Technology Platform Nanoelectronics

Strategic Research Agenda

Executive Summary
Brussels, April 27, 2005
Content

„ Industrial landscape
„ ENIAC vision
„ Society needs / application domains
„ Technology requirements
„ Research priorities
„ Infrastructure and partnerships
„ Conclusions

Strategic Research Agenda – Executive Summary – p 2

 Industrial landscape

Telecom,
Services € 5,000B
Internet, Broadcast

Electronics € 1,100B Consumer, Medical,

Transport, Security, Space
Semiconductors € 200B

Materials and equipment € 50B

Cornerstone of
2004 worldwide market figures
high-tech economy
Source: Medea+

Strategic Research Agenda – Executive Summary – p 3

Pervasive presence

Strategic Research Agenda – Executive Summary – p 4

Power on a thumbnail

Strategic Research Agenda – Executive Summary – p 5

Leading in research

„ Largest R&D spending in industry

„ Major driver for ICT, Ambient Intelligence, Nanotechnology
Source: Technology Review, Dec 2004

Semiconductors

Biotechnology

Computer software

Pharmaceutical/medical

Telecommunications

(R&D as % of sales) 0 5 10 15 20 25

Strategic Research Agenda – Executive Summary – p 6

A success story for European industry

Ranking of the World Top 10

Semiconductor Companies

1 EU
2
3
1
1 Korea
6
4
3
Japan

3 3 3
USA
1990 2000 2004
Source: WSTS

Strategic Research Agenda – Executive Summary – p 7

Top supply in key application areas
Example: Automotive

1 Infineon
2 Bosch
3 Motorola
4 ST
5 Philips
6 TI
7 Intel
8 NEC European Automotive
9 Renesas Semiconductors
10 Atmel 2003 market figures

Source: Strategy Analytics

Strategic Research Agenda – Executive Summary – p 8

Technology market leadership
Example: Lithography
Canon

Perkin Canon
Elmer
Hitachi
ASET
GCA

ASML
Nikon

Ultratech
Eaton

1984 total market Nikon

$550 million

Source: ASML MCC 2003 total market > $3,000 million

Strategic Research Agenda – Executive Summary – p 9

Established through R&D ecosystems
•Thousands of
jobs created
•Large indirect
impact on
local economies
•Local networks
with SMEs and
Universities

Nijmegen/ Dresden
Eindhoven/
Leuven
Crolles/
Grenoble

Catania

Strategic Research Agenda – Executive Summary – p 10

ENIAC vision

„ Master the revolutionary transition from Microelectronics

to Nanoelectronics
– Serve the future demands of European society
– Increase high-skilled employment
– Reinforce competitiveness of European industry
– Secure global leadership in high-tech research
„ Make the 2020 Information Society technologically
feasible and economically affordable

Strategic Research Agenda – Executive Summary – p 11

The pervasion is far from its end!
Average semiconductor content
as % of product value
30%

20%

10%

Micro Nano
1980 1990 2000 2010 2020
Source: Medea+

Strategic Research Agenda – Executive Summary – p 12

 t e
Preparing for the future R
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The Strategic Research

Stakeholders Public
Agenda (EU,National,EUREKA)
(2004-2005) and Private (Industry)
- Revision every 2 years -

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SRA

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The Report of the ENIAC
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(2003-2004)
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Strategic Research Agenda – Executive Summary – p 13

ENIAC SRA objectives

„ Serve the European Semiconductor value chain

– Including suppliers / producers / users
„ Connect European high-quality competencies
– Enabling critical knowledge, including SMEs
„ Identify disruptive technologies to solve blocking points
– Guided by SRA Domain Teams
„ Focus on research leading to industrial innovation
„ Enhance cooperation between industry and academia
– Strong R&D ecosystems for each SRA domain

Strategic Research Agenda – Executive Summary – p 14

 Society needs / application domains

Society Needs

Safety and Education &

Communications Health Mobility
Security Entertainment

Personal Learning Seamless wired The Doctor in your

100% Safety on
Emergency anywhere, and wireless Pocket
the Road
Systems anytime access

Protection against Content with Mobile Services Real-Time Integrated

Crime and Terrorism best Quality without Diagnostics Transport
. (e.g. HDTV) compromise Systems

