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"FEM-based method to determine mechanical stress evolution during process ..."

S. Orain et al. (2007)

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DOI: 10.1016/J.MICROREL.2006.09.018

access: closed

type: Journal Article

metadata version: 2020-02-22

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S. Orain, J.-C. Barbé, X. Federspiel, P. Legallo, H. Jaouen:
FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding. Microelectron. Reliab. 47(2-3): 295-301 (2007)

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