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"L-shape based layout fracturing for e-beam lithography."

Bei Yu, Jhih-Rong Gao, David Z. Pan (2013)

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DOI: 10.1109/ASPDAC.2013.6509604

access: closed

type: Conference or Workshop Paper

metadata version: 2018-01-30

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Bei Yu, Jhih-Rong Gao, David Z. Pan:
L-shape based layout fracturing for e-beam lithography. ASP-DAC 2013: 249-254

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