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"Mechanical reliability assessment of 28nm Back End of Line (BEoL) stack ..."
Kashi Vishwanath Machani et al. (2015)
- Kashi Vishwanath Machani, Holm Geisler, Dirk Breuer, Frank Kuechenmeister, Jens Paul:
Mechanical reliability assessment of 28nm Back End of Line (BEoL) stack using finite element analysis and validation. IRPS 2015: 1
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