porous surface with voids will not be useful for any device
application.
Subject to the foregoing considerations one may use single crystal,
polycrystalline or amorphous substrates of metals or semiconductors in the
form of foils, sheets, wafers or thin films. When single crystal
semiconductors are used as substrates a back ohmic contact is normally
formed by using a conducting paint, a suitable solder or an evaporated film.
Metals have been widely used as substrates because of their good
conductivity, easy availability, lower cost and relative ease of handling.
3.7.2 Substrate surface preparation:
The preparation of smooth scratch free substrate surface is
extremely important in semiconductor electrodeposition as surface
inhomogeneities tend to amplify during electrodeposition. On the atomic
scale surface defects may be point defects, dislocations etc., while on the
macroscopic scale they can be scratches left from polishing operations,
grain boundaries etc. Substrate preparation consists of three major steps,
grinding and polishing, cleaning and testing the surface cleanliness.
Grinding and polishing are usually employed to prepare a smooth surface
with a mirror finish. The grinding operation uses abrasives of different grit
sizes. Emery paper can be used for grinding, after grinding the surface is
either polished mechanically or electrochemically, Mechanical polishing is
performed using polishing wheels with abrasive grains glued to them with
the help of adhesives or cement compounds. The glues are available in a
wide range of viscosities and flexibilities. The abrasive most commonly
used in metal polishing is fused alumina grains, which are available in
various grain sizes down to 0.3 µm. Fused alumina is hard, sharp, fast
cutting and long wearing. Silicon carbide can also be employed for certain
special operations. However, it is more difficult to bond it firmly to the
wheel. The polishing surface is lubricated with a lubricating oil or grease
that can be sprayed or friction applied on to the polishing wheel.
Lubrication is desirable to minimize heat and produce a fine polish. Typical
speeds of polishing wheels range from 6000 to 8000 revolutions per
minute.
In some applications electropolishing can also be employed. This is
an electrochemical operation in which the substrate is allowed to dissolve
slowly by applying an anodic bias to it. The microscopic projections are
dissolved away at a greater rate, resulting in smoothing, leveling and/ or
deburring. Brightening of the surface takes place simultaneously. The
surface brightness achieved by electropolishing is different from that
obtained by mechanical means. Electropolishing yields a scratch free,
deformation free surface. Time, temperature and current density are the
critical parameters that control the surface finish. The surface quality and
finish obtained by a prior polishing operation also help to determine the
final finish resulting from electropolishing. One can remove layers of a few
micrometers thick using electropolishing.
3.7.3 Cleaning:
Surface cleaning in thin film technology is an important step prior to
deposition. It is necessary to remove the contaminants that would
otherwise affect the properties of the films. The properties that can be
affected by the presence of the contaminants include adhesion,
morphology, nucleation, electronic properties of the film, and the substrate
film interface. The choice of the cleaning procedure is governed by the
substrate as well as by the type of contaminants that are likely to be
present. The composition, physical properties and chemistry of the
substrate should be carefully considered in designing the cleaning
operation. The cleaning process should be chosen to avoid any undesirable
damage to the substrate surface and yet contaminant is to be removed. It
is easier to select the cleaning procedure when the nature and origin of the
contaminants are known. Some common contaminants are finger tip
grease, glue, dust, leftovers of abrasives, soldering fluxes and similar
materials.
3.7.4 Cleaning by solvents:
Solvent cleaning is employed to dissolve or emulsify the
contamination. Solvent cleaning can be performed by soaking the surface
in petroleum or chlorinated solvents. Some common chlorinated solvents
are trichloroethylene, methylene chloride, perchloroethylene. These
chlorinated solvents may contain hydrochloric acid as a hydrolysis product,
and due care should be exercised to inhibit it. Vapor degreasing units are
also commonly employed for cleaning. Such a unit consists of a chamber in
which a chlorinated solvent is vaporized. Cleaning takes place when the
solvent vapors condense on the colder substrate. Solvent cleaning can also
be accomplished by soaking in an emulsifiable solvent. Detergent cleaning
is useful for metals. Acid cleaning is often employed to remove oxides and
oil from inert glass or metal substrates. An aqueous solution of organic or
inorganic acid is normally employed in soaking, painting, brushing or
spraying applications. The contaminants are first converted into water
soluble compounds that are subsequently removed in a water rinse.
Alkaline cleaners along with some surface active agents are often
employed after detergent cleaning to remove oil smuts and oxides.
