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"Test structures for dielectric spectroscopy of thin films at microwave ..."

Nicola Delmonte et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.01.062

access: closed

type: Journal Article

metadata version: 2020-02-22

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Nicola Delmonte, B. E. Watts, Giovanni Chiorboli, Paolo Cova, Roberto Menozzi:
Test structures for dielectric spectroscopy of thin films at microwave frequencies. Microelectron. Reliab. 47(4-5): 682-685 (2007)

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