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"A novel approach to hedge and compensate the critical dimension variation ..."

Chen-Fu Chien, Ying-Jen Chen, Chia-Yu Hsu (2015)

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DOI: 10.1016/J.COR.2014.05.009

access: closed

type: Journal Article

metadata version: 2025-05-16

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Chen-Fu Chien, Ying-Jen Chen, Chia-Yu Hsu:
A novel approach to hedge and compensate the critical dimension variation of the developed-and-etched circuit patterns for yield enhancement in semiconductor manufacturing. Comput. Oper. Res. 53: 309-318 (2015)

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