Secure Home Content Protection of Bio-chips,

Prevention of
Environment Protection privacy and Body-Sensors
pollution
content

Strategic Research Agenda – Executive Summary – p 15

Intelligence applied: safety cocoon

77 GHz Infrared Video Ultra sonic Video

Radar

Long range Night Vision Mid range Short range Rear

≤ 150 m ≤ 150 m ≤ 60 m ≤3m zone

Strategic Research Agenda – Executive Summary – p 16

 Intelligence applied: personal comfort

Personal Map
-Compass
Personal Health Monitor -GPS
-Heart activity -Altitude
-Blood pressure
-Glucose level Personal Weather Station
-Humidity
Gaming -Pressure
-Ozone
Mouse -UV exposure

Identification Decibel Meter

Strategic Research Agenda – Executive Summary – p 17

Intelligent systems compute and interact

baseline HV sensors bio

CMOS memory RF Power passives actuators fluidics

More Moore More than Moore

Interact with user and

Compute
environment

Digital content Non-digital content

Lots of software Lots of processes

Strategic Research Agenda – Executive Summary – p 18

The market is very demanding

„ System functionality must go up, cost per function down

Area x 1/100 in 15-20 years!

Micro Nano

Strategic Research Agenda – Executive Summary – p 19

Expected evolution of key parameters

100 Hard work

Hard work
needed
needed!

10
Computing
power and
data rate
1 Storage
density
2005 = 1

0.1
This is
not enough! Power
dissipation
per element
1990 2000 2010 2020

Strategic Research Agenda – Executive Summary – p 20

Research priorities

„ Complex technology landscape, partitioning required

„ Organized by technology domain, with mutual interaction
„ Each domain sets strategic directions and roadmaps
„ Common view: research infrastructure and partnerships

Strategic Research Agenda – Executive Summary – p 21

Application-driven technology domains

Society Needs
Technology
Application Domains Domains

Design
Automation

Heterogeneous
Integration
Beyond
CMOS

‘More ‘More than

Moore’ Moore’
Equipment and
Materials

Strategic Research Agenda – Executive Summary – p 22

 Application-driven technology domains

Complex digital circuits Enabling technology into Non-digital functions and

(compute)
Society Needs
manufacturing human interface (interact)

Exploring the physical Effective platform-based Total system integration

limits of scaling Application Domains
system design (“System-in-Package”)

Design
Automation

Heterogeneous
Integration
Beyond
CMOS

‘More ‘More than

Moore’ Moore’
Equipment and
Materials

Strategic Research Agenda – Executive Summary – p 23

More Moore

„ Enabling complex digital circuits

„ Baseline CMOS silicon processing
„ Very small dimensions, very large scale
„ Main challenges
– New substrates and core devices
– New memories
– New optical and mask-less lithography processes

Strategic Research Agenda – Executive Summary – p 24

More Moore:
Baseline CMOS technology roadmap
Critical dimension (nm)

250
180
Micro 130
90
Nano 65
45
32
22

Year of risk production 2000 2010 2020

Strategic Research Agenda – Executive Summary – p 25

More than Moore

„ Enabling non-digital functions and human interface

„ Diversified semiconductor technologies
„ Multiple competencies, linked with application
„ Main challenges
– New radio-frequency systems
– New high-voltage / power systems
– New sensors and actuators

Strategic Research Agenda – Executive Summary – p 26

More than Moore:
Heterogeneous technologies
GSM frontend RF-ID tag sensors &
high-voltage actuators
fluidics
passives
RF

Wheel speed Phone camera 3D accelerometer RF-MEMS switch

Inkjet head Ultra-filter Lab-on-a-Chip Nano-syringe

Strategic Research Agenda – Executive Summary – p 27

Heterogeneous Integration

„ Enabling total system integration (System-in-Package)

„ Integrating CMOS and diversified technologies
„ Main challenges
– Extreme system miniaturization
– Multi-function / multi-scale (micro and nano) integration
– Novel packaging for new functionalities (e.g., medical)

Strategic Research Agenda – Executive Summary – p 28

Heterogeneous Integration:
Nanoelectronics plus microsystems
Interface / interaction with environment
(optical, mechanical, biological, chemical)

Heat dissipation, Shielding, Mechanical protection …

ICs Big passives Discretes Other…

Bump? Wire? Solder/Glue? Stacked wafer/die?

