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"Impact of Anode-side Defect Generation on Inter-Level TDDB Degradation in ..."

Naohito Suzumura et al. (2020)

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DOI: 10.1109/IRPS45951.2020.9129094

access: closed

type: Conference or Workshop Paper

metadata version: 2021-01-20

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  dblp key:
  - conf/irps/SuzumuraOTAY20
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  - https://dblp.org/rec/conf/irps/SuzumuraOTAY20
Naohito Suzumura, Kazuyuki Omori, Hideaki Tsuchiya, Hideki Aono, Tomohiro Yamashita:
Impact of Anode-side Defect Generation on Inter-Level TDDB Degradation in Cu/Low-k Damascene Structures. IRPS 2020: 1-6

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