default search action

combined dblp search
author search
venue search
publication search

ask others

"Prognostics for Semiconductor Sustainability: Tool Failure Behavior ..."

Li Zhu, Junghui Chen, Chun-I Chen (2024)

> Home

Details and statistics

DOI: 10.1109/TSMC.2024.3359851

access: closed

type: Journal Article

metadata version: 2024-06-18

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/tsmc/ZhuCC24
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/tsmc/ZhuCC24
Li Zhu, Junghui Chen, Chun-I Chen:
Prognostics for Semiconductor Sustainability: Tool Failure Behavior Prediction in Fabrication Processes. IEEE Trans. Syst. Man Cybern. Syst. 54(6): 3450-3460 (2024)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.