Chip
Embedded ICs Substrate
Board

High-density Insulated Redistribution Conductive Low-density

RLC zone vias RLC

Strategic Research Agenda – Executive Summary – p 29

Equipment and Materials

„ Enabling technology concepts into manufacturing

„ Innovation driven by integration schemes and ITRS
– More Moore, More than Moore, Hetero Integration
„ Main challenges
– New lithography and metrology
– New substrates, layers, and patterning
– Micro-machining / nano-manipulation
– Multi-functional materials

Strategic Research Agenda – Executive Summary – p 30

Design Automation

„ Enabling effective platform-based system design

„ Addressing high circuit density and function diversity
– More Moore, More than Moore, Hetero Integration
„ Main challenges
– New platform-based design and verification
– Design for manufacturability, reliability, and testability
– Multi-technology / multi-functional / multi-disciplinary

Strategic Research Agenda – Executive Summary – p 31

Design Automation:
The designer crisis
25,000
person years per circuit ???

50
person years
?
per circuit

2005 2015

Design automation breakthroughs

mandatory to win the design race!
Strategic Research Agenda – Executive Summary – p 32
Beyond CMOS

„ Exploring the physical limits of technology scaling

„ Nanoscience elements complementing conventional logic
„ Expected incidence at 32-22nm technology node
„ Main challenges
– Disruptive architectures
– Nanotubes and nanowires
– Molecular electronics
– Self-organizing circuits

Strategic Research Agenda – Executive Summary – p 33

Beyond CMOS:
This could be nanotube devices

Strategic Research Agenda – Executive Summary – p 34

Technology roadmap summary

10µm

More than Moore

1µm Mi
cro
Hi me
Ra gh ch
d -V an
M io- o lt
ag
ics
100nm
or Fr
eq e
e ue
M nc
oo y
re
10nm

Beyond CMOS
1nm
1960 1980 2000 2020 2040 2060

Strategic Research Agenda – Executive Summary – p 35

Technology and applications are linked:
Some examples
„ Car cocoon „ Mobility
– Radar, infrared, ultrasound – Safety on the road
„ Personal network „ Education & Entertainment
– Broadband wireless – Learning anywhere, anytime
„ Terabit infrastructure „ Communications
– Optical transmitters – Seamless network access
„ Personal monitor „ Health
– Mobile sensors – The doctor in your pocket
„ Intelligent smartcard „ Safety & Security
– Low-cost mass memory – Protection against crime

Strategic Research Agenda – Executive Summary – p 36

Infrastructures and partnerships

„ Each technology domain has specific requirements

„ Common view: leveraging heterogeneous competences
„ Essential: firming up industry-academia collaboration
„ Cross-learning from European world class best practices

Strategic Research Agenda – Executive Summary – p 37

Industry-academia R&D collaboration

Past Academia research

model
Industry research

Product innovation

New Academia research

Model
Industry research

Product innovation
SRA

Strategic Research Agenda – Executive Summary – p 38

More Moore:
A world-class R&D ecosystem

„ More Moore (CMOS) has a world-class R&D ecosystem

„ Best practice of industry-academia collaboration
„ Need continuous upgrading to maintain leadership
„ Significant efforts in Equipment and Materials
„ Extensive partnerships to leverage investments (300mm)

Strategic Research Agenda – Executive Summary – p 39

Next step in R&D ecosystems:
More Than Moore / Hetero Integration

„ More than Moore and Hetero Integration are diverse

„ Extensive partnerships needed to gain critical mass
„ Build R&D ecosystems along More Moore best practice!
„ Enabled by modular processes and unified design flow
„ Driven by core group of industry and academia
„ Close networking with Nanoelectronics research centers
„ Combining competences from large players and SMEs

