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"A switched actuation and sensing method for a MEMS electrostatic drive."

Steven Ian Moore, S. O. Reza Moheimani (2016)

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DOI: 10.1109/ACC.2016.7526581

access: closed

type: Conference or Workshop Paper

metadata version: 2020-06-15

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Steven Ian Moore, S. O. Reza Moheimani:
A switched actuation and sensing method for a MEMS electrostatic drive. ACC 2016: 5817-5822

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