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"5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical ..."

Liangchen Ye, Gaofei Zhang, Zheng You (2017)

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DOI: 10.3390/S17030521

access: open

type: Journal Article

metadata version: 2018-11-14

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Liangchen Ye, Gaofei Zhang, Zheng You:
5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR Application. Sensors 17(3): 521 (2017)

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