Strategic Research Agenda – Executive Summary – p 40

Next step in partnerships:
Design Automation / Beyond CMOS

„ Design Automation must realize breakthrough efficiency

„ Platforms / standards definition and coordination are key

„ Beyond CMOS explores the boundaries of scaling

„ Many novel ideas, mostly at academia
„ But no clear main direction, parallel evaluation required
„ Selection and filtering of ideas is a challenge in itself

Strategic Research Agenda – Executive Summary – p 41

To realize the 2020 vision, R&D efforts
in Europe must be strongly enhanced

„ Nanoelectronics continues to grow with ~10% per year

„ Challenges increase, both technical and in resources
„ Long term trends
– From captive development to open innovation
– From CMOS to beyond CMOS
– From downstream R&D to upstream research and infrastructures
„ Need to regain balance in public-private partnerships
„ Learn from existing R&D ecosystems, build new ones

Strategic Research Agenda – Executive Summary – p 42

Regaining the balance in ENIAC R&D
effort in public-private partnerships
2005 2015
Includes
Includingoperational
operationalcosts
of infrastructures
costs of researchfor
and pilot
research and pilot lines
infrastructures Private Public Private Public
Advanced research 80 175 140 420
Technology integration 490 325 780 780
Application development 1980 0 3390 0
Prototyping 850 0 1290 0
Million euro per year 3400 500 5600 1200
Public-private ratio to be
Including operational increased
costs significantly,
of research and pilote.g.,
advanced research 75/25, technology integration 50/50
infrastructures
Strategic Research Agenda – Executive Summary – p 43
New directions in public-private
partnerships required
„ Connect and leverage sponsoring mechanisms
– European programs
– Transnational programs (EUREKA, e.g., MEDEA+, PIDEA)
– National programs
„ Strengthen European R&D ecosystems
– Know-how / human resources
– Research infrastructures
„ Focus solutions on supporting both technology pillars
– More Moore (‘Compute’: the Brains)
– More than Moore (‘Interact’: the Arms, Legs, Ears and Eyes)

Strategic Research Agenda – Executive Summary – p 44

European partnership alignment is
possible using existing guidelines
European Transnational
Past model FP6 EUREKA

Coordinated
sponsoring
SRA

European Transnational
New model FP7 EUREKA

European Research
Infrastructures

Strategic Research Agenda – Executive Summary – p 45

Nanoelectronics ecosystems worldwide

We are
not alone!

Strategic Research Agenda – Executive Summary – p 46

The Far East challenge

„ Transfer of commodity volume production is inevitable

– Many products will eventually become a commodity
– Largest growth in consumer markets is in the Far East
– Low cost of labor
„ But manufacturing in Europe continues to be needed
– Any outsourcing requires in-house knowledge
– Rapid prototyping in multidisciplinary domains
– IP-sensitive technologies, high-quality / smart products
– Learning environment for academic and industrial researchers
„ Innovative technologies help European manufacturing
– Providing competitive advantages versus low Far East labor cost

Strategic Research Agenda – Executive Summary – p 47

Conclusions

„ Nanoelectronics is the essential enabler to make the

Europe 2020 Information Society feasible and affordable
„ European Nanoelectronics research and industry is
world-class, allowing Europe to master its own destiny
„ The ENIAC SRA provides guidance for public-private
partnerships, identifying key domains and blocking points
„ Fragmented academic research must be integrated in
focused ecosystems, joining large industry and SMEs
„ Rebalancing of national and European sponsoring is
required to timely realize breakthrough innovations

Strategic Research Agenda – Executive Summary – p 48

Next steps

„ Technology Domain Teams continue to detail the SRA

– Through gap analysis of present status versus future needs
– Common format: critical priorities, key parameters and roadmaps
– Assessing infrastructures, ecosystems, and regulations
„ Maximize synergy with related activities
– EUREKA (e.g., MEDEA+, PIDEA), FP, ITRS, …
– Continuous exchange with other Platforms (e.g., ARTEMIS)
„ Full SRA to be presented at first ENIAC Workshop
– Planned on 16th September 2005, in Grenoble
– In conjunction with the ESSDERC-ESSCIRC conference

Strategic Research Agenda – Executive Summary – p 49

Technology Platform Nanoelectronics
Strategic Research Agenda

Executive Summary
Brussel, April 27, 2005