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"A Capacitively Transduced Bulk Acoustic Wave MEMS Resonator with Low Bias ..."

Zeji Chen et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451294

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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  dblp key:
  - conf/nems/ChenJLZYYY21
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  - https://dblp.org/rec/conf/nems/ChenJLZYYY21
Zeji Chen, Qianqian Jia, Wenli Liu, Yinfang Zhu, Quan Yuan, Jinling Yang, Fuhua Yang:
A Capacitively Transduced Bulk Acoustic Wave MEMS Resonator with Low Bias Voltages. NEMS 2021: 455-458

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