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"Performance-Based Optical Proximity Correction Methodology."

Siew-Hong Teh, Chun-Huat Heng, Arthur Tay (2010)

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DOI: 10.1109/TCAD.2009.2032360

access: closed

type: Journal Article

metadata version: 2020-10-26

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Siew-Hong Teh, Chun-Huat Heng, Arthur Tay:
Performance-Based Optical Proximity Correction Methodology. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 29(1): 51-64 (2010)

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