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"DSA-aware multiple patterning for the manufacturing of vias: Connections ..."

Dehia Ait-Ferhat et al. (2019)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2019-05-21

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  - electronic edition @ arxiv.org (open access)
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  dblp key:
  - journals/corr/abs-1902-04145
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  persistent URL:
  - https://dblp.org/rec/journals/corr/abs-1902-04145
Dehia Ait-Ferhat, Vincent Juliard, Gautier Stauffer, J. Andres Torres:
DSA-aware multiple patterning for the manufacturing of vias: Connections to graph coloring problems, IP formulations, and numerical experiments. CoRR abs/1902.04145 (2019)

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