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"Via high resistance failure analysis of LSI devices induced by multiple ..."

Takuya Naoe et al. (2012)

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DOI: 10.1016/J.MICROREL.2012.07.023

access: closed

type: Journal Article

metadata version: 2020-02-22

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Takuya Naoe, Hirotaka Komoda, Tamao Ikeuchi, Kohichi Yokoyama:
Via high resistance failure analysis of LSI devices induced by multiple factors related to process and design. Microelectron. Reliab. 52(12): 2975-2981 (2012)

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