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"High density plasma chemical vapor deposition of diamond-like carbon films."

Ana Paula Mousinho et al. (2003)

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DOI: 10.1016/S0026-2692(03)00065-X

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mj/MousinhoMMZ03
Ana Paula Mousinho, Ronaldo Domingues Mansano, Marcos Massi, Luís da Silva Zambom:
High density plasma chemical vapor deposition of diamond-like carbon films. Microelectron. J. 34(5-8): 627-629 (2003)

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