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"Big data analytic for multivariate fault detection and classification in ..."

Ying-Jen Chen et al. (2017)

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DOI: 10.1109/COASE.2017.8256190

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-07

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Ying-Jen Chen, Bocheng Wang, Jei-Zheng Wu, Yi-Chia Wu, Chen-Fu Chien:
Big data analytic for multivariate fault detection and classification in semiconductor manufacturing. CASE 2017: 731-736

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