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"A MEMS Type Damping Viscous Vacuum Gauge For High Vacuum Measurement."
Chengxiang Wang et al. (2020)
- Chengxiang Wang, Yulie Wu, Zhanqiang Hou, Yunbin Kuang, Yongmeng Zhang, Xuezhong Wu, Dingbang Xiao:
A MEMS Type Damping Viscous Vacuum Gauge For High Vacuum Measurement. IEEE SENSORS 2020: 1-4
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