0
Cleaning is generally performed at temperatures of 120 – 200 F. The final
cleaning should be done in flowing deionized water.
Ultrasonic cleaning can also be a useful technique, particularly for
ceramics. The cleaning is assisted by ultrasonic agitation in which jetting,
which accomplishes the collapse of bubbles generated by cavitation near
the surface, increases the rate of solvation and emulsification. The cleaning
liquid can be water based or solvent based chemical in which the
substrates are immersed. The effectiveness of ultrasonic cleaning depends
on the intensity of cavitation achieved. Liquids with higher surface tension
and lower viscosity should be preferred. The dissolved gases in the liquid
also tend to decrease cavitation intensity, whereas increasing temperature
increases it. The ultrasonic frequency and power should also be properly
chosen. Higher frequencies require more power to maintain the same level
and cavitation intensity. Similarly, the ultrasonic power should be matched
to the work desired.
3.7.5 Cleaning by Heating:
Heating the substrate may remove the volatile impurities. The temperature
should be chosen according to the melting point and/ or surface reactivity
of the substrate. Heating is not useful if it causes stresses and cracking
due to non uniform heating or oxidation of the surface.
3.7.6 Cleaning by etching:
In many cases, a suitable etchant can be used as a clean surface. Etching
can be performed in the dark or under illumination. This can be specially
used for semiconductor substrates.
3.8 Other methods:
There are a number of cleaning methods that are more useful than
the foregoing for thin film deposition in vacuum system. Three of these
methods are sputter cleaning, plasma oxidation and glow discharge
cleaning. Cleaning techniques have been discussed by Brown, Holland
[5,6].
3.8.1 Surface Cleanliness Test:
The various tests that can be applied for checking the surface
cleanliness are:
3.8.2 Breath Figure Test:
The substrate is brought near the mouth and a soft breath is blown
on it. A poorly reflecting black specular film indicates a clean surface.
Breath figures of various shapes appear on an uneven surface.
3.8.3 Atomizer Test:
Water is sprayed over the surface of the dried substrate. Surface
cleanliness is indicated by the formation of fine mist, while on an unclean
surface water coalesces into big drops.
3.8.4 Water Break Test:
The substrate is pulled against the surface of water in a beaker. If
the water sticks to the substrate surface as a continuous film, a clean
surface is indicated.
3.8.5 Contact Angle Test:
A contact angle zero between water droplet and the substrate
implies that the substrate is clean.
3.8.6 Coefficient of friction Test:
Resistance encountered when a glass or metal sheet is slid over
the substrate can also be a measure of cleanliness. If the coefficient of
friction approaches unity the surface is clean.
3.8.7 Indium Adhesion Test:
Surface cleanliness is tested by measuring the coefficient of
adhesion between the substrate and a piece of indium. It may range from
zero for a dirty surface to about two for a clean surface.
3.8.8 Fluorescence Dye Test:
Contaminants that can absorb fluorescent dyes can be detected by
illuminating the substrate with UV light.
3.8.9 Edge Lighting Effect:
It is useful to check transparent substrates such as glass. If the
edge of the glass is illuminated, the contaminants present on the surface
become visible as lighted areas against a dark background.
In addition to the foregoing techniques one can also employ
gravimetric or radiotracer methods.
3.9 Electrolytic Bath
The electrolytic bath is the medium that supplies the ions that move
upon application of an electric field. In general ionic transport is facilitated
in aqueous solutions, non aqueous solutions or molten salt bath.
3.9.1 Aqueous and Non-aqueous Electrolytic Solutions:
The choice of solvent depends on primary factors such as solubility
and non-reactivity.
3.9.1.1 Aqueous: These solvents are suitable for a large number of salts,
complexing agents and other compounds. Barring a few hydrolysis
reactions, water is generally a nonreactive solvent. However an aqueous
+ –
solution necessarily contains H and OH ions, which complicate the
electrodeposition process by resulting in the evolution of Hydrogen and / or
oxygen at the electrodes.
3.9.1.2 Non-aqueous: These can be further be classified as protic and
aprotic solvents.
3.9.1.3 Protic Solvents: (Alcohols, formamide etc.,) these solvents are
generally strong hydrogen donors and can exchange protons rapidly. Such
solvents also sometimes lead to hydrogen evolution.
3.9.1.4 Aprotic Solvents: They contain hydrogen bonded only with the
carbon (propylene carbonate, DMF, DMSO, acetonitrile, tetrahydrofuran
etc.,).
