The Enhancement Mechanisms of SiOx Hardness via Manipulation of Oxygen Content - Hwanbeom Cho; Kyeongeun Kim; Minkyoung Kim; Chinam An; Noeul Sim; Youngseok Oh; Minseung Kim; Gyumyeong Kim; Jinkyung Park; Jin Jeon; Minjin Kim; Eunae Heo; et al. (IEEE International Reliability Physics Symposium, IRPS 2024, Grapevine, TX, USA, April 14-18, 2024, 2024)