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"High Performance and Yield for Super Steep Retrograde Wells (SSRW) by Well ..."

U. Rana et al. (2019)

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DOI: 10.1109/DRC46940.2019.9046440

access: closed

type: Conference or Workshop Paper

metadata version: 2024-07-11

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  dblp key:
  - conf/drc/RanaBRTSJPSZRKM19
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  - https://dblp.org/rec/conf/drc/RanaBRTSJPSZRKM19
U. Rana, D. P. Brunco, S. Raman, Dina H. Triyoso, M. W. Stoker, Jeffrey B. Johnson, Luigi Pantisano, K. D. Seo, M. Zhao, A. Reznicek, R. Krishnan, B. Moser, J. Freeman, L. Jang, Evgeny Kaganer:
High Performance and Yield for Super Steep Retrograde Wells (SSRW) by Well Implant / Si-based Epitaxy on Advanced Technology FinFETs. DRC 2019: 251-252

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