The nonaqueous solvents have attracted attention for semiconductor
electrodeposition work due to the greater flexibility they afford in choosing
dopants, solutes, complexants, temperature range and working electrode
potentials and the absence of hydrogen evolution reaction, among other
reasons.
3.9.2 Preparation of Electrolytic Bath:
3.9.2.1 Selection of Solvent: The first step is to choose aqueous or non-
aqueous solvents depending on the material to be deposited.
Electrodeposition solvents are stable in only a limited potential range,
beyond which reduction- oxidation take place. This range is called the
working potential range or the window. The potential at which the
electrodeposition is to be carried out should be within this range. The
morphology and rate of growth depends upon the temperature at which
electrodeposition is being carried out. The solvent should remain liquid at
the desired temperature. Therefore solvents with a large range are
preferred to provide greater flexibility.
High vapour pressure solvents are preferred because the electrolytic
concentration remains more constant. This is particularly true when the
solvent is being purged with nitrogen or an inert gas to drive out the
dissolved oxygen.
The dielectric constant should be more than 10. Too low a dielectric
constant facilitates ion pair formation, giving poor conductivity and
ionization in the solution.
Lower viscosity is always preferred because of the better conductivity
and diffusion. Furthermore, many irreversible electrochemical reactions
limited by mass transport become reversible in a medium with lower
viscosity.
3.9.2.2 Selection of Supporting Electrolyte:
The supporting electrolyte performs several functions in the
electrochemical process. (1) It increases the conductivity of the electrolyte.
This minimizes Joule heating and provides more uniform current
distribution and iR compensation.(2) It reduces the electrode double layer
thickness and also influences ion pairing and adsorption.(3) It effectively
eliminates the effect of migration in the mass transport. The criteria for
selection of a supporting electrolyte are its solubility in the solvent and a
dissociation constant sufficiently high to yield good conductivity and the
electrochemical oxidation of anion and electroreduction of cation at more
anionic or cationic potentials, respectively in the electrochemical process
under investigation.
In aqueous media, KCl, HCl have been commonly used, In organic
solvents lithium perchlorate, lithium tetrafluoborate, trifluoroacetate and
quaternary ammonium salts have been employed as supporting
electrolytes.
3.9.2.3 Additives in Electrolytes:
Additives (brightening agents, surfactants, complexants etc.) are
often added to the plating bath to obtain a brighter and smoother deposit,
controllable reaction rate, better adhesion and also a better texture. The
role of additives in the electrodeposition process is used either (1) to
control the rate of electrodeposition process or to (2) influence deposit
morphology.
3.9.2.4 Solvent Purity:
Impurities in the solvent interfere with the electrochemical processes.
In many cases electrodeposition may not be possible or the deposit
morphologies may be affected by the impurities. The electronic properties
of the semiconductor are also extremely sensitive to impurities that co-
deposit. It is therefore essential to purify the solvent. Some of the
commonly used methods employ deionization using ion exchange resin or
distillation from an alkaline permanganate solution. However this is not a
very satisfactory method and many organic contaminants may still be
present. Further purification by passing the water vapours through a
column of platinum gauge heated to 750 – 800ºC in a stream of oxygen is
necessary to remove these contaminants. In some case purification by
flushing an inert gas to remove oxygen followed by pre electrolysis at a
constant potential may also be employed to remove heavy metal ions.
Non aqueous solvents also need to be purified by refluxing with
strong oxidizing or reducing agents, distillation under reduced pressure, or
passage through molecular sieves. A common impurity in non-aqueous
solvent is oxygen, which can be removed by purging with nitrogen.
3.10 Molten Salt Electrolysis Bath:
The term molten salt includes molten media that may be wholly ionic
or derived from simple salts. The conductivity and ionicity of these systems
are generally sensitive to temperature, pressure and composition. Molten
salts exhibit a wide range of electrochemical stability high ionic
conductivity, high heat capacity and good thermal conductivity. They also
exhibit good electrochemical reaction rates. In contrast to aqueous
electrodeposition molten salt electrodeposition can be carried out without
the annoying intervention of hydrogen evolution, oxide formation, hydride
formation and similar problems.
Some of the commonly used molten salt electrolytes are, NaCl + KCl + Na 3
PO 4, NaF + KF + NaPO 3 + In 2 O 3, etc. Molten salt baths suffer from certain
disadvantages like high operating temperatures, lack of sufficient
thermodynamical and kinetic data.
