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"Disturbance and Response Time Improvement of Submicrometer Precision ..."

Hoi-Wai Chow, Norbert C. Cheung (2013)

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DOI: 10.1109/TIE.2012.2185015

access: closed

type: Journal Article

metadata version: 2020-05-22

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Hoi-Wai Chow, Norbert C. Cheung:
Disturbance and Response Time Improvement of Submicrometer Precision Linear Motion System by Using Modified Disturbance Compensator and Internal Model Reference Control. IEEE Trans. Ind. Electron. 60(1): 139-150 (2013)

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