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"Big data analytics for modeling WAT parameter variation induced by process ..."

Chen-Fu Chien, Ying-Jen Chen, Jei-Zheng Wu (2016)

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DOI: 10.1109/WSC.2016.7822290

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-07

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Chen-Fu Chien, Ying-Jen Chen, Jei-Zheng Wu:
Big data analytics for modeling WAT parameter variation induced by process tool in semiconductor manufacturing and empirical study. WSC 2016: 2512-2522

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