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"Micro scale silicon dioxide gear fabrication by bulk micromachining process."

Dugan Um et al. (2010)

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DOI: 10.1109/NEMS.2010.5592170

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-13

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Dugan Um, Bahram Asiabanpour, David Foor, Mathew Kurtz, Mary Tellers, Todd McGregor:
Micro scale silicon dioxide gear fabrication by bulk micromachining process. NEMS 2010: 860-864

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