3.11 Classification of Electrodeposition Techniques
Electrodeposition techniques can be classified according to the
nature of the electric field applied across the electrolysis cell:
Deposition at constant dc potential (Potentiostatic)
Deposition at constant dc current (Galvanostatic)
Deposition using a periodic or pulse source.
3.11.1 Potentiostaic Deposition:
In this technique different charge transfer reactions proceed under a
steady state condition at rates appropriate to the steady state interfacial
overpotential and exchange current density. The choice of the overpotential
is dictated by the composition of the bath, the substrate and the reversible
potential of the species to be deposited. The table of standard electrode
potentials serves as an approximate guide in finding the potentials at which
electrodeposition of particular species will be possible, but in practice the
actual deposition depends on a number of factors such as substrate deposit
interaction of the hydrogen overvoltage, the interaction between the
components during compound electrodeposition and the polarization
characteristics of the bath. Potentiostatic deposition is carried out under
pure activation, diffusion or mixed control depending on the choice of the
deposition potential. Potentiostatic deposition has been used to grow
layers of elemental, binary and ternary semiconductors. In the case of
semiconductors it is desirable to obtain large grained polycrystalline
deposits. However, very low overpotential may not be suitable, as they may
lead to a spongy or porous deposit due to low nucleation rates. As the
overpotential is increased, the supersaturation increases and a large
number of nuclei are formed. The deposit thus acquires a fine grained
morphology. Very high overpotentials may, however lead to the growth of
dendrites or whiskers. In the case of compound semiconductors, more
stringent control of the deposition potential is required to maintain the
deposit stoichiometry.
3.11.2 Deposition at Constant Direct Current:
The constant current between the working and counter electrodes
required for electrodeposition at a constant direct current can be obtained
from a galvanostat.
The initial guideline for choosing the required deposition current
density can be obtained from the knowledge of (1) the Faradaic efficiency
and (2) the maximum permissible growth rate for a good crystal. The former
can be obtained by a series of preliminary deposition experiments. The
latter is to be obtained from the available crystal growth data.
The galvanostatic electrodeposition of compound semiconductors is
more complex and a straight forward answer for the proper choice of
deposition current density is not possible. As discussed earlier, compound
semiconductors are usually deposited by the transport of at least one of the
constituents under diffusion control. The simplest situation is when the
deposition of all the components is diffusion controlled. The rates of
deposition will then be directly proportional to the corresponding limiting
current densities. As an example, consider the cathodic electrodeposition of
a binary compound semiconductor A x B y . If the electrodeposition of B is
under diffusion control, then the maximum current distribution due to
species B cannot exceed the corresponding limiting current density.
Further, if the deposition of A is under pure activation control, then the
current distribution due to A for galvanostatic deposition will depend on the
value of exchange current density of A and the steady state overpotential.
For the compound electrodeposition to be favoured, the value of the total
current density should be chosen so that the steady state overpotential
satisfies the thermodynamic condition for codeposition of A and B.
Galvanostatic electrodeposition is therefore still an art as it depends
on the manipulative experience and ability of the individual worker. Initial
trials may be necessary to obtain the final optimum values of the
electrodeposition current density.
3.11.3 Electrodeposition from a Periodic or Pulsed Source:
The use of non dc signals for electrodeposition is known to improve
the deposit quality. However, only a few reports have appeared on its
application to semiconductor electrodeposition. Non dc electrodeposition
can be carried out by either varying the current or the overpotential.
Current variation can be accomplished by using a periodic reverse current,
a pulsating current or alternating current without or superimposed over a dc
current.
3.12 Morphology of The Electrodeposits
The nature and magnitude of the applied electric field across the
electrolysis decides (1) grain size (2) surface roughness (3) dendritic
growth and (4) spongy and powdery deposit formation.
3.12.1 Grain Size:
The grain size depends upon the overpotential which in turn controls
whether the deposition is controlled by diffusion, activation or both. The
relevant conclusions can be briefly stated as follows. At low overpotentials,
initially a small number of nuclei grow independently. It is therefore
expected that a large grained deposit will be obtained under these
conditions. As the overpotential is increased, a large number of nuclei may
be formed leading to a decrease in grain size.
3.12.2 Surface Roughness:
At an ideal surface, the value of the diffusion layer thickness and the
limiting current are constant throughout, which leads to an uniform growth.
Some minor variations in thickness may arise due to convective effect,
which is neglected here. However the situation is complex for a real surface
which is rough consisting of elevation and recesses. The rate of deposition
at the elevations may be higher due to shorter diffusional path between the
outer plane of the diffusion layer and the elevations. At the tips of the
elevations the diffusion conditions may approach those of spherical
diffusion. Spherical diffusion is faster than the linear diffusion because of
wider diffusional field in the former case. As a result surface roughness
gets amplified during electrodeposition.
