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"Design and Characterization of 5 μm Pitch InGaAs Photodiodes Using In ..."

Jules Tillement et al. (2023)

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DOI: 10.3390/S23229219

access: open

type: Journal Article

metadata version: 2024-03-16

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  - journals/sensors/TillementCBJNRGMSGBRB23
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  - https://dblp.org/rec/journals/sensors/TillementCBJNRGMSGBRB23
Jules Tillement, Cyril Cervera, Jacques Baylet, Christophe Jany, François Nardelli, Thomas Di Rito, Sylvain Georges, Gabriel Mugny, Olivier Saxod, Olivier Gravrand, Thierry Baron, François Roy, Frédéric Boeuf:
Design and Characterization of 5 μm Pitch InGaAs Photodiodes Using In Situ Doping and Shallow Mesa Architecture for SWIR Sensing. Sensors 23(22): 9219 (2023)

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