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"A novel characterization method for MEMS based electrostatic resonators ..."

Eren Aydin et al. (2016)

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DOI: 10.1109/ICSENS.2016.7808938

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  - conf/ieeesensors/AydinKGZK16
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  - https://dblp.org/rec/conf/ieeesensors/AydinKGZK16
Eren Aydin, Mustafa Kangül, Furkan Gökçe, Özge Zorlu, Haluk Külah:
A novel characterization method for MEMS based electrostatic resonators for Q enhancement and feedthrough current elimination. IEEE SENSORS 2016: 1-3

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