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"Completion Time Analysis of Wafer Lots in Single-Armed Cluster Tools With ..."

Jun-Ho Lee, Hyun-Jung Kim (2017)

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DOI: 10.1109/TASE.2017.2690443

access: closed

type: Journal Article

metadata version: 2020-04-02

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Jun-Ho Lee, Hyun-Jung Kim:
Completion Time Analysis of Wafer Lots in Single-Armed Cluster Tools With Parallel Processing Modules. IEEE Trans Autom. Sci. Eng. 14(4): 1622-1633 (2017)

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