3.12.3 Dendritic Growth:
In the case of dc electrodeposition, surface roughness can lead to
the initiation of preferential growth at protrusions or dendrites. The
mechanism of dendritic growth has been studied by Diggle et al and Popov
et al [7,8].
3.12.4 Formation of Powdery or Spongy Deposit:
Other than dendritic growth another undesirable type of
electrodeposit is a powdery or spongy deposit. Dendritic growth is primarily
controlled by overpotential or critical current density. However, powdery or
spongy growth is interplay of many factors other than the overpotential,
such as viscosity and temperature. Powdery deposits are classified by their
small particle size and poor adhesion to the electrode surface. They are
generally obtained when the deposition is carried out under diffusion limited
current conditions or close to transition time. The amorphous nature of the
powdery deposit is due to the high nucleation rate. Powder formation is
enhanced when the concentration of the depositing species is decreased,
the supporting electrolyte concentration is increased, solution viscosity is
decreased, the temperature is decreased or the stirring rate is decreased.
The mechanism of formation of a spongy deposit has been discussed by
Popov et al [9]. It was shown that a spongy deposit is formed if the radius
of the growing grain exceeds a critical value.
3.13 Basics of pulse plating
Generally in the electrodeposition technique for producing a metal or
compound, a driving force (i.e., the free energy) in the form of a potential or
current is applied to the electrode. Either of them can be used as a variable as in
the case of continuous electrodeposition. Modern electronics allows one to make
use of these parameters as a function of time. This permits a number of possible
ways of varying the conditions.
Four variable parameters are of primary importance in pulse plating. They
are: peak current density, ip, average current density, ia, ON time and OFF time.
The sum of the ON and OFF times constitute one pulse cycle. The duty cycle is
defined as follows:
Duty Cycle = ______ON time _____ x 100 % ------------ (1)
ON time + OFF time
A duty cycle of 100% corresponds to conventional plating because OFF
time is zero.
In practice, pulse plating usually involves a duty cycle of 5% or
greater.
The average current density(Ia) under pulse plating conditions is defined as
Ia = peak current density x duty cycle
= ip x duty cycle ---------------- (2)
During the ON time the concentration of the metal ions to be
deposited is reduced within a certain distance from the cathode surface.
This so-called diffusion layer pulsates with the same frequency as the
applied pulse current. Its thickness is also related to ip but reaches a
limiting value governed primarily by the diffusion coefficient of the metal
ions. During the OFF time the concentration of the metal ions build up
again by diffusion from the bulk electrolyte and will reach the equilibrium
concentration of the bulk electrolyte if enough time is allowed.
These variables result in two important characteristic features of pulse
plating which make it useful for alloy plating as well as property changes
as mentioned earlier.
(i) Very high instantaneous current densities and hence very high
negative potentials can be reached. The high over potential causes a shift
in the ratio of the rates of reactions with different kinetics. This high over
potential associated with the high pulse current density greatly influences
the nucleation rate because a high energy is available for the formation of
new nuclei.
(ii) The second characteristic feature is the influence of the OFF time
during which important adsorption and desorption phenomena as well as
recrystallization of the deposit occur.
3.14 References
[1]. H.Gerischer, Recent Advance in Electrochemistry,Vol.I, Wiley
Interscience, New York,1962.
[2]. V.G.Levich, Advances in Electrochemical and Electrochemical
Engg,vol-4,!966.
[3]. J.O.M.Bockris and A.K.N.Reddy, Modern Electrochemistry, Vol-2,
Plenum Press, New York, 1973.
[4]. N.Frumkin, Advances in Electrochemistry and Electrochemical
Engineering, vol.3, Intersceince, New York,1963.
[5]. R.Brown, Handbook of Thin film Technology,McGraw Hill, New
York,1970.
[6]. L.Holland, Vacuum Deposition of thin films, Chapman and Hall,
London, 1955.
[7]. J.W.Diggle, A.R.Despic and J.O.M.Bockris, J.Electrochem.Soc,
116(1969)1503.
[8]. K.I.Popov, M.C.Maksimovic and Djokic, Surf.Tech,14(1981)423.
[9]. K.I.Popov, M.D.Maksimovic, S.K.Zecevik and M.R.Stojik,
Surf.Technol, 27(1986)117.