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"A silicon neural probe fabricated using DRIE on bonded thin silicon."

Xiao Chuan Ong et al. (2016)

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DOI: 10.1109/EMBC.2016.7591822

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Xiao Chuan Ong, Amanda Willard, Mats Forssell, Aryn Gittis, Gary K. Fedder:
A silicon neural probe fabricated using DRIE on bonded thin silicon. EMBC 2016: 4885-4888

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