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"A cost-driven lithographic correction methodology based on off-the-shelf ..."

Puneet Gupta et al. (2003)

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DOI: 10.1145/775832.775840

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-28

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Puneet Gupta, Andrew B. Kahng, Dennis Sylvester, Jie Yang:
A cost-driven lithographic correction methodology based on off-the-shelf sizing tools. DAC 2003: 16-21

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