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"Lot allocation and process control in semiconductor manufacturing - a ..."

Nital S. Patel (2004)

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DOI: 10.1109/CDC.2004.1429418

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-18

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Nital S. Patel:
Lot allocation and process control in semiconductor manufacturing - a dynamic game approach. CDC 2004: 4243-4248

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