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"Post CMOS integration of high aspect ratio SOI MEMS devices."

Lina Sun et al. (2011)

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DOI: 10.1109/NEMS.2011.6017321

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-13

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Lina Sun, Liang Qian, P. Z. Hong, Guizhen Yan, Zhenchuan Yang:
Post CMOS integration of high aspect ratio SOI MEMS devices. NEMS 2011: 166-169

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