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"Defect pattern recognition on wafers using convolutional neural networks."

Rui Wang, Nan Chen (2020)

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DOI: 10.1002/QRE.2627

access: closed

type: Journal Article

metadata version: 2021-03-31

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Rui Wang, Nan Chen:
Defect pattern recognition on wafers using convolutional neural networks. Qual. Reliab. Eng. Int. 36(4): 1245-1257 (2020)

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