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"Study of silicon nitride film embedded with silicon quantum dots."

Pei Ling Li et al. (2011)

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DOI: 10.1109/NEMS.2011.6017438

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Pei Ling Li, Chie Gau, Bau Tong Dai, Chien-Wei Liu:
Study of silicon nitride film embedded with silicon quantum dots. NEMS 2011: 646-649

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