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"Qualification Management in Wafer Fabs: Optimization Approach and ..."

Denny Kopp et al. (2020)

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DOI: 10.1109/TASE.2019.2935469

access: closed

type: Journal Article

metadata version: 2020-04-02

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  - journals/tase/KoppMPS20
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  - https://dblp.org/rec/journals/tase/KoppMPS20
Denny Kopp, Lars Mönch, Detlef Pabst, Marcel Stehli:
Qualification Management in Wafer Fabs: Optimization Approach and Simulation-Based Performance Assessment. IEEE Trans Autom. Sci. Eng. 17(1): 475-489 (2020)

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