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"Investigation of fluorine containing plasma activation for ..."

Chenxi Wang, Tadatomo Suga (2012)

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DOI: 10.1016/J.MICROREL.2011.09.005

access: closed

type: Journal Article

metadata version: 2020-02-22

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Chenxi Wang, Tadatomo Suga:
Investigation of fluorine containing plasma activation for room-temperature bonding of Si-based materials. Microelectron. Reliab. 52(2): 347-351 (2012)

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