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"Efficient and accurate RIE modeling methodology for BEOL 2.5D parasitic ..."
Nur Kurt-Karsilayan, Jim Falbo, Dusan Petranovic (2014)
- Nur Kurt-Karsilayan, Jim Falbo, Dusan Petranovic:
Efficient and accurate RIE modeling methodology for BEOL 2.5D parasitic extraction. MWSCAS 2014